Impedance detection equipment

Abstract

The embodiment of the utility model provides impedance detection equipment, comprising a rack and a first support, the rack is provided with a deviation detection unit used for detecting the deviation of a COF and FPC bonding area, an impedance detection unit used for detecting the impedance of a substrate and FPC bonding area, a deviation detection platform used for bearing the substrate during deviation detection, and a second support used for detecting the impedance of the substrate during impedance detection. The impedance detection platform is used for bearing the substrate, is used for recycling and detecting the NG carrying unit of the bad substrate, and can be used for carrying out deviation detection and impedance detection on the substrate; the first carrying unit, the second carrying unit and the third carrying unit which are used for carrying the substrates are used for carrying a plurality of products at the same time, so that the production takt is improved; through multi-section adjustment adsorption and supporting of the deviation detection platform and the impedance detection platform, adsorption of substrates of different sizes is compatible, and warping is prevented.

Description

Technical Field

[0001] The utility model relates to the technical field of substrate production and detection, in particular to an impedance detection device. Background Art

[0002] With the continuous development of display technologies, including flexible displays, display technologies have received increasing attention, providing people with richer interactive experiences. However, since the substrates of flexible displays are generally made of PI materials or PET (polyethylene terephthalate) materials, when bonding the substrate to the FPC and thermally pressing the COF to the FPC, compared with glass substrates, this material has poor stability, a larger coefficient of expansion, and is more likely to have a large amount of deformation.

[0003] Therefore, during the bonding process, the alignment difficulty increases, resulting in deformation of the gold fingers under pressure and misalignment of the bonding, reducing the effective bonding area of the gold finger lines. This further causes short circuits or open circuits in the bonding area, and there may also be a risk of excessive misalignment of the gold fingers in the bonding area between the FPC circuit board and the substrate or the COF, greatly reducing the stability of its electrical performance and ultimately resulting in a very low yield of the final product.

[0004] Therefore, to avoid the above situations, after bonding, the misalignment detection of the COF and FPC bonding and the impedance detection of the substrate and FPC will be performed simultaneously to determine the conductivity status. In the prior art, the detection equipment generally only has an impedance detection function, is not compatible with misalignment detection, and has low detection efficiency, affecting the detection accuracy and production efficiency. Summary of the Utility Model

[0005] The utility model provides an impedance detection device to solve the technical problems in the prior art that different-sized substrates are prone to warping, cannot be compatible with multiple detection processes, and have low detection efficiency during the detection process.

[0006] To solve the above problems, the technical solution adopted by the utility model is:

[0007] The utility model provides an impedance detection device for detecting the misalignment detection and impedance detection of a substrate, characterized by comprising a frame and a first bracket. The frame is provided with a misalignment detection unit for detecting the misalignment of the COF and FPC bonding area, an impedance detection unit for detecting the impedance of the substrate and FPC bonding area, a misalignment detection platform for carrying the substrate during misalignment detection, an impedance detection platform for carrying the substrate during impedance detection, and an NG conveying unit for recycling the detected defective substrates.

[0008] The first support is located on the frame. A first transfer unit for transferring the substrate from the upstream equipment to the offset detection platform is provided on the first support. A second transfer unit for transferring the substrate from the offset detection platform to the impedance detection platform is provided on one side of the first transfer unit. A third transfer unit for transferring the substrate from the impedance detection platform to the NG transfer unit and the downstream equipment is provided on one side of the second transfer unit;

[0009] An offset detection platform is provided on one side of the impedance detection platform, an NG transfer unit is provided on the other side of the impedance detection platform, an offset detection unit is provided in front of the offset detection platform, an impedance detection unit is provided in front of the impedance detection platform, and an offset detection unit is provided on one side of the impedance detection unit.

[0010] Further, the offset detection platform includes a first adsorption stage for adsorbing the substrate. The first adsorption stage includes independently controlled first adsorption areas, second adsorption areas, and third adsorption areas. Multiple adsorption grooves are provided in the first adsorption area and the second adsorption areas and the third adsorption areas; A first adsorption assembly for adsorbing the FPC and COF and a first support assembly for supporting the COF are connected to the rear of the first adsorption stage; A first rotation assembly for rotating the first adsorption stage is provided below the first adsorption stage, and a first moving assembly for driving the first adsorption stage to move in the first direction is provided below the first rotation assembly. The first moving assembly is provided on the frame.

[0011] Preferably, the first support assembly includes a first mounting member and a support plate. One end of the first mounting member is connected to the first adsorption stage, and the other end of the first mounting member is connected to the support plate; The first adsorption assembly includes a first adjusting member and a second adjusting member. The first adjusting member and the second adjusting member are vertically connected to the first mounting member and are parallel to the first adsorption stage. The first adjusting member is provided behind the first adsorption stage, the second adjusting member is provided behind the first adjusting member, and the support plate is located behind the second adjusting member; The first mounting member is provided with a first groove, and the first adjusting member and the second adjusting member adjust the distance along the first direction through the first groove; The first adjusting member is provided with a second groove, the second adjusting member is provided with a third groove, the first adjusting member is provided with a second mounting member, a third mounting member, and a fourth mounting member slidably connected through the second groove, the second adjusting member is provided with a second mounting member and a third mounting member slidably connected through the third groove, a first vacuum inner cavity for evacuating is provided in the second mounting member, a second vacuum inner cavity is provided in the third mounting member, a third vacuum inner cavity is provided in the fourth mounting member, a fourth groove is provided on the upper surface of the second mounting member, a first adsorption hole is provided on the upper surface of the third mounting member, a second adsorption hole is provided on the upper surface of the fourth mounting member, the fourth groove is evacuated through the first vacuum inner cavity to form a fourth adsorption area, the first adsorption hole and the second vacuum inner cavity form a fifth adsorption area, and the second adsorption hole and the third vacuum inner cavity form a sixth adsorption area; The first adsorption stage and the fourth adsorption area, the fifth adsorption area, and the sixth adsorption area are all on the same horizontal plane.

[0012] Further, the impedance detection platform includes a second adsorption stage for adsorbing a substrate. A second rotation assembly for driving the second adsorption stage to rotate and a second movement assembly for driving the second adsorption stage to move in a first direction are provided below the second adsorption stage. The second movement assembly is disposed on the frame;

[0013] A seventh adsorption area for adsorbing the substrate is provided on the second adsorption stage. A second adsorption assembly for adsorbing the FPC and COF is connected behind the second adsorption stage, and a second support assembly for supporting the COF is connected behind the second adsorption assembly; the second adsorption assembly is parallel to the first adsorption assembly, and the second support assembly is parallel to the first support assembly.

[0014] Further, the NG conveying unit includes a conveying belt for conveying the substrate to a recycling box and a driving assembly for driving the conveying belt. The driving assembly includes a driving member, a driven roller, and a driving roller. The driving member is connected to the driving roller, and the conveying belt is wrapped around the driving roller and the driven roller and is tightened by the driving roller and the driven roller.

[0015] Further, the first conveying unit includes a first conveying arm and a second conveying arm. The first conveying arm and the second conveying arm simultaneously grab the substrate and place it on the first adsorption stage. The first adsorption area and the third adsorption area or the second adsorption area adsorb the substrate. The center distance between the first conveying arm and the second conveying arm is greater than the width of the substrate;

[0016] The second conveying unit includes a third conveying arm and a fourth conveying arm. The third conveying arm and the fourth conveying arm simultaneously adsorb the substrate on the first adsorption stage and convey it to the second adsorption stage. The seventh adsorption area adsorbs the substrate;

[0017] The third conveying unit includes a fifth conveying arm and a sixth conveying arm. The fifth conveying arm and the sixth conveying arm simultaneously adsorb the substrate on the second adsorption stage and place it on the conveying belt and the downstream equipment.

[0018] Further, the first bracket includes a first moving area, a second moving area, and a third moving area. The second moving area is located on the right side of the first moving area, and the third moving area is located on the right side of the second moving area;

[0019] The first conveying unit includes a third moving assembly. The third moving assembly is connected to the first bracket, and the third moving assembly drives the first conveying arm and the second conveying arm to move in the first moving area in a second direction;

[0020] The second conveying unit includes a fourth moving assembly. The fourth assembly is connected to the first bracket, and the fourth moving assembly drives the third conveying arm and the fourth conveying arm to move in the second moving area in a second direction;

[0021] The third conveying unit includes a fifth moving component and a sixth moving component. The sixth moving component is connected to the first bracket, the fifth moving component is connected to the sixth moving component, the sixth moving component is connected to a fifth conveying arm and a sixth conveying arm. The fifth moving component drives the fifth conveying arm and the sixth conveying arm to move in a third moving area along a second direction, and the sixth moving component drives the fifth conveying arm and the sixth conveying arm to move along a third direction.

[0022] Preferably, the first conveying arm is provided with a plurality of first profile frames, second profile frames, a fifth mounting member, and a suction member. The first profile frame is provided with a fourth groove, the second profile frame is provided with a fifth groove, the second profile frame is selectively and vertically fixed along the first direction through the fourth groove, the fifth mounting member is selectively fixed to the second profile frame along the second direction through the fifth groove, the suction member is fixed to the fifth mounting member, and the suction member adsorbs the substrate.

[0023] Further, the offset detection unit includes a first detection portion for detecting FOF cracks, a correction portion for correcting the relative position between the substrate and the first detection portion, a seventh moving component for moving the first detection portion along the second direction, a second bracket for carrying the seventh moving component, a light source portion for assisting the first detection portion in detection, a first connecting member for connecting the light source portion and the seventh moving component, and a second connecting member for connecting the correction portion and the first detection portion; the light source portion is provided directly below the first detection portion, the correction portion is provided in front of the first detection portion, and moves in the second direction synchronously with the first detection portion through the seventh moving component.

[0024] Preferably, the impedance detection unit includes a third bracket provided on the frame. The third bracket is provided with an eighth moving component moving along the second direction and a ninth moving component moving along the third direction. The eighth moving component is connected to the ninth moving component, and a second detection portion for performing impedance detection of the substrate is carried on the ninth moving component. The second detection portion includes a probe and a carrier for positioning the probe. The carrier moves to above the second adsorption stage through the eighth moving component and the ninth moving component, and the probe contacts the contact point of the substrate to perform impedance detection.

[0025] Compared with the prior art, the present utility model has the following beneficial effects:

[0026] An impedance detection device provided by the present utility model simultaneously performs offset detection and impedance detection of a substrate through an offset detection unit, an impedance detection unit, an offset detection platform, and an impedance detection platform provided on a frame; the first adsorption stage is provided with different adsorption areas, which is compatible with the adsorption of substrates of different sizes and prevents warping. Description of the Drawings

[0027] To more clearly illustrate the technical solution proposed by the present utility model, the following will be described in detail in conjunction with embodiments and drawings. It should be understood that the drawings in the following description are only some embodiments of the present utility model, and those skilled in the art can make changes to these drawings under the concept of the present utility model.

[0028] Figure 1 An assembled perspective view of an impedance detection device provided by the present utility model;

[0029] Figure 2 An assembled perspective view of an impedance detection unit provided by the present utility model;

[0030] Figure 3 An assembled perspective view of an offset detection platform provided by the present utility model;

[0031] Figure 4 Another perspective assembled perspective view of an offset detection platform provided by the present utility model;

[0032] Figure 5 An assembled perspective view of an offset detection unit provided by the present utility model;

[0033] Figure 6 An assembled perspective view of an NG conveying unit provided by the present utility model;

[0034] Figure 7 An assembled perspective view of a first bracket provided by the present utility model.

[0035] 1. Offset detection unit; 10. Second bracket; 11. Seventh moving component; 12. Calibration part; 13. Light source part; 14. First detection part; 2. Impedance detection unit; 20. Second detection part; 200. Carrier; 21. Eighth moving component; 22. Ninth moving component; 23. Third bracket; 30. First adsorption stage; 300. First adsorption area; 301. Second adsorption area; 302. Third adsorption area; 31. First moving component; 32. First rotating component; 33. First supporting component; 330. Support plate; 331. First mounting part; 332. First groove; 34. First adsorption component; 340. First adjusting part; 341. Second adjusting part; 342. Second groove; 343. Third groove; 344. Second mounting part; 345. Third mounting part; 346. Fourth mounting part; 4. Impedance detection platform; 5. NG conveying unit; 50. Conveying belt; 51. Driving part; 52. Driven roller; 53. Driving roller; 6. First bracket; 60. First conveying arm; 600. First profile frame; 601. Second profile frame; 602. Fifth mounting part; 603. Adsorbing part; 61. Second conveying arm; 62. Third conveying arm; 63. Fourth conveying arm; 64. Fifth conveying arm; 65. Sixth conveying arm. Detailed implementation manners

[0036] The following will clearly and completely describe the technical solutions in the embodiments with reference to the accompanying drawings in the embodiments of the present utility model. Similar component numbers in the drawings represent similar components. Obviously, the embodiments to be described below are only a part of the embodiments of the present utility model, rather than all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0037] It should be understood that when used in this specification and the appended claims, the terms "comprises" and "comprising" indicate the presence of the described features, wholes, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, wholes, steps, operations, elements, components, and / or their combinations.

[0038] It should also be understood that the terms used in the specification of the embodiments of the present utility model are only for the purpose of describing specific embodiments and are not intended to limit the embodiments of the present utility model. As used in the specification of the embodiments of the present utility model and the appended claims, unless the context clearly indicates otherwise, the singular forms "a", "an", and "the" are intended to include the plural forms.

[0039] An impedance detection device provided by the present utility model is used for detecting the deviation detection and impedance detection of a substrate. It is characterized in that it includes a frame and a first bracket 6. A deviation detection unit 1 for detecting the deviation of the substrate, an impedance detection unit 2 for detecting the impedance of the substrate, a deviation detection platform for carrying the substrate during deviation detection, an impedance detection platform 4 for carrying the substrate during impedance detection, and an NG conveying unit 5 for recycling defective substrates are provided on the frame:

[0040] The first bracket 6 is located on the frame. A first conveying unit for conveying the substrate from an upstream device to the deviation detection platform is provided on the first bracket 6. A second conveying unit for conveying the substrate from the deviation detection platform to the impedance detection platform 4 is provided on one side of the first conveying unit. A third conveying unit for conveying the substrate from the impedance detection platform 4 to the NG conveying unit 5 and a downstream device is provided on one side of the second conveying unit;

[0041] A deviation detection platform is provided on one side of the impedance detection platform 4, an NG conveying unit 5 is provided on the other side of the impedance detection platform 4, a deviation detection unit 1 is provided in front of the deviation detection platform, an impedance detection unit 2 is provided in front of the impedance detection platform 4, and a deviation detection unit 1 is provided on one side of the impedance detection unit 2.

[0042] Please refer to Figure 1, in this embodiment, the first transfer unit includes a first transfer arm 60 and a second transfer arm 61. The center distance between the first transfer arm 60 and the second transfer arm 61 is greater than the width of the substrate. The first transfer arm 60 is provided with a plurality of first profile racks 600, second profile racks 601, a fifth mounting member 602, and an adsorbing member 603. The first profile rack 600 is provided with a fourth groove, and the second profile rack 601 is provided with a fifth groove. The second profile rack 601 is selectively and vertically fixed along the first direction through the fourth groove. The fifth mounting member 602 is selectively fixed to the second profile rack 601 along the second direction through the fifth groove. The adsorbing member 603 is fixed to the fifth mounting member 602, and the adsorbing member 603 adsorbs the substrate. The first transfer arm 60 and the second transfer arm 61 simultaneously adsorb and grab one or more substrates from the upstream equipment through the adsorbing member 603 and place them on the first adsorption stage 30. The first adsorption area 300 and the third adsorption area 302 or the second adsorption area 301 of the first adsorption stage 30 adsorb the substrate. When grabbing one substrate, the substrate is placed in the second adsorption area 301. When grabbing two substrates simultaneously, they are placed in the first adsorption area 300 and the third adsorption area 302. The first adsorption area 300, the second adsorption area 301, and the third adsorption area 302 are all provided with a plurality of adsorption grooves. Behind the first adsorption stage 30, a first adsorption assembly 34 for adsorbing FPC and COF and a first support assembly 33 for supporting COF are connected. Below the first adsorption stage 30, a first rotation assembly 32 for rotating the first adsorption stage 30 is provided. Below the first rotation assembly 32, a first moving assembly 31 for driving the first adsorption stage 30 to move along the first direction is provided, and the first moving assembly 31 is arranged on the frame.

[0043] Please refer to Figure 3 , Figure 4The first support assembly 33 includes a first mounting member 331 and a support plate 330. One end of the first mounting member 331 is connected to the first adsorption carrier 30, and the other end of the first mounting member 331 is connected to the support plate 330. The first adsorption assembly 34 includes a first adjusting member 340 and a second adjusting member 341. The first adjusting member 340 and the second adjusting member 341 are perpendicularly connected to the first mounting member 331 and are parallel to the first adsorption carrier 30. The first adjusting member 340 is disposed behind the first adsorption carrier 30, the second adjusting member 341 is disposed behind the first adjusting member 340, and the support plate 330 is located behind the second adjusting member 341. The first mounting member 331 is provided with a first groove 332, and the first adjusting member 340 and the second adjusting member 341 adjust the distance along the first direction through the first groove 332. The first adjusting member 340 is provided with a second groove 342, and the second adjusting member 341 is provided with a third groove 343. The first adjusting member 340 is provided with a second mounting member 344, a third mounting member 345, and a fourth mounting member 346 that are slidably connected through the second groove 342. The second adjusting member 341 is provided with a second mounting member 344 and a third mounting member 345 that are slidably connected through the third groove 343. The second mounting member 344 is provided with a first vacuum cavity for evacuating air, the third mounting member 345 is provided with a second vacuum cavity, and the fourth mounting member 346 is provided with a third vacuum cavity. The upper surface of the second mounting member 344 is provided with a fourth groove, the upper surface of the third mounting member 345 is provided with a first adsorption hole, and the upper surface of the fourth mounting member 346 is provided with a second adsorption hole. The fourth groove evacuates air through the first vacuum cavity to form a fourth adsorption area, the first adsorption hole and the second vacuum cavity form a fifth adsorption area, and the second adsorption hole and the third vacuum cavity form a sixth adsorption area. The first adsorption carrier 30, the fourth adsorption area, the fifth adsorption area, and the sixth adsorption area are all disposed on the same horizontal plane.

[0044] Please refer to Figure 5 and Figure 7, the offset detection unit 1 includes a first detection part 14 for detecting FOF cracks, a correction part 12 for correcting the relative position between the substrate and the first detection part 14, a seventh moving component 11 for moving the first detection part 14 in the second direction, a second bracket 10 for carrying the seventh moving component 11, a light source part 13 for assisting the first detection part 14 in detection, a first connecting piece for connecting the light source part 13 and the seventh moving component 11, and a second connecting piece for connecting the correction part 12 and the first detection part 14; the light source part 13 is arranged directly below the first detection part 14, and the correction part 12 is arranged in front of the first detection part 14 and moves in the second direction synchronously with the first detection part 14 through the seventh moving component 11. After the first adsorption stage 30 adsorbs the adsorption substrate, the correction part 12 feeds back the compensation information to the first rotation component 32, the first moving component 31 and the seventh moving component 11. The first adsorption stage 30 is rotated and moved by the first moving component 31 and the first rotation component 32. The first detection part 14 adjusts the height from the substrate surface through the seventh moving component 11 to complete the correction, moves the substrate below the first detection part 14, the light source part 13 turns on the light source, the first detection part 14 takes a picture of the substrate to perform COF and FPC offset detection, and the first detection part 14 feeds back the detection result to the second transfer unit. The second transfer unit includes a third transfer arm 62 and a fourth transfer arm 63. When the offset detection result is defective, the third transfer arm 62 and the fourth transfer arm 63 adsorb the substrate through the fourth moving component and transfer the substrate to the second adsorption stage; the third transfer unit includes a fifth moving component and a sixth moving component. The sixth moving component is connected to the first bracket 6, the fifth moving component is connected to the sixth moving component, the sixth moving component is connected to the fifth transfer arm 64 and the sixth transfer arm 65. The fifth moving component drives the fifth transfer arm 64 and the sixth transfer arm 65 to move in the second direction in the third moving area, and the sixth moving component drives the fifth transfer arm 64 and the sixth transfer arm 65 to move in the third direction; the fifth transfer arm 64 and the sixth transfer arm 65 transfer the substrate from the second adsorption stage to the NG transfer unit 5 through the fifth moving component.

[0045] Please refer to Figure 6 , the NG transfer unit 5 includes a transfer belt 50 for transferring the substrate to the recycling box and a driving component for driving the transfer belt 50. The driving component includes a driving part 51, a driven roller 52 and a driving roller 53. The driving part 51 is connected to the driving roller 53, and the transfer belt 50 is wrapped around the driving roller 53 and the driven roller 52 and is tightened by the driving roller 53 and the driven roller 52. Through the sixth moving component, the fifth transfer arm 64 and the sixth transfer arm 65 place the substrate on the transfer belt 50. The driving part 51 drives the driven roller 52 and the driving roller 53 to drive the transfer belt 50 to perform repeated movement and recycle the substrate on the transfer belt 50.

[0046] Please refer toFigures 1 to 7 , in this embodiment, the first bracket 6 includes a first moving area, a second moving area, and a third moving area. The second moving area is located on the right side of the first moving area, and the third moving area is located on the right side of the second moving area. The first transfer arm 60 and the second transfer arm 61 perform a second-direction movement within the range of the first moving area through the third moving component, and place the substrates on the first transfer arm 60 and the second transfer arm 61 on the first adsorption stage 30. The first adsorption area 300, the second adsorption area 301, and the third adsorption area 302 of the first adsorption stage 30 adsorb the substrates, and are moved to below the first detection unit 14 through the first moving component 31, and are corrected by the correction unit 12. The correction unit 12 feeds back the compensation information to the first detection unit 14 and the first rotation component 32. The first adsorption stage 30 performs rotational compensation through the first rotation component 32. The light source unit 13 turns on the light source, and the first detection unit 14 performs offset detection on the substrate. The first detection unit 14 feeds back the qualified offset detection information to the second transfer unit. The third transfer arm 62 and the fourth transfer arm 63 of the second transfer unit perform a second-direction movement in the second moving area through the fourth moving component, and the third transfer arm 62 and the fourth transfer arm 63 transfer the substrates to the second adsorption stage on the impedance detection platform 4;

[0047] Below the second adsorption stage, there is a second rotation component that drives the second adsorption stage to rotate, and a second moving component that drives the second adsorption stage to move in the first direction. The second moving component is arranged on the frame; on the second adsorption stage, there is a seventh adsorption area for adsorbing substrates. Behind the second adsorption stage, there is a second adsorption component for adsorbing FPC and COF connected, and behind the second adsorption component, there is a second support component for supporting COF connected; the second adsorption component is parallel to the first adsorption component 34, and the second support component is parallel to the first support component 33;

[0048] The impedance detection unit 2 includes a third bracket 23 arranged on the frame. On the third bracket 23, there is an eighth moving component 21 that moves in the second direction and a ninth moving component 22 that moves in the third direction. The eighth moving component 21 is connected to the ninth moving component 22. On the ninth moving component 22, there is a second detection unit 20 for performing impedance detection on the substrate. The second detection unit 20 includes a probe and a carrier 200 for positioning the probe. The second adsorption stage is moved to below the carrier 200 of the impedance detection unit 2, i.e., the impedance detection position, through the second moving component. The second detection unit 20 is moved to above the impedance detection position of the substrate through the eighth moving component 21. Further, through the ninth moving component 22, the carrier 200 positions the probe and moves in the third direction to the contacts of the substrate to perform impedance detection.

[0049] When the impedance detection is qualified, the second detection unit 20 feeds back information to the third conveying unit. The fifth conveying arm 64 and the sixth conveying arm 65 will move within the third moving area through the fifth moving component and be conveyed to the downstream equipment.

[0050] When the impedance detection is unqualified, the second detection unit 20 feeds back information to the third conveying unit. The fifth conveying arm 64 and the sixth conveying arm 65 will move within the third moving area through the fifth moving component, convey the substrate above the conveying belt 50, and further perform a third-direction movement through the sixth moving component to place the substrate on the conveying belt 50.

[0051] In the above embodiments, the descriptions of the respective embodiments have their own focuses. For parts not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0052] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0053] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, "a plurality" means two or more unless otherwise specifically defined.

[0054] In the present invention, unless otherwise clearly specified and limited, terms such as "installation", "connection", "connection", "fixation", etc. should be understood in a broad sense. For example, it can be a connection, a detachable connection, or an integral body; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the internal communication of two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0055] In the present utility model, unless otherwise clearly specified and defined, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through additional features therebetween. Moreover, the first feature being "above", "over" and "on top of" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "beneath" and "underneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely indicates that the horizontal height of the first feature is lower than that of the second feature.

[0056] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "example", "specific example", or "some examples", etc. means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic representation of the above terms should not be understood as necessarily referring to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine the different embodiments or examples described in this specification.

[0057] Obviously, those skilled in the art can make various changes and modifications to the present utility model without departing from the spirit and scope of the present utility model. Thus, provided that these modifications and variations of the present utility model fall within the scope of the claims of the present utility model and their equivalent technologies, the present utility model also intends to include these changes and modifications therein.

[0058] As described above, this is the specific implementation manner of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered by the protection scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.

Claims

1. An impedance detection device, used for detecting the offset detection and impedance detection of a substrate, characterized in that: It includes a frame and a first bracket, wherein the frame is provided with a displacement detection unit for detecting the displacement of the bonding area of ​​COF and FPC, an impedance detection unit for detecting the impedance of the bonding area of ​​the substrate and FPC, a displacement detection platform for carrying the substrate when used for displacement detection, an impedance detection platform for carrying the substrate when used for impedance detection, and an NG conveying unit for recovering the substrates that have been inspected and tested poorly; The first bracket is located on the frame, and a first conveying unit for conveying a substrate from an upstream device to the offset detection platform is provided on the first bracket, a second conveying unit for conveying a substrate from the offset detection platform to the impedance detection platform is provided on one side of the first conveying unit, and a third conveying unit for conveying a substrate from the impedance detection platform to the NG conveying unit and a downstream device is provided on one side of the second conveying unit; The deviation detection platform is provided on one side of the impedance detection platform, the NG conveying unit is provided on the other side of the impedance detection platform, the deviation detection unit is provided in front of the deviation detection platform, the impedance detection unit is provided in front of the impedance detection platform, and the deviation detection unit is provided on one side of the impedance detection unit.

2. The impedance detection device according to claim 1, characterized in that: The displacement detection platform includes a first adsorption platform for adsorbing the substrate, the first adsorption platform includes independently controlled first adsorption area, second adsorption area, and third adsorption area, and the first adsorption area, the second adsorption area, and the third adsorption area are all provided with multiple adsorption grooves; the first adsorption platform is connected to the rear of a first adsorption component for adsorbing FPC and COF, and a first supporting component for supporting COF; a first rotating component for rotating the first adsorption platform is provided below the first adsorption platform, and a first moving component for driving the first adsorption platform to move along a first direction is provided below the first rotating component, and the first moving component is provided on the frame.

3. The impedance detection device according to claim 2, characterized in that: The first support assembly includes a first mounting member and a support plate, one end of the first mounting member is connected to the first adsorption carrier, and the other end of the first mounting member is connected to the support plate; the first adsorption assembly includes a first adjusting member and a second adjusting member, the first adjusting member and the second adjusting member are vertically connected to the first mounting member and are parallel to the first adsorption carrier, the first adjusting member is arranged behind the first adsorption carrier, the second adjusting member is arranged behind the first adjusting member, and the support plate is located behind the second adjusting member; the first mounting member is provided with a first groove, and the first adjusting member and the second adjusting member adjust the spacing along the first direction through the first groove; the first adjusting member is provided with a second groove, and the second adjusting member is provided with a third groove, and the first adjusting member is provided with a second mounting member slidably connected through the second groove The second adjusting member is provided with the second mounting member and the third mounting member which are slidably connected through the third groove, the second mounting member is provided with a first vacuum inner cavity for vacuuming, the third mounting member is provided with a second vacuum inner cavity, the fourth mounting member is provided with a third vacuum inner cavity, the upper surface of the second mounting member is provided with a fourth groove, the upper surface of the third mounting member is provided with a first adsorption hole, the upper surface of the fourth mounting member is provided with a second adsorption hole, the fourth groove is vacuumed by the first vacuum inner cavity to form a fourth adsorption area, the first adsorption hole and the second vacuum inner cavity form a fifth adsorption area, the second adsorption hole and the third vacuum inner cavity form a sixth adsorption area; the first adsorption carrier and the fourth adsorption area, the fifth adsorption area and the sixth adsorption area are all arranged on the same horizontal plane.

4. The impedance detection device according to claim 3, characterized in that: The impedance detection platform includes a second adsorption stage for adsorbing the substrate, a second rotating component driving the second adsorption stage to rotate and a second moving component driving the second adsorption stage to move along the first direction are provided below the second adsorption stage, and the second moving component is provided on the frame; The second adsorption platform is provided with a seventh adsorption area for adsorbing the substrate, the rear of the second adsorption platform is connected to a second adsorption component for adsorbing FPC and COF, the rear of the second adsorption component is connected to a second supporting component for supporting COF; the second adsorption component is parallel to the first adsorption component, and the second supporting component is parallel to the first supporting component.

5. The impedance detection device according to claim 4, characterized in that: The NG conveying unit includes a conveying belt for conveying the substrate to the recovery box, and a driving component for driving the conveying belt. The driving component includes a driving member, a driven roller, and an active roller. The driving member is connected to the active roller. The conveying belt is wrapped around the active roller and the driven roller, and is tightened by the active roller and the driven roller.

6. The impedance detection device according to claim 5, characterized in that: The first transport unit comprises a first transport arm and a second transport arm, the first transport arm and the second transport arm simultaneously grab a substrate and place it on the first adsorption stage, the first adsorption area and the third adsorption area or the second adsorption area adsorb the substrate, and the center distance between the first transport arm and the second transport arm is greater than the width of the substrate; The second transport unit includes a third transport arm and a fourth transport arm. The fourth transfer arm simultaneously adsorbs the substrate on the first adsorption stage and transfers it to the second adsorption stage, and the seventh adsorption area adsorbs the substrate; The third conveying unit includes a fifth conveying arm and a sixth conveying arm. The fifth conveying arm and the sixth conveying arm simultaneously adsorb the substrate on the second adsorption stage to place the conveying belt and the downstream equipment.

7. The impedance detection device according to claim 6, characterized in that: The first bracket includes a first moving area, a second moving area, and a third moving area, the second moving area is located on the right side of the first moving area, and the third moving area is located on the right side of the second moving area; The first transport unit includes a third moving component, the third moving component is connected to the first bracket, and the third moving component drives the first transport arm and the second transport arm to move in the first moving area along the second direction; The second transport unit includes a fourth moving component, the fourth moving component is connected to the first bracket, and the fourth moving component drives the third transport arm and the fourth transport arm to move in the second moving area along the second direction; The third conveying unit includes a fifth moving component and a sixth moving component, the sixth moving component is connected to the first bracket, the fifth moving component is connected to the sixth moving component, the sixth moving component is connected to the fifth conveying arm and the sixth conveying arm, the fifth moving component drives the fifth conveying arm and the sixth conveying arm to move along the second direction in the third moving area, and the sixth moving component drives the fifth conveying arm and the sixth conveying arm to move along the third direction.

8. The impedance detection device according to claim 7, characterized in that: The first conveying arm is provided with a plurality of first profile frames and second profile frames, a fifth mounting member, and an adsorption member. The first profile frame is provided with a fourth groove, the second profile frame is provided with a fifth groove, the second profile frame is selectively vertically fixed along a first direction through the fourth groove, the fifth mounting member is selectively fixed to the second profile frame along a second direction through the fifth groove, the adsorption member is fixed to the fifth mounting member, and the adsorption member adsorbs the substrate.

9. The impedance detection device according to claim 1, characterized in that: The displacement detection unit includes a first detection part for detecting FOF cracks, a correction part for correcting the relative position of the substrate and the first detection part, a seventh movable component for moving the first detection part along the second direction, a second bracket for carrying the seventh movable component, a light source part for assisting the first detection part in detection, and a first connecting member for connecting the light source part and the seventh movable component, and a second connecting member for connecting the correction part and the first detection part; the light source part is arranged directly below the first detection part, and the correction part is arranged in front of the first detection part, and moves in the second direction synchronously with the first detection part through the seventh movable component.

10. The impedance detection device according to claim 6, characterized in that: The impedance detection unit includes a third bracket arranged on a frame, an eighth movable component moving along a second direction and a ninth movable component moving along a third direction are arranged on the third bracket, the eighth movable component is connected to the ninth movable component, the ninth movable component is equipped with a second detection part for performing substrate impedance detection, the second detection part includes a probe and a carrier for positioning the probe, the carrier is moved to above the second adsorption platform through the eighth movable component and the ninth movable component, and the probe contacts the substrate for impedance detection.

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