Coating machine

Abstract

The utility model discloses a coating machine which comprises a coating machine chamber, a coating machine umbrella tray is rotatably arranged in the coating machine chamber, a clamp is arranged on the umbrella tray, and the coating machine further comprises a first temperature sensor and a heating part. Wherein the first temperature sensor is mounted in a coating machine chamber and is used for detecting the temperature in the coating machine chamber; one end of the heating part is connected with the gas inlet pipeline, and the other end of the heating part is connected with the coating machine chamber through the gas outlet pipeline, and is used for heating gas conveyed in the gas inlet pipeline and conveying the heated gas into the coating machine chamber. In the deflation process of the coating machine disclosed by the utility model, the temperature of external gas entering the cavity of the coating machine is in stable transition, so that the phenomena of thermal expansion and cold contraction are avoided, and the yield of products is greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a coating machine. Background Art

[0002] In vacuum coating, after the coating process is completed, before opening the door of the coating machine, it is necessary to let the air in the atmosphere enter the vacuum chamber to make the pressure inside and outside the vacuum chamber equal so that the door can be opened, which is simply called deflation. The air entering the coating machine is generally the air in a dust-free workshop, the air temperature is generally 23 - 26 °C, the air humidity is less than 60% RH, and the cleanliness is generally at the thousand-level. During the deflation process of the coating machine, the requirements for air humidity and cleanliness can generally be met.

[0003] In the prior art, for precision coating, if the temperature of the coating machine chamber is relatively high, such as 150 °C, during the deflation process, it will cause a large temperature difference between the inlet air temperature and the temperature inside the coating machine chamber; and because the glass lenses inside the coating machine and the conventional umbrella trays and jigs in the coating machine have large differences in thermal expansion coefficients due to different materials, when the temperature difference between the inlet air temperature and the temperature inside the coating machine chamber is large, coating defects such as film edge collapse will occur.

[0004] Based on this, a new technical solution is needed. Summary of the Utility Model

[0005] In view of this, the embodiments of the present utility model provide a coating machine to at least solve the problem that the large temperature difference between the external gas entering the existing coating machine and the gas inside the coating machine easily causes coating defects.

[0006] The embodiments of the present utility model provide the following technical solutions:

[0007] The embodiments of the present utility model provide a coating machine, including a coating machine chamber, a coating machine umbrella tray rotatably arranged in the coating machine chamber, jigs arranged on the umbrella tray, and further including:

[0008] A first temperature sensor, which is installed in the coating machine chamber and is used to detect the temperature in the coating machine chamber;

[0009] A heating part, one end of the heating part is connected to the intake pipe, and the other end is connected to the coating machine chamber through an outlet pipe, and is used to heat the gas transported in the intake pipe and then transport it into the coating machine chamber.

[0010] Further, the coating machine further includes:

[0011] A regulating valve, which is arranged on the outlet pipe and is used to control the opening and closing of the outlet pipe.

[0012] Further, the heating part includes:

[0013] A cavity element, which is a hollow structure with openings at both ends, one end of which is connected to the intake pipe and the other end is connected to the outlet pipe;

[0014] A heating element, which is arranged on the cavity element and is used to heat the gas inside the cavity element.

[0015] Furthermore, the heating part further includes:

[0016] A second temperature sensor, which is arranged inside the cavity element and is used to detect the temperature of the gas inside the cavity element.

[0017] Furthermore, the heating part further includes:

[0018] A heat insulation layer, which is arranged outside the cavity element.

[0019] Furthermore, the heating part further includes:

[0020] Two flanges, which are arranged at the two openings of the cavity element.

[0021] Furthermore, the cavity element is a stainless steel pipe and the heating element is a heating wire.

[0022] Furthermore, the heat insulation layer is heat-insulating cotton and is attached to the outer surface of the cavity element.

[0023] Furthermore, the coating machine further includes:

[0024] A filtering part, which is arranged on the intake pipe and is used to filter the gas in the intake pipe.

[0025] Furthermore, the coating machine further includes:

[0026] A control part, which is electrically connected to the first temperature sensor, the solenoid valve, the heating element and the second temperature sensor respectively, and is used to control the heating time of the heating element according to the temperature information sent by the first temperature sensor and the second temperature sensor.

[0027] Compared with the prior art, the at least one technical solution adopted in the embodiment of the present utility model can achieve at least the following beneficial effects:

[0028] A coating machine of the present utility model obtains the gas temperature in the chamber of the coating machine in real time through a first temperature sensor, and controls the heating time of the external gas entering the chamber of the coating machine according to the gas temperature in the chamber of the coating machine, so as to heat the external gas entering the chamber of the coating machine by the heating part, reduce the temperature difference between the external gas entering the chamber of the coating machine and the gas in the chamber of the coating machine, thereby solving the problem that coating is prone to defects due to different thermal expansion coefficients in the prior art and improving the product yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required to be used in the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0030] Figure 1 It is a schematic structural diagram of a coating machine according to an embodiment of the present utility model;

[0031] Figure 2 It is an assembly drawing of an umbrella tray and a fixture according to an embodiment of the present utility model;

[0032] Figure 3 It is a cross-sectional view of a heating part according to an embodiment of the present utility model;

[0033] Figure 4 It is the cooling process of the chamber of the coating machine according to an embodiment of the present utility model.

[0034] The reference numerals of the present utility model are as follows:

[0035] 10. Chamber of the coating machine; 20. Umbrella tray; 30. Fixture; 40. First temperature sensor; 50. Heating part; 51. Intake pipe; 52. Cavity element; 53. Heating element; 54. Second temperature sensor; 55. Heat insulation layer; 56. Flange; 60. Control valve; 70. Filter part. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0036] The embodiments of the present application will be described in detail below with reference to the drawings.

[0037] The following describes the implementation manners of the present application through specific specific examples. Those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope protected by the present application.

[0038] It should be noted that the following describes various aspects of the embodiments within the scope of the appended claims. It should be obvious that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is illustrative only. Based on the present application, those skilled in the art should understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects described herein can be used to implement the device and / or practice the method. In addition, this device can be implemented and this method can be practiced using other structures and / or functions in addition to one or more of the aspects described herein.

[0039] It should also be noted that the diagrams provided in the following embodiments only schematically illustrate the basic concept of the present application. The diagrams only show the components related to the present application, rather than being drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and ratio of each component in actual implementation can be arbitrarily changed, and the component layout type may also be more complex.

[0040] In addition, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that the examples can be practiced without these specific details.

[0041] The completed coating film connects the lens and the tooling fixture along the periphery of the product coating. Generally, the commonly used materials for coating fixtures are aluminum (AL6061) or stainless steel (SUS 304), and the conventional materials for lenses are glass types, such as germanium, silicon, sapphire, etc.

[0042] The thermal expansion coefficient of aluminum is 23.6, the thermal expansion coefficient of stainless steel is 17.3, the thermal expansion coefficient of germanium is 6.12, the thermal expansion coefficient of silicon is 2.5, and the thermal expansion coefficient of sapphire is 6.2.

[0043] The coating temperature of the germanium lens is 150 °C, and the temperature needs to drop to 50 °C in a short time. The fixture material is aluminum, and the product size is 25 mm. Without considering the film material, the deformation difference caused by thermal expansion is: 25*(150 - 50)*(23.6 - 6.12)*10^-6 / = 0.043 mm. Since the general coating thickness is below 0.02, 0.043 is already a relatively large value. Therefore, during the coating abandonment process, if the gas release temperature is not well controlled, it will cause the coating layer to adhere to the fixture when removing the lens, resulting in chipping around the film.

[0044] Based on this, the embodiments of this specification propose a processing solution: as Figure 1 shown, a coating machine of the present utility model heats the external gas entering the coating machine chamber 10 through the heating part 50, thereby being able to reduce the temperature difference between the external gas and the internal gas of the coating machine chamber 10, avoiding obvious deformation between the fixture 30 and the lens due to different thermal expansion coefficients, and solving the problem that coatings are prone to defects due to different thermal expansion coefficients in the prior art.

[0045] The following will describe the technical solutions provided by the embodiments of this application in conjunction with the drawings.

[0046] As Figures 1 - 2 shown, the present utility model provides a coating machine, including a coating machine chamber 10, a coating machine turntable 20 is rotatably arranged in the coating machine chamber 10, and a fixture 30 is arranged on the turntable 20.

[0047] Among them, the turntable 20 is used to place the lens, and the fixture 30 is used to clamp the lens.

[0048] Among them, the turntable 20 can rotate along the central axis at different speeds.

[0049] Among them, the fixture 30 is used to install the lens for coating removal, and according to different sizes, each fixture 30 can be assembled with different numbers of lenses.

[0050] Among them, the lens can be a germanium lens, a silicon lens, a sapphire lens, etc.

[0051] The coating machine further includes a first temperature sensor 40 and a heating part 50. Among them, the first temperature sensor 40 is installed in the coating machine chamber 10 for detecting the temperature in the coating machine chamber 10; one end of the heating part 50 is connected to the intake pipe 51, and the other end is connected to the coating machine chamber 10 through the outlet pipe, for heating the gas transported in the intake pipe 51 and then transporting it into the coating machine chamber 10.

[0052] Among them, the first temperature sensor 40 is installed on the inner wall of the coating machine chamber 10 for detecting the gas temperature inside the coating machine chamber 10.

[0053] Among them, according to the gas temperature inside the coating machine chamber 10 obtained by the first temperature sensor 40, the heating time of the heating unit 50 can be controlled, so that the gas temperature delivered by the heating unit 50 into the coating machine chamber 10 is close to the gas temperature inside the coating machine chamber 10, thereby reducing the temperature difference between the external gas entering the coating machine chamber 10 and the gas inside the coating machine chamber 10, and then reducing the coating defects caused by the coefficient of thermal expansion and improving the yield of the coating.

[0054] Specifically, when gas needs to be delivered into the coating machine chamber 10, the gas first enters the heating unit 50 from the intake pipe 51, and after being heated in the heating unit 50, it enters the coating machine chamber 10 through the outlet pipe.

[0055] In some of these embodiments, after the external gas enters the heating unit 50, it can directly flow onto the heating element 53 inside the heating unit 50 to enter the coating machine chamber 10 after the temperature is increased.

[0056] Furthermore, the coating machine further includes a regulating valve 60, which is arranged on the outlet pipe and is used to control the opening and closing of the outlet pipe to control whether the external gas enters the coating machine chamber 10.

[0057] Among them, the regulating valve 60 is an intake regulating valve 60, and it can be a solenoid valve.

[0058] Specifically, after the external gas enters the heating unit 50 through the intake pipe 51, the regulating valve 60 can be first closed to enable the heating unit 50 to continuously heat the external gas until after a preset time or the external gas reaches a preset temperature, and then the regulating valve 60 is opened to enable the heated external gas to enter the coating machine chamber 10.

[0059] Among them, the regulating valve 60 is also used to regulate the rate at which the external gas flows into the coating machine chamber 10.

[0060] For example, according to the size, temperature, and intake time of the coating machine chamber 10, the intake rate of the regulating valve 60 can be set.

[0061] In some of these embodiments, as Figure 3 shown, the heating unit 50 includes a cavity element 52 and a heating element 53. Among them, the cavity element 52 is a hollow structure with openings at both ends, one end of which is connected to the intake pipe 51 and the other end is connected to the outlet pipe, and is used to obtain and store the external gas; the heating element 53 is arranged on the cavity element 52 and is used to heat the gas inside the cavity element 52.

[0062] Among them, the intake end of the intake pipe 51 is connected to the clean room environment so that clean air enters the heating unit 50.

[0063] Specifically, after the external gas enters the cavity element 52 through the intake pipe 51, the heating element 53 can heat the external gas, and finally the heated gas enters the coating machine chamber 10 through the outlet pipe.

[0064] Among them, the cavity element 52 can be a stainless steel pipe.

[0065] Among them, the heating element 53 can be a heating wire.

[0066] In some embodiments, when the heating element 53 is a heating wire, the heating wire can be arranged around the inner wall of the cavity element 52; the heating wire can also form a serpentine three-dimensional structure or other three-dimensional structures in the cavity element 52 to increase the contact area between the external gas and the external gas.

[0067] Among them, the temperature of the heating wire can be controlled according to the magnitude of the current. In the equipment control system, a heating temperature - heating time curve can be set.

[0068] Furthermore, the heating part 50 further includes a second temperature sensor 54. The second temperature sensor 54 is arranged in the cavity element 52 and is used to detect the temperature of the gas in the cavity element 52.

[0069] Among them, the second temperature sensor 54 is used to facilitate the staff to understand the temperature of the external gas in the cavity element 52, so as to facilitate the staff to control the opening and closing of the outlet pipe through the regulating valve 60.

[0070] For example, when the staff learns through the second temperature sensor 54 that the external gas in the cavity element 52 meets the requirements, they can open the regulating valve 60 or increase the opening of the regulating valve 60, so that the heated gas enters the coating machine chamber 10.

[0071] Furthermore, the heating part 50 further includes a heat insulation layer 55. The heat insulation layer 55 is arranged outside the cavity element 52. The heat insulation layer 55 is used to isolate the heat of the cavity element 52, avoid the shell temperature of the cavity element 52 being too high and causing harm to the staff, and at the same time can play a heat preservation effect.

[0072] Among them, the heat insulation layer 55 can be made of heat preservation cotton and is pasted on the outer surface of the shell of the cavity element 52 to maintain the temperature stability and integrity of the cavity element 52 and avoid the cavity element 52 having too high a temperature and harming the staff.

[0073] Furthermore, the heating part 50 further includes two flanges 56. The two flanges 56 are arranged at the two openings of the cavity element 52 to facilitate sealed connection with the intake pipe 51 or the outlet pipe.

[0074] Among them, the flange 56 is a KF25 flange, which is a standard connection method for vacuum equipment and is convenient for the staff to install.

[0075] In some of these embodiments, the coating machine further includes a filtering unit 70 disposed on the intake pipe 51 for filtering the gas in the intake pipe 51.

[0076] Among them, the filtering unit 70 can be an air filter screen for filtering the gas entering the intake pipe 51 to prevent external impurities from entering the cavity component 52 and the coating machine chamber 10.

[0077] In some of these embodiments, the coating machine further includes a control unit electrically connected to the first temperature sensor 40, the regulating valve 60, the heating element 53, and the second temperature sensor 54 respectively, for controlling the heating time of the heating element 53 according to the temperature information sent by the first temperature sensor 40 and the second temperature sensor 54.

[0078] Among them, the control unit is used to obtain the temperature information sent by the first temperature sensor 40 and the second temperature sensor 54, and adjust the heating time of the heating element 53 according to the temperature information.

[0079] Among them, the control unit can control the opening timing of the regulating valve 60 according to the temperature information sent by the second temperature sensor 54.

[0080] Specifically, after the control unit obtains the first temperature value of the first temperature sensor 40, at this time the regulating valve 60 is in the closed state, and the staff controls to turn on the heating element 53 so that the heating element 53 heats the external gas inside the cavity component 52; when the control unit obtains through the second temperature sensor 54 that the second temperature value of the external gas is close to the first temperature value, the control unit can control to turn off the heating element 53 and open the regulating valve 60 so that the gas enters the coating machine chamber 10. Among them, the second temperature value is close to the first temperature value.

[0081] For example, when the first temperature value is 100 °C, the second temperature value is 80 °C.

[0082] A specific embodiment of the present utility model is as follows:

[0083] Such as Figure 4As shown in the figure, from point A to point B, it is the natural cooling of the coating machine. After 50 minutes, the temperature drops from 150 °C to 100 °C; from point C to point D, the time is from 50 minutes to 80 minutes. The external gas temperature inside the heating part 50 is heated to 80 °C and continuously heated. The regulating valve 60 is opened, and the heated external air enters the coating machine chamber 10 to cool the temperature inside the coating machine chamber 10 to 80 °C; from point E to point F, the time is from 80 minutes to 110 minutes. The external gas temperature inside the heating part 50 drops from 60 °C to 25 °C and is continuously heated. The intake valve is opened, and the external gas enters the coating machine chamber 10 to cool the inside of the coating machine chamber 10; during this process, the umbrella tray 20 rotates at a speed of 10 rpm until the gas addition is completed.

[0084] For a certain infrared product coating, the substrate material to be coated is germanium, the film layer materials are germanium and ZnS, the coating baking temperature is 150 °C, the material of the umbrella tray 20 is SUS 304, and the material of the fixture 30 is SUS 304. Before temperature control, the cavity was kept warm for 60 minutes, and the film breakdown yield of the product was 88.2%. After using temperature control, the film breakdown yield of the product reached 99.5%.

[0085] By controlling the temperature of the external gas entering the coating machine chamber 10, the present utility model avoids the rapid change of the gas inside and outside the coating machine chamber 10. At the same time, during the deflation process, the umbrella tray 20 rotates at a constant speed, which also enables the temperatures of the umbrella tray 20, the fixture 30, and the lens to drop smoothly, and the temperatures of each lens are more uniform, thereby improving the yield of the product.

[0086] During the deflation process of the coating machine of the present invention, the temperature of the external gas entering the coating machine chamber 10 has a smooth transition, avoiding the occurrence of thermal expansion and contraction phenomena, and greatly improving the yield of the product.

[0087] In this specification, the same or similar parts among the various embodiments can be referred to each other, and each embodiment focuses on the differences from other embodiments. In particular, for the product embodiments described later, since they correspond to the methods, the descriptions are relatively simple, and the relevant parts can be referred to the partial descriptions of the system embodiments.

[0088] The above is only the specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present application should be covered within the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A coating machine, comprising a coating machine chamber, an umbrella plate rotatably arranged in the coating machine chamber, a clamp arranged on the umbrella plate, characterized in that: Also includes: A first temperature sensor, which is installed in the coating machine chamber and is used to detect the temperature in the coating machine chamber; A heating part, one end of which is connected to the air inlet pipe, and the other end of which is connected to the coating machine chamber through the air outlet pipe, and is used for heating the gas transported in the air inlet pipe and then transporting it into the coating machine chamber.

2. The coating machine according to claim 1, characterized in that: Also includes: A regulating valve is arranged on the air outlet pipeline and is used to control the opening and closing of the air outlet pipeline.

3. The coating machine according to claim 2, characterized in that: The heating unit comprises: A cavity element, wherein the cavity element is a hollow structure with two ends open, one end of which is connected to the air inlet pipe, and the other end of which is connected to the air outlet pipe; A heating element is disposed on the cavity element and is used to heat the gas inside the cavity element.

4. The coating machine according to claim 3, characterized in that: The heating unit further comprises: A second temperature sensor is disposed in the cavity element and is used to detect the temperature of the gas in the cavity element.

5. The coating machine according to claim 4, characterized in that: The heating unit further comprises: A heat insulation layer is arranged outside the cavity element.

6. The coating machine according to claim 5, characterized in that: The heating unit further comprises: Two flanges are arranged at two openings of the cavity element.

7. The coating machine according to claim 3, characterized in that: The cavity element is a stainless steel tube, and the heating element is a heating wire.

8. The coating machine according to claim 5, characterized in that: The heat insulation layer is thermal insulation cotton and is attached to the outer surface of the cavity element.

9. The coating machine according to any one of claims 1 to 8, characterized in that: Also includes: The filter unit is arranged on the air intake pipe and is used for filtering the gas in the air intake pipe.

10. The coating machine according to claim 4, characterized in that: Also includes: A control unit, wherein the control unit is electrically connected to the first temperature sensor, the regulating valve, the heating element, and the second temperature sensor, and is used to control the heating time of the heating element according to the temperature information sent by the first temperature sensor and the second temperature sensor.

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