Coating carrier and chemical vapor deposition device
By designing a separable coating vehicle, using the first carrier plate and the second carrier plate to form a sheet limit cavity, the problems of surface residue and structural damage during the silicon wafer flip coating process are solved, and the defect rate of the coating process is reduced.
Patent Information
- Application Number
- CN202421793837.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-26
- Publication Date
- 2025-06-13
- Estimated Expiration
- 2034-07-26
AI Technical Summary
In the preparation process of solar cells, the silicon wafer needs to be flipped for coating. The traditional suction nozzle absorption and transfer methods can easily lead to residual surface and structural damage to the silicon wafer, and the silicon wafer is exposed to the external environment for a long time, which increases the defect rate of the coating process.
A coating carrier is designed, including a separable first carrier plate and a second carrier plate, and a sheet limit cavity is formed through the use of the first carrier plate and the second carrier plate to avoid residual printing of the nozzle and protect the surface structure of the silicon wafer, while avoiding long-term exposure of the silicon wafer in the external environment.
It effectively reduces the defect rate of the coating process, avoids surface residues and structural damage of the silicon wafer, and reduces the exposure time of the silicon wafer in the external environment.
Smart Images
Figure CN222975290U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of photovoltaic coating, in particular to a coating carrier and a chemical vapor deposition device. Background Art
[0002] A solar cell is a device that can directly convert solar energy into electrical energy. Coating on a crystalline silicon substrate is a common method for preparing crystalline silicon solar cells. In the actual coating process, silicon wafers usually need to be placed on a coating carrier for the transportation and coating of the silicon wafers.
[0003] Some preparation processes of solar cells often require coating on both opposite surfaces of the silicon wafer, and accordingly, the silicon wafer needs to be flipped during the preparation process. For example, the structure of a heterojunction solar cell (HJT) often includes a front intrinsic silicon layer, a front doped silicon layer, a back intrinsic silicon layer, and a front doped silicon layer. To improve the preparation efficiency, usually the front intrinsic silicon layer is prepared first, then the silicon wafer is flipped to prepare the back intrinsic silicon layer and the back doped silicon layer, and then the silicon wafer is flipped again to prepare the front doped silicon layer. In the traditional technology, usually a suction nozzle is used to suck the silicon wafer and then transfer the silicon wafer. This method has the following problems: the suction nozzle mark is likely to remain on the surface of the silicon wafer, and the texture structure of the silicon wafer is easily damaged, and the silicon wafer needs to be exposed in the external environment for a long time, which all increases the defect rate of the coating process. Summary of the Utility Model
[0004] Based on this, in view of the problems in the above background art, in order to avoid the residue of the suction nozzle mark, protect the surface structure of the sheet material to be coated, and avoid the long-term exposure of the sheet material to be coated in the external environment, it is necessary to provide a coating carrier and a corresponding chemical vapor deposition device to reduce the defect rate of the coating process.
[0005] According to some embodiments of the present utility model, there is provided a coating carrier, which includes a first carrier plate and a second carrier plate that are used in cooperation and can be separated. The first carrier plate has a first bearing surface, and the second carrier plate has a second bearing surface. When the first carrier plate and the second carrier plate are used in cooperation, the first bearing surface and the second bearing surface are arranged facing each other, and a sheet material limiting cavity is formed between the first bearing surface and the second bearing surface.
[0006] In some embodiments of the present utility model, a first limiting groove with a notch located on the first bearing surface is provided on the first carrier plate, and a second limiting groove with a notch located on the second bearing surface is provided on the second carrier plate. When the first carrier plate and the second carrier plate are used in cooperation, the first limiting groove and the second limiting groove are arranged in alignment and form the sheet material limiting cavity.
[0007] In some embodiments of the present utility model, a first sliding area is provided on the groove side wall of the first limiting groove, and along the direction from the groove opening of the first limiting groove towards its groove bottom, the first sliding area gradually contracts; and / or,
[0008] A second sliding area is provided on the groove side wall of the second limiting groove, and along the direction from the groove opening of the second limiting groove towards its groove bottom, the second sliding area gradually contracts.
[0009] In some embodiments of the present utility model, the first carrier plate includes a first bearing platform disposed in the first limiting groove, and the first bearing platform protrudes from the groove bottom wall of the first limiting groove; and / or,
[0010] The second carrier plate includes a second bearing platform disposed in the second limiting groove, and the second bearing platform protrudes from the groove bottom wall of the second limiting groove.
[0011] In some embodiments of the present utility model, the top end of the first sliding area is located at the groove opening of the first limiting groove, and the bottom end of the first sliding area is connected to the first bearing platform; and / or,
[0012] The top end of the second sliding area is located at the groove opening of the second limiting groove, and the bottom end of the second sliding area is connected to the second bearing platform.
[0013] In some embodiments of the present utility model, when the first carrier plate and the second carrier plate are used in cooperation, the groove opening of the first limiting groove coincides with the groove opening of the second limiting groove.
[0014] In some embodiments of the present utility model, the first carrier plate further includes a fitting convex block disposed on the first bearing surface, and the second carrier plate further includes a fitting groove disposed on the second bearing surface, and the fitting convex block can be embedded into the fitting groove.
[0015] In some embodiments of the present utility model, the first carrier plate includes two of the fitting convex blocks, the two fitting convex blocks are spaced apart and disposed on the first bearing surface, the second carrier plate includes two of the fitting grooves, the two fitting grooves are spaced apart and disposed on the second bearing surface, and the sheet material limiting cavity is disposed between the two fitting convex blocks and the two fitting grooves.
[0016] In some embodiments of the present utility model, the first carrier plate has a first clamping surface opposite to the first bearing surface, and a first clamping groove is provided on the first clamping surface; and / or,
[0017] The second carrier plate has a second clamping surface opposite to the second bearing surface, and a second clamping groove is provided on the second clamping surface.
[0018] Furthermore, the present disclosure also provides a chemical vapor deposition apparatus, which includes a deposition chamber, a rotating member, and a coating carrier as described in any of the above embodiments. The rotating member and the coating carrier are used in cooperation with the deposition chamber, and the rotating member is configured to drive the coating carrier to perform a rotating action.
[0019] The coating carrier of the present utility model includes a first carrier plate and a second carrier plate that are used in cooperation and separable. The first carrier plate has a first bearing surface, and the second carrier plate has a second bearing surface. When the first carrier plate and the second carrier plate are used in cooperation, the first bearing surface and the second bearing surface face each other, and a sheet limiting cavity is formed between the first bearing surface and the second bearing surface. The sheet limiting cavity is used to accommodate the sheet to be coated. When the sheet needs to be flipped, the first carrier plate and the second carrier plate can be flipped as a whole to drive the sheet to complete the flipping. After the first carrier plate and the second carrier plate are flipped as a whole, the first carrier plate and the second carrier plate can be separated to expose the flipped sheet and perform subsequent coating treatment. By providing the separable first carrier plate and second carrier plate, this coating carrier gets rid of the suction and flipping method in the traditional technology, thus can avoid the suction nozzle marks remaining on the surface of the sheet, protect the surface structure of the sheet to be coated, and also can avoid the sheet to be coated from being exposed in the external environment for a long time, thereby effectively reducing the defect rate of the coating process. Description of the Drawings
[0020] Figure 1 is a schematic structural diagram of a coating carrier;
[0021] Figure 2 is Figure 1 a schematic structural diagram of the first carrier plate in
[0022] Figure 3 is Figure 1 a schematic structural diagram of the second carrier plate in
[0023] Figure 4 is Figure 2 an enlarged schematic structural diagram of area A in
[0024] Figure 5 is Figure 4 a schematic cross-sectional structural diagram of the first limiting groove in
[0025] Among them, the meanings of the reference numerals are as follows:
[0026] 100. First carrier board; 101. First bearing surface; 110. First limiting groove; 111. First sliding area; 120. First support platform; 130. Fitting convex block; 140. First clamping groove; 200. Second carrier board; 201. Second bearing surface; 210. Second limiting groove; 230. Fitting groove; 240. Second clamping groove; 300. Rotating actuator. Detailed implementation mode
[0027] For the convenience of understanding the present utility model, the present utility model will be described more comprehensively below in conjunction with the implementation mode and the effect diagram. The embodiment gives a preferred implementation mode of the present utility model. However, the present utility model can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosed content of the present utility model more thorough and comprehensive.
[0028] It should be noted that when an element is referred to as "fixed" to another element, it can be directly fixed to the other element, or it can also be fixed to the other element through an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element, or there can also be an intermediate element between the two elements. In addition, in the description of the present utility model, unless otherwise clearly defined and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. For example, it can be a mechanical connection or an electrical connection. For example, it can be a direct connection or an indirect connection through an intermediate element, and it can also be the communication inside the two elements. It should be understood that those skilled in the art can understand the specific meanings of the above terms according to the specific situation without causing ambiguity.
[0029] Unless otherwise limited, in the description of the present utility model, the terms indicating the orientation or position relationship such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientation or position relationship shown in the utility model drawings. It is only for the convenience and simplification of describing the content of the utility model, and at the same time helps the reader to understand in combination with the drawings, rather than limiting or implying that the device or element referred to must have a specific orientation. Therefore, it cannot be understood as a limitation to the present utility model.
[0030] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which this utility model belongs. The terms used in the specification of this utility model herein are only for the purpose of describing specific embodiments, and are not intended to limit the implementation of this utility model. The term "and / or" used herein includes any and all combinations of one or more of the related listed items. "Plurality" herein includes combinations of two or more items.
[0031] The utility model provides a coating carrier, which includes a first carrier plate and a second carrier plate that are used in cooperation and can be separated. The first carrier plate has a first bearing surface, and the second carrier plate has a second bearing surface. When the first carrier plate and the second carrier plate are used in cooperation, the first bearing surface and the second bearing surface are arranged facing each other, and a sheet limiting cavity is formed between the first bearing surface and the second bearing surface.
[0032] The coating carrier of the utility model includes a first carrier plate and a second carrier plate that are used in cooperation and can be separated. The first carrier plate has a first bearing surface, and the second carrier plate has a second bearing surface. When the first carrier plate and the second carrier plate are used in cooperation, the first bearing surface and the second bearing surface are arranged facing each other, and a sheet limiting cavity is formed between the first bearing surface and the second bearing surface. The sheet limiting cavity is used to accommodate the sheet to be coated. When the sheet needs to be flipped, the first carrier plate and the second carrier plate can be flipped as a whole to drive the sheet to complete the flipping. After the first carrier plate and the second carrier plate are flipped as a whole, the first carrier plate and the second carrier plate can be separated to expose the flipped sheet and perform subsequent coating treatment. By setting the separable first carrier plate and second carrier plate, the coating carrier gets rid of the traditional way of sucking and flipping, thus can avoid the suction nozzle marks remaining on the surface of the sheet, protect the surface structure of the sheet to be coated, and the sheet is inside the sheet limiting cavity, which can also avoid the long-term exposure of the sheet to be coated in the external environment, thereby effectively reducing the defect rate of the coating process.
[0033] Figure 1 It is a schematic structural diagram of a coating carrier according to the utility model. Refer to Figure 1 As shown, the coating carrier includes a first carrier plate 100 and a second carrier plate 200 that are used in cooperation and can be separated. Figure 1 It is the structure of the first carrier plate 100 and the second carrier plate 200 when they are used in cooperation, Figure 2 is Figure 1 a schematic structural diagram of the first carrier plate 100 in Figure 3 is Figure 1 a schematic structural diagram of the second carrier plate 200 in Figures 1 - 3As shown, the first carrier plate 100 has a first bearing surface 101, and the second carrier plate 200 has a second bearing surface 201. When the first carrier plate 100 and the second carrier plate 200 are used in combination, the first bearing surface 101 and the second bearing surface 201 face each other, and a sheet limiting cavity is formed between the first bearing surface 101 and the second bearing surface 201.
[0034] Among them, the sheet limiting cavity is used to limit the position of the sheet to be coated. During the overall flipping process of the first carrier plate 100 and the second carrier plate 200, the sheet to be coated is located inside the sheet limiting cavity, so as to ensure the normal flipping of the sheet to be coated and subsequent coating. The sheet limiting cavity can be a closed space or a partially open semi-closed space. In this embodiment, the sheet limiting cavity can be a closed space.
[0035] Furthermore, referring to Figure 2 and Figure 3 As shown, in some examples of this embodiment, a first limiting groove 110 with a notch located on the first bearing surface 101 is provided on the first carrier plate 100, and a second limiting groove 210 with a notch located on the second bearing surface 201 is provided on the second carrier plate 200. When the first carrier plate 100 and the second carrier plate 200 are used in combination, the first limiting groove 110 and the second limiting groove 210 are arranged in alignment and form a sheet limiting cavity. It can be understood that during actual use, if the first carrier plate 100 is set lower, the sheet will be placed in the first limiting groove 110. After flipping, if the second carrier plate 200 is set lower, then the sheet will fall into the second limiting groove 210 at this time. By providing the first limiting groove 110 on the first carrier plate 100 and the second limiting groove 210 on the second carrier plate 200, both the first carrier plate 100 and the second carrier plate 200 can be used as coating carrier plates for the sheet. Only by removing the upper carrier plate can the sheet be coated.
[0036] Referring to Figure 2 and Figure 3 As shown, in some examples of this embodiment, a plurality of first limiting grooves 110 can be provided on the first carrier plate 100, and a plurality of second limiting grooves 210 can be correspondingly provided on the second carrier plate 200. Each first limiting groove 110 and the corresponding second limiting groove 210 can form a sheet limiting cavity. By providing a plurality of first limiting grooves 110 and a plurality of second limiting grooves 210, a plurality of sheets can be coated and flipped simultaneously.
[0037] Figure 4 For Figure 2 the enlarged structural schematic diagram of area A in Figure 4As shown, in some examples of this embodiment, a first sliding area 111 is provided on the groove side wall of the first limiting groove 110. Along the direction from the groove opening of the first limiting groove 110 towards its groove bottom, the first sliding area 111 gradually contracts. It can be understood that corresponding to the gradually contracting first sliding area 111, the cross-sectional area of the first limiting groove 110 also gradually decreases from top to bottom. When flipping, the sheet material is more likely to move from the groove bottom of the first limiting groove 110 towards the groove opening and then into the second limiting groove 210. Therefore, setting the first sliding area 111 can reduce the resistance suffered by the sheet material during flipping and also reduce the friction between the sheet material and the groove wall of the first limiting groove 110.
[0038] Figure 5 is Figure 4 a schematic cross-sectional structure diagram of the first limiting groove 110 in. Refer to Figure 5 As shown, in some examples of this embodiment, the first sliding area 111 can be in the shape of a plane that intersects the first bearing surface 101 obliquely. Further, the angle formed by the first sliding area 111 and the first bearing surface 101 can be 60° - 90°. For example, the angle formed by the first sliding area 111 and the first bearing surface 101 can be 60°, 65°, 70°, 75°, 80°, 85°, 90°, or the angle formed by the first sliding area 111 and the first bearing surface 101 can also be in the range between any two of the above angles.
[0039] Combined with Figure 4 and Figure 5 As shown, in some examples of this embodiment, the first carrier plate 100 further includes a first bearing platform 120 disposed in the first limiting groove 110, and the first bearing platform 120 protrudes from the groove bottom wall of the first limiting groove 110. Among them, the first bearing platform 120 is used to carry the sheet material to be coated, so that there is a gap between the sheet material to be coated and the groove bottom wall of the first limiting groove 110. This can reduce the contact area between the sheet material to be coated and the first carrier plate 100, reduce the damage caused by contact friction, and improve the yield rate of the sheet material during the coating process.
[0040] Combined with Figure 4 and Figure 5 As shown, in some examples of this embodiment, the top end of the first sliding area 111 is located at the groove opening of the first limiting groove 110, and the bottom end of the first sliding area 111 is connected to the first bearing platform 120.
[0041] Further, in some examples of this embodiment, a second sliding area is provided on the groove side wall of the second limiting groove 210. Along the direction from the groove opening of the second limiting groove 210 towards its groove bottom, the second sliding area gradually contracts. Setting the second sliding area can reduce the resistance suffered by the sheet material during flipping and also reduce the friction between the sheet material and the groove wall of the second limiting groove 210. The structure of the second sliding area is the same asFigure 4 and Figure 5 The structure of the first slip zone 111 shown is similar and can be Figure 4 and Figure 5 To understand.
[0042] In some examples of this embodiment, the second sliding zone may be in the shape of a plane obliquely intersecting the second bearing surface 201. Further, the angle formed by the second sliding zone and the second bearing surface 201 may be 60° to 90°, for example, the angle formed by the second sliding zone and the second bearing surface 201 may be 60°, 65°, 70°, 75°, 80°, 85°, 90°, or the angle formed by the second sliding zone and the second bearing surface 201 may also be in the range between any two of the above angles.
[0043] In some examples of this embodiment, the second carrier 200 further includes a second carrier platform disposed in the second limiting groove 210, and the second carrier platform protrudes from the bottom wall of the second limiting groove 210. The second carrier platform is used to carry the sheet to be coated, so that there is a gap between the sheet to be coated and the bottom wall of the second limiting groove 210, which can reduce the contact area between the sheet to be coated and the second carrier 200, reduce the damage caused by contact friction, and improve the yield of the sheet during the coating process.
[0044] In some examples of this embodiment, the top end of the second sliding area is located at the notch of the second limiting groove 210, and the bottom end of the second sliding area is connected to the second supporting platform.
[0045] Combination Figures 1 - 3 As shown, in some examples of this embodiment, when the first carrier plate 100 and the second carrier plate 200 are used together, the notch of the first limiting groove 110 overlaps with the notch of the second limiting groove 210. By arranging the notch of the first limiting groove 110 to overlap with the notch of the second limiting groove 210, a closed sheet limiting cavity can be formed, ensuring that the sheet can smoothly move back and forth between the first limiting groove 110 and the second limiting groove 210, and isolating the environment inside and outside the sheet limiting cavity, thereby preventing the sheet from being disturbed by the external environment as much as possible.
[0046] Reference Figure 2 and Figure 3As shown, in some examples of this embodiment, the first carrier plate 100 further includes a fitting bump 130 disposed on the first bearing surface 101. The fitting bump 130 protrudes from the first bearing surface 101. The second carrier plate 200 further includes a fitting groove 230 disposed on the second bearing surface 201. The notch of the fitting groove 230 is located on the first bearing surface 101. The fitting bump 130 can be embedded in the fitting groove 230. It can be understood that when the first carrier plate 100 and the second carrier plate 200 are used in combination, the fitting bump 130 and the fitting groove 230 can be aligned to ensure that the first carrier plate 100 and the second carrier plate 200 are aligned. Further, by providing the fitting bump 130 and the fitting groove 230, it is also beneficial to ensure the overall stable combination and easy separation of the first carrier plate 100 and the second carrier plate 200, and improve the working efficiency during actual use.
[0047] Referring to Figure 2 and Figure 3 As shown, in some examples of this embodiment, the first carrier plate 100 includes two fitting bumps 130. The two fitting bumps 130 are spaced apart on the first bearing surface 101. The second carrier plate 200 includes two fitting grooves 230. The two fitting grooves 230 are spaced apart on the second bearing surface 201. The sheet limiting cavity is disposed between the two fitting bumps 130 and the two fitting grooves 230. It can be understood that in this embodiment, the first limiting groove 110 can be disposed between the two fitting bumps 130, and the second limiting groove 210 can be disposed between the two fitting grooves 230, so that the formed sheet limiting cavity is located between the two fitting bumps 130 and the two fitting grooves 230.
[0048] During actual use, the coating carrier of this embodiment can rotate, and the rotation axis can be located on the first bearing surface 101. Referring to Figure 1 As shown, in some examples of this embodiment, a rotation action can be used to drive the coating carrier to perform a rotation action. The rotation action member 300 should be able to be fixedly connected to the coating carrier and be detachably disposed from the coating carrier.
[0049] Referring to Figure 1 As shown, in some examples of this embodiment, the first carrier plate 100 has a first clamping surface opposite to the first bearing surface 101. A first clamping groove 140 is provided on the first clamping surface. The second carrier plate 200 has a second clamping surface opposite to the second bearing surface 201. A second clamping groove 240 is provided on the second clamping surface. The first clamping groove 140 and the second clamping groove 240 can be used for the rotation action member 300 to clamp and be fixedly connected to the first carrier plate 100 and the second carrier plate 200 by clamping. Through the rotation action of the rotation action member 300 itself, the first carrier plate 100 and the second carrier plate 200 being clamped can be driven to perform a rotation action.
[0050] Furthermore, the present utility model also provides a chemical vapor deposition device, which includes a deposition chamber, a rotating member 300, and a coating carrier as described in the above embodiments. Among them, the rotating member 300 and the coating carrier can be used in cooperation with the deposition chamber, that is, the coating carrier should be able to be placed in the deposition chamber to perform the coating process, and the rotating member 300 can be arranged in the deposition chamber and is used to drive the coating carrier to perform a rotating action.
[0051] The technical features of the above embodiments can be combined arbitrarily. For the sake of concise description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope recorded in this specification.
[0052] The above embodiments only represent several implementation manners of the present utility model, and the description is relatively specific and detailed, but it cannot be understood as a limitation to the scope of the utility model patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several deformations and improvements can still be made, and these all belong to the protection scope of the present utility model. Therefore, the protection scope of the utility model patent should be subject to the appended claims.
Claims
1. A coating carrier, characterized in that: The invention comprises a first carrier plate (100) and a second carrier plate (200) which are used in conjunction with each other and are separable, wherein the first carrier plate (100) has a first bearing surface (101), and the second carrier plate (200) has a second bearing surface (201); when the first carrier plate (100) and the second carrier plate (200) are used in conjunction with each other, the first bearing surface (101) and the second bearing surface (201) are arranged opposite to each other, and a sheet limiting cavity is formed between the first bearing surface (101) and the second bearing surface (201).
2. The coating carrier according to claim 1, characterized in that: The first carrier plate (100) is provided with a first limiting groove (110) whose opening is located on the first bearing surface (101), and the second carrier plate (200) is provided with a second limiting groove (210) whose opening is located on the second bearing surface (201); when the first carrier plate (100) and the second carrier plate (200) are used together, the first limiting groove (110) and the second limiting groove (210) are arranged in alignment and form the sheet limiting cavity.
3. The coating carrier according to claim 2, characterized in that: A first sliding zone (111) is provided on the side wall of the first limiting groove (110), and the first sliding zone (111) gradually shrinks along the direction from the groove opening of the first limiting groove (110) towards the groove bottom thereof; and / or, A second sliding zone is provided on the groove side wall of the second limiting groove (210), and the second sliding zone gradually shrinks along the direction from the groove opening of the second limiting groove (210) towards the groove bottom thereof.
4. The coating carrier according to claim 3, characterized in that: The first carrier plate (100) comprises a first bearing platform (120) arranged in the first limiting groove (110), the first bearing platform (120) protruding from the bottom wall of the first limiting groove (110); and / or, The second carrier plate (200) comprises a second bearing platform arranged in the second limiting groove (210), and the second bearing platform is arranged to protrude from the bottom wall of the second limiting groove (210).
5. The coating carrier according to claim 4, characterized in that: The top end of the first sliding area (111) is located at the notch of the first limiting groove (110), and the bottom end of the first sliding area (111) is connected to the first bearing platform (120); and / or, The top end of the second sliding area is located at the notch of the second limiting groove (210), and the bottom end of the second sliding area is connected to the second bearing platform.
6. The coating carrier according to claim 5, characterized in that: When the first carrier plate (100) and the second carrier plate (200) are used in combination, the notch of the first limiting groove (110) overlaps with the notch of the second limiting groove (210).
7. The film coating carrier according to any one of claims 1 to 6, characterized in that: The first carrier plate (100) further comprises an engaging protrusion (130) arranged on the first carrier surface (101), and the second carrier plate (200) further comprises an engaging groove (230) arranged on the second carrier surface (201), wherein the engaging protrusion (130) can be embedded in the engaging groove (230).
8. The film coating carrier according to claim 7, characterized in that: The first carrier plate (100) comprises two engaging protrusions (130), the two engaging protrusions (130) are arranged at intervals on the first bearing surface (101), the second carrier plate (200) comprises two engaging grooves (230), the two engaging grooves (230) are arranged at intervals on the second bearing surface (201), and the sheet limiting cavity is arranged between the two engaging protrusions (130) and the two engaging grooves (230).
9. The film coating carrier according to any one of claims 1 to 6 and 8, characterized in that: The first carrier plate (100) has a first clamping surface opposite to the first carrier surface (101), and a first clamping groove (140) is provided on the first clamping surface; and / or, The second carrier plate (200) has a second clamping surface opposite to the second carrier surface (201), and a second clamping groove (240) is provided on the second clamping surface.
10. A chemical vapor deposition device, characterized in that: It comprises a deposition chamber, a rotating action piece (300) and a coating carrier as claimed in any one of claims 1 to 9, wherein the rotating action piece (300) and the coating carrier are used in conjunction with the deposition chamber, and the rotating action piece (300) is used to drive the coating carrier to rotate.