Demoulding device

Abstract

The utility model discloses a demolding device. The demolding device comprises a sealed container, a lifting mechanism, a heating mechanism, an ultrasonic mechanism and a vacuum mechanism. At least part of the lifting mechanism is arranged in the sealed container, and the lifting mechanism is used for bearing a to-be-machined part and driving the to-be-machined part to ascend and descend in the sealed container in a reciprocating mode; the heating mechanism is used for heating the sealed container; the ultrasonic mechanism is used for performing ultrasonic treatment in the sealed container; and the vacuum machine is connected with the sealed container and is used for vacuumizing and breaking vacuum of the sealed container. And the ultrasonic mechanism performs ultrasonic treatment on the sealed container, so that methanol soaking is more sufficient, and the dissolving effect is improved. Meanwhile, the crucible and the crystal are lifted to the position above the liquid level of the methanol by the lifting mechanism, then the vacuum mechanism is used for vacuumizing, residual methanol between the crucible and the crystal can be discharged, then the crucible and the crystal are immersed in the methanol again, and fresh methanol can enter the crucible and the crystal, so that the dissolving effect on the boron oxide is further improved; and the demolding rate is further improved.

Description

Technical Field

[0001] This application belongs to the technical field of semiconductor processing, and particularly relates to a demolding device. Background Art

[0002] During the growth process of gallium arsenide crystals, while adding gallium arsenide raw materials into the crucible, a certain amount of boron oxide also needs to be added. Boron oxide is located between the crucible and gallium arsenide, and is used to wrap the gallium arsenide melt to prevent the phenomenon of sticking boats between gallium arsenide and the crucible, thereby avoiding the generation of defects such as polycrystals and twins during the crystal growth process.

[0003] After the crystal growth is completed, the crystal needs to be demolded. The crucible and the crystal rod are immersed in methanol. After boron oxide dissolves in methanol, the crucible and the crystal are taken out, and the methanol on the surface of the crystal is drained to complete the demolding. In recent years, the size of the crystal has gradually increased, while the thickness of boron oxide between the crucible and the crystal is relatively small, about 0.1 mm. Therefore, the boron oxide between the crucible and the crystal is likely to be incompletely dissolved, which affects the demolding rate of the crystal. Summary of the Utility Model

[0004] The technical problem to be solved by this application is that the boron oxide between the existing crucible and the crystal is incompletely dissolved, which affects the demolding of the crystal. To solve the above technical problem, a demolding device is provided that can improve the dissolution effect of boron oxide and the demolding rate of the crystal.

[0005] The technical solution proposed by this application is as follows:

[0006] A demolding device, comprising:

[0007] A sealed container;

[0008] A lifting mechanism, at least partially disposed inside the sealed container, the lifting mechanism is used to carry the workpiece to be processed and drive the workpiece to reciprocate up and down inside the sealed container;

[0009] A heating mechanism for heating the sealed container;

[0010] An ultrasonic mechanism for performing ultrasonic treatment inside the sealed container;

[0011] A vacuum mechanism connected to the sealed container for evacuating and breaking the vacuum of the sealed container.

[0012] Furthermore, the demolding device further includes a containing box, the sealed container is disposed inside the containing box, and the ultrasonic mechanism is disposed inside the containing box.

[0013] Further, a heating medium is provided in the accommodating box, at least a part of the sealed container is immersed in the heating medium, and the heating mechanism is connected to the accommodating box for circulating and heating the heating medium in the accommodating box.

[0014] Further, the accommodating box is provided with a liquid inlet and a liquid outlet that communicate with its interior. The heating mechanism includes a liquid inlet pipe, a liquid outlet pipe, a circulation pump, and a heater. The liquid inlet pipe is connected between the liquid inlet and the heater, the liquid outlet pipe is connected between the liquid outlet and the heater, and the circulation pump is arranged on the liquid inlet pipe or the liquid outlet pipe.

[0015] Further, the accommodating box is provided with a liquid discharge port that communicates with its interior. The demolding device further includes a liquid discharge valve. The liquid discharge valve is arranged outside the accommodating box and communicates with the liquid discharge port.

[0016] Further, the demolding device further includes a first temperature detector and a second temperature detector. The first temperature detector is arranged in the accommodating box, and the second temperature detector is arranged in the sealed container.

[0017] Further, the sealed container includes a sealed box and a sealed cover. The sealed cover is detachably connected to the sealed box, and the sealed cover is used to seal the sealed box. The lifting mechanism is arranged in the sealed box, and the vacuum mechanism is connected to the sealed cover.

[0018] Further, the sealed container further includes a sealing ring. The sealing ring is arranged on the sealed cover or the sealed box, and when the sealed cover is connected to the sealed box, the sealing ring is located between the sealed cover and the sealed box.

[0019] Further, the vacuum mechanism includes a connecting pipe and a vacuum generator. One end of the connecting pipe is connected to the sealed container and communicates with the interior of the sealed container, and the other end is connected to the vacuum generator.

[0020] Further, the lifting mechanism includes a lifting driving member and a lifting frame. The lifting driving member is arranged in the sealed container and is connected to the lifting frame. The lifting frame is used to carry the workpiece to be processed and is located in the sealed container.

[0021] With the above demolding device, the ultrasonic mechanism performs ultrasonic treatment on the inside of the sealed container, which can make the soaking of methanol more sufficient and improve the dissolution effect. At the same time, the lifting mechanism lifts the crucible and the crystal above the methanol liquid level, and then the vacuum mechanism evacuates the air, which can discharge the residual methanol between the crucible and the crystal. Then, the crucible and the crystal are immersed in methanol again, and fresh methanol can enter the crucible and the crystal, thereby further improving the dissolution effect of boron oxide and further increasing the demolding rate.

[0022] In addition, after the dissolution effect of boron oxide is improved, demolding can be facilitated. At the same time, the heating mechanism heats the methanol in the sealed container, which can accelerate the dissolution rate of boron oxide by methanol and shorten the dissolution time, thereby improving production efficiency. Description of the Drawings

[0023] The drawings are used to provide a further understanding of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation to the present application.

[0024] Figure 1 It is a schematic structural diagram of a demolding device provided by an embodiment of the present application.

[0025] Label Description:

[0026] 100, demolding device; 110, sealed container; 120, lifting mechanism; 130, vacuum mechanism; 140, accommodating box; 141, liquid discharge port; 111, sealed box; 112, sealing cover; 121, lifting driving member; 122, lifting frame. Detailed Description of the Embodiment

[0027] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present application.

[0028] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present application.

[0029] As Figure 1 shown, an embodiment of the present application provides a demolding device 100, including a sealed container 110, a lifting mechanism 120, a heating mechanism, an ultrasonic mechanism, and a vacuum mechanism 130.

[0030] The lifting mechanism 120 is at least partially disposed inside the sealed container 110. The lifting mechanism 120 is used to carry the workpiece to be processed and drive the workpiece to reciprocally lift inside the sealed container 110.

[0031] The heating mechanism is used to heat the sealed container 110, the ultrasonic mechanism is used to perform ultrasonic treatment inside the sealed container 110, and the vacuum mechanism 130 is connected to the sealed container 110 for evacuating and breaking the vacuum of the sealed container 110.

[0032] It should be noted that in this embodiment, the workpiece to be processed is a crucible and a crystal, there is boron oxide between the crucible and the crystal, and the demolding device 100 can be used for demolding the crystal.

[0033] When demolding the crystal, first fill methanol into the sealed container 110, then place the crucible and the crystal on the lifting mechanism 120. The lifting mechanism 120 drives the crucible and the crystal to descend and immerse in the methanol, and then the sealed container 110 is sealed. Next, the heating mechanism heats the sealed container 110, and at the same time, the ultrasonic mechanism performs multiple ultrasonic treatments inside the sealed container 110. After heating, the lifting mechanism 120 drives the crucible and the crystal to rise above the methanol liquid level, then the vacuum mechanism 130 evacuates the inside of the sealed container 110. After maintaining the vacuum for a period of time, the vacuum mechanism 130 breaks the vacuum of the sealed container 110. After breaking the vacuum, the lifting mechanism 120 drives the crucible and the crystal to immerse in the methanol again. Next, the heating mechanism heats the sealed container 110 again, and at the same time, the ultrasonic mechanism performs multiple ultrasonic treatments inside the sealed container 110. After heating, the lifting mechanism 120 drives the crucible and the crystal to rise above the methanol liquid level, then the vacuum mechanism 130 evacuates the inside of the sealed container 110 again. After maintaining the vacuum for a period of time, the vacuum mechanism 130 breaks the vacuum of the sealed container 110. Finally, open the sealed container 110 and take out the crucible and the crystal to perform the demolding operation.

[0034] With the above demolding device 100, the ultrasonic mechanism performs ultrasonic treatment inside the sealed container 110, which can make the soaking of methanol more sufficient and improve the dissolution effect. At the same time, the lifting mechanism 120 lifts the crucible and the crystal above the methanol liquid level, and then the vacuum mechanism 130 evacuates the air, which can discharge the residual methanol between the crucible and the crystal. Then, immerse the crucible and the crystal in the methanol again, and fresh methanol can enter the crucible and the crystal, thereby further improving the dissolution effect of boron oxide and further increasing the demolding rate.

[0035] In addition, after the dissolution effect of boron oxide is improved, demolding is facilitated. At the same time, the heating mechanism heats the methanol inside the sealed container 110, which can accelerate the dissolution rate of methanol to boron oxide and shorten the dissolution time, thereby improving production efficiency.

[0036] It can be understood that the ultrasonic mechanism performs ultrasonic treatment inside the sealed container 110, which means performing ultrasonic treatment on the crucible, the crystal bar and the methanol inside the sealed container 110.

[0037] In one embodiment, the demolding device 100 further includes a containing box 140. The sealed container 110 is disposed within the containing box 140, and the ultrasonic mechanism is disposed within the containing box 140 to perform ultrasonic treatment on the inside of the sealed container 110 within the containing box 140. Optionally, the ultrasonic mechanism is an ultrasonic generator.

[0038] In one embodiment, a heating medium is provided within the containing box 140, and the sealed container 110 is at least partially immersed in the heating medium. The heating mechanism is connected to the containing box 140 and is configured to circulate and heat the heating medium within the containing box 140, thereby heating the sealed container 110 through the heating medium. Optionally, the heating medium is water.

[0039] Further, the containing box 140 is provided with a liquid inlet and a liquid outlet that communicate with its interior. The heating mechanism includes an inlet pipe, an outlet pipe, a circulation pump, and a heater. The inlet pipe is connected between the liquid inlet and the heater, the outlet pipe is connected between the liquid outlet and the heater, and the circulation pump is disposed in the inlet pipe or the outlet pipe to enable the heating medium to circulate between the containing box 140 and the heater. During the circulation process, the heater heats the heating medium, thereby achieving the circulation heating of the heating medium. In this way, the heater can be separated from the sealed container 110, avoiding the generation of sparks within the containing box 140 or overheating of the methanol within the sealed container 110 in case of abnormal heating, and improving the safety of the demolding device 100.

[0040] In practical applications, the demolding device 100 further includes a first temperature detector and a second temperature detector. The first temperature detector is disposed within the containing box 140 and is configured to detect the temperature of the heating medium, and the second temperature detector is disposed within the sealed container 110 and is configured to detect the temperature of the methanol. In this way, the heating mechanism can heat the heating medium based on the detection results of the first temperature detector and the second temperature detector, and thereby indirectly heat the methanol within the sealed container 110.

[0041] In one embodiment, the containing box 140 is further provided with a drain port 141 that communicates with its interior. The demolding device 100 further includes a drain valve. The drain valve is disposed outside the containing box 140 and is in communication with the drain port 141 to control the opening and closing of the drain port 141, thereby draining the heating medium within the containing box 140 when the drain port 141 is opened, facilitating the replacement of the heating medium.

[0042] In one embodiment, the sealed container 110 includes a sealed box 111 and a sealed cover 112. The sealed cover 112 is detachably connected to the sealed box 111 to seal the sealed box 111. The vacuum mechanism 130 is connected to the sealed cover 112. Further, the sealed container 110 further includes a sealing ring. The sealing ring is disposed on the sealed box 111 or the sealed cover 112. When the sealed cover 112 is connected to the sealed box 111, the sealing ring is located between the sealed cover 112 and the sealed box 111 to ensure the sealing of the sealed box 111 between the sealed cover 112 and the sealed box 111. Optionally, the sealing ring is a rubber sealing ring.

[0043] In one embodiment, the vacuum mechanism 130 includes a connecting pipe and a vacuum generator. One end of the connecting pipe is connected to the sealed container 110 and is in communication with the interior of the sealed container 110, and the other end is connected to the vacuum generator, so as to evacuate or break the vacuum in the interior of the sealed container 110 under the action of the vacuum generator.

[0044] In one embodiment, the lifting mechanism 120 includes a lifting driving member 121 and a lifting frame 122. The lifting driving member 121 is disposed on the sealed container 110 and is connected to the lifting frame 122 to drive the lifting frame 122 to reciprocate up and down. The lifting frame 122 is used to carry the workpiece to be processed and is located inside the sealed container 110, so as to drive the workpiece to be processed to reciprocate up and down inside the sealed container 110. Optionally, the lifting frame 122 is a metal frame. It should be noted that the lifting driving member 121 can be selected according to the actual situation, and the lifting driving member 121 can be disposed at the bottom of the sealed box 111. At this time, the lifting driving member 121 should have certain protection performance to avoid methanol affecting the operation of the lifting driving member 121; the lifting driving member 121 can also be disposed on the sealed cover 112, as Figure 1 shown, and there is no limitation here.

[0045] For the convenience of understanding the technical solution of the present application, the working process of the demoulding device 100 in the above embodiment is described herein in conjunction with Figure 1 :

[0046] When demoulding the crystal, first fill methanol in the sealed box 111, then place the crucible and the crystal on the lifting frame 122. The lifting driving member 121 drives the lifting frame 122 to descend until the crucible and the crystal are immersed in methanol, and then the sealed box 111 is sealed through the sealed cover 112.

[0047] Next, the heating medium is heated by a heating mechanism to indirectly heat the methanol in the sealed container 110. While heating, the sealed container 110 is subjected to multiple ultrasonic treatments by an ultrasonic generator. After heating, the lifting driving member 121 drives the lifting frame 122 to drive the crucible and the crystal to rise above the methanol liquid level. Then, the sealed container 110 is evacuated by a vacuum generator. After maintaining the vacuum for a period of time, the sealed container 110 is broken vacuum by the vacuum generator.

[0048] After breaking the vacuum, the lifting driving member 121 drives the lifting frame 122 to descend until the crucible and the crystal are immersed in the methanol again. Next, the heating medium is heated again by the heating mechanism. While heating, the sealed container 110 is subjected to multiple ultrasonic treatments by an ultrasonic generator. After heating, the lifting driving member 121 drives the lifting frame 122 to drive the crucible and the crystal to rise above the methanol liquid level. Then, the sealed container 110 is evacuated again by a vacuum generator. After maintaining the vacuum for a period of time, the sealed container 110 is broken vacuum by the vacuum mechanism 130. Finally, the sealed cover 112 is removed, and the crucible and the crystal are taken out for demolding operation.

[0049] It should be noted that in the above embodiments, the heating mechanism heats the methanol in the sealed container 110 by a water bath with the heating medium, and it is necessary to ensure that the temperature of the methanol is maintained at 40~70°C, and the heating time is 50~70 min; the ultrasonic generator performs an ultrasonic treatment on the sealed container 110 every 25~35 min, and the duration of each ultrasonic treatment is 1~2 min, and the ultrasonic frequency is 5~40 KHz; after the sealed container 110 is evacuated by the vacuum generator, the vacuum degree in the sealed container 110 is 1*10 -2 ~1*10 -4 Pa.

[0050] Although the embodiments of the present application have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirits of the present application. The scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A demoulding device, characterized in that: include: Sealed container; A lifting mechanism, at least partially disposed inside the sealed container, the lifting mechanism being used to carry the workpiece to be processed and drive the workpiece to be processed to rise and fall reciprocally inside the sealed container; A heating mechanism, used for heating the sealed container; An ultrasonic mechanism, used for performing ultrasonic treatment on the sealed container; The vacuum mechanism is connected to the sealed container and is used for evacuating and breaking the vacuum of the sealed container.

2. The demoulding device according to claim 1, characterized in that: The demoulding device further comprises a containing box, the sealed container is arranged in the containing box, and the ultrasonic mechanism is arranged in the containing box.

3. The demoulding device according to claim 2, characterized in that: A heating medium is arranged in the containing box, the sealed container is at least partially immersed in the heating medium, and the heating mechanism is connected to the containing box for circulating heating the heating medium in the containing box.

4. The demoulding device according to claim 3, characterized in that: The containing box is provided with a liquid inlet and a liquid outlet which are connected to the interior of the containing box. The heating mechanism comprises a liquid inlet pipe, a liquid outlet pipe, a circulation pump and a heater. The liquid inlet pipe is connected between the liquid inlet and the heater, the liquid outlet pipe is connected between the liquid outlet and the heater, and the circulation pump is arranged on the liquid inlet pipe or the liquid outlet pipe.

5. The demoulding device according to claim 3, characterized in that: The containing box is provided with a liquid discharge port communicated with the interior thereof, and the demoulding device further comprises a liquid discharge valve, which is arranged on the outside of the containing box and communicated with the liquid discharge port.

6. The demoulding device according to claim 3, characterized in that: The demoulding device further includes a first temperature detector and a second temperature detector, wherein the first temperature detector is disposed in the containing box, and the second temperature detector is disposed in the sealed container.

7. The demoulding device according to claim 1, characterized in that: The sealed container comprises a sealed box and a sealed cover, wherein the sealed cover is detachably connected to the sealed box and is used to seal the sealed box, the lifting mechanism is arranged in the sealed box, and the vacuum mechanism is connected to the sealed cover.

8. The demoulding device according to claim 7, characterized in that: The sealed container further comprises a sealing ring, which is arranged on the sealing cover or the sealing box, and when the sealing cover is connected to the sealing box, the sealing ring is located between the sealing cover and the sealing box.

9. The demoulding device according to claim 1, characterized in that: The vacuum mechanism includes a connecting pipe and a vacuum generator. One end of the connecting pipe is connected to the sealed container and communicates with the interior of the sealed container, and the other end is connected to the vacuum generator.

10. The demoulding device according to claim 1, characterized in that: The lifting mechanism includes a lifting driving member and a lifting frame. The lifting driving member is arranged in the sealed container and connected to the lifting frame. The lifting frame is used to carry the workpiece to be processed and is located in the sealed container.

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