PBN crucible for crystal growth

Abstract

The utility model relates to the technical field of semiconductor crystal growth, and discloses a PBN crucible for crystal growth, which comprises a crucible main body, a crucible plug and a connecting piece, a seed crystal well is arranged at the lower end of the crucible main body, and the crucible plug is inserted into the seed crystal well to support seed crystals; a first through hole is formed in the side wall of the seed crystal well, a second through hole is formed in the crucible plug, and the connecting piece is connected with the first through hole and the second through hole. The first through hole is formed in the side wall of the seed crystal well, the second through hole is formed in the crucible plug, and the connecting piece is used for connecting the first through hole and the second through hole, so that the crucible plug is axially supported by the connecting piece and cannot fall off from the seed crystal well; therefore, the condition that the single crystal is dead due to inclination or non-uniform heating of the seed crystal placed in the PBN crucible is avoided, the crystal forming rate of the single crystal is ensured, and the production cost of an enterprise is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor crystal growth, in particular to a PBN crucible for crystal growth. Background Art

[0002] In the growth process of some semiconductor crystals, a PBN (pyrolytic boron nitride) crucible is required. In the actual production process, the seed crystal in the seed crystal well at the lower end of the PBN crucible needs to be blocked, so the PBN crucible is equipped with a crucible plug matching the seed crystal well.

[0003] However, the existing crucible plugs are all cylindrical and are directly inserted into the seed crystal well. During use, the crucible plug may fall off, resulting in the inclination or uneven heating of the seed crystal placed inside the PBN crucible, causing the single crystal to die, greatly reducing the crystal formation rate of the single crystal, and increasing the production cost of the enterprise. Summary of the Utility Model

[0004] To solve the above technical problems, the utility model provides a PBN crucible for crystal growth, which can avoid the falling off of the crucible plug, ensure the crystal formation rate of the crystal, and reduce the cost of the enterprise.

[0005] The technical solution adopted by the utility model to solve its technical problems is as follows:

[0006] A PBN crucible for crystal growth, comprising a crucible body, a crucible plug and a connecting piece. A seed crystal well is provided at the lower end of the crucible body, and the crucible plug is inserted into the seed crystal well to support the seed crystal;

[0007] A first through hole is provided on the side wall of the seed crystal well, a second through hole is provided on the crucible plug, and the connecting piece connects the first through hole and the second through hole.

[0008] Preferably, the two first through holes are oppositely arranged, and the center lines of the two first through holes coincide with the center line of the second through hole.

[0009] Preferably, the connecting piece is a bolt or a screw, and the bolt or the screw passes through the first through hole and the second through hole and is connected with a nut.

[0010] Preferably, the length of the seed crystal well is L 1 , and the distance between the center of the first through hole and the end face of the free end of the seed crystal well is S 1 , S 1 =(0.2 - 0.3)L 1 .

[0011] Preferably, one end of the crucible plug connected to the seed crystal well is a connection end, and the distance between the center of the second through hole and the end face of the connection end is S 2, the length of the crucible plug is L 2 , S 2 =(0.2 - 0.3)L 2 .

[0012] Preferably, the diameter of the second through hole is d, and the outer diameter of the crucible plug is D, where d=(0.45 - 0.55)D.

[0013] Preferably, the diameter of the first through hole is the same as the diameter of the second through hole.

[0014] Preferably, the crucible body includes a cylindrical growth part and a conical connection part, and the other end of the connection part is connected to the seed crystal well.

[0015] Compared with the prior art, the beneficial effects of a PBN crucible for crystal growth according to an embodiment of the present invention are as follows: By providing a first through hole on the side wall of the seed crystal well, a second through hole on the crucible plug, and using a connecting member to connect the first through hole and the second through hole, the crucible plug is axially supported by the connecting member, and the situation of falling out of the seed crystal well will not occur, thereby avoiding the situation where the seed crystal placed inside the PBN crucible is tilted or unevenly heated, resulting in the growth of a single crystal being blocked, ensuring the crystal formation rate of the single crystal, and reducing the production cost of the enterprise. Description of the Drawings

[0016] Figure 1 is a schematic structural diagram of a PBN crucible for crystal growth of the present invention.

[0017] Figure 2 is a schematic structural diagram of the crucible plug of the present invention.

[0018] Figure 3 is a schematic structural diagram of the crucible body of the present invention.

[0019] Among them: 1 - crucible body, 11 - growth part, 12 - connection part, 2 - crucible plug, 21 - second through hole, 3 - connecting member, 4 - seed crystal well, 41 - first through hole, 5 - nut. Detailed Embodiments

[0020] The following further describes in detail the specific embodiments of the present invention with reference to the drawings and embodiments. The following embodiments are used to illustrate the present invention but are not used to limit the scope of the present invention.

[0021] As Figure 1 shown, a PBN crucible for crystal growth according to a preferred embodiment of the present invention includes a crucible body 1, a crucible plug 2, and a connecting member 3. A seed crystal well 4 is provided at the lower end of the crucible body 1, and the crucible plug 2 is inserted into the seed crystal well 4 to support the seed crystal;

[0022] The side wall of the seed crystal well 4 is provided with a first through hole 41, the crucible plug 2 is provided with a second through hole 21, and the connecting member 3 connects the first through hole 41 and the second through hole 21.

[0023] For the PBN crucible for crystal growth based on the above features, by providing a first through hole 41 on the side wall of the seed crystal well 4, a second through hole 21 on the crucible plug 2, and simultaneously using a connecting member 3 to connect the first through hole 41 and the second through hole 21, the crucible plug 2 is axially supported by the connecting member 3 and will not fall out of the seed crystal well 4, thus avoiding the situation where the seed crystal placed inside the PBN crucible is inclined or unevenly heated, resulting in the growth of the single crystal being blocked, ensuring the crystal formation rate of the single crystal, and reducing the production cost of the enterprise.

[0024] In this embodiment, the first through holes 41 are two oppositely arranged, and the center lines of the two first through holes 41 coincide with the center line of the second through hole 21. Thus, a stable connection between the crucible plug 2 and the seed crystal well 4 can be achieved by using one connecting member 3. The connecting member 3 is a bolt or a screw, and the bolt or screw passes through the first through hole 41 and the second through hole 21 and is connected to a nut 5. Through the threaded connection of the nut 5, the connection is simple and convenient, and has good stability.

[0025] As for whether to use a screw or a bolt, it needs to be determined according to the diameters of the first through hole 41 and the second through hole 21. When the diameters of the first through hole 41 and the second through hole 21 are relatively large, a bolt can be used; when the diameters of the first through hole 41 and the second through hole 21 are relatively small, a screw can be used. Preferably, the diameters of the first through hole 41 and the second through hole 21 are the same to ensure the overall stability of the connection. Taking the second through hole 21 as an example, the specific diameter of the through hole is related to the outer diameter of the crucible plug 2.

[0026] As Figure 2 shown, if the diameter of the second through hole 21 is d and the outer diameter of the crucible plug 2 is D, then d = (0.45 - 0.55)D, such as 0.46D, 0.47D, 0.48D, 0.49D, 0.5D, 0.51D, 0.52D, 0.53D, 0.54D, etc., or any value or any range between any two of the above values. Such a setting can not only ensure the strength of the crucible plug 2 itself, but also ensure the connection strength between the connecting member 3 and the crucible plug 2.

[0027] In this embodiment, one end of the crucible plug 2 connected to the seed crystal well 4 is a connection end, and the distance between the center of the second through hole and the end face of the connection end is S 2 , and the length of the crucible plug 2 is L 2 , S 2 = (0.2 - 0.3)L2 , such as 0.21L 2 , 0.22L 2 , 0.23L 2 , 0.24L 2 , 0.25L 2 , 0.26L 2 , 0.27L 2 , 0.28L 2 , 0.29L 2 , or any value or any range between any two of the above values.

[0028] Meanwhile, please refer to the appendix Figure 3 , the length of the seed crystal well 4 is L 1 , the distance between the center of the first through hole 41 and the end face of the free end of the seed crystal well 4 is S 1 , S 1 = (0.2 - 0.3)L 1 , such as 0.21L 1 , 0.22L 1 , 0.23L 1 , 0.24L 1 , 0.25L 1 , 0.26L 1 , 0.27L 1 , 0.28L 1 , 0.29L 1 , or any value or any range between any two of the above values.

[0029] Under the condition that the above S 1 and S 2 are satisfied simultaneously, it can be ensured that part of the crucible plug 2 is exposed outside the seed crystal well 4, thus facilitating the operation of the crucible plug 2.

[0030] In this embodiment, the crucible body 1 includes a cylindrical growth part 11 and a conical connecting part 12, and the other end of the connecting part 12 is connected to the seed crystal well 4. Crystals grow in the growth part 11, and the connecting part 12 slows down the rapid formation of the solid-liquid interface, increases the solid-liquid surface tension, forms a convex surface, and reduces the formation of twins.

[0031] The above are only the preferred embodiments of the present invention. It should be noted that for those of ordinary skill in the art, without departing from the technical principle of the present invention, several improvements and replacements can be made, and these improvements and replacements should also be regarded as the protection scope of the present invention.

Claims

1. A PBN crucible for crystal growth, characterized in that: It comprises a crucible body, a crucible plug and a connecting piece, wherein a seed crystal well is provided at the lower end of the crucible body, and the crucible plug is plugged into the seed crystal well to support the seed crystal; A first through hole is disposed on the side wall of the seed crystal well, a second through hole is disposed on the crucible plug, and the connecting member connects the first through hole and the second through hole.

2. The PBN crucible for crystal growth according to claim 1, characterized in that: There are two first through holes arranged opposite to each other, and the center lines of the two first through holes coincide with the center line of the second through hole.

3. The PBN crucible for crystal growth according to claim 1, characterized in that: The connecting member is a bolt or a screw, and the bolt or the screw passes through the first through hole and the second through hole and is connected to a nut.

4. The PBN crucible for crystal growth according to claim 1, characterized in that: The length of the seed well is L1, and the distance between the center of the first through hole and the end surface of the free end of the seed well is S1, where S1 = (0.2-0.3) L1.

5. The PBN crucible for crystal growth according to any one of claims 1 to 4, characterized in that: One end of the crucible plug connected to the seed crystal well is a connecting end, the distance between the center of the second through hole and the end surface of the connecting end is S2, the length of the crucible plug is L2, S2=(0.2-0.3)L2.

6. The PBN crucible for crystal growth according to any one of claims 1 to 4, characterized in that: The diameter of the second through hole is d, the outer diameter of the crucible plug is D, and d=(0.45-0.55)D.

7. The PBN crucible for crystal growth according to any one of claims 1 to 4, characterized in that: The diameter of the first through hole is the same as the diameter of the second through hole.

8. The PBN crucible for crystal growth according to any one of claims 1 to 4, characterized in that: The crucible body includes a cylindrical growth portion and a conical connection portion, and the other end of the connection portion is connected to the seed crystal well.

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