Multi-station vacuum system

Abstract

The utility model relates to the technical field of ultrahigh vacuum systems, and particularly discloses a multi-station vacuum system which comprises a vacuum device, a plurality of connecting valves and a plurality of Dewar flask. A plurality of connecting ports are formed in the vacuum equipment; one end of the connecting valve is connected with the connecting port, and the other end of the connecting valve is connected with the Dewar; the connecting valve is provided with an operating handle for controlling the connecting valve to be opened and closed; and the plurality of connecting valves, the plurality of Dewar and the plurality of connecting ports are connected in a one-to-one correspondence manner. According to the scheme, the vacuum equipment and the Dewar are connected through the connecting valves capable of being controlled to be opened and closed, the connecting stability can be improved, when part of Dewar breaks down, after the corresponding connecting valves are closed through the operating handles, the broken-down Dewar is detached, operation of the vacuum equipment is not affected, and the working efficiency is improved. The problems that an existing connection mode of the vacuum system and the Dewar is poor in stability, and the system is difficult to be connected with a plurality of Dewar at the same time are effectively solved.

Description

Technical Field

[0001] This application relates to the technical field of ultra-high vacuum systems, and particularly to a multi-station vacuum system. Background Art

[0002] An ultra-high vacuum system is a device that uses the suction force of a vacuum pump to extract the gas inside a Dewar to achieve ultra-high vacuum.

[0003] In the existing ultra-high vacuum systems, the Dewar is generally directly connected to the system. This connection method has poor stability and makes it difficult for the system to connect multiple Dewars simultaneously. Utility Model Content

[0004] In view of this, the purpose of this application is to provide a multi-station vacuum system, which is used to solve the problems that the connection method between the existing vacuum system and the Dewar has poor stability and it is difficult for the system to connect multiple Dewars simultaneously.

[0005] To achieve the above technical purpose, this application provides a multi-station vacuum system, including: a vacuum device, a plurality of connection valves and a plurality of Dewars;

[0006] A plurality of connection ports are provided on the vacuum device;

[0007] One end of the connection valve is connected to the connection port, and the other end is connected to the Dewar;

[0008] An operation handle for controlling the opening and closing of the connection valve is provided on the connection valve;

[0009] A plurality of the connection valves, a plurality of the Dewars and a plurality of the connection ports are connected in one-to-one correspondence.

[0010] Further, a plurality of the connection ports are evenly distributed in a circumferential manner on the vacuum device.

[0011] Further, a standard joint is further included;

[0012] The other end of the connection valve is connected to the Dewar through the standard joint.

[0013] Further, a heating cover and an end cover are further included;

[0014] The heating cover and the end cover enclose a heating cavity;

[0015] A plurality of the Dewars are arranged in the heating cavity.

[0016] Further, the connection valve includes a first port and a second port;

[0017] The first port is located on the side of the connection valve and is connected to the connection port;

[0018] The second port is located above the connection valve and is connected to the Dewar.

[0019] Further, a through hole for the second port to snap into is provided on the end cover.

[0020] Further, the first port is hermetically connected to the connection port through a flange structure.

[0021] Further, the heating cover includes: an inner shell and an outer shell;

[0022] The outer shell is sleeved on the outer periphery of the inner shell;

[0023] A heat insulation cotton is provided between the outer shell and the inner shell.

[0024] Further, a blower communicating with the heating chamber is provided on the heating cover.

[0025] Further, evenly spaced wire grooves are provided on the inner peripheral wall surface of the heating cover;

[0026] The wire grooves are used for armored heating wires.

[0027] As can be seen from the above technical solutions, the present application provides a multi-station vacuum system, including: a vacuum device, a plurality of connection valves and a plurality of Dewars; a plurality of connection ports are provided on the vacuum device; one end of the connection valve is connected to the connection port, and the other end is connected to the Dewar; an operation handle for controlling the opening and closing of the connection valve is provided on the connection valve; the plurality of connection valves, the plurality of Dewars and the plurality of connection ports are connected in one-to-one correspondence.

[0028] In this solution, by connecting the vacuum device and the Dewar through a connection valve that can be controlled to open and close, the connection stability can be improved. And when some Dewars fail, the corresponding connection valve can be closed through the operation handle, and then the faulty Dewar can be removed without affecting the operation of the vacuum device, effectively solving the problems that the connection method between the existing vacuum system and the Dewar has poor stability and it is difficult for the system to connect multiple Dewars at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0030] Figure 1 It is an enlarged view of the connection position of the connection valve of a multi-station vacuum system provided by an embodiment of the present application;

[0031] Figure 2 A perspective view of a multi-station vacuum system provided by an embodiment of the present application;

[0032] Figure 3 A perspective view of a multi-station vacuum system with an end cover provided by an embodiment of the present application;

[0033] Figure 4 A perspective view of a multi-station vacuum system with a heating cover provided by an embodiment of the present application;

[0034] Figure 5 An exploded view of the heating cover in a multi-station vacuum system provided by an embodiment of the present application. Detailed implementation manners

[0035] Next, the technical solutions of the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. Based on the embodiments in this specification of the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the scope of protection claimed in the present application.

[0036] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the embodiments of the present application. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0037] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0038] Please refer to Figure 1 And Figure 2, A multi-station vacuum system provided in an embodiment of the present application includes: a vacuum device 10, a plurality of connection valves 20, and a plurality of dewars 30; a plurality of connection ports 11 are provided on the vacuum device 10; one end of the connection valve 20 is connected to the connection port 11, and the other end is connected to the dewar 30; an operation handle 23 for controlling the opening and closing of the connection valve 20 is provided on the connection valve 20; the plurality of connection valves 20, the plurality of dewars 30, and the plurality of connection ports 11 are connected in one-to-one correspondence.

[0039] When a part of the dewar 30 fails, the connection valve 20 connected to the faulty dewar 30 can be closed through the operation handle 23, so that this part of the faulty dewar 30 can be disassembled and repaired without affecting the continued operation of the vacuum device 10, enabling the vacuum device 10 to be connected to a plurality of dewars 30 simultaneously without worrying about operation interruption.

[0040] Through the multi-station vacuum system provided in this embodiment, the vacuum degree stability in the vacuum device 10 can be maintained, thereby ensuring the service life of the system. At the same time, a plurality of connection ports 11 can be connected to a plurality of dewars 30 with different exhaust cycles through the connection valves 20, improving the convenience of actual production.

[0041] In this embodiment, the connection valve 20 can be a three-way valve structure, its first end is hermetically connected to the connection port 11, the second end is hermetically connected to the dewar 30, and the third end is provided with the operation handle 23.

[0042] As an implementation manner, the operation handle 23 can be sleeved on the third end of the connection valve 20 in a rotatable manner, and the opening and closing of the connection valve 20 are controlled by screwing; correspondingly, two butterfly-shaped operation handles 22 extend from the operation handle 23, facilitating the user to screw the operation handle 23 through the operation handles 22.

[0043] In one embodiment, the plurality of connection ports 11 are evenly distributed in a circle on the vacuum device 10.

[0044] Specifically, the plurality of connection ports 11 can be located at the same horizontal height and are evenly distributed in a circle, which helps to achieve the same vacuum pumping effect of the vacuum device 10 on the plurality of dewars 30.

[0045] In one embodiment, the other end of the connection valve 20 is connected to the dewar 30 through a standard joint 60, which is convenient for component replacement during maintenance.

[0046] In a more specific embodiment, please refer to Figure 3 And Figure 4 , The multi-station vacuum system provided in this embodiment further includes: a heating cover 40 and an end cover 50; the heating cover 40 and the end cover 50 enclose a heating chamber; a plurality of dewars 30 are arranged in the heating chamber.

[0047] The heating chamber formed by the heating cover 40 and the end cap 50 can heat the Dewar 30, making the gas in the Dewar 30 active and easier to be pumped out. Among them, heating wires are arranged in the heating cover 40 at evenly spaced intervals from bottom to top to ensure uniform heating effect.

[0048] It should be noted that a blower 41 communicating with the heating chamber can be arranged on the heating cover 40; the fan blade 42 of the blower is rotatably arranged in the heating chamber, and the blower 41 can exhaust and cool the inside of the heating cover 40, which helps to control the internal temperature of the heating chamber.

[0049] In one embodiment, please refer to Figure 1 , the connection valve 20 includes a first port 21 and a second port 22; the first port 21 is located on the side of the connection valve 20 and is connected to the connection port 11; the second port 22 is located above the connection valve 20 and is connected to the Dewar 30. The first port 21 can be hermetically connected to the connection port 11 through a flange structure.

[0050] Specifically, in this embodiment, the orientations of the first port 21 and the second port 22 are at 90°, so that the Dewar 30 arranged on the side of the vacuum device 10 can be located above the vacuum device 10, which is convenient for the end cap 50 and the heating cover 40 to be connected.

[0051] In one embodiment, the end cap 50 is provided with a through hole 51 for the second port 22 to be inserted into.

[0052] Specifically, corresponding to the plurality of Dewars 30 evenly distributed in a circumferential direction and located at the same horizontal height, the through holes 51 on the end cap 50 can facilitate the connection of the end cap 50 to the connection valve 20; in practical applications, the end cap 50 can be directly placed above the plurality of connection valves 20, and the plurality of second ports 22 can be inserted into the plurality of through holes 51 one by one in correspondence.

[0053] In one embodiment, please refer to Figure 5 , the heating cover 40 includes: an inner shell 401 and an outer shell 402; the outer shell 402 is sleeved on the outer periphery of the inner shell 401; a heat insulation cotton is arranged between the outer shell 402 and the inner shell 401.

[0054] By arranging the heat insulation cotton, the heat preservation effect of the heating cover 40 can be enhanced, ensuring that the external temperature of the heating cover 40 is less than 50°C.

[0055] The heating cover 40 can be provided with a wire threading post 43 for wiring.

[0056] Furthermore, on the inner peripheral wall surface of the heating cover 40, that is, on the inner wall surface of the inner shell 401, wire grooves 403 are arranged at evenly spaced intervals; the wire grooves 403 are used for armored heating wires.

[0057] Among them, the wire groove 403 can surround the inner circumference of the heating cover 40 and be evenly spaced up and down, so that the heating wire can uniformly heat the inside of the heating cover 40.

[0058] In practical applications, the heating cover 40 and the end cover 50 can both be sleeved on the single shaft 70; the single shaft 70 is slidably connected to the end cover 50, and the single shaft 70 is fixedly connected to the heating cover 40, so that the lifting and sliding of the single shaft 70 can drive the heating cover 40 away from the end cover 50 to open the heating cavity or approach the end cover 50 to close the heating cavity.

[0059] The above are the preferred embodiments of the present application and are not used to limit the present invention. Although the present application has been described in detail with reference to the examples, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing examples, or perform equivalent replacements on some of the technical features. However, any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A multi-station vacuum system, characterized in that: include: A vacuum device (10), a plurality of connecting valves (20) and a plurality of dewars (30); The vacuum device (10) is provided with a plurality of connection ports (11); One end of the connecting valve (20) is connected to the connecting port (11), and the other end is connected to the Dewar (30); The connecting valve (20) is provided with an operating handle (23) for controlling the opening and closing of the connecting valve (20); The plurality of connection valves (20), the plurality of dewars (30) and the plurality of connection ports (11) are connected in a one-to-one correspondence.

2. The multi-station vacuum system according to claim 1, characterized in that: The plurality of connection ports (11) are evenly distributed around the circumference of the vacuum device (10).

3. The multi-station vacuum system according to claim 1, characterized in that: Also included is a standard connector (60); The other end of the connecting valve (20) is connected to the Dewar (30) via the standard connector (60).

4. The multi-station vacuum system according to claim 2, characterized in that: Also includes: A heating hood (40) and an end cover (50); The heating cover (40) and the end cover (50) form a heating chamber; A plurality of Dewars (30) are arranged in the heating chamber.

5. The multi-station vacuum system according to claim 4, characterized in that: The connecting valve (20) comprises a first port (21) and a second port (22); The first port (21) is located at a side of the connecting valve (20) and is connected to the connecting port (11); The second port (22) is located above the connecting valve (20) and is connected to the Dewar (30).

6. The multi-station vacuum system according to claim 5, characterized in that: The end cover (50) is provided with a through hole (51) for the second port (22) to be inserted into.

7. The multi-station vacuum system according to claim 5, characterized in that: The first port (21) is sealedly connected to the connecting port (11) via a flange structure.

8. The multi-station vacuum system according to claim 4, characterized in that: The heating cover (40) comprises: an inner shell (401) and an outer shell (402); The outer shell (402) is sleeved on the outer circumference of the inner shell (401); Heat insulation cotton is arranged between the outer shell (402) and the inner shell (401).

9. The multi-station vacuum system according to claim 4, characterized in that: The heating cover (40) is provided with a blower (41) connected to the heating chamber.

10. The multi-station vacuum system according to claim 4, characterized in that: The inner peripheral wall surface of the heating cover (40) is provided with wire grooves (403) distributed at even intervals; The wire slot (403) is used for armored heating wires.

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