Adjusting mechanism and wafer detection device

Abstract

The utility model relates to an adjusting mechanism and a wafer detection device. The adjusting mechanism comprises a mounting seat, a bearing plate, a mounting assembly and a horizontal adjusting assembly, one end of the bearing plate is rotatably connected with the mounting seat, and the bearing plate is used for bearing a needle card; the mounting assembly is used for connecting the mounting seat and the bearing plate; the horizontal adjusting assembly and the mounting assembly are arranged in a spaced mode, and the horizontal adjusting assembly is used for adjusting the relative position of the bearing plate and the mounting base so that the bearing plate can be located at the horizontal position; the number of the horizontal adjusting assemblies is three, and the three horizontal adjusting assemblies and the mounting assembly are arranged around the outer periphery of the bearing plate at intervals. The adjusting mechanism can enable the bearing plate and the needle clamp to be in the horizontal position.

Description

Technical Field

[0001] The present application relates to the field of wafer detection technology, and in particular to an adjustment mechanism and a wafer detection device. Background Art

[0002] In the field of wafer inspection technology, the test signal of the tester is transmitted to the sample to be inspected through the probe card, and the probe card further transmits the response signal of the sample to be inspected back to the tester to detect the performance of the sample to be inspected. When the probe card contacts the sample to be inspected, the horizontality of the probe card is very important. If the probe card is tilted, the probe on the probe card may not contact the sample to be inspected well, thus affecting the accuracy of the test. Utility Model Content

[0003] In view of this, the present application provides an adjustment mechanism and a wafer detection device, wherein the adjustment mechanism can place the carrier plate and the needle clamp in a horizontal position.

[0004] The present application provides an adjustment mechanism, which includes: a mounting seat, a supporting plate, a mounting assembly and a horizontal adjustment assembly, wherein one end of the supporting plate can be rotatably connected to the mounting seat, and the supporting plate is used to support a needle card; the mounting assembly is used to connect the mounting seat and the supporting plate; the horizontal adjustment assembly is spaced apart from the mounting assembly, and is used to adjust the relative position of the supporting plate and the mounting seat so that the supporting plate is in a horizontal position; wherein the number of the horizontal adjustment assemblies is three, and the three horizontal adjustment assemblies and the mounting assemblies are spaced apart around the outer periphery of the supporting plate.

[0005] Further, the horizontal adjustment component includes a first adjustment subassembly, which includes a driving member, a transmission member and a supporting member. The driving member is installed on the mounting seat and the power output shaft of the driving member is connected to the transmission member for driving the transmission member to rotate. The supporting member is sleeved on an end of the transmission member away from the driving member and the supporting member is threadedly connected to the transmission member; the end of the supporting member away from the transmission member supports the supporting plate; when the driving member drives the transmission member to rotate, the supporting member moves relative to the transmission member toward or away from the driving member, thereby pushing the supporting plate to move toward or away from the mounting seat.

[0006] Furthermore, the supporting plate has a first through hole; the horizontal adjustment assembly also includes a second adjustment subassembly, the second adjustment subassembly includes a first adjustment cylinder, a first clamping piece and a first positioning piece; the first adjustment cylinder can be rotatably penetrated in the first through hole, the first clamping piece is sleeved on the first adjustment cylinder and is located on the side of the supporting plate away from the mounting seat, the first positioning piece is arranged on the side of the supporting plate facing the mounting seat, the first positioning piece is sleeved on the outer periphery of the first adjustment cylinder and is threadedly connected to the first adjustment cylinder; when the first adjustment cylinder rotates relative to the first positioning piece, the first adjustment cylinder moves relative to the supporting plate toward or away from the mounting seat, thereby driving the supporting plate to move toward or away from the mounting seat.

[0007] Furthermore, the second adjusting subassembly further comprises a first locking member, and the first locking member is sequentially passed through the first adjusting cylinder and the abutting member, so that the supporting plate is detachably connected to the mounting seat.

[0008] Furthermore, the first adjusting subassembly also includes a first mounting member, which is arranged on the mounting seat and located at the end of the supporting member away from the driving member; the supporting member includes a connected sleeve portion and a supporting portion, the sleeve portion is sleeved on the outer periphery of the transmission member, the supporting portion is passed through the first mounting member, and the end of the supporting portion away from the sleeve portion abuts against the first adjusting cylinder.

[0009] Further, the first mounting member has a mounting through hole and a guide groove, the guide groove is located on the inner wall of the mounting through hole and connected to the mounting through hole, and the mounting through hole and the guide groove both extend along a preset direction; the supporting portion includes a supporting sub-portion and a guiding sub-portion, the guiding sub-portion is arranged on the outer periphery of the supporting sub-portion, and the guiding sub-portion and the supporting sub-portion both extend along a preset direction, the supporting sub-portion is located in the mounting through hole, and the guiding sub-portion is located in the guide groove, and the first mounting member cooperates with the supporting portion to guide the sleeve portion to move along the preset direction toward or away from the driving member.

[0010] Furthermore, the first adjusting subassembly also includes a second mounting member, which is disposed on the mounting seat and is closer to the driving member than the first mounting member; the second mounting member is used to mount the transmission member.

[0011] Further, the mounting assembly includes a second positioning member, a second adjusting cylinder, a second clamping member, a bottom member, and a second locking member. The carrier plate has a second through hole, and the second through hole is spaced from the first through hole. The second adjusting cylinder is rotatably disposed through the second through hole. The second clamping member is sleeved on the second adjusting cylinder and located on the side of the carrier plate away from the mounting seat. The second positioning member is disposed on the side of the carrier plate facing the mounting seat. The second positioning member is sleeved on the outer periphery of the second adjusting cylinder and is threadedly connected to the second adjusting cylinder. The bottom member is disposed on the side of the mounting seat facing the carrier plate and abuts against the second adjusting cylinder. When the second adjusting cylinder rotates relative to the second positioning member, the second adjusting cylinder moves relative to the carrier plate in a direction approaching or departing from the mounting seat, thereby driving the carrier plate to move in a direction away from or approaching the mounting seat. The second locking member sequentially passes through the second adjusting cylinder and the bottom member to detachably connect the carrier plate and the mounting seat.

[0012] The present application provides a wafer inspection device, which includes: a probe card, an adjusting mechanism provided by the present application, and a sample stage. The carrier plate of the adjusting mechanism is used to carry the probe card. The mounting seat and the carrier plate enclose a chamber, and the tip of the probe card faces the chamber. The sample stage is disposed in the chamber and is used to carry a sample to be inspected.

[0013] Further, the horizontal adjustment assembly of the adjusting mechanism includes a first adjustment sub-assembly. The first adjustment sub-assembly includes a driving member, a transmission member, and an abutting member. The driving member, the transmission member, and the abutting member cooperate to adjust the relative positions of the carrier plate and the mounting seat. The wafer inspection device further includes a camera and a controller. The controller is electrically connected to the camera and the driving member respectively. The camera is disposed in the chamber and is slidably connected to the mounting seat. The camera is used to obtain image information of the probe card under the control of the controller to obtain the position information of the probe card. The controller is used to control the driving member to rotate according to the position information to adjust the relative positions of the carrier plate and the mounting seat.

[0014] In the present application, the horizontal adjustment assembly and the mounting assembly are arranged at intervals around the outer peripheral edge of the carrier plate. When the carrier plate is closed relative to the mounting base, the mounting assembly is used to connect the mounting base and the carrier plate to fix the relative positions of the mounting base and the carrier plate. Further, the horizontal adjustment assembly further adjusts the relative positions of the mounting base and the carrier plate from the outer peripheral edge of the carrier plate based on the relative positions of the mounting assembly, the mounting base, and the carrier plate, so that the carrier plate and the needle card are in a horizontal position. When the carrier plate is used in a wafer inspection device and is used to carry the needle card, the tips of the needle card can be in flush contact with the side of the sample to be inspected facing the needle card, so that the contact between the needle card and the sample to be inspected is good, improving the accuracy of inspecting the sample to be inspected. In addition, when the carrier plate is in a horizontal position, the needle card can be in a horizontal position, which can avoid bending and damage of the needle card due to uneven force, or damage to the sample to be inspected caused by some tips on the needle card directly piercing the sample to be inspected, extending the service life of the needle card and reducing the cost of repairing or replacing the needle card. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0016] Figure 1 Structural schematic diagram of a wafer inspection device according to an embodiment of the present application;

[0017] Figure 2 Circuit block diagram of a wafer inspection device according to an embodiment of the present application;

[0018] Figure 3 Circuit block diagram of a wafer inspection device according to another embodiment of the present application;

[0019] Figure 4 Structural schematic diagram of an adjustment mechanism according to the first embodiment of the present application;

[0020] Figure 5 Structural schematic diagram of an adjustment mechanism according to the second embodiment of the present application;

[0021] Figure 6 Top view structural schematic diagram of an adjustment mechanism according to an embodiment of the present application;

[0022] Figure 7 is Figure 6 Cross-sectional structural schematic diagram in the A-A direction in the embodiment;

[0023] Figure 8 is Figure 7 an enlarged view of the dashed box B in

[0024] Figure 9 a schematic structural view of a horizontal adjustment assembly according to an embodiment of the present application;

[0025] Figure 10 is Figure 7 an enlarged view of the dashed box C in

[0026] Figure 11 an exploded structural view of a horizontal adjustment assembly according to an embodiment of the present application;

[0027] Figure 12 a schematic structural view of a first mounting member according to an embodiment of the present application;

[0028] Figure 13 a schematic structural view of a mounting assembly according to an embodiment of the present application;

[0029] Figure 14 is Figure 7 an enlarged view of the dashed box D in

[0030] Explanation of reference numerals:

[0031] 100 - adjustment mechanism, 110 - mounting base, 111 - chamber, 120 - carrier plate, 121 - first through hole, 122 - second through hole, 130 - mounting assembly, 131 - second positioning member, 132 - second adjustment cylinder, 133 - second clamping member, 134 - bottom member, 135 - second locking member, 140 - horizontal adjustment assembly, 150 - first adjustment sub - assembly, 151 - driving member, 152 - transmission member, 153 - abutting member, 1531 - sleeved portion, 1532 - abutting portion, 1533 - abutting sub - portion, 1534 - guiding sub - portion, 1535 - second through hole, 154 - first mounting member, 1541 - mounting through hole, 1542 - guiding groove, 155 - second mounting member, 160 - second adjustment sub - assembly, 161 - first adjustment cylinder, 1611 - first through hole, 1612 - first through sub - hole, 1613 - second through sub - hole, 162 - first clamping member, 163 - first positioning member, 164 - first locking member, 170 - inspection machine, 200 - wafer inspection device, 210 - needle card, 220 - sample stage, 230 - camera, 240 - controller, 300 - sample to be inspected. Detailed implementation manners

[0032] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts shall fall within the protection scope of the present application.

[0033] The terms "first", "second", etc. in the specification and claims of the present application and the above-mentioned accompanying drawings are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "comprising" and "having" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally further includes steps or units not listed, or optionally further includes other steps or units inherent to these processes, methods, products or devices.

[0034] Referring to "embodiment" or "embodiment" herein means that a specific feature, structure or characteristic described in connection with the embodiment or embodiment may be included in at least one embodiment of the present application. The phrase appears in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art will explicitly and implicitly understand that the embodiments described herein may be combined with other embodiments.

[0035] In the field of wafer detection technology, the test signal of the tester is transmitted to the sample to be detected through the probe card, and the probe card further transmits the response signal of the sample to be detected back to the tester to detect the performance of the sample to be detected. When the probe card is in contact with the sample to be detected, the levelness of the probe card is very important. If the probe card is tilted, it may cause poor contact between the probes on the probe card and the sample to be detected, thus affecting the accuracy of the test. In addition, if the probe card is tilted, the probes on the probe card may also be damaged due to uneven force during the test, increasing the cost of repairing or replacing the probe card, and also increasing the risk of some probes on the probe card piercing the sample to be detected.

[0036] Please refer to Figure 1 and Figure 2 , the present application provides a wafer detection device 200, and the wafer detection device 200 includes: a probe card 210, an adjustment mechanism 100 provided by the present application, and a sample stage 220. The carrier plate 120 of the adjustment mechanism 100 is used to carry the probe card 210. The mounting seat 110 and the carrier plate 120 enclose a chamber 111, and the tips of the probes of the probe card 210 face the chamber 111; the sample stage 220 is disposed in the chamber 111, and the sample stage 220 is used to carry the sample 300 to be detected.

[0037] Understandably, along the arrangement direction of the carrier plate 120 and the mounting base 110, the needle card 210 and the sample stage 220 are arranged in sequence.

[0038] In this embodiment, the mounting base 110 and the carrier plate 120 enclose a chamber 111, and the carrier plate 120 is rotatably connected to the mounting base 110, so that the carrier plate 120 can be opened or closed relative to the mounting base 110. When the carrier plate 120 is opened relative to the mounting base 110, it is convenient for an operator to place a sample 300 to be detected into the chamber 111, so as to place the sample 300 to be detected on the sample stage 220. When the carrier plate 120 is closed relative to the mounting base 110, the mounting component 130 and the horizontal adjustment component 140 in the adjustment mechanism 100 cooperate to adjust the carrier plate 120 to a horizontal position. Further, when the carrier plate 120 is used to carry the needle card 210, the needle card 210 can be adjusted to a horizontal state, so that the tips of the needles of the needle card 210 can be in contact with the side of the sample 300 to be detected facing the needle card 210 in a flush manner, so that the contact between the needle card 210 and the sample 300 to be detected is good, improving the accuracy of the wafer detection device 200 for detecting the sample 300 to be detected. In addition, it can also prevent the needle card 210 from being bent and damaged due to uneven force, or prevent some of the needle tips on the needle card 210 from directly piercing the sample 300 to be detected and damaging the sample 300 to be detected, extending the service life of the needle card 210, reducing the cost of repairing or replacing the needle card 210, and also improving the safety performance of the wafer detection device 200 for detecting the sample 300 to be detected.

[0039] Understandably, Figure 1 The embodiment only shows a part of the structure of the mounting base 110.

[0040] Optionally, the wafer detection device 200 further includes a detector 170, and the detector 170 is electrically connected to the needle card 210. When the needle card 210 makes physical contact with the sample 300 to be detected, the detector 170 can obtain the detection information of the sample 300 to be detected.

[0041] Optionally, the wafer detection device 200 performs surface defect testing and electrical property testing on the sample 300 to be detected, etc.

[0042] Please refer to Figure 3, the horizontal adjustment component 140 of the adjustment mechanism 100 includes a first adjustment sub-component 150, and the first adjustment sub-component 150 includes a driving member 151, a transmission member 152 and a resisting member 153. The driving member 151, the transmission member 152 and the resisting member 153 cooperate to adjust the relative positions of the carrier plate 120 and the mounting base 110; in some embodiments, the wafer detection device 200 further includes a camera 230 and a controller 240. The controller 240 is electrically connected to the camera 230 and the driving member 151 respectively; the camera 230 is disposed in the chamber 111 and is slidably connected to the mounting base 110. The camera 230 is configured to obtain image information of the pin card 210 under the control of the controller 240 to obtain the position information of the pin card 210; the controller 240 is configured to control the driving member 151 to rotate according to the position information to adjust the relative positions of the carrier plate 120 and the mounting base 110.

[0043] In this embodiment, the camera 230 is disposed in the chamber 111 and is slidably connected to the mounting base 110, and can obtain image information of the pin card 210 under the control of the controller 240 to obtain the position information of the pin card 210; specifically, the camera 230 is slidably connected to the mounting base 110 to scan the periphery of the pin card 210 and capture the image information of the pin card 210. Along the arrangement direction of the pin card 210 and the camera 230, if the pin card 210 is placed obliquely, the distances between different positions on the pin card 210 and the camera 230 are different, which will result in different depths of field of different positions of the pin card 210 in the image information obtained by the camera 230, so that the position information of the pin card 210 can be obtained, and then the position information of the carrier plate 120 can be obtained. The controller 240 can process the position information obtained by the camera 230 to control the driving member 151 to rotate to adjust the relative positions of the carrier plate 120 and the mounting base 110 so that the carrier plate 120 and the pin card 210 are both in a horizontal position. Further, when the pin card 210 is used to detect the sample 300 to be detected, the tips of the pins on the pin card 210 can be flush with the side of the sample 300 to be detected facing the pin card 210, so that the contact between the pin card 210 and the sample 300 to be detected is good, improving the accuracy of the wafer detection device 200 for detecting the sample 300 to be detected. In addition, it can also prevent the pin card 210 from being bent and damaged due to uneven force, or prevent some of the pins on the pin card 210 from directly piercing the sample 300 to be detected and damaging the sample 300 to be detected, extending the service life of the pin card 210, reducing the cost of repairing or replacing the pin card 210, and also improving the safety performance of the wafer detection device 200 for detecting the sample 300 to be detected.

[0044] Please refer to Figure 4 and Figure 5 As shown in Figure 4 and Figure 5 , an adjusting mechanism 100 is provided in an embodiment of the present application. The adjusting mechanism 100 includes: a mounting base 110, a bearing plate 120, a mounting component 130, and a horizontal adjusting component 140. One end of the bearing plate 120 is rotatably connected to the mounting base 110, and the bearing plate 120 is used for bearing a needle card 210; the mounting component 130 is used for connecting the mounting base 110 and the bearing plate 120; the horizontal adjusting component 140 is arranged at an interval from the mounting component 130 and is used for adjusting the relative position between the bearing plate 120 and the mounting base 110 so that the bearing plate 120 is in a horizontal position; wherein, the number of the horizontal adjusting components 140 is three, and the three horizontal adjusting components 140 are arranged at intervals around the outer peripheral edge of the bearing plate 120 with respect to the mounting component 130.

[0045] It can be understood that one end of the bearing plate 120 being rotatably connected to the mounting base 110 means that the bearing plate 120 can be opened or closed relative to the mounting base 110 so that the chamber 111 is opened or closed; when the bearing plate 120 is closed relative to the mounting base 110, the bearing plate 120 and the mounting base 110 are stacked. In Figure 4 the embodiment, the bearing plate 120 is closed relative to the mounting base 110; in Figure 5 the embodiment, the bearing plate 120 is opened relative to the mounting base 110.

[0046] In this embodiment, the horizontal adjustment assembly 140 and the mounting assembly 130 are spaced around the outer periphery of the carrier plate 120. When the carrier plate 120 is closed relative to the mounting seat 110, the mounting assembly 130 is used to connect the mounting seat 110 and the carrier plate 120 to fix the relative position of the mounting seat 110 and the carrier plate 120. Further, the horizontal adjustment assembly 140 further adjusts the relative position of the mounting seat 110 and the carrier plate 120 from the outer periphery of the carrier plate 120 based on the relative position of the mounting assembly 130, the mounting seat 110 and the carrier plate 120, so that the carrier plate 120 and the needle card 210 are in a horizontal position. When the carrier plate 120 is used for the wafer detection device 200 and for carrying the needle card 210, the needle tip of the needle card 210 can be flush with the side of the sample to be detected 300 facing the needle card 210, so that the needle card 210 and the sample to be detected 300 are in good contact, thereby improving the accuracy of the detection of the sample to be detected 300. In addition, the carrier plate 120 is in a horizontal position, which can make the needle card 210 in a horizontal position, and can prevent the needle card 210 from bending and being damaged due to uneven force, or part of the needle tip on the needle card 210 directly piercing the sample to be detected 300 and damaging the sample to be detected 300, thereby extending the service life of the needle card 210 and reducing the cost of repairing or replacing the needle card 210.

[0047] See also Figures 6 to 9 In some embodiments, the horizontal adjustment component 140 includes a first adjustment subassembly 150, which includes a driving member 151, a transmission member 152 and a supporting member 153. The driving member 151 is installed on the mounting seat 110 and the power output shaft of the driving member 151 is connected to the transmission member 152 for driving the transmission member 152 to rotate. The supporting member 153 is sleeved on one end of the transmission member 152 away from the driving member 151 and the supporting member 153 is threadedly connected to the transmission member 152; the end of the supporting member 153 away from the transmission member 152 resists the supporting plate 120; when the driving member 151 drives the transmission member 152 to rotate, the supporting member 153 moves relative to the transmission member 152 toward or away from the driving member 151, thereby pushing the supporting plate 120 to move toward or away from the mounting seat 110.

[0048] It can be understood that the supporting member 153 is threadedly connected to the transmission member 152 , and the supporting member 153 may have an internal thread, and the transmission member 152 may have an external thread, and the internal thread of the supporting member 153 is threadedly connected to the external thread of the transmission member 152 .

[0049] Understandably, along the arrangement direction of the bearing plate 120 and the mounting assembly 130, the abutting member 153 and the driving member 151 are arranged at intervals, and the transmission member 152 is respectively connected to the abutting member 153 and the driving member 151.

[0050] In this embodiment, when the horizontal adjustment assembly 140 is used to adjust the relative position between the bearing plate 120 and the mounting seat 110, the power output shaft of the driving member 151 is connected to the transmission member 152. When the driving member 151 is turned on, the transmission member 152 is driven to rotate. The abutting member 153 is sleeved on one end of the transmission member 152 away from the driving member 151 and is threadedly connected to the transmission member 152. Then, the transmission member 152 and the abutting member 153 rotate relative to each other, so that the abutting member 153 moves in a direction close to or away from the driving member 151, and then the abutting member 153 abuts against the bearing plate 120 and drives the bearing plate 120 to move in a direction away from or close to the mounting seat 110, so as to adjust the relative position between the bearing plate 120 and the mounting seat 110, so that the bearing plate 120 and the needle card 210 are in a horizontal state. In this embodiment, the driving member 151 drives the transmission member 152 to rotate, and the transmission member 152 drives the abutting member 153 to move in a direction close to or away from the driving member 151, realizing the adjustment of the relative position between the bearing plate 120 and the mounting seat 110. Compared with the manual adjustment method, the method of setting the driving member 151 for driving is more accurate, which is beneficial to further improving the accuracy of the horizontal adjustment assembly 140 in adjusting the relative position between the bearing plate 120 and the mounting seat 110.

[0051] Understandably, the relative rotation of the transmission member 152 and the abutting member 153 can be that the transmission member 152 rotates under the drive of the driving member 151, and the abutting member 153 does not rotate.

[0052] In some embodiments, the carrier plate 120 has a first through hole 121; the horizontal adjustment assembly 140 further includes a second adjustment sub-assembly 160, and the second adjustment sub-assembly 160 includes a first adjustment cylinder 161, a first clamping member 162 and a first positioning member 163; the first adjustment cylinder 161 is rotatably disposed through the first through hole 121, the first clamping member 162 is sleeved on the first adjustment cylinder 161 and is located on the side of the carrier plate 120 away from the mounting seat 110, the first positioning member 163 is disposed on the side of the carrier plate 120 facing the mounting seat 110, the first positioning member 163 is sleeved on the outer periphery of the first adjustment cylinder 161 and is threadedly connected to the first adjustment cylinder 161; when the first adjustment cylinder 161 rotates relative to the first positioning member 163, the first adjustment cylinder 161 moves relative to the carrier plate 120 in a direction approaching or away from the mounting seat 110, thereby driving the carrier plate 120 to move in a direction away from or approaching the mounting seat 110.

[0053] Understandably, along the arrangement direction of the carrier plate 120 and the mounting seat 110, the first clamping member 162, the carrier plate 120, and the first positioning member 163 are arranged in sequence.

[0054] In this embodiment, the first adjusting cylinder 161 is rotatably disposed through the first through hole 121, so that the relative position between the first adjusting cylinder 161 and the carrier plate 120 is adjustable. The first positioning member 163 is sleeved on the outer periphery of the first adjusting cylinder 161 and is threadedly connected to the first adjusting cylinder 161. The first positioning member 163 is further disposed on the side of the carrier plate 120 facing the mounting seat 110. When the first adjusting cylinder 161 is threadedly connected to the first positioning member 163, the relative position between the first adjusting cylinder 161 and the carrier plate 120 can be adjusted. When the first adjusting cylinder 161 moves relative to the first positioning member 163 in a direction close to the mounting seat 110, the abutting member 153 of the first adjusting subassembly 150 abuts against the first adjusting cylinder 161, so that the carrier plate 120 moves in a direction away from the mounting seat 110. When the first adjusting cylinder 161 moves relative to the first positioning member 163 in a direction away from the mounting seat 110, the abutting member 153 of the first adjusting subassembly 150 abuts against the first adjusting cylinder 161, so that the carrier plate 120 moves in a direction close to the mounting seat 110, thereby roughly adjusting the relative position between the carrier plate 120 and the mounting seat 110. Wherein, the first clamping member 162 and the first positioning member 163 are disposed on opposite sides of the carrier plate 120, and the first clamping member 162 and the first positioning member 163 cooperate with each other to prevent the first adjusting cylinder 161 from twisting, so as to fix the relative position between the first adjusting cylinder 161 and the carrier plate 120, and further fix the relative position between the carrier plate 120 and the mounting seat 110, improving the structural stability of the adjusting mechanism 100. In the actual assembly of the adjusting mechanism 100, the relative position between the carrier plate 120 and the mounting seat 110 can be roughly adjusted by the second adjusting subassembly 160 first, and then the relative position between the carrier plate 120 and the mounting seat 110 can be finely adjusted by driving the first adjusting subassembly 150, so that the carrier plate 120 is in a horizontal position.

[0055] Understandably, the first adjusting cylinder 161 has an external thread, the first positioning member 163 has an internal thread, and the external thread of the first adjusting cylinder 161 is threadedly connected to the internal thread of the first positioning member 163 to adjust the relative position between the first positioning member 163 and the first adjusting cylinder 161.

[0056] Understandably, the first through hole 121 has an internal thread, and the external thread of the first adjusting cylinder 161 is threadedly connected to the internal thread of the first through hole 121 to adjust the relative position between the first adjusting cylinder 161 and the carrier plate 120.

[0057] Please refer toFigure 10 , in some embodiments, the second adjusting sub-assembly 160 further includes a first locking member 164, and the first locking member 164 sequentially passes through the first adjusting cylinder 161 and the abutting member 153, so that the carrier plate 120 is detachably connected to the mounting base 110.

[0058] It can be understood that the first locking member 164 sequentially passing through the first adjusting cylinder 161 and the abutting member 153 may be that the first adjusting cylinder 161 has a first through hole 1611, the abutting member 153 has a second through hole 1535, the first through hole 1611 penetrates through two opposite surfaces of the first adjusting cylinder 161, the second through hole 1535 penetrates through the side of the abutting member 153 facing away from the driving member 151, and the first locking member 164 sequentially passes through the first through hole 1611 and the second through hole 1535.

[0059] In this embodiment, the first adjusting cylinder 161 is rotatably passed through the first through hole 121 of the carrier plate 120, and at least a part of the abutting member 153 is disposed on the mounting base 110. When the first locking member 164 sequentially passes through the first adjusting cylinder 161 and the abutting member 153, and the first locking member 164 sequentially passes through the first through hole 1611 and the second through hole 1535, the first locking member 164 connects the carrier plate 120 and the mounting base 110 to connect the carrier plate 120 and the mounting base 110 into an integral structure. When the first locking member 164 does not pass through the first adjusting cylinder 161 and the abutting member 153, the carrier plate 120 can rotate relative to the mounting base 110 to open the chamber 111, facilitating an operator to place a sample 300 to be detected into the chamber 111. In this embodiment, the detachable connection between the carrier plate 120 and the mounting base 110 improves the convenience of fixing the relative positions of the carrier plate 120 and the mounting base 110, and improves the service performance of the adjusting mechanism 100.

[0060] Optionally, the first through hole 1611 includes a first through sub-hole 1612 and a second through sub-hole 1613 that communicate with each other. The first through sub-hole 1612 is closer to the mounting base 110 than the second through sub-hole 1613. The inner diameter of the first through sub-hole 1612 is smaller than the inner diameter of the second through sub-hole 1613. The first through sub-hole 1612 has an internal thread, and the first locking member 164 has an external thread. The external thread of the first locking member 164 is threadedly connected to the internal thread of the first through sub-hole 1612.

[0061] In this embodiment, the first through sub-hole 1612 is disposed closer to the mounting base 110 than the second through sub-hole 1613. Then, when the first locking member 164 sequentially passes through the first adjusting cylinder 161 and the abutting member 153, the first locking member 164 sequentially passes through the second through sub-hole 1613, the first through sub-hole 1612, and the second through hole 1535 to connect the carrier plate 120 and the mounting base 110 into an integral structure. When it is necessary to rotatably connect the carrier plate 120 to the mounting base 110 to open the chamber 111, the first locking member 164 can be withdrawn in a direction away from the mounting base 110 to separate the carrier plate 120 and the mounting base 110. In this embodiment, the inner diameter of the first through sub-hole 1612 is smaller than the inner diameter of the second through sub-hole 1613 and the first through sub-hole 1612 has an internal thread. Then, when the first locking member 164 is withdrawn in a direction away from the mounting base 110, the first locking member 164 can still pass through the second through sub-hole 1613 and the first through sub-hole 1612, and the internal thread of the first through sub-hole 1612 is threadedly connected to the external thread of the first locking member 164, which can prevent the first locking member 164 from directly detaching from the first adjusting cylinder 161 and being lost, improving the service performance of the second adjusting sub-assembly 160. Furthermore, the inner diameter of the first through sub-hole 1612 is smaller than the inner diameter of the second through sub-hole 1613. Then, when the first locking member 164 is withdrawn in a direction away from the mounting base 110, it can prevent the first locking member 164 from interfering with the first adjusting cylinder 161, which is beneficial to improving the efficiency of disassembling and connecting the carrier plate 120 and the mounting base 110.

[0062] Please refer to Figure 11 , in some embodiments, the first adjusting sub-assembly 150 further includes a first mounting member 154, and the first mounting member 154 is disposed on the mounting base 110 and at an end of the abutting member 153 away from the driving member 151; the abutting member 153 includes a sleeved portion 1531 and an abutting portion 1532 connected to each other. The sleeved portion 1531 is sleeved on the outer periphery of the transmission member 152, the abutting portion 1532 passes through the first mounting member 154, and an end of the abutting portion 1532 away from the sleeved portion 1531 abuts against the first adjusting cylinder 161.

[0063] In this embodiment, the first mounting member 154 is disposed on the mounting seat 110 and is used to penetrate the abutting portion 1532 so as to stably set the abutting portion 153 in the mounting seat 110. The sleeve portion 1531 is sleeved on the outer periphery of the transmission member 152. When the driving member 151 is turned on, the driving member 152 rotates, so that the sleeve portion 1531 drives the abutting portion 1532 to move in a direction close to or away from the driving member 151, and the end of the abutting portion 1532 away from the sleeve portion 1531 abuts against the first adjustment cylinder 161, so that the supporting plate 120 moves toward the mounting seat 110 or away from the mounting seat 110, so as to achieve horizontal adjustment of the position of the supporting plate 120. The first mounting member 154 limits and guides the movement of the abutting portion 1532 to prevent the abutting portion 1532 from tilting when moving toward or away from the driving member 151 , thereby facilitating adjustment of the horizontal position of the supporting plate 120 .

[0064] It can be understood that the sleeve portion 1531 has an internal thread, the transmission member 152 has an external thread, and the internal thread of the sleeve portion 1531 is threadedly connected with the external thread of the transmission member 152.

[0065] See also Figure 12 In some embodiments, the first mounting member 154 has a mounting through hole 1541 and a guide groove 1542, wherein the guide groove 1542 is located on the inner wall of the mounting through hole 1541 and is connected to the mounting through hole 1541, and both the mounting through hole 1541 and the guide groove 1542 extend along a preset direction; the supporting portion 1532 includes a supporting sub-portion 1533 and a guiding sub-portion 1534, wherein the guiding sub-portion 1534 is arranged on the outer periphery of the supporting sub-portion 1533, and both the guiding sub-portion 1534 and the supporting sub-portion 1533 extend along a preset direction, wherein the supporting sub-portion 1533 is located in the mounting through hole 1541, and the guiding sub-portion 1534 is located in the guide groove 1542, and the first mounting member 154 cooperates with the supporting portion 1532 to guide the sleeve portion 1531 to move along a preset direction toward or away from the driving member 151.

[0066] It can be understood that when the carrying plate 120 is in a closed state relative to the mounting seat 110 , the preset direction is the arrangement direction of the carrying plate 120 and the mounting seat 110 .

[0067] Understandably, the mounting through-hole 1541 and the guiding groove 1542 extend along a preset direction. It can be that, along the preset direction, the mounting through-hole 1541 penetrates through two opposite surfaces of the first mounting member 154, and the guiding groove 1542 penetrates through two opposite surfaces of the first mounting member 154.

[0068] Understandably, the guiding groove 1542 is located on the inner wall of the mounting through-hole 1541 and is connected to the mounting through-hole 1541. It can be that the guiding groove 1542 is provided on the outer periphery of the mounting through-hole 1541.

[0069] In this embodiment, the first mounting member 154 has a mounting through-hole 1541 and a guiding groove 1542, and both the mounting through-hole 1541 and the guiding groove 1542 extend along a preset direction. When the abutting portion 1532 penetrates through the first mounting member 154, the abutting sub-portion 1533 is located in the mounting through-hole 1541, and the guiding sub-portion 1534 is located in the guiding groove 1542. The mounting through-hole 1541 and the guiding groove 1542 limit and guide the moving direction of the abutting portion 1532. On the one hand, it can prevent the abutting portion 1532 from tilting during the process of moving closer to or away from the driving member 151. On the other hand, it can prevent the abutting portion 1532 from twisting inside the first mounting member 154 and detaching from the transmission member 152, improving the accuracy of the first adjusting sub-assembly 150 in adjusting the horizontal position of the carrier plate 120, and also extending the service life of the adjusting mechanism 100. When the carrier plate 120 is used in the wafer detection device 200 and for carrying the probe card 210, the tips of the probe card 210 can be in flush contact with one side of the sample 300 to be detected facing the probe card 210, so that the contact between the probe card 210 and the sample 300 to be detected is good, improving the accuracy of detecting the sample 300 to be detected. In addition, the carrier plate 120 is horizontally arranged, which can make the probe card 210 horizontally arranged, preventing the probe card 210 from being bent and damaged due to uneven force, or some of the tips on the probe card 210 directly piercing through the sample 300 to be detected and damaging the sample 300 to be detected, extending the service life of the probe card 210, and reducing the cost of repairing or replacing the probe card 210.

[0070] Optionally, the number of the guiding sub-portions 1534 is multiple, the number of the guiding grooves 1542 is multiple, and the number of the guiding sub-portions 1534 is equal to the number of the guiding grooves 1542.

[0071] In the terms of this application, "multiple" means greater than or equal to two, and can be but not limited to two, three, four, five, six, etc.

[0072] In some embodiments, the first adjusting sub-assembly 150 further includes a second mounting member 155. The second mounting member 155 is disposed on the mounting base 110 and is closer to the driving member 151 than the first mounting member 154. The second mounting member 155 is used for mounting the transmission member 152.

[0073] Understandably, along the arrangement direction of the bearing plate 120 and the mounting base 110, the first mounting member 154 and the second mounting member 155 are spaced apart.

[0074] In this embodiment, the second mounting member 155 is used for mounting the transmission member 152 to install the position of the transmission member 152, improving the structural stability of the transmission member 152 disposed on the mounting base 110. In this embodiment, the transmission member 152 is disposed on the power output shaft of the driving member 151. The position of the transmission member 152 is limited by the position of the driving member 151 and the position of the second mounting member 155, so that the transmission member 152 can rotate relative to the second mounting member 155 under the drive of the driving member 151 to drive the abutting member 153 to move towards or away from the driving member 151.

[0075] Please refer to Figure 13 and Figure 14 , in some embodiments, the mounting assembly 130 includes a second positioning member 131, a second adjusting cylinder 132, a second clamping member 133, a bottom member 134 and a second locking member 135. The bearing plate 120 has a second through hole 122. The second through hole 122 is spaced apart from the first through hole 121. The second adjusting cylinder 132 is rotatably passed through the second through hole 122. The second clamping member 133 is sleeved on the second adjusting cylinder 132 and is located on the side of the bearing plate 120 away from the mounting base 110. The second positioning member 131 is disposed on the side of the bearing plate 120 facing the mounting base 110. The second positioning member 131 is sleeved on the outer periphery of the second adjusting cylinder 132 and is threadedly connected to the second adjusting cylinder 132. The bottom member 134 is disposed on the side of the mounting base 110 facing the bearing plate 120 and abuts against the second adjusting cylinder 132. When the second adjusting cylinder 132 rotates relative to the second positioning member 131, the second adjusting cylinder 132 moves towards or away from the mounting base 110 relative to the bearing plate 120, thereby driving the bearing plate 120 to move away from or towards the mounting base 110. The second locking member 135 passes through the second adjusting cylinder 132 and the bottom member 134 in sequence to detachably connect the bearing plate 120 and the mounting base 110.

[0076] Understandably, along the preset direction, the second clamping member 133, the bearing plate 120, and the second positioning member 131 are arranged in sequence.

[0077] In this embodiment, the second adjusting cylinder 132 is rotatably disposed through the second through hole 122, so that the relative position between the second adjusting cylinder 132 and the bearing plate 120 is adjustable. The second positioning member 131 is sleeved on the outer periphery of the second adjusting cylinder 132 and is threadedly connected to the second adjusting cylinder 132. The second positioning member 131 is further disposed on the side of the bearing plate 120 facing the mounting seat 110. Then, when the second adjusting cylinder 132 is threadedly connected to the second positioning member 131, the relative position between the second adjusting cylinder 132 and the bearing plate 120 can be adjusted. When the second adjusting cylinder 132 moves relative to the second positioning member 131 in a direction close to the mounting seat 110, the bottom member 134 abuts against the second adjusting cylinder 132, so that the bearing plate 120 moves in a direction away from the mounting seat 110; when the second adjusting cylinder 132 moves relative to the second positioning member 131 in a direction away from the mounting seat 110, the bottom member 134 abuts against the second adjusting cylinder 132, so that the bearing plate 120 moves in a direction close to the mounting seat 110, thereby roughly adjusting the relative position between the bearing plate 120 and the mounting seat 110. Among them, the second clamping member 133 and the second positioning member 131 are disposed on opposite sides of the bearing plate 120, and the second clamping member 133 and the second positioning member 131 cooperate with each other to prevent the second adjusting cylinder 132 from twisting, so as to fix the relative position between the second adjusting cylinder 132 and the bearing plate 120, and further fix the relative position between the bearing plate 120 and the mounting seat 110, improving the structural stability of the adjusting mechanism 100. Further, the second locking member 135 is sequentially disposed through the second adjusting cylinder 132 and the bottom member 134. Specifically, along the first direction, the second adjusting cylinder 132 has a third through hole that penetrates two opposite surfaces of the second adjusting cylinder 132, and the bottom member 134 has a fourth through hole that penetrates the side of the bottom member 134 facing away from the driving member 151. The second locking member 135 is sequentially disposed through the third through hole and the fourth through hole, and the second locking member 135 connects the bearing plate 120 and the mounting seat 110 to connect the bearing plate 120 and the mounting seat 110 into an integral structure. When the second locking member 135 disengages from the fourth through hole of the bottom member 134, the separation of the bearing plate 120 and the mounting seat 110 can be realized, improving the convenience of disassembling and connecting the bearing plate 120 and the mounting seat 110, and improving the service performance of the adjusting mechanism 100.

[0078] Understandably, the second adjusting cylinder 132 has an external thread, the second positioning member 131 has an internal thread, and the external thread of the second adjusting cylinder 132 is threadedly connected to the internal thread of the second positioning member 131 to adjust the relative positions of the second positioning member 131 and the second adjusting cylinder 132.

[0079] Understandably, the second through hole 122 has an internal thread, and the external thread of the second adjusting cylinder 132 is threadedly connected to the internal thread of the second through hole 122 to adjust the relative position of the second adjusting cylinder 132 and the carrier plate 120.

[0080] In this application, the mention of "embodiment" or "implementation manner" means that the specific features, structures, or characteristics described in connection with the embodiment may be included in at least one embodiment of this application. The phrase appears in various positions in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art explicitly and implicitly understand that the embodiments described in this application can be combined with other embodiments. In addition, it should also be understood that the features, structures, or characteristics described in each embodiment of this application can be combined arbitrarily without contradiction to form another embodiment that does not depart from the spirit and scope of the technical solution of this application.

[0081] Finally, it should be noted that the above implementation manners are only used to illustrate the technical solutions of this application and not to limit them. Although the technical solutions of this application have been described in detail with reference to the above preferred implementation manners, those of ordinary skill in the art should understand that modifications or equivalent replacements can be made to the technical solutions of this application without departing from the spirit and scope of the technical solutions of this application.

Claims

1. An adjustment mechanism, characterized in that: The regulating mechanism comprises: Mounting seat; A carrying plate, one end of which is rotatably connected to the mounting seat, and the carrying plate is used to carry the needle card; A mounting assembly, the mounting assembly being used to connect the mounting seat and the bearing plate; and A horizontal adjustment component, which is spaced apart from the mounting component and is used to adjust the relative position of the bearing plate and the mounting seat so that the bearing plate is in a horizontal position; There are three horizontal adjustment components, and the three horizontal adjustment components and the mounting components are spaced apart around the outer periphery of the bearing plate.

2. The adjustment mechanism according to claim 1, characterized in that: The horizontal adjustment assembly includes a first adjustment subassembly, which includes a driving member, a transmission member and a supporting member. The driving member is installed on the mounting seat and the power output shaft of the driving member is connected to the transmission member for driving the transmission member to rotate. The supporting member is sleeved on an end of the transmission member away from the driving member and the supporting member is threadedly connected to the transmission member; the end of the supporting member away from the transmission member supports the supporting plate; when the driving member drives the transmission member to rotate, the supporting member moves relative to the transmission member toward or away from the driving member, thereby pushing the supporting plate to move toward or away from the mounting seat.

3. The adjustment mechanism according to claim 2, characterized in that: The supporting plate has a first through hole; the horizontal adjustment assembly also includes a second adjustment subassembly, and the second adjustment subassembly includes a first adjustment cylinder, a first clamping piece and a first positioning piece; the first adjustment cylinder can be rotatably penetrated in the first through hole, the first clamping piece is sleeved on the first adjustment cylinder and is located on the side of the supporting plate away from the mounting seat, the first positioning piece is arranged on the side of the supporting plate facing the mounting seat, the first positioning piece is sleeved on the outer periphery of the first adjustment cylinder and is threadedly connected to the first adjustment cylinder; when the first adjustment cylinder rotates relative to the first positioning piece, the first adjustment cylinder moves relative to the supporting plate toward or away from the mounting seat, thereby driving the supporting plate to move toward or away from the mounting seat.

4. The adjustment mechanism according to claim 3, characterized in that: The second adjusting subassembly further includes a first locking member, which is sequentially inserted into the first adjusting cylinder and the abutting member so that the supporting plate is detachably connected to the mounting seat.

5. The adjustment mechanism according to claim 3, characterized in that: The first adjusting subassembly also includes a first mounting member, which is arranged on the mounting seat and located at an end of the supporting member away from the driving member; the supporting member includes a connected sleeve portion and a supporting portion, the sleeve portion is sleeved on the outer periphery of the transmission member, the supporting portion is passed through the first mounting member, and the end of the supporting portion away from the sleeve portion abuts against the first adjusting cylinder.

6. The adjustment mechanism according to claim 5, characterized in that: The first mounting member has a mounting through hole and a guide groove, wherein the guide groove is located on the inner wall of the mounting through hole and connected to the mounting through hole, and both the mounting through hole and the guide groove extend along a preset direction; the supporting portion includes a supporting sub-portion and a guiding sub-portion, and the guiding sub-portion is arranged on the outer periphery of the supporting sub-portion, and both the guiding sub-portion and the supporting sub-portion extend along a preset direction, the supporting sub-portion is located in the mounting through hole, and the guiding sub-portion is located in the guide groove, and the first mounting member cooperates with the supporting portion to guide the sleeve portion to move along the preset direction toward or away from the driving member.

7. The adjustment mechanism according to claim 5, characterized in that: The first adjusting subassembly also includes a second mounting member, which is disposed on the mounting seat and is closer to the driving member than the first mounting member; the second mounting member is used to mount the transmission member.

8. The adjustment mechanism according to any one of claims 3 to 7, characterized in that: The mounting assembly includes a second positioning member, a second adjusting cylinder, a second clamping member, a bottom member and a second locking member, the supporting plate having a second through-hole, the second through-hole being arranged at an interval with the first through-hole; the second adjusting cylinder can be rotatably penetrated in the second through-hole, the second clamping member is sleeved on the second adjusting cylinder and is located on the side of the supporting plate away from the mounting seat, the second positioning member is arranged on the side of the supporting plate facing the mounting seat, the second positioning member is sleeved on the outer circumference of the second adjusting cylinder and is threadedly connected with the second adjusting cylinder, the bottom member is arranged on the side of the mounting seat facing the supporting plate and abuts against the second adjusting cylinder; when the second adjusting cylinder rotates relative to the second positioning member, the second adjusting cylinder moves relative to the supporting plate toward a direction close to or away from the mounting seat, thereby driving the supporting plate to move toward a direction away from or close to the mounting seat; the second locking member is sequentially penetrated through the second adjusting cylinder and the bottom member, so that the supporting plate and the mounting seat are detachably connected.

9. A wafer inspection device, characterized in that: The wafer detection device comprises: Needle card; The adjustment mechanism according to any one of claims 1 to 8, wherein the support plate of the adjustment mechanism is used to support the needle card, the mounting seat and the support plate enclose a chamber, and the needle tip of the needle card is arranged toward the chamber; A sample stage is disposed in the chamber and is used to carry a sample to be detected.

10. The wafer inspection device according to claim 9, characterized in that: The horizontal adjustment component of the adjustment mechanism includes a first adjustment subassembly, which includes a driving member, a transmission member and a resisting member. The driving member, the transmission member and the resisting member cooperate to adjust the relative position of the carrier plate and the mounting seat; the wafer detection device also includes a camera and a controller, and the controller is electrically connected to the camera and the driving member respectively; the camera is arranged in the chamber and can be slidably connected to the mounting seat, and the camera is used to obtain image information of the needle card under the control of the controller to obtain position information of the needle card; The controller is used to control the driving member to rotate according to the position information, so as to adjust the relative position of the supporting plate and the mounting seat.

Images