Ultrasonic water tank with elastic supporting structure

Abstract

The utility model relates to the technical field of wafer processing, in particular to an ultrasonic water tank with an elastic supporting structure, an elastic cushion is arranged on the bottom surface of the water tank, a plurality of elastic blocks are annularly distributed around the elastic cushion and used for supporting and fixing a crystal ingot, a gap is formed between every two adjacent elastic blocks, and an extension part is arranged on one side, away from the crystal ingot, of each elastic block. According to the utility model, the elastic pad is arranged in the water tank, the plurality of elastic blocks are annularly arranged, and the extension part is arranged on one side, far away from the crystal ingot, of each elastic block, so that the process of ultrasonically separating the crystal ingot is optimized. Wherein the elastic pad and the elastic block act together, so that ultrasonic energy is effectively absorbed and dispersed, uniform supporting and buffering are provided, stress concentration is reduced, it is ensured that a crystal ingot is uniformly stressed under the action of ultrasonic waves, the separation efficiency is improved, the damage risk is reduced, the overall stability and impact resistance are enhanced, and the yield and production efficiency of wafers are remarkably improved.

Description

Technical Field

[0001] This application relates to the technical field of wafer processing, and specifically relates to an ultrasonic water tank with an elastic support structure. Background Art

[0002] The preparation of wafers mainly includes two steps: laser scribing and wafer separation. Ultrasonic separation utilizes the high-frequency vibration of ultrasonic waves to apply vibration and stress to the wafer by the acoustic pressure generated in the liquid medium, thereby achieving separation. In ultrasonic separation, the ingot is placed in the water tank, the ultrasonic probe is placed on the top of the ingot and contacts the water in the water tank, and the ultrasonic waves are transmitted to the ingot and the wafer through the water medium, prompting the wafer to break away from the substrate. Although the ultrasonic separation technology has a high separation efficiency, in practical applications, the breakage rate of wafers is relatively high. Summary of the Utility Model

[0003] To solve the above problems, the utility model provides an ultrasonic water tank with an elastic support structure, including a water tank. An elastic pad is arranged on the bottom surface of the water tank, and a plurality of elastic blocks are annularly arranged around the elastic pad for supporting and fixing the ingot. A gap is provided between adjacent elastic blocks, and an extension part is arranged on the side of the elastic block away from the ingot.

[0004] In practical applications, in order to efficiently separate wafers, the ultrasonic energy applied is relatively high, which causes stress concentration on the surface of the wafer, thereby triggering the expansion of microcracks and ultimately resulting in wafer breakage. Through the design with an elastic support structure, the utility model utilizes the buffering and dispersing effects of elastic materials to disperse and absorb ultrasonic energy, reduce stress concentration, provide stable support, reduce the breakage rate of wafers, and improve the yield rate and production efficiency of wafers. Specifically, the strategies of the utility model to solve the problem of "high wafer breakage rate" are as follows: (1) The elastic pad and the elastic blocks absorb the vibration energy transmitted by the ultrasonic waves, reduce the direct impact on the ingot and the wafer, buffer the instantaneous stress caused by the ultrasonic vibration, and prevent cracks from occurring on the surface of the wafer; (2) A gap is provided between adjacent elastic blocks, enabling the ingot to have a certain buffering space when subjected to ultrasonic waves, avoiding excessive fixation and restraint of the ingot, making the stress evenly distributed among multiple elastic blocks, and reducing local stress concentration; (3) The extension part increases the buffering capacity of the elastic block, helps to more evenly distribute the ultrasonic energy on the ingot and the wafer, and further reduces stress concentration.

[0005] Furthermore, the elastic pad is arranged at the central position of the water tank. The central position can provide uniform support and buffering effects, making the ingot more evenly stressed under the action of ultrasonic waves, and reducing wafer breakage caused by uneven stress.

[0006] Furthermore, the elastic pad is circular. The separated ingot is circular. The circular elastic pad can disperse ultrasonic energy more evenly, providing stable support for the ingot and avoiding edge stress concentration.

[0007] Furthermore, the elastic pad is porous. The porous design increases the elasticity and water permeability of the elastic pad, enabling it to more effectively absorb and disperse ultrasonic energy. Meanwhile, it helps with water circulation and avoids local overheating.

[0008] Furthermore, the side of the elastic block close to the ingot is arc-shaped. The arc-shaped design can better conform to the shape of the ingot, providing uniform support and buffering, reducing stress concentration caused by local contact, and lowering the risk of wafer breakage.

[0009] Furthermore, the height of the extension part is less than that of the elastic block. That is to say, the extension part does not contact the bottom of the water tank or the liquid surface in the vertical direction. In this way, the extension part can not only buffer vibrations in the horizontal direction but also buffer vibrations in the vertical direction, enhancing its ability to disperse stress.

[0010] Furthermore, the extension part is conical. The conical extension part can more effectively disperse ultrasonic energy and reduce stress concentration in the wafer.

[0011] Furthermore, the extension part is zigzag-shaped. The zigzag shape increases the elasticity of the structure, enabling it to better absorb and disperse ultrasonic energy and reducing the breakage rate of the wafer.

[0012] Furthermore, along the direction away from the ingot, the size of the extension part gradually decreases. This makes the extension part suitable for ultrasonic waves of different frequencies and intensities, enhancing its ability to disperse ultrasonic waves.

[0013] Furthermore, there are multiple extension parts, which are arranged along the height direction of the elastic block. This not only enhances the ability to disperse ultrasonic energy in the horizontal direction but also enhances the ability to disperse ultrasonic energy in the vertical direction.

[0014] Advantages of the present utility model:

[0015] (1) By arranging a circular porous elastic pad in the center of the water tank, the present utility model effectively absorbs and disperses ultrasonic energy, provides uniform support and buffering, reduces stress concentration in the wafer under the action of ultrasonic waves, and thus reduces the wafer breakage rate.

[0016] (2) With the design of the elastic blocks arranged in a ring shape and the arc-shaped side close to the ingot, the present utility model ensures uniform stress on the ingot. The extension part further disperses stress, effectively preventing the ingot from shaking and breaking during the separation process.

[0017] (3) The conical or polyline design of the extension part of the present utility model enables its size to gradually decrease along the direction away from the ingot, dispersing ultrasonic energy in multiple layers, avoiding energy concentration, further reducing stress concentration, and enhancing the overall stability and impact resistance of the structure.

[0018] Considering the above beneficial effects, the present utility model has good application prospects in the field of wafer processing technology. Description of the Drawings

[0019] Figure 1 It is a schematic diagram of an ultrasonic water tank with an elastic support structure.

[0020] Figure 2 It is a top view of the ingot, elastic block, and extension part.

[0021] In the figure: 1. Water tank; 2. Elastic pad; 3. Elastic block; 4. Ingot; 31. Extension part. Specific Embodiments

[0022] To make the purpose, technical solutions and advantages of the present application clearer, the following examples are given with reference to the attached drawings to further elaborate on the present application in detail.

[0023] Embodiment 1

[0024] The present utility model provides an ultrasonic water tank with an elastic support structure. As Figure 1 shown, it includes a water tank 1. The shape of the water tank 1 is square, and the material is stainless steel. In this embodiment, the relevant dimensional parameters of all components are based on separating 6-inch silicon carbide wafers. The inner diameter of the water tank is 600 mm × 600 mm, the depth is 300 mm, and the thickness of the water tank 1 is 5 mm. An elastic pad 2 is arranged at the center of the bottom surface of the water tank 1. The elastic pad 2 is circular. The material of the elastic pad 2 is silicone rubber, with a diameter of 151 mm - 153 mm and a thickness of 10 mm. The elastic pad 2 provides support for the ingot 4 and absorbs and disperses ultrasonic energy. A plurality of elastic blocks 3 are arranged in a circular pattern around the elastic pad 2. Specifically, the number of elastic blocks 3 is 4, 6, or 8, and there is a gap between adjacent elastic blocks 3. The elastic blocks 3 are rotationally symmetrically distributed. The material of the elastic blocks 3 is silicone rubber, and the thickness of the elastic blocks 3 is 20 mm. The side of the elastic block 3 close to the ingot 4 is arc-shaped, used to support and fix the ingot 4, and provide buffering and absorb ultrasonic energy. As Figure 2 shown, an extension part 31 is arranged on the side of the elastic block 3 away from the ingot 4. The extension part 31 is conical, with a bottom diameter of 10 mm and a length of 20 mm - 40 mm. In the vertical direction, the height of the extension part 31 is less than the height of the elastic block 3.

[0025] In the present utility model, ultrasonic waves are transmitted to the cleavage interface through water. The wafer at the cleavage interface is vibrated by the ultrasonic waves, generating a separating effect. The ultrasonic energy is simultaneously transmitted to the elastic block 3. The side of the elastic block 3 close to the ingot 4 is designed in an arc shape, effectively fitting the ingot 4 and absorbing part of the vibration energy. The elastic material in the elastic block 3 further disperses and buffers the ultrasonic energy through its elastic deformation, reducing stress concentration and lowering the wafer breakage rate.

[0026] Embodiment 2

[0027] Based on Embodiment 1, the elastic pad 2 is porous, with a pore diameter of 1 mm - 2 mm and a pore spacing of 4 mm - 6 mm. The pores are evenly distributed and arranged in a honeycomb pattern. The porous structure provides additional paths and spaces, enabling the ultrasonic energy to be continuously dispersed and weakened during propagation, thereby reducing energy concentration and stress concentration and protecting the wafer from breakage. Additionally, the presence of pores allows water to flow more easily, contributing to maintaining the uniformity and stability of the ultrasonic propagation medium, further optimizing the ultrasonic transmission effect. The porous structure helps water flow, avoiding local heat accumulation, keeping the temperature of the wafer surface uniform, and preventing breakage caused by thermal stress.

[0028] Embodiment 3

[0029] Based on Embodiment 2, the extension part 31 is in a zigzag shape, with a length of the zigzag being 30 mm - 40 mm and the number of segments of the zigzag being 4. Along the direction away from the ingot 4, the size of the extension part 31 gradually decreases. That is to say, the segment closer to the elastic block 3 is thicker and longer, while the segment farther from the elastic block 3 is thinner and shorter. The thick and long segment has a higher damping effect on low-frequency ultrasonic waves due to its larger volume and mass, and can effectively absorb and dissipate low-frequency vibration energy; the thin and short segment has a higher response ability to high-frequency ultrasonic waves due to its smaller size and higher flexibility, and can more effectively absorb and disperse high-frequency vibration energy. Additionally, by designing the extension part 31 as a combination of thick and long segments and thin and short segments, the occurrence of resonance is avoided. Resonance can lead to excessive concentration of energy at a certain frequency, and designing segments with different sizes can effectively disrupt the resonance conditions and adapt to ultrasonic waves of different frequencies.

[0030] Embodiment 4

[0031] Based on Embodiment 3, there are multiple extension parts 31, and the multiple extension parts 31 are arranged along the height direction of the elastic block 3. The distance between adjacent extension parts 31 is 5 mm - 10 mm. The multiple extension parts 31 arranged along the height direction provide a multi-level buffering effect. The different sizes and shapes of each extension part can provide effective buffering for ultrasonic waves within a wide frequency range, enhancing the adaptability to ultrasonic waves of different frequencies.

[0032] In summary, the present utility model provides an ultrasonic water tank with an elastic support structure. An elastic pad 2 is provided on the bottom surface of the water tank 1, and a plurality of elastic blocks 3 are arranged in a circular pattern around the elastic pad 2 for supporting and fixing the ingot 4. A gap is provided between adjacent elastic blocks 3, and an extension portion 31 is provided on the side of the elastic block 3 away from the ingot 4. By providing the elastic pad 2 in the water tank 1, arranging a plurality of elastic blocks 3 in a circular pattern, and providing the extension portion 31 on the side of the elastic block 31 away from the ingot 4, the present utility model optimizes the process of ultrasonic separation of the ingot 4. Among them, the elastic pad 2 and the elastic blocks 3 work together to effectively absorb and disperse ultrasonic energy, provide uniform support and buffering, reduce stress concentration, ensure uniform stress on the ingot under the action of ultrasonic waves, improve the separation efficiency, reduce the risk of breakage, enhance the overall stability and impact resistance, significantly improve the yield rate and production efficiency of the wafers, and have good application prospects in the field of wafer processing technology.

[0033] The foregoing is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall be included within the scope of protection of the present application.

Claims

1. An ultrasonic water tank with an elastic support structure, comprising a water tank, characterized in that: An elastic pad is arranged on the bottom surface of the water tank, and a plurality of elastic blocks are arranged in a ring around the elastic pad for supporting and fixing the crystal ingot. Gaps are arranged between adjacent elastic blocks, and an extension portion is arranged on the side of the elastic block away from the crystal ingot.

2. The ultrasonic water tank with an elastic support structure according to claim 1, characterized in that: The elastic pad is arranged at the center of the water tank.

3. The ultrasonic water tank with an elastic support structure according to claim 1, characterized in that: The elastic pad is circular.

4. The ultrasonic water tank with an elastic support structure according to claim 1, characterized in that: The elastic pad is porous.

5. The ultrasonic water tank with an elastic support structure according to claim 1, characterized in that: The side of the elastic block close to the crystal ingot is arc-shaped.

6. The ultrasonic water tank with an elastic support structure according to claim 1, characterized in that: The height of the extending portion is smaller than the height of the elastic block.

7. The ultrasonic water tank with elastic support structure according to claim 6, characterized in that: The extension portion is tapered.

8. The ultrasonic water tank with an elastic support structure according to claim 6, characterized in that: The extension portion is in a broken line shape.

9. The ultrasonic water tank with an elastic support structure according to claim 8, characterized in that: The size of the extension portion gradually decreases along a direction away from the ingot.

10. The ultrasonic water tank with an elastic support structure according to any one of claims 6 to 9, characterized in that: There are multiple extension parts, and the multiple extension parts are arranged along the height direction of the elastic block.

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