Rotating stand system and vacuum coating machine adopting same

Abstract

The utility model relates to a rotating stand system and a vacuum coating machine adopting the rotating stand system, and the rotating stand system is characterized in that a horizontally arranged revolution part adopts a rotating stand shell used for forming an internal environment isolated from the outside. According to the utility model, the rotating stand shell is used as a revolution part, so that the rotation shaft and the driving mechanism thereof can be mounted in the shell cavity, and are isolated from the environment in the vacuum coating cavity, thereby avoiding the pollution of splashing substances in the coating process and reducing the failure rate.

Description

Technical Field

[0001] The utility model relates to a turntable system for a vacuum coating machine, and also relates to a vacuum coating machine adopting the turntable system. Background Art

[0002] For many vertical vacuum coating machines in the prior art, the turntable system is designed as follows: including a horizontally arranged common turntable, arranged on the common turntable, and a corresponding driving mechanism. The applicant intends to isolate the self-rotating frame and its driving mechanism from the environment in the vacuum coating chamber, and thus designs a turntable system with the following new structure. Summary of the Utility Model

[0003] The purpose of the utility model is to provide a turntable system that can form an isolation space. By adopting this turntable system, the self-rotating frame and its driving system of the turntable system can be isolated from the environment in the vacuum coating chamber.

[0004] The purpose of the utility model is realized through the following technical solutions: a turntable system, including a horizontally arranged revolving member, characterized in that the revolving member adopts a turntable shell for forming an internal environment isolated from the outside, so that the self-rotating shaft and its driving mechanism can be installed therein to be isolated from the environment in the vacuum coating chamber, avoiding the pollution of splashing substances during the coating process.

[0005] The revolution of the turntable shell is preferably driven in the following manner:

[0006] The turntable system further includes a turntable connecting pipe, a welded bellows, a magnetic fluid, a rotary driving mechanism and a lifting driving mechanism;

[0007] The turntable shell is hermetically communicated with the turntable connecting pipe through a bottom surface provided with an opening. The turntable connecting pipe passes through an opening with a surplus on the bottom surface of the coating chamber and is hermetically communicated with the hollow rotary shaft of the magnetic fluid. The upper end of the main body of the magnetic fluid is hermetically connected to the periphery of the opening on the bottom surface of the coating chamber through the welded bellows. The rotary driving mechanism is fixedly connected to the main body of the magnetic fluid, and its driving output end is connected to the rotary shaft of the magnetic fluid. The lifting driving mechanism is fixed on the outer side of the bottom surface of the coating chamber, and its lifting motion output end is connected to the main body of the magnetic fluid.

[0008] As a preferred structure for the electrical introduction method:

[0009] The turntable system further includes a rotary cylinder, an electric slip ring and an air slip ring; the inside of the rotary cylinder is continuously connected to the lower end of the rotary shaft of the magnetic fluid in a communicating manner and sleeved with the electric slip ring and the air slip ring. The rotary cylinder is also provided with holes for wires and air pipes to penetrate.

[0010] For facilitating the positioning of the rotation angle of the turntable shell:

[0011] A position encoder is also installed on the bottom of the lower end of the rotating cylinder.

[0012] As an optimization of the rotation drive mechanism and the lifting drive mechanism:

[0013] The rotation drive mechanism includes a servo motor, a speed reducer, a synchronous belt and pulley mechanism. The servo motor is connected to the speed reducer, and the speed reducer drives the rotating shaft of the magnetic fluid to rotate through the synchronous belt and pulley mechanism.

[0014] The lifting drive mechanism includes a lifting motor, a lifting speed reducer, and a lead screw mechanism. The lead screw mechanism is vertically arranged. The lifting motor drives the lead screw of the lead screw mechanism to rotate through the lifting speed reducer, and the nut on the lead screw is connected to the main body of the magnetic fluid through a fixing bracket.

[0015] The present utility model also provides a vacuum coating machine adopting the turntable system.

[0016] Beneficial effects:

[0017] 1) The present utility model uses the turntable housing as the revolving part. In this way, the self-rotating shaft and its drive mechanism can be installed in the housing cavity, so as to be isolated from the environment in the vacuum coating cavity, avoid the pollution of splashing substances during the coating process, and reduce the failure rate.

[0018] 2) The present utility model realizes the drive connection structure of the turntable housing through the above-mentioned cooperation structure of the welded bellows and the magnetic fluid. That is, while the turntable connecting pipe is hermetically passed through the vacuum chamber, it does not prevent the turntable housing from moving up and down and rotating by driving the turntable connecting pipe. Moreover, the sealed communication structure of the turntable housing, the turntable connecting pipe, and the hollow rotating shaft of the magnetic fluid in the present utility model forms an atmospheric environment passage leading into the coating chamber. On the one hand, this structure facilitates the introduction of electrical circuits. On the other hand, the drive mechanism installed therein only needs to be selected to be suitable for the atmosphere, reducing the requirements for the drive mechanism. Description of the Drawings

[0019] Figure 1 It is a schematic structural diagram of the turntable system of the preferred embodiment of the present utility model. Detailed Embodiments

[0020] Figure 1 It is a schematic structural diagram of the turntable system of the preferred embodiment of the present utility model. In fact, the turntable system should also include a self-rotating shaft and its drive mechanism, but since it is not the improvement point involved in the present utility model, this part of the structure is omitted here.

[0021] Such as Figure 1As shown in the figure, the turntable system mainly includes a turntable housing 1, a turntable connecting pipe 2, a welded bellows 3, a magnetorheological fluid 4, a rotary drive mechanism 5, a lifting drive mechanism 6, a rotary cylinder 7, an electric slip ring 8, and a pneumatic slip ring 9.

[0022] The turntable housing 1 is used to form an internal environment isolated from the vacuum environment of the external coating chamber 10, so that the self-rotating turntable of the turntable system of the vacuum coating machine (when in use, the end of the self-rotating turntable or the end of the fixture connected to the self-rotating turntable is sealed through the turntable housing to connect the workpiece to be coated) and its drive mechanism (not shown) can be installed therein to be isolated from the outside world, which can avoid the pollution of splashing substances during the coating process and reduce the failure rate.

[0023] The turntable housing 1 is hermetically connected to the turntable connecting pipe 2 through the bottom surface provided with an opening. The lower end of the turntable connecting pipe 2 passes through an opening 101 with a surplus on the bottom surface of the coating chamber 10 and is hermetically connected to the hollow rotating shaft 42 of the magnetorheological fluid 4. The upper end of the main body 41 of the magnetorheological fluid 4 is hermetically connected to the periphery of the opening 101 on the bottom surface of the coating chamber 10 through the welded bellows 3. The rotary drive mechanism 5 is fixedly connected to the main body 41 of the magnetorheological fluid 4, and the drive output end is connected to the rotating shaft 42 of the magnetorheological fluid 4 to drive the rotation of the rotating shaft 42, so as to drive the turntable housing 1 to rotate through the turntable connecting pipe 2. The lifting drive mechanism 6 is fixed on the outer side of the bottom surface of the coating chamber 10, and the lifting motion output end is connected to the main body 41 of the magnetorheological fluid 4, so as to drive the turntable housing 1 to lift through the turntable connecting pipe 2. It can be seen that the turntable housing 1 of this embodiment can lift and rotate in the vacuum chamber.

[0024] Here, the cooperation structure of the welded bellows 3 and the magnetorheological fluid 4 is adopted to realize the drive connection structure of the turntable housing 1, that is, while the turntable connecting pipe 2 is hermetically passing through the vacuum chamber, it does not prevent driving the turntable housing 1 to move up and down and rotate through the turntable connecting pipe 2. The sealed connection structure of the turntable housing 1, the turntable connecting pipe 2, and the hollow rotating shaft 42 of the magnetorheological fluid 4 forms an atmospheric environment channel leading into the coating chamber 10. On the one hand, this structure facilitates the introduction of electrical lines. On the other hand, the drive mechanism installed therein only needs to be selected as atmospheric compatible, which reduces the requirements for the drive mechanism.

[0025] Continue as Figure 1 As shown in the figure, the inside of the rotary cylinder 7 is continuously connected to the lower end of the rotating shaft 42 of the magnetorheological fluid 4 and sleeved with an electric slip ring 8 and a pneumatic slip ring 9. Wire penetration holes 71 and air pipe penetration holes 72 are respectively opened on the rotary cylinder 7 at the upper ends of the electric slip ring 8 and the pneumatic slip ring 9. A position encoder 11 is also installed on the bottom of the lower end cylinder of the rotary cylinder 7. The electric slip ring 8, the pneumatic slip ring 9, and the position encoder 11 are all connected to the lifting drive mechanism 6 through a first fixing bracket 12.

[0026] The external electrical lines can be introduced into the turntable housing 1 in the following way:

[0027] The external wire is connected to the outer ring 81 of the electric slip ring, then passes through the inner ring 82 of the electric slip ring and enters the wire entry hole 71, and is connected to the wire inside the turntable housing 1 without entanglement during rotation; the external air pipe is connected to the outer ring 91 of the air slip ring, then passes through the inner ring 92 of the air slip ring and enters the air pipe entry hole 72, and is communicated with the air pipe inside the turntable housing 1 without entanglement during rotation.

[0028] As Figure 1 shown, the rotation driving mechanism 5 adopted in this embodiment includes a servo motor 51, a speed reducer 52, and a synchronous belt and pulley mechanism. The servo motor 51 is connected to the speed reducer 52, and the speed reducer 52 drives the rotation shaft 42 of the magnetorheological fluid 4 to rotate through the synchronous belt 54 and the synchronous pulley 55.

[0029] As Figure 1 shown, the lifting driving mechanism 6 of this embodiment includes a lifting motor 61, a lifting speed reducer 62, and a lead screw mechanism. The lead screw mechanism is vertically arranged, and its lead screw 63 is rotatably installed through a bearing block 64. The lifting motor 61 is connected to the lifting speed reducer 62, and the output shaft of the lifting speed reducer 62 is connected to the lead screw 63 through a coupling 65 to drive its rotation. The nut 64 on the lead screw 63 is connected to the main body 41 of the magnetorheological fluid 4 through a second fixing bracket 13, so that when the lead screw 63 rotates, the turntable connection pipe 2 and the turntable housing 1 are driven to move up and down as a whole through the magnetorheological fluid 4. During the up and down movement, the welded bellows 3 folds and unfolds accordingly.

[0030] The above is the preferred embodiment of the present invention, and it cannot be used as a limitation to the protection scope of the invention. The protection scope of the present invention shall be specifically determined by the records in its claims.

Claims

1. A rotating frame system, comprising a horizontally arranged revolution member, characterized in that: The revolving member adopts a revolving frame shell for forming an internal environment isolated from the outside.

2. The turret system according to claim 1, characterized in that: The revolution of the turret shell is driven by: The turret system also includes a turret connecting pipe, a welding bellows, a magnetic fluid, a rotation drive mechanism and a lifting drive mechanism; The turret shell is sealed and connected to the turret connecting tube via a bottom surface provided with an opening. The turret connecting tube passes through a surplus opening on the bottom surface of the coating chamber and is sealed and connected to the hollow rotating shaft of the magnetic fluid. The upper end of the main body of the magnetic fluid is sealed and connected to the periphery of the opening on the bottom surface of the coating chamber via the welded bellows. The rotating drive mechanism is fixedly connected to the main body of the magnetic fluid, and its driving output end is connected to the rotating shaft of the magnetic fluid. The lifting drive mechanism is fixed to the outer side of the bottom surface of the coating chamber, and the lifting motion output end is connected to the main body of the magnetic fluid.

3. The turret system according to claim 2, characterized in that: The turret system also includes a rotating drum, an electric slip ring, and an air slip ring; the rotating drum is internally connected to the lower end of the rotating shaft of the magnetic fluid and is covered with an electric slip ring and an air slip ring, and the rotating drum is also provided with holes for wires and air pipes to penetrate.

4. The turret system according to claim 3, characterized in that: A position encoder is also installed on the bottom of the lower end of the rotating cylinder.

5. The turret system according to any one of claims 2 to 4, characterized in that: The rotary drive mechanism comprises a servo motor, a reducer, a synchronous belt and a wheel mechanism. The servo motor is connected to the reducer, and the reducer drives the rotating shaft of the magnetic fluid to rotate through the synchronous belt and the wheel mechanism.

6. The turret system according to any one of claims 2 to 4, characterized in that: The lifting drive mechanism includes a lifting motor, a lifting reducer, and a screw mechanism. The screw mechanism is vertically arranged. The lifting motor drives the screw of the screw mechanism to rotate through the lifting reducer. The nut on the screw is connected to the main body of the magnetic fluid through a fixing frame.

7. A vacuum coating machine, characterized in that: It adopts the rotating rack system described in any one of claims 1-6.

Images