High-vacuum five-dimensional displacement platform

Abstract

The utility model relates to the technical field of vacuum displacement platforms, and particularly discloses a high-vacuum five-dimensional displacement platform which comprises a base, the upper end of the base is connected with a guide rail lower supporting plate through an adjusting column, a lead screw body is arranged in a guide rail upper supporting plate, and the upper end of a Z-axis moving plate is connected with a Y-axis moving plate through a Y-axis crossed guide rail. The upper end of the Y-axis moving plate is connected with an X-axis moving plate through an X-axis cross guide rail; an X-axis adjusting piece is arranged between the X-axis moving plate and the Y-axis moving plate, and a Y-axis adjusting piece is arranged between the Y-axis moving plate and the Z-axis moving plate; the high-vacuum five-dimensional displacement table controls the X-axis movement and the Y-axis movement by using a micrometer head, so that very fine adjustment can be provided, and the submicron-level positioning precision is realized; multi-dimensional adjustment is carried out, more complex space positioning capacity is provided, and the adjustable freedom degree is multiple; the five-dimensional displacement table is provided with a visual rotating handle and a rotary knob, so that the operation is simple and convenient.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum displacement tables, and particularly relates to a high-vacuum five-dimensional displacement platform. Background Art

[0002] Vacuum displacement tables play an important role in physical vapor deposition (PVD) technology; PVD is a technology that, in a vacuum environment, transforms materials from a solid or liquid state into a gaseous state through a physical process and then deposits them into thin films on a substrate; this technology is widely used in fields such as semiconductor manufacturing, optical coating, decorative coating, and tool coating;

[0003] A vacuum displacement table is a precision positioning device used in a vacuum environment, mainly for precisely controlling the movement of an object in a vacuum environment at the atmospheric end; existing vacuum displacement tables have problems such as high cost, complex operation, few adjustable degrees of freedom, and limited stroke range. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a high-vacuum five-dimensional displacement platform to solve the problems raised in the above background art.

[0005] To achieve the above purpose, the utility model provides the following technical solutions:

[0006] A high-vacuum five-dimensional displacement platform, comprising:

[0007] A base, the upper end of the base is connected with a lower guide rail support plate through an adjusting column, one side of the upper end of the lower guide rail support plate is connected with an upper guide rail support plate through a guide rail group, the guide rail group is a guide rail assembly in the prior art, which plays a role in assisting the Z-axis moving plate to move up and down in the Z-axis direction, a lead screw body is arranged inside the upper guide rail support plate, both ends of the lead screw body are respectively connected with the lower guide rail support plate and the upper guide rail support plate, the outer end of the lead screw body is connected with a Z-axis moving plate through a threaded connector, by rotating the arranged lead screw body, the Z-axis moving plate can be driven to move up and down in the Z-axis direction, the upper end of the Z-axis moving plate is connected with a Y-axis moving plate through a Y-axis cross guide rail, the upper end of the Y-axis moving plate is connected with an X-axis moving plate through an X-axis cross guide rail, through the setting of the guide rails, when moving the X-axis moving plate, the Y-axis moving plate can be made not to move, and the moving space of the displacement table in the X-axis is significantly increased, reducing the overall appearance volume, a bellows is installed inside the X-axis moving plate, an opening groove is arranged inside the Y-axis moving plate for the bellows to pass through, the bellows is set as a CF bellows, and the lower end of the bellows is connected with the base;

[0008] An X-axis adjusting member is provided between the X-axis moving plate and the Y-axis moving plate, which can adjust the movement of the X-axis moving plate and the Y-axis moving plate in the X-axis direction. A Y-axis adjusting member is provided between the Y-axis moving plate and the Z-axis moving plate, which can adjust the movement of the Z-axis moving plate and the Y-axis moving plate in the Y-axis direction.

[0009] Preferably, the X-axis adjusting member includes an X-axis micrometer head positioning block, an X-axis coupling, an X-axis micrometer head, and an X-axis micrometer head fixing block. The X-axis micrometer head positioning block is installed on one side of the X-axis moving plate, the X-axis micrometer head fixing block is installed on one side of the Y-axis moving plate, the X-axis micrometer head is installed inside the X-axis micrometer head fixing block, and one end of the X-axis micrometer head is connected to the X-axis micrometer head positioning block through the X-axis coupling, making them connected as a whole to achieve sub-micron movement accuracy.

[0010] Preferably, the Y-axis adjusting member includes a Y-axis micrometer head positioning block, a Y-axis coupling, a Y-axis micrometer head, and a Y-axis micrometer head fixing block. The Y-axis micrometer head fixing block is installed on one side of the Y-axis moving plate, the X-axis micrometer head positioning block is installed on one side of the Z-axis moving plate, the Y-axis micrometer head is installed inside the Y-axis micrometer head fixing block, and one end of the Y-axis micrometer head is connected to the Y-axis micrometer head positioning block through the Y-axis coupling. The working principle is the same as that of the X-axis adjusting member, making them connected as a whole to achieve sub-micron movement accuracy.

[0011] Preferably, a through hole is formed inside the Z-axis moving plate for the screw rod body to pass through. A screw nut is installed at the upper end of the Z-axis moving plate, and the screw nut is threadedly connected to the screw rod body. By rotating the screw rod body, the screw nut rotates in threaded cooperation with the screw rod body, which can drive the Z-axis moving plate to move.

[0012] Preferably, a thrust ball bearing is provided at the lower end of the guide rail upper support plate, which is beneficial to the rotation of the screw rod body. The upper end of the screw rod body passes through the inside of the thrust ball bearing, and the upper end of the screw rod body penetrates through the guide rail upper support plate and is connected to a handwheel. By rotating the provided handwheel, the screw rod body can be driven to rotate, which is further beneficial to driving the Z-axis moving plate to move.

[0013] Preferably, the adjusting column is arranged as a pitch adjusting stud, and there are four groups of pitch adjusting studs. A first through hole matching with the pitch adjusting stud is formed inside the lower support plate of the guide rail, and a second through hole matching with the pitch adjusting stud is formed inside the upper support plate of the guide rail. Nuts threadedly connected with the pitch adjusting stud are installed at both the upper and lower ends of the upper support plate of the guide rail. By rotating the nuts, the height of the nuts on the corresponding pitch adjusting studs is adjusted, so as to adjust the height of the corresponding side of the lower support plate of the guide rail, and further the pitch angles of the adjusting displacement table in the X and Y axis directions can be adjusted. The operation is simple and the manufacturing cost is reduced.

[0014] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0015] (1) High-precision positioning: The high-vacuum five-dimensional displacement table controls the movement of the X-axis and Y-axis with a differential head, which can provide very fine adjustment and achieve sub-micron positioning accuracy.

[0016] (2) Multi-dimensional adjustment: The five-dimensional displacement table can be adjusted along three orthogonal linear axes (X, Y, Z) and the pitch angles of the X and Y axes, providing more complex spatial positioning capabilities and multiple adjustable degrees of freedom.

[0017] (3) Simple operation: The five-dimensional displacement table is equipped with intuitive rotary handles and knobs, making the operation simple. Users can quickly adjust the position with low cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 It is a cross-sectional view of the utility model;

[0020] Figure 3 It is a top view of the utility model;

[0021] Figure 4 It is a schematic diagram of another perspective of the utility model;

[0022] In the figure: 1, hand wheel; 2, screw rod body; 3, thrust ball bearing; 4, upper support plate of the guide rail; 5, screw rod nut; 6, Z-axis moving plate; 7, guide rail group; 8, lower support plate of the guide rail; 9, bellows;

[0023] 10, X-axis moving plate; 11, X-axis cross guide rail; 12, Y-axis moving plate; 13, Y-axis micrometer head fixing block; 14, Y-axis cross guide rail; 15, pitch adjusting stud; 16, X-axis micrometer head positioning block; 17, X-axis coupling; 18, X-axis micrometer head; 19, X-axis micrometer head fixing block; 20, Y-axis micrometer head positioning block; 21, Y-axis coupling; 22, Y-axis micrometer head; 23, base. Detailed implementation mode

[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0025] Embodiment:

[0026] Please refer to Figures 1-4 As shown, a high-vacuum five-dimensional displacement platform includes:

[0027] A base 23, the upper end of the base 23 is connected with a lower guide rail support plate 8 through an adjusting column, one side of the upper end of the lower guide rail support plate 8 is connected with an upper guide rail support plate 4 through a guide rail group 7. The guide rail group 7 is a guide rail group 7 in the prior art, which plays a role in assisting the Z-axis moving plate 6 to move up and down in the Z-axis direction. A lead screw body 2 is arranged inside the upper guide rail support plate 4, and both ends of the lead screw body 2 are respectively connected with the lower guide rail support plate 8 and the upper guide rail support plate 4. The outer end of the lead screw body 2 is connected with a Z-axis moving plate 6 through a threaded connecting piece. By rotating the arranged lead screw body 2, the Z-axis moving plate 6 can be driven to move up and down in the Z-axis direction. The upper end of the Z-axis moving plate 6 is connected with a Y-axis moving plate 12 through a Y-axis cross guide rail 14, and the upper end of the Y-axis moving plate 12 is connected with an X-axis moving plate 10 through an X-axis cross guide rail 11. Through the setting of the guide rails, when the X-axis moving plate 10 is moved, the Y-axis moving plate 12 can be made not to move, and the moving space of the displacement table in the X-axis direction is significantly increased, reducing the overall appearance volume. A bellows 9 is installed inside the X-axis moving plate 10, and an opening groove is formed inside the Y-axis moving plate 12 for the bellows 9 to pass through. The bellows 9 is set as a CF bellows 9, and the lower end of the bellows 9 is connected with the base 23;

[0028] An X-axis adjusting member is arranged between the X-axis moving plate 10 and the Y-axis moving plate 12, which can adjust the movement of the X-axis moving plate 10 and the Y-axis moving plate 12 in the X-axis direction. A Y-axis adjusting member is arranged between the Y-axis moving plate 12 and the Z-axis moving plate 6, which can adjust the movement of the Z-axis moving plate 6 and the Y-axis moving plate 12 in the Y-axis direction.

[0029] By manually rotating the handle or knob, the screw is driven to rotate. The meshing of the screw and the nut causes the displacement table to move precisely along the guide rail system, realizing the precise positioning of the sample or tool in the vacuum environment. At the same time, the design of the displacement table ensures the simplicity, stability and compatibility with the vacuum environment of the operation.

[0030] Reference Figures 1-4As shown in the figure, the X-axis adjusting member includes an X-axis micrometer positioning block 16, an X-axis coupling 17, an X-axis micrometer 18, and an X-axis micrometer fixing block 19. An X-axis micrometer positioning block 16 is installed on one side of the X-axis moving plate 10, and an X-axis micrometer fixing block 19 is installed on one side of the Y-axis moving plate 12. An X-axis micrometer 18 is installed inside the X-axis micrometer fixing block 19. One end of the X-axis micrometer 18 is connected to the X-axis micrometer positioning block 16 through the X-axis coupling 17, making them connected as a whole to achieve a sub-micron level of movement accuracy.

[0031] Reference Figures 1-4 As shown in the figure, the Y-axis adjusting member includes a Y-axis micrometer positioning block 20, a Y-axis coupling 21, a Y-axis micrometer 22, and a Y-axis micrometer fixing block 13. A Y-axis micrometer fixing block 13 is installed on one side of the Y-axis moving plate 12, and an X-axis micrometer positioning block 16 is installed on one side of the Z-axis moving plate 6. A Y-axis micrometer 22 is installed inside the Y-axis micrometer fixing block 13. One end of the Y-axis micrometer 22 is connected to the Y-axis micrometer positioning block 20 through the Y-axis coupling 21. The working principle is the same as that of the X-axis adjusting member, making them connected as a whole to achieve a sub-micron level of movement accuracy.

[0032] Reference Figures 1-4 As shown in the figure, a through hole is provided inside the Z-axis moving plate 6 for the lead screw body 2 to pass through. The threaded connecting member includes a lead screw nut (5). A lead screw nut (5) is installed at the upper end of the Z-axis moving plate (6). The lead screw nut 5 is threadedly connected to the lead screw body 2. By rotating the lead screw body 2, the lead screw nut 5 rotates in threaded cooperation with the lead screw body 2, which can drive the Z-axis moving plate 6 to move.

[0033] Reference Figures 1-4 As shown in the figure, a thrust ball bearing 3 is provided at the lower end of the guide rail upper support plate 4, which is beneficial to the rotation of the lead screw body 2. The upper end of the lead screw body 2 passes through the inside of the thrust ball bearing 3. The upper end of the lead screw body 2 penetrates through the guide rail upper support plate 4 and is connected with a hand wheel 1. By rotating the provided hand wheel 1, the lead screw body 2 can be driven to rotate, which is further beneficial to driving the Z-axis moving plate 6 to move.

[0034] Reference Figures 1-4 As shown in the figure, the adjusting column is set as a pitching adjusting stud 15. Four groups of pitching adjusting studs 15 are provided. A through hole one matching with the pitching adjusting stud 15 is provided inside the guide rail lower support plate 8, and a through hole two matching with the pitching adjusting stud 15 is provided inside the guide rail upper support plate 4. Nuts threadedly connected to the pitching adjusting stud 15 are installed at both the upper and lower ends of the guide rail upper support plate 4. By rotating the nuts, the height of the nuts on the corresponding pitching adjusting stud 15 is adjusted to achieve the adjustment of the height of the corresponding side of the guide rail lower support plate 8, and further the pitching angle of the adjusting displacement table in the X and Y axis directions can be adjusted, which simplifies the operation and reduces the manufacturing cost at the same time.

[0035] The design of the present utility model reduces the manufacturing cost in terms of structure, simplifies the structure operation and can complete five-dimensional movement; the lifting of the Z-axis is realized by using a lead screw mechanism; the pitching angle control of the vacuum displacement table in the X and Y axes is completed by adjusting the pitching adjusting stud 15 and the nut; the movement of the vacuum displacement table in the X and Y axes is adjusted by using a fixed block and a micrometer head, with an intuitive rotating handle and precision dimensions, making the operation simple, and allowing the user to quickly adjust the position.

[0036] Although the embodiments of the present utility model have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present utility model, and the scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A high vacuum five-dimensional displacement platform, characterized in that: include: A base (23), the upper end of the base (23) is connected to a guide rail lower support plate (8) through an adjustment column, one side of the upper end of the guide rail lower support plate (8) is connected to a guide rail upper support plate (4) through a guide rail group (7), a screw rod body (2) is arranged inside the guide rail upper support plate (4), the two ends of the screw rod body (2) are respectively connected to the guide rail lower support plate (8) and the guide rail upper support plate (4), and the outer end of the screw rod body (2) is connected to the guide rail lower support plate (8) and the guide rail upper support plate (4) through a threaded connector. A Z-axis moving plate (6) is connected, the upper end of the Z-axis moving plate (6) is connected to a Y-axis moving plate (12) via a Y-axis cross guide rail (14), the upper end of the Y-axis moving plate (12) is connected to an X-axis moving plate (10) via an X-axis cross guide rail (11), a bellows (9) is installed inside the X-axis moving plate (10), an open groove is provided inside the Y-axis moving plate (12), and the lower end of the bellows (9) is connected to the base (23); An X-axis adjusting member is provided between the X-axis moving plate (10) and the Y-axis moving plate (12), and a Y-axis adjusting member is provided between the Y-axis moving plate (12) and the Z-axis moving plate (6).

2. A high vacuum five-dimensional displacement platform according to claim 1, characterized in that: The X-axis adjustment component comprises an X-axis micrometer head positioning block (16), an X-axis coupling (17), an X-axis micrometer head (18) and an X-axis micrometer head fixing block (19); the X-axis micrometer head positioning block (16) is installed on one side of the X-axis movable plate (10); the X-axis micrometer head fixing block (19) is installed on one side of the Y-axis movable plate (12); the X-axis micrometer head (18) is installed inside the X-axis micrometer head fixing block (19); and one end of the X-axis micrometer head (18) is connected to the X-axis micrometer head positioning block (16) via the X-axis coupling (17).

3. A high vacuum five-dimensional displacement platform according to claim 2, characterized in that: The Y-axis adjustment component comprises a Y-axis micrometer head positioning block (20), a Y-axis coupling (21), a Y-axis micrometer head (22) and a Y-axis micrometer head fixed block (13); the Y-axis micrometer head fixed block (13) is installed on one side of the Y-axis movable plate (12); the X-axis micrometer head positioning block (16) is installed on one side of the Z-axis movable plate (6); the Y-axis micrometer head (22) is installed inside the Y-axis micrometer head fixed block (13); and one end of the Y-axis micrometer head (22) is connected to the Y-axis micrometer head positioning block (20) via the Y-axis coupling (21).

4. A high vacuum five-dimensional displacement platform according to claim 3, characterized in that: A through hole is provided inside the Z-axis moving plate (6), and the threaded connection part comprises a screw nut (5). The screw nut (5) is mounted on the upper end of the Z-axis moving plate (6), and the screw nut (5) is threadedly connected to the screw body (2).

5. A high vacuum five-dimensional displacement platform according to claim 4, characterized in that: A thrust ball bearing (3) is arranged at the lower end of the guide rail upper support plate (4), the upper end of the screw rod body (2) passes through the interior of the thrust ball bearing (3), and the upper end of the screw rod body (2) passes through the guide rail upper support plate (4) and is connected to a hand wheel (1).

6. A high vacuum five-dimensional displacement platform according to claim 5, characterized in that: The adjustment column is configured as a pitch adjustment stud (15), and the pitch adjustment stud (15) is configured in four groups. A through hole one matching with the pitch adjustment stud (15) is provided inside the guide rail lower support plate (8), and a through hole two matching with the pitch adjustment stud (15) is provided inside the guide rail upper support plate (4). Nuts threadedly connected with the pitch adjustment stud (15) are installed at the upper and lower ends of the guide rail upper support plate (4).

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