Double-sided coating equipment

Abstract

The utility model relates to double-sided coating equipment which comprises a feeding cavity, a coating cavity and a discharging cavity, a first roller transmission line used for transmitting a substrate carrier is arranged in the feeding cavity, a second roller transmission line and a third roller transmission line are arranged in the coating cavity, and a fourth roller transmission line is arranged in the discharging cavity. The first roller transmission line corresponds to the second roller transmission line, a first carrier translation assembly is arranged between the second roller transmission line and the third roller transmission line, and the rotation directions of the second roller transmission line and the third roller transmission line are opposite; a plurality of bidirectional sputter coating cathode mechanisms are arranged between the second roller transmission line and the third roller transmission line, the third roller transmission line corresponds to the fourth roller transmission line, and heating devices for heating substrates are arranged in the feeding cavity and the coating cavity. And cold trap devices for extracting condensable steam are arranged in the feeding cavity and the coating cavity. The double-sided coating equipment not only realizes double-sided coating of a product, but also improves the production efficiency.

Description

Technical Field

[0001] The utility model relates to the technical field of coating equipment, in particular to double-sided coating equipment. Background Art

[0002] Traditional coating equipment generally includes a feeding chamber, a coating chamber and a discharging chamber. A carrier drives a substrate to flow into the feeding chamber for vacuum pumping, and then is transferred to the coating chamber. A single-sided coating cathode mechanism in the coating chamber coats the substrate on one side only. The coated substrate flows into the discharging chamber with the carrier, and the discharging chamber performs buffering and vacuum pumping on the substrate. This coating equipment occupies a large area and has low production efficiency, unable to meet the production needs of society. Summary of the Utility Model

[0003] The technical problem to be solved by the utility model is to provide a double-sided coating equipment, which not only realizes double-sided coating of products, but also improves production efficiency.

[0004] The technical solution adopted by the utility model to solve its technical problem is: a double-sided coating equipment, including a feeding chamber, a coating chamber and a discharging chamber. A first roller transmission line for transmitting a substrate carrier is arranged in the feeding chamber. A second roller transmission line and a third roller transmission line are arranged in the coating chamber. A fourth roller transmission line is arranged in the discharging chamber. The first roller transmission line corresponds to the second roller transmission line. A first carrier translation component is arranged between the second roller transmission line and the third roller transmission line. The second roller transmission line and the third roller transmission line rotate in opposite directions. A plurality of bidirectional sputtering coating cathode mechanisms are arranged between the second roller transmission line and the third roller transmission line. The third roller transmission line corresponds to the fourth roller transmission line.

[0005] Heating devices for heating the substrate are arranged in the feeding chamber, the coating chamber and the discharging chamber. Cold trap devices for removing condensable vapor are arranged in the feeding chamber and the coating chamber.

[0006] In one embodiment, the feeding chamber and the discharging chamber of the double-sided coating equipment are located at the same side end of the coating chamber. The feeding chamber and the discharging chamber are horizontally arranged. The feeding chamber and the discharging chamber are both vertical cavities. The substrate is placed vertically on the carrier, and the carrier is placed on the first roller transmission line.

[0007] In one embodiment, the feeding chamber of the double-sided coating equipment is located at the upper left side end of the coating chamber, and the discharging chamber is located at the lower right side end of the coating chamber. A second carrier translation component is arranged between the third roller transmission line and the fourth roller transmission line. The second carrier translation component is used to transfer the carrier on the third roller transmission line to the fourth roller transmission line. The fourth roller transmission line is located below the third roller transmission line.

[0008] In one embodiment, the loading chamber, the coating chamber, and the unloading chamber of the double-sided coating equipment are horizontal chambers, and the carrier is horizontally placed on the first roller conveyor line.

[0009] In one embodiment, the loading chamber of the double-sided coating equipment sequentially includes a film feeding chamber, a first transition chamber, and a first buffer chamber from left to right.

[0010] In one embodiment, the unloading chamber of the double-sided coating equipment sequentially includes a second buffer chamber, a second transition chamber, and a film discharging chamber from left to right.

[0011] The beneficial effects of the present application are as follows:

[0012] The present application provides a double-sided coating equipment. The double-sided coating equipment cooperates with the first roller conveyor line, the second roller conveyor line, the third roller conveyor line, and the fourth roller conveyor line to transfer the carrier with the substrate in the loading chamber, the coating chamber, and the unloading chamber. The first roller conveyor line conveys the carrier and the substrate into the loading chamber for vacuum pumping operation. After the vacuum pumping is completed, the first roller conveyor line conveys the carrier and the substrate to the second roller conveyor line and flows into the coating chamber. A plurality of bidirectional sputtering coating cathode mechanisms in the coating chamber perform coating operations on the lower surface of the substrate. After the coating is completed, the second roller conveyor line conveys the carrier and the substrate to the first carrier translation assembly. The first carrier translation assembly conveys the carrier and the substrate to the third roller conveyor line. A plurality of bidirectional sputtering coating cathode mechanisms in the coating chamber perform coating operations on the upper surface of the substrate. After the coating is completed, the third roller conveyor line conveys the carrier and the substrate to the fourth roller conveyor line. The fourth roller conveyor line conveys the carrier and the substrate to the unloading chamber for buffering and vacuum pumping operations, and finally transmits the equipment to complete the double-sided coating operation of the substrate. The double-sided coating equipment not only realizes the double-sided coating of the product, but also improves the coating efficiency of the product and reduces the time cost.

[0013] The double-sided coating equipment also uses a heating device to heat the substrate, effectively improving the coating efficiency of the substrate.

[0014] The double-sided coating equipment also uses a cold trap device to capture and pump out the condensable vapor in the loading chamber and the coating chamber, improving the vacuum pumping efficiency. Description of the Drawings

[0015] Figure 1 It is a top view of the double-sided coating equipment according to the embodiment of the present application;

[0016] Figure 2 It is a side view of the double-sided coating equipment according to the embodiment of the present application;

[0017] Wherein:

[0018] 1. Inlet chamber; 2. Coating chamber; 3. Outlet chamber; 4. Heating device; 5. Cold trap device; 11. First roller conveyor line; 12. Loading chamber; 13. First transition chamber; 14. First buffer chamber; 21. Second roller conveyor line; 22. Third roller conveyor line; 23. First carrier translation assembly; 24. Dual magnetron sputtering coating cathode mechanism; 25. Second carrier translation assembly; 31. Fourth roller conveyor line; 32. Second buffer chamber; 33. Second transition chamber; 34. Unloading chamber. Detailed implementation manners

[0019] To make the above objects, features, and advantages of the present utility model more obvious and understandable, the following provides a detailed description of the specific implementation manners of the present utility model in conjunction with the accompanying drawings.

[0020] As Figure 1 and Figure 2 shown, an embodiment of the present application provides a double-sided coating device, including an inlet chamber 1, a coating chamber 2, and an outlet chamber 3. A first roller conveyor line 11 for transporting a substrate carrier is provided in the inlet chamber 1. A second roller conveyor line 21 and a third roller conveyor line 22 are provided in the coating chamber 2. A fourth roller conveyor line 31 is provided in the outlet chamber 3. The first roller conveyor line 11 corresponds to the second roller conveyor line 21. A first carrier translation assembly 23 is provided between the second roller conveyor line 21 and the third roller conveyor line 22. The second roller conveyor line 21 and the third roller conveyor line 22 rotate in opposite directions. A plurality of dual magnetron sputtering coating cathode mechanisms 24 are provided between the second roller conveyor line 21 and the third roller conveyor line 22. The third roller conveyor line 22 corresponds to the fourth roller conveyor line 31.

[0021] Heating devices 4 for heating the substrate are provided in both the inlet chamber 1 and the coating chamber 2. Cold trap devices 5 for removing condensable vapor are provided in the inlet chamber 1 and the coating chamber 2.

[0022] Specifically, the feeding chamber 1 sequentially includes a wafer loading chamber 12, a first transition chamber 13, and a first buffer chamber 14 from left to right. The discharging chamber 3 sequentially includes a second buffer chamber 32, a second transition chamber 33, and a wafer unloading chamber 34 from left to right. A plurality of substrates are placed in a carrier, and the carrier is sequentially conveyed by the first roller conveyor line 11 into the wafer loading chamber 12, the first transition chamber 13, and the first buffer chamber 14 for vacuum pumping, transition, and buffering. After the vacuum pumping is completed, the first roller conveyor line 11 conveys the carrier and the substrates onto the second roller conveyor line 21. The second roller conveyor line 21 conveys the carrier and the substrates into the coating chamber 2. Two bidirectional sputtering coating cathode mechanisms 24 coat the lower surface of the substrates. After the coating is completed, the second roller conveyor line 21 conveys the carrier and the substrates onto the first carrier translation assembly 23. The first carrier translation assembly 23 conveys the carrier and the substrates to the third roller conveyor line 22. Two bidirectional sputtering coating cathode mechanisms 24 coat the upper surface of the substrates on the third roller conveyor line 22. After the coating is completed, the third roller conveyor conveys the carrier and the substrates onto the fourth roller conveyor line 31. The fourth roller conveyor line 31 conveys the carrier and the substrates into the discharging chamber 3 for buffering and vacuum pumping operations, and finally discharges from the equipment to complete the double-sided coating operation. Among them, the heating devices 4 in the feeding chamber 1, the coating chamber 2, and the discharging chamber 3 respectively heat the substrates to a suitable temperature to accelerate the coating efficiency of the substrates. The cold trap devices 5 in the feeding chamber 1 and the coating chamber 2 respectively capture and remove the condensable vapor in the chambers, improving the vacuum pumping efficiency of the vacuum pump in the prior art. Among them, the bidirectional sputtering coating cathode mechanism 24, the heating device 4, and the cold trap device 5 are all prior arts. The bidirectional sputtering coating cathode mechanism 24 can refer to the bidirectional coating cathode mechanism in the patent document "CN118086852B".

[0023] In the above structure, through the cooperation of the first roller conveyor line 11, the second roller conveyor line 21, the third roller conveyor line 22, the fourth roller conveyor line 31, and the first carrier translation assembly 23, the carrier and the substrates are conveyed, enabling the bidirectional sputtering coating cathode mechanism 24 to perform double-sided coating on the substrates, greatly improving the coating efficiency of the equipment. The substrates are also heated by the heating device 4, effectively improving the coating efficiency of the substrates. The condensable vapor in the feeding chamber 1 and the coating chamber 2 is captured and removed by the cold trap device 5, improving the vacuum pumping efficiency. Therefore, the double-sided coating equipment not only realizes double-sided coating of the product but also greatly improves the production efficiency.

[0024] As Figure 1 shown, in one embodiment, the feeding chamber 1 and the discharging chamber 3 of the double-sided coating equipment are located at the same side end of the coating chamber 2. The feeding chamber 1 and the discharging chamber 3 are horizontally arranged. The feeding chamber 1 and the discharging chamber 3 are both vertical cavities, and the substrates are vertically placed on the first roller conveyor line 11.

[0025] Specifically, the double-sided coating equipment is a vertical coating production line. The loading chamber 1 and the unloading chamber 3 are vertical cavities. The carrier is positioned on the first roller conveyor line 11, and the substrate is vertically fixed on the carrier. The loading chamber 1 and the unloading chamber 3 are horizontally located at both ends of the coating chamber 2. This double-sided coating equipment not only occupies a small area but also has high production efficiency.

[0026] As Figure 2 shown, in one embodiment, the loading chamber 1 of the double-sided coating equipment is located at the upper left side of the coating chamber 2, the unloading chamber 3 is located at the lower right side of the coating chamber 2, and a second carrier translation assembly 25 is arranged between the third roller conveyor line 22 and the fourth roller conveyor line 31. The second carrier translation assembly 25 is used to transfer the carrier on the third roller conveyor line 22 to the fourth roller conveyor line 31, and the fourth roller conveyor line 31 is located below the third roller conveyor line 22.

[0027] Specifically, the double-sided coating equipment is a horizontal coating production line. The first roller conveyor line 11 drives the carrier and the substrate to sequentially enter the loading chamber 12, the first transition chamber 13, and the first buffer chamber 14 for vacuum pumping, transition, and buffering. Then, the first roller conveyor line 11 drives the carrier and the substrate to be transferred to the second roller conveyor line 21. The second roller conveyor line 21 drives the carrier and the substrate into the coating chamber 2, and the bidirectional sputtering coating cathode mechanism 24 coats the lower surface of the substrate. After coating, the second roller conveyor line 21 drives the carrier and the substrate to move onto the first carrier translation assembly 23. The first carrier translation assembly 23 transfers the carrier and the substrate downward to the third roller conveyor line 22, and the bidirectional sputtering coating cathode mechanism 24 coats the upper surface of the substrate. After coating, the third roller conveyor line 22 transfers the carrier and the substrate to the second carrier translation assembly 25, and the second carrier translation assembly 25 drives the carrier and the substrate to move downward to the fourth roller conveyor line 31. The fourth roller conveyor line 31 transfers the carrier and the substrate to the second buffer chamber 32, the second transition chamber 33, and the unloading chamber 34 in sequence for buffering, transition, and vacuum breaking operations, and finally removes the coated substrate from the equipment. Among them, the first carrier translation assembly 23 and the second carrier translation assembly 25 both belong to the prior art and can refer to the upper translation mechanism and the lower translation mechanism in the patent document number "CN118086852B".

[0028] The above setting realizes double-sided coating of the product, greatly improving the coating efficiency of the equipment. Compared with traditional coating equipment, the production efficiency has doubled.

[0029] As Figure 2 shown, in one embodiment, the loading chamber 1, the coating chamber 2, and the unloading chamber 3 of the double-sided coating equipment are horizontal cavities, and the carrier is horizontally placed on the first roller conveyor line 11. This setting improves the stability of substrate transfer.

[0030] As Figure 1 and Figure 2 shown, in one embodiment, the loading chamber 1 of the double-sided coating device sequentially includes a wafer loading chamber 12, a first transition chamber 13, and a first buffer chamber 14 from left to right. This setting facilitates the vacuum pumping, transition, and buffering of the substrate entering the loading chamber 1.

[0031] As Figure 1 and Figure 2 shown, in one embodiment, the unloading chamber 3 of the double-sided coating device sequentially includes a second buffer chamber 32, a second transition chamber 33, and a wafer unloading chamber 34 from left to right. This setting facilitates the buffering, transition, and vacuum breaking of the substrate after coating.

[0032] The above-described embodiments merely represent several implementation manners of the present utility model. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the utility model patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several modifications and improvements can still be made, and these all belong to the protection scope of the present utility model. Therefore, the protection scope of the present utility model patent shall be subject to the appended claims.

Claims

1. Double-sided coating equipment, characterized in that: The invention comprises a feeding chamber (1), a coating chamber (2) and a discharging chamber (3); a first roller transmission line (11) for transmitting a substrate carrier is arranged in the feeding chamber (1); a second roller transmission line (21) and a third roller transmission line (22) are arranged in the coating chamber (2); a fourth roller transmission line (31) is arranged in the discharging chamber (3); the first roller transmission line (11) corresponds to the second roller transmission line (21); a first carrier translation assembly (23) is arranged between the second roller transmission line (21) and the third roller transmission line (22); the second roller transmission line (21) and the third roller transmission line (22) rotate in opposite directions; a plurality of bidirectional sputtering coating cathode mechanisms (24) are arranged between the second roller transmission line (21) and the third roller transmission line (22); the third roller transmission line (22) corresponds to the fourth roller transmission line (31); The feed chamber (1) and the coating chamber (2) are both provided with a heating device (4) for heating the substrate, and the feed chamber (1) and the coating chamber (2) are both provided with a cold trap device (5) for extracting condensable steam.

2. The double-sided coating device according to claim 1, characterized in that: The feed chamber (1) and the discharge chamber (3) are located at the same side end of the coating chamber (2), the feed chamber (1) and the discharge chamber (3) are arranged horizontally, and both the feed chamber (1) and the discharge chamber (3) are vertical chambers. The substrate is placed vertically on a carrier, and the carrier is placed on a first roller transmission line (11).

3. The double-sided coating device according to claim 1, characterized in that: The feeding chamber (1) is located at the upper left end of the coating chamber (2), and the discharging chamber (3) is located at the lower right end of the coating chamber (2). A second carrier translation assembly (25) is arranged between the third roller transmission line (22) and the fourth roller transmission line (31). The second carrier translation assembly (25) is used to transfer the carrier on the third roller transmission line (22) to the fourth roller transmission line (31). The fourth roller transmission line (31) is located below the third roller transmission line (22).

4. The double-sided coating device according to claim 3, characterized in that: The feeding chamber (1), the coating chamber (2) and the discharging chamber (3) are horizontal chambers, and the carrier is placed horizontally on the first roller transmission line (11).

5. The double-sided coating device according to claim 1, characterized in that: The feeding chamber (1) comprises, from left to right, a film feeding chamber (12), a first transition chamber (13) and a first buffer chamber (14).

6. The double-sided coating device according to claim 1, characterized in that: The discharge chamber (3) comprises, from left to right, a second buffer chamber (32), a second transition chamber (33) and a sheet discharge chamber (34).

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