Air inlet pipe group and deposition device
By setting pressure relief holes on the intake pipe of the low-pressure chemical vapor deposition device, the problems of high gas volume for deposition and poor uniformity of the membrane layer are solved, and more efficient gas source utilization and more uniform membrane layer results are achieved.
Patent Information
- Application Number
- CN202422166037.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-04
- Publication Date
- 2025-06-17
- Estimated Expiration
- 2034-09-04
AI Technical Summary
During the use of the existing low-pressure chemical vapor deposition device, there is a problem that the amount of gas used for deposition is high and the uniformity of the obtained film layer is poor.
An intake pipe group is designed, including the provision of specific pressure relief holes on the sides of the intake pipe, through which the air flow is regulated, thereby improving the gas source utilization and uniformity of the membrane layer.
By setting pressure relief holes on the intake pipe, the gas source utilization rate of the low-pressure chemical vapor deposition device is significantly improved, the consumption of silane is reduced, and the internal uniformity and inter-uniformity of the obtained film layer are improved.
Smart Images
Figure CN222990206U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of low-pressure chemical vapor deposition, and particularly relates to an air inlet pipe group and a deposition device. Background Art
[0002] Low-pressure chemical vapor deposition is a reaction process in which the pressure of a gas in a reactor is reduced to about 133 Pa for deposition. It is currently the mainstream technology for BC cell thin film deposition. However, in the process of using existing low-pressure chemical vapor deposition devices, there are still problems such as a relatively high gas consumption for deposition and poor uniformity of the obtained film layer. Content of the Utility Model
[0003] In view of the problems existing in the prior art, the purpose of the utility model is to provide an air inlet pipe group and a deposition device to solve the problems that in the process of using existing low-pressure chemical vapor deposition devices, there are still a relatively high gas consumption for deposition and poor uniformity of the obtained film layer.
[0004] To achieve this purpose, the utility model adopts the following technical solutions:
[0005] In the first aspect, the utility model provides an air inlet pipe group applied to a furnace tube.
[0006] The furnace tube includes: a first region, a second region, and a third region arranged in sequence.
[0007] The air inlet pipe group includes:
[0008] A first air inlet pipe arranged below the boat in the first region. At least one first pressure relief hole is arranged on the side surface of the first air inlet pipe, and a first air outlet is arranged at the end of the first air inlet pipe.
[0009] A second air inlet pipe arranged below the boat in the second region. At least one second pressure relief hole is arranged on the side surface of the second air inlet pipe, and a second air outlet is arranged at the end of the second air inlet pipe.
[0010] A third air inlet pipe arranged below the boat in the third region. At least one third pressure relief hole is arranged on the side surface of the third air inlet pipe, and a third air outlet is arranged at the end of the third air inlet pipe.
[0011] The openings of the first pressure relief hole, the second pressure relief hole, and the third pressure relief hole all face the top of the furnace tube.
[0012] An exhaust pipe is provided in the central region of the furnace tube, and the first intake pipe, the second intake pipe, and the third intake pipe are circumferentially distributed around the exhaust pipe; with the exhaust pipe as the vertex, a first connection line is formed between the first intake pipe and the exhaust pipe, a second connection line is formed between the second intake pipe and the exhaust pipe, and a third connection line is formed between the third intake pipe and the exhaust pipe. The included angle β between the second connection line and the third connection line is greater than the included angle α between the first connection line and the second connection line.
[0013] The intake pipe group provided by the present utility model solves the defect of high gas consumption for deposition by providing specific pressure relief holes on the intake pipes. At the same time, the in-sheet uniformity and inter-sheet uniformity of the film thickness of the obtained film layer are significantly improved, and the service performance of the low-pressure chemical vapor deposition device is enhanced.
[0014] As a preferred technical solution of the present utility model, the distance between the first air outlet and the adjacent first pressure relief hole is 10 - 30 cm;
[0015] The distance between the second air outlet and the adjacent second pressure relief hole is 10 - 30 cm;
[0016] The distance between the third air outlet and the adjacent third pressure relief hole is 10 - 30 cm.
[0017] As a preferred technical solution of the present utility model, at least two first pressure relief holes are provided on the side of the first intake pipe, and the at least two first pressure relief holes are spaced apart starting from the first air outlet of the first intake pipe;
[0018] At least two second pressure relief holes are provided on the side of the second intake pipe, and the at least two second pressure relief holes are spaced apart starting from the second air outlet of the second intake pipe.
[0019] As a preferred technical solution of the present utility model, when the number of the third pressure relief holes is greater than or equal to two, the third pressure relief holes are spaced apart starting from the third air outlet at the end of the third intake pipe far from the first end, and the distance between adjacent third pressure relief holes is 10 - 30 cm.
[0020] As a preferred technical solution of the present utility model, the distance between adjacent first pressure relief holes is 10 - 30 cm;
[0021] The distance between adjacent second pressure relief holes is 10 - 30 cm.
[0022] As a preferred technical solution of the present utility model, the aperture of the first pressure relief hole is 1 - 3 mm;
[0023] The aperture of the second pressure relief hole is 1 - 3 mm;
[0024] The aperture of the third pressure relief hole is 1-3 mm.
[0025] As a preferred technical solution of the present utility model, the shape of the first pressure relief hole includes one of a round hole, an oval hole or a polygonal hole;
[0026] The shape of the second pressure relief hole includes one of a round hole, an oval hole or a polygonal hole;
[0027] The shape of the third pressure relief hole includes one of a round hole, an oval hole or a polygonal hole.
[0028] As a preferred technical solution of the present utility model, the first intake pipe, the second intake pipe and the third intake pipe are arranged adjacent to the bottom of the furnace tube.
[0029] As a preferred technical solution of the present utility model, a tail end sealing rod, a connecting rod, a fastener and a gas path sealing port are sequentially arranged at one end of the first intake pipe away from the first air outlet;
[0030] A tail end sealing rod, a connecting rod, a fastener and a gas path sealing port are sequentially arranged at one end of the second intake pipe away from the second air outlet;
[0031] A tail end sealing rod, a connecting rod, a fastener and a gas path sealing port are sequentially arranged at one end of the third intake pipe away from the third air outlet.
[0032] In a second aspect, the present utility model provides a deposition device, which includes: at least one furnace tube, a deposition cavity for processing products is formed inside the furnace tube; an intake pipe group as described in the first aspect is arranged inside the furnace tube.
[0033] Compared with the prior art solution, the present utility model has the following beneficial effects:
[0034] The low-pressure chemical vapor deposition device provided by the present utility model realizes the improvement of the utilization rate of the gas source used in low-pressure chemical vapor deposition by setting the intake pipe at a specific temperature and setting specific pressure relief holes on the corresponding intake pipe. Compared with the conventional intake method (i.e., the pressure relief holes of the present utility model are not provided on the side wall of the intake pipe), the consumption of silane is reduced by 20%, and at the same time, the uniformity inside the non-silicon film thickness slice and the uniformity between slices are significantly improved. Description of the Drawings
[0035] Figure 1 It is a schematic diagram of the deposition cavity in the embodiment of the present utility model;
[0036] Figure 2 It is a schematic diagram of the first intake pipe in the embodiment of the present utility model;
[0037] Figure 3 It is a schematic diagram of the second intake pipe in the embodiment of the present utility model;
[0038] Figure 4 It is a schematic diagram of the third intake pipe in the embodiment of the present utility model;
[0039] Figure 5 It is a schematic diagram of the position of the intake pipe in the embodiment of the present utility model;
[0040] Figure 6 It is a schematic diagram of the sampling point in the embodiment of the present utility model.
[0041] In the figure: 1 - first region, 2 - second region, 3 - third region, 4 - first intake pipe, 41 - first air outlet, 42 - first pressure relief hole, 5 - second intake pipe, 51 - second air outlet, 52 - second pressure relief hole, 6 - third intake pipe, 61 - third air outlet, 62 - third pressure relief hole, 7 - tail end sealing rod, 8 - connecting rod, 9 - fastener, 10 - air path sealing port, 11 - exhaust pipe;
[0042] α is the angle between the first connecting line and the second connecting line, and β is the angle between the second connecting line and the third connecting line.
[0043] The present utility model will be further described in detail below. However, the following examples are merely simple examples of the present utility model and do not represent or limit the scope of the rights protection of the present utility model. The scope of protection of the present utility model shall be subject to the claims. Specific embodiments
[0044] To better illustrate the present utility model and facilitate understanding of its technical solutions, the typical but non - restrictive embodiments of the present utility model are as follows:
[0045] This embodiment provides an intake pipe group, which is applied to a furnace tube, as shown in Figure 1 , Figure 2 , Figure 3 and Figure 4 .
[0046] The furnace tube includes: a first end, a second end, and a first region 1, a second region 2, and a third region 3 arranged in sequence along the first direction;
[0047] The intake pipe group includes:
[0048] A first intake pipe 4, which extends along the first direction with the first end as the starting point to the first region 1. At least one first pressure relief hole 42 is provided on the side surface of the first intake pipe 4, and a first air outlet 41 is provided at the end of the first intake pipe 4 far from the first end;
[0049] The second intake pipe 5 extends from the first end along the first direction to the second area 2. At least one second pressure relief hole 52 is provided on the side surface of the second intake pipe 5, and a second air outlet 51 is provided at the end of the second intake pipe 5 away from the first end.
[0050] The third intake pipe 6 extends from the first end along the first direction to the third area 3. At least one third pressure relief hole 62 is provided on the side surface of the third intake pipe 6, and a third air outlet 61 is provided at the end of the third intake pipe 6 away from the first end.
[0051] Wherein, the first direction is the direction from the first end to the second end. The furnace tube includes a furnace mouth and a furnace tail. The first end is the furnace mouth and the second end is the furnace tail, or the first end is the furnace tail and the second end is the furnace mouth.
[0052] That is, in the present utility model, the first intake pipe 4, the second intake pipe 5, and the third intake pipe 6 can be selectively extended along any direction of the furnace tube, but it is necessary to ensure that the air outlets and pressure relief openings of the first intake pipe 4, the second intake pipe 5, and the third intake pipe 6 are in the defined positions.
[0053] In the present utility model, the first air outlet 41, the second air outlet 51, and the third air outlet 61 are located in the corresponding first area 1, second area 2, and third area 3.
[0054] Wherein, the distance between the first air outlet 41 at the end of the first intake pipe 4 away from the first end and the adjacent first pressure relief hole 42 is 10 - 30 cm. For example, it can be 10 cm, 15 cm, 20 cm, 25 cm, or 30 cm, etc., but is not limited to the listed values. Other unlisted values within this range also meet the requirements.
[0055] Wherein, the distance between the second air outlet 51 at the end of the second intake pipe 5 away from the first end and the adjacent second pressure relief hole 52 is 10 - 30 cm. For example, it can be 10 cm, 15 cm, 20 cm, 25 cm, or 30 cm, etc., but is not limited to the listed values. Other unlisted values within this range also meet the requirements.
[0056] Wherein, the distance between the third air outlet 61 at the end of the third intake pipe 6 away from the first end and the adjacent third pressure relief hole 62 is 10 - 30 cm. For example, it can be 10 cm, 15 cm, 20 cm, 25 cm, or 30 cm, etc., but is not limited to the listed values. Other unlisted values within this range also meet the requirements.
[0057] Among them, at least two first pressure relief holes 42 are provided on the side of the first intake pipe 4, and the at least two first pressure relief holes 42 are spaced apart starting from the first air outlet 41 at the end of the first intake pipe 4 away from the first end; the distance between adjacent first pressure relief holes 42 is 10-30 cm. For example, it can be 10 cm, 15 cm, 20 cm, 25 cm, or 30 cm, etc., but is not limited to the listed values, and other unlisted values within this range also meet the requirements.
[0058] Among them, at least two second pressure relief holes 52 are provided on the side of the second intake pipe 5, and the at least two second pressure relief holes 52 are spaced apart starting from the second air outlet 51 at the end of the second intake pipe 5 away from the first end; the distance between adjacent second pressure relief holes 52 is 10-30 cm. For example, it can be 10 cm, 15 cm, 20 cm, 25 cm, or 30 cm, etc., but is not limited to the listed values, and other unlisted values within this range also meet the requirements.
[0059] Among them, when the number of the third pressure relief holes 62 is greater than or equal to two, the third pressure relief holes 62 are spaced apart starting from the third air outlet 61 at the end of the third intake pipe 6 away from the first end, and the distance between adjacent third pressure relief holes 62 is 10-30 cm. For example, it can be 10 cm, 15 cm, 20 cm, 25 cm, or 30 cm, etc., but is not limited to the listed values, and other unlisted values within this range also meet the requirements.
[0060] Among them, the openings of the first pressure relief holes 42, the second pressure relief holes 52, and the third pressure relief holes 62 all face the top of the furnace tube.
[0061] Among them, the aperture of the first pressure relief hole 42 is 1-3 mm. For example, it can be 1 mm, 1.5 mm, 2 mm, 2.5 mm, or 3 mm, etc., but is not limited to the listed values, and other unlisted values within this range also meet the requirements.
[0062] Among them, the aperture of the second pressure relief hole 52 is 1-3 mm. For example, it can be 1 mm, 1.5 mm, 2 mm, 2.5 mm, or 3 mm, etc., but is not limited to the listed values, and other unlisted values within this range also meet the requirements.
[0063] Among them, the aperture of the third pressure relief hole 62 is 1-3 mm. For example, it can be 1 mm, 1.5 mm, 2 mm, 2.5 mm, or 3 mm, etc., but is not limited to the listed values, and other unlisted values within this range also meet the requirements.
[0064] Among them, the shape of the first pressure relief hole 42 includes one of a round hole, an oval hole, or a polygonal hole.
[0065] Among them, the shape of the second pressure relief hole 52 includes one of a round hole, an oval hole, or a polygonal hole.
[0066] Among them, the shape of the third pressure relief hole 62 includes one of a round hole, an oval hole, or a polygonal hole.
[0067] In the present utility model, the polygonal hole is exemplarily a triangular hole, a rectangular hole, a square hole, a pentagonal hole, a hexagonal hole, an octagonal hole, etc.
[0068] Among them, the first intake pipe 4, the second intake pipe 5, and the third intake pipe 6 are arranged adjacent to the bottom of the furnace tube;
[0069] An exhaust pipe 11 is arranged in the central area of the furnace tube, and the first intake pipe 4, the second intake pipe 5, and the third intake pipe 6 are distributed circumferentially around the exhaust pipe 11;
[0070] Taking the exhaust pipe 11 as the vertex, the first intake pipe 4 forms a first connection line with the exhaust pipe 11, the second intake pipe 5 forms a second connection line with the exhaust pipe 11, the third intake pipe 6 forms a third connection line with the exhaust pipe 11, and the included angle β between the second connection line and the third connection line is greater than the included angle α between the first connection line and the second connection line, as Figure 5 shown.
[0071] In this embodiment, the bottom of the furnace tube refers to the position where the lowest point of the furnace tube is located, and the top of the furnace tube is the position where the highest point of the furnace tube is located. At this time, the furnace tube is horizontally placed with the long end.
[0072] Among them, in the area of the first intake pipe 4 near the first end, a tail end sealing rod 7, a connecting rod 8, a fastener 9, and a gas path sealing port 10 are sequentially arranged along the second direction, as Figure 2 shown.
[0073] Among them, in the area of the second intake pipe 5 near the first end, a tail end sealing rod 7, a connecting rod 8, a fastener 9, and a gas path sealing port 10 are sequentially arranged along the second direction, as Figure 3 shown.
[0074] Among them, in the area of the third intake pipe 6 near the first end, a tail end sealing rod 7, a connecting rod 8, a fastener 9, and a gas path sealing port 10 are sequentially arranged along the second direction, as Figure 4 shown.
[0075] Furthermore, this embodiment provides a deposition device, and the deposition device includes: at least one furnace tube, a deposition chamber for processing products is formed in the furnace tube; an intake pipe group as described above is arranged in the furnace tube.
[0076] Among them, the low-pressure chemical vapor deposition device further includes an exhaust gas extraction device, a heating device, and a vacuum pumping device.
[0077] In the present utility model, the exhaust gas extraction device, the heating device, and the vacuum pumping device in the device are connected to detection devices such as a pressure detection device and a temperature detection device through a control center to achieve intelligent control of relevant devices.
[0078] Furthermore, in order to illustrate the good usage effects that the intake pipe group provided by the present utility model can achieve, actual examples are used for illustration as follows:
[0079] Embodiment 1
[0080] The deposition device adopted in this embodiment is as follows:
[0081] The furnace tube is divided into a first region 1, a second region 2, and a third region 3 from the furnace mouth to the furnace tail, and is divided into 6 temperature zones in total, including a first temperature zone, a second temperature zone, a third temperature zone, a fourth temperature zone, a fifth temperature zone, and a sixth temperature zone; among them, 3 carriers are respectively arranged in the second temperature zone, the third temperature zone, the fourth temperature zone, and the fifth temperature zone.
[0082] In the direction from the furnace mouth to the furnace tail, at this time, in the first region 1, that is, in the second temperature zone, a first intake pipe 4 is a 3.15 m straight-through pressure relief pipe (1 first pressure relief hole 42 with a diameter of 2 mm is arranged at every interval of 20 cm from the gas outlet, and there are 2 holes in total), in the second region 2, that is, between the third temperature zone and the fourth temperature zone, a second intake pipe 5 is a 2.3 m straight-through pressure relief pipe (1 second pressure relief hole 52 with a diameter of 2 mm is arranged at every interval of 20 cm from the gas outlet, and there are 2 holes in total), and in the third region 3, that is, in the fifth temperature zone, a third intake pipe 6 is a 1.45 m straight-through pressure relief pipe (1 third pressure relief hole 62 with a diameter of 2 mm is arranged 20 cm from the gas outlet), and it is installed at the bottom of the furnace tube.
[0083] In the direction from the furnace mouth to the furnace tail, the first gas outlet 41 of the 3.15 m straight-through pressure relief pipe, that is, the first exhaust pipe 4, is located below the third carrier in the second temperature zone, the second gas outlet 51 of the 2.3 m straight-through pressure relief pipe, that is, the second exhaust pipe 5, is located between the third temperature zone and the fourth temperature zone, and the third gas outlet 61 of the 1.45 m straight-through pressure relief pipe, that is, the third exhaust pipe 6, is located below the first carrier in the fifth temperature zone.
[0084] Based on the above low-pressure chemical vapor deposition device, a low-pressure chemical deposition verification test is carried out. In order to deposit an amorphous silicon film layer on a silicon wafer substrate, in the experiment, the carriers in the four temperature zones are sequentially numbered as A1 - A12 along the furnace mouth to the furnace tail. The uniformity results of the obtained amorphous silicon film layer are shown in Table 1. During the detection, 5 detection points are selected on the silicon wafer for uniformity testing, and the sampling points are as Figure 6 shown.
[0085] Table 1
[0086]
[0087]
[0088] As can be seen from the results in Table 1, for the solution provided by the present utility model, the in-sheet uniformity and inter-sheet uniformity of the amorphous silicon film flakes in the direct-through pressure relief hole air intake mode are better than those in the conventional air intake mode. At the same time, the consumption of silane is reduced. Under the same deposition rate and the same number of wafers carried, the silane consumption in the direct-through pressure relief hole air intake mode is 20% lower than that in the conventional air intake mode. Further, by combining with nitrogen dilution, the problems of slow P-poly deposition rate and white edges at the edges can be solved. Due to the simple structure, the manufacturing cost is greatly reduced, and it has a wide application prospect.
[0089] It is declared that the present utility model uses the above embodiments to illustrate the detailed structural features of the present utility model, but the present utility model is not limited to the above detailed structural features, that is, it does not mean that the present utility model must rely on the above detailed structural features to be implemented. Those skilled in the art should understand that any improvement to the present utility model, the equivalent replacement of the components selected for the present utility model, the addition of auxiliary components, and the selection of specific methods, etc., all fall within the protection scope and the disclosure scope of the present utility model.
[0090] The preferred embodiments of the present utility model have been described in detail above. However, the present utility model is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present utility model, various simple modifications can be made to the technical solution of the present utility model, and these simple modifications all belong to the protection scope of the present utility model.
[0091] In addition, it should be noted that, in the case of no contradiction, the various specific technical features described in the above specific embodiments can be combined in any suitable manner. To avoid unnecessary repetition, the present utility model will not separately describe various possible combination methods.
[0092] In addition, any combination can be made between different embodiments of the present utility model, as long as it does not violate the idea of the present utility model, and it should also be regarded as the content disclosed by the present utility model.
Claims
1. An air intake pipe assembly, applied to a furnace pipe, characterized in that: The furnace tube comprises: a first area, a second area and a third area which are arranged in sequence; The air intake pipe group comprises: A first air inlet pipe is disposed below the boat in the first area, the side of the first air inlet pipe is provided with at least one first pressure relief hole, and the end of the first air inlet pipe is provided with a first air outlet; A second air inlet pipe is disposed below the boat in the second area, the side of the second air inlet pipe is provided with at least one second pressure relief hole, and the end of the second air inlet pipe is provided with a second air outlet; A third air inlet pipe is disposed below the boat in the third area, the side of the third air inlet pipe is provided with at least one third pressure relief hole, and the end of the third air inlet pipe is provided with a third air outlet; The openings of the first pressure relief hole, the second pressure relief hole and the third pressure relief hole are all toward the top of the furnace tube; An exhaust pipe is arranged in the central area of the furnace pipe, and the first air inlet pipe, the second air inlet pipe and the third air inlet pipe are distributed along the circumference surrounding the exhaust pipe; with the exhaust pipe as the vertex, the first air inlet pipe and the exhaust pipe form a first connecting line, the second air inlet pipe and the exhaust pipe form a second connecting line, and the third air inlet pipe and the exhaust pipe form a third connecting line, and the angle β between the second connecting line and the third connecting line is greater than the angle α between the first connecting line and the second connecting line.
2. The air intake pipe assembly according to claim 1, characterized in that: The distance between the first air outlet and the adjacent first pressure relief hole is 10-30 cm; The distance between the second air outlet and the adjacent second pressure relief hole is 10-30 cm; The distance between the third air outlet and the adjacent third pressure relief hole is 10-30 cm.
3. The air intake pipe assembly according to claim 1, characterized in that: At least two first pressure relief holes are arranged on the side of the first air inlet pipe, and the at least two first pressure relief holes are spaced apart from each other with the first air outlet of the first air inlet pipe as a starting point; At least two second pressure relief holes are arranged on the side of the second air inlet pipe, and the at least two second pressure relief holes are distributed at intervals with the second air outlet of the second air inlet pipe as a starting point.
4. The air intake pipe assembly according to claim 1, characterized in that: When the number of the third pressure relief holes is greater than or equal to two, the third pressure relief holes are spaced apart starting from the third air outlet of the third air inlet pipe, and the spacing between adjacent third pressure relief holes is 10-30 cm.
5. The air intake pipe assembly according to claim 3, characterized in that: The spacing between adjacent first pressure relief holes is 10-30 cm; The distance between adjacent second pressure relief holes is 10-30 cm.
6. The air intake pipe assembly according to claim 1, characterized in that: The aperture of the first pressure relief hole is 1-3 mm; The aperture of the second pressure relief hole is 1-3 mm; The diameter of the third pressure relief hole is 1-3 mm.
7. The air intake pipe assembly according to claim 1, characterized in that: The shape of the first pressure relief hole includes one of a circular hole, an elliptical hole or a polygonal hole; The shape of the second pressure relief hole includes one of a circular hole, an elliptical hole or a polygonal hole; The shape of the third pressure relief hole includes a circular hole, an elliptical hole or a polygonal hole.
8. The air intake pipe assembly according to claim 1, characterized in that: The first air inlet pipe, the second air inlet pipe and the third air inlet pipe are arranged adjacent to the bottom of the furnace tube.
9. The air intake pipe assembly according to claim 1, characterized in that: The end of the first air inlet pipe away from the first air outlet is sequentially provided with a tail end sealing rod, a connecting rod, a fastener and an air path sealing port; The end of the second air inlet pipe away from the second air outlet is sequentially provided with a tail end sealing rod, a connecting rod, a fastener and an air path sealing port; The end of the third air inlet pipe away from the third air outlet is sequentially provided with a tail end sealing rod, a connecting rod, a fastener and an air path sealing port.
10. A deposition device, characterized in that: The deposition device comprises: at least one furnace tube, in which a deposition cavity for processing products is formed; and the furnace tube is provided with an air intake pipe group as described in any one of claims 1 to 9.