Charge coupled device (CCD) camera replacing device and photoetching machine
By designing a CCD camera replacement device, the position and angle of the CCD camera are adjusted by the movement of the rotating seat and bracket, the alignment accuracy reduction caused by mismatch of CCD camera models in lithography machines is solved, and the effect of reducing maintenance costs and normal production is achieved.
Patent Information
- Application Number
- CN202422324730.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-24
- Publication Date
- 2025-06-17
- Estimated Expiration
- 2034-09-24
AI Technical Summary
In existing lithography machines, mismatch in CCD camera models leads to a reduced alignment accuracy and the cost of replacing the auxiliary alignment unit is high.
A CCD camera replacement device is designed, including a mounting base, a rotating seat, a bracket and a CCD camera. Through the relative movement of the rotating seat and the bracket, the position and angle of the CCD camera are adjusted to suit different models of CCD cameras.
It realizes that the position and angle of the CCD camera is adjusted without replacing the entire auxiliary alignment unit, meets the alignment accuracy requirements of the lithography machine, reduces maintenance costs, and can normally replace the original CCD camera for production.
Smart Images
Figure CN222992569U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of optical machinery, in particular to a CCD camera replacement device and a lithography machine. Background Art
[0002] The alignment accuracy of a lithography machine is crucial for semiconductor manufacturing. Any factor affecting the alignment accuracy may lead to a decline in the chip manufacturing quality. At different stages, the production processes and production versions of the CCD cameras (Charge Coupled Device) in the auxiliary alignment unit of the lithography machine will vary, resulting in different specifications and imaging qualities of the CCD cameras.
[0003] In the prior art, once the original CCD camera in the early-produced auxiliary alignment unit is damaged, it is difficult to find a CCD camera with a matching model, which may lead to the shutdown of the lithography machine. If a CCD camera with a mismatched model is directly installed in the position of the original CCD camera, it will affect the alignment accuracy of the lithography machine. If the entire auxiliary alignment unit is directly replaced, the maintenance cost is very high.
[0004] Therefore, there is an urgent need to provide a CCD camera replacement device, which can adjust the position of the CCD camera after replacing CCD cameras of different models, so as to meet the alignment accuracy requirements of the lithography machine, reduce the maintenance cost, and achieve the purpose of replacing the original CCD camera for normal production. Summary of the Utility Model
[0005] The purpose of the utility model is to provide a CCD camera replacement device and a lithography machine, which can adjust the position of the CCD camera after replacing CCD cameras of different models, so as to meet the alignment accuracy requirements of the lithography machine, reduce the maintenance cost, and achieve the purpose of replacing the original CCD camera for normal production.
[0006] To achieve the above object, the utility model adopts the following technical solutions:
[0007] The utility model provides a CCD camera replacement device, which comprises:
[0008] A mounting base, on which a mounting groove is provided;
[0009] A rotating seat, which is arranged in the mounting groove and can rotate in the mounting groove;
[0010] A bracket, which is arranged on the rotating seat, and the bracket and the rotating seat can move relative to each other in a first direction;
[0011] A CCD camera, which is arranged on the bracket, and the CCD camera and the bracket can move relative to each other in a second direction.
[0012] As an alternative technical solution of a CCD camera replacement device, it further includes a first connecting member. An oblong hole is provided on the mounting base. The first connecting member passes through the oblong hole and its end is threadedly connected to the rotating seat. When the rotating seat rotates, it can drive the first connecting member to slide in the oblong hole.
[0013] As an alternative technical solution of a CCD camera replacement device, at least two oblong holes are provided around the circumference of the mounting groove, and the first connecting members are arranged in one-to-one correspondence with the oblong holes.
[0014] As an alternative technical solution of a CCD camera replacement device, it further includes a second connecting member. A first guiding groove is formed on the bracket. The second connecting member passes through the first guiding groove and its end is threadedly connected to the rotating seat. The second connecting member can slide in the first guiding groove along the first direction.
[0015] As an alternative technical solution of a CCD camera replacement device, four first threaded holes are provided on the rotating seat, and the four first threaded holes are arranged in a square. Two first guiding grooves are arranged side by side. The two second connecting members respectively pass through the first guiding grooves and are in threaded cooperation with two adjacent first threaded holes.
[0016] As an alternative technical solution of a CCD camera replacement device, it further includes a third connecting member. A second guiding groove is further formed on the bracket. The third connecting member passes through the second guiding groove and its end is threadedly connected to the CCD camera. The third connecting member can slide in the second guiding groove along the second direction.
[0017] As an alternative technical solution of a CCD camera replacement device, two second guiding grooves are arranged side by side, and the third connecting members are arranged in one-to-one correspondence with the second guiding grooves.
[0018] As an alternative technical solution of a CCD camera replacement device, the thickness of the rotating seat is equal to or less than the depth of the mounting groove.
[0019] As an alternative technical solution of a CCD camera replacement device, an avoidance through hole is provided on the rotating seat, and the CCD camera can be exposed from the avoidance through hole.
[0020] The present utility model provides a lithography machine, which includes a main body and the CCD camera replacement device, and the CCD camera replacement device is arranged on the main body. Beneficial effects:
[0021] The present utility model provides a CCD camera replacement device, which includes a mounting base, a rotating seat, a bracket, and a CCD camera. An installation groove is provided on the mounting base, and the rotating seat is arranged in the installation groove and can rotate in the installation groove; the bracket is arranged on the rotating seat, and the bracket and the rotating seat can move relative to each other in a first direction, and the CCD camera is arranged on the bracket, and the CCD camera and the bracket can move relative to each other in a second direction. By using the mounting base and the rotating seat as the basis, mounting the bracket on the rotating seat and replacing and mounting the CCD camera on the bracket, the angle of the CCD camera can be adjusted by rotating the rotating seat, and the relative position of the CCD camera and the mounting base can be adjusted by moving the bracket in the first direction or moving the CCD camera in the second direction, so that the replaced CCD camera can be adjusted to meet the alignment requirements, without replacing the entire auxiliary alignment unit, reducing the maintenance cost. The replaced CCD camera replacement device can replace the original CCD camera for normal production.
[0022] The present utility model provides a lithography machine, which includes a main body and a CCD camera replacement device arranged on the main body. The CCD camera replacement device is used to replace the original damaged CCD camera, reducing the maintenance cost. Description of the Drawings
[0023] Figure 1 is a schematic structural diagram of the CCD camera replacement device provided by an embodiment of the present utility model;
[0024] Figure 2 is a partial exploded view of the CCD camera replacement device provided by an embodiment of the present utility model;
[0025] Figure 3 is a schematic structural diagram of the mounting base and the rotating seat provided by an embodiment of the present utility model Figure 1 ;
[0026] Figure 4 is a schematic structural diagram of the mounting base and the rotating seat provided by an embodiment of the present utility model Figure 2 ;
[0027] Figure 5 is a schematic structural diagram of the rotating seat and the bracket provided by an embodiment of the present utility model;
[0028] Figure 6 is a schematic structural diagram of the bracket provided by an embodiment of the present utility model.
[0029] In the figure:
[0030] 10. Mounting base; 11. Installation groove; 12. Installation hole; 13. Kidney-shaped hole;
[0031] 20. Rotating seat; 21. First threaded hole; 22. Second threaded hole; 23. Avoidance through hole;
[0032] 30. Bracket; 31. First guide groove; 32. Second guide groove;
[0033] 40. CCD camera. Detailed implementation manner
[0034] The present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present utility model, rather than limiting the present utility model. In addition, it should be noted that for the convenience of description, only the parts related to the present utility model rather than all the structures are shown in the drawings.
[0035] In the description of the present utility model, unless otherwise clearly defined and limited, the terms "connected", "connected to", and "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.
[0036] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "over", and "on" the second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "below", "under", and "beneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or simply means that the horizontal height of the first feature is lower than that of the second feature.
[0037] In the description of this embodiment, the orientation or positional relationships such as "above", "below", "right", etc. are based on the orientation or positional relationships shown in the drawings, and are only for the convenience of description and simplifying the operation, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the present utility model. In addition, the terms "first" and "second" are only used for distinction in description and do not have special meanings.
[0038] Such as Figures 1 to 6As shown in the figure, this embodiment provides a CCD camera replacement device and a lithography machine. The lithography machine includes a main body and a CCD camera replacement device disposed on the main body. The CCD camera replacement device includes a mounting base 10, a rotating seat 20, a bracket 30, and a CCD camera 40. The mounting base 10 is provided with a mounting groove 11. The rotating seat 20 is disposed in the mounting groove 11 and can rotate within the mounting groove 11. The bracket 30 is disposed on the rotating seat 20. The bracket 30 and the rotating seat 20 can move relative to each other in a first direction. The CCD camera 40 is disposed on the bracket 30. The CCD camera 40 and the bracket 30 can move relative to each other in a second direction.
[0039] Based on the mounting base 10 and the rotating seat 20, by mounting the bracket 30 on the rotating seat 20 and replacing and mounting the CCD camera 40 on the bracket 30, the angle of the CCD camera 40 can be adjusted by the rotation of the rotating seat 20. By moving the bracket 30 in the first direction or moving the CCD camera 40 in the second direction, the relative position between the CCD camera 40 and the mounting base 10 can be adjusted, so that the replaced CCD camera 40 can be adjusted to meet the alignment requirements without replacing the entire auxiliary alignment unit, reducing the maintenance cost. The replaced CCD camera replacement device can replace the original CCD camera for normal production. In this embodiment, the first direction is the horizontal direction, and the second direction is the vertical direction.
[0040] Specifically, the mounting base 10 is square, and mounting holes 12 are provided at the four corners of the mounting base 10. Bolts pass through the mounting holes 12 and are fixed on the main body of the lithography machine. By providing four mounting holes 12, it helps to ensure the stability of the mounting base 10 after installation.
[0041] In this embodiment, the mounting groove 11 is a circular groove, and the rotating seat 20 is also in the shape of a circular flat plate. The shape of the rotating seat 20 matches the shape of the mounting groove 11. The rotating seat 20 can rotate around its own axis direction. A gap for relative rotation between the outer side wall of the rotating seat 20 and the inner wall of the mounting groove 11 is left. The thickness of the rotating seat 20 is equal to or less than the depth of the mounting groove 11. By setting the thickness of the rotating seat 20 to be equal to or less than the depth of the mounting groove 11, the rotating seat 20 can be completely located within the mounting groove 11. When the bracket 30 is mounted on the rotating seat 20, the bracket 30 can move along the first direction by fitting on the surface of the rotating seat 20 or the mounting base 10.
[0042] Furthermore, the CCD camera replacement device further includes a first connecting member. The mounting base 10 is provided with a kidney-shaped hole 13. The first connecting member passes through the kidney-shaped hole 13 and its end is threadedly connected to the rotating seat 20. The rotation of the rotating seat 20 can drive the first connecting member to slide within the kidney-shaped hole 13. At least two kidney-shaped holes 13 are provided around the circumference of the mounting groove 11, and the first connecting members and the kidney-shaped holes 13 are arranged in one-to-one correspondence.
[0043] By providing an oblong hole 13 on the mounting base 10 and providing a first connecting member, the rotating seat 20 is fixed on the mounting base 10 through the first connecting member. When the rotating seat 20 rotates, it can drive the first connecting member to slide in the oblong hole 13, changing the relative position between the mounting base 10 and the rotating seat 20, and further adjusting the setting angle of the CCD camera 40 relative to the lithography machine body. The first connecting member can be a bolt or a screw. By providing at least two oblong holes 13, the rotating seat 20 can be installed on the mounting base 10 using the first connecting member at different positions, and the rotation of the rotating seat 20 can be restricted from different positions, ensuring the smooth rotation of the rotating seat 20.
[0044] In this embodiment, a through hole is provided in the middle of the bottom of the installation groove 11, and an oblong hole 13 is provided at the edge of the bottom of the installation groove 11; there are three oblong holes 13, and the three oblong holes 13 are evenly spaced circumferentially around the installation groove 11; a second threaded hole 22 is provided on the rotating seat 20, and the second threaded hole 22 corresponds to the oblong hole 13 one by one; there are three second threaded holes 22, and the distance from the center of each second threaded hole 22 to the center position of the rotating seat 20 is equal. By providing at least two oblong holes 13 along the circumference of the installation groove 11, the rotation direction of the rotating seat 20 can be restricted.
[0045] Further, an avoidance through hole 23 is provided on the rotating seat 20, and the CCD camera 40 can be exposed from the avoidance through hole 23. In this embodiment, the avoidance through hole 23 communicates with the through hole provided in the middle of the bottom of the installation groove 11, and the CCD camera 40 can be exposed from the avoidance through hole 23 and the through hole.
[0046] Further, the CCD camera replacement device further includes a second connecting member. A first guiding groove 31 is provided on the bracket 30. The second connecting member passes through the first guiding groove 31 and its end is threadedly connected to the rotating seat 20. The second connecting member can slide in the first guiding groove 31 along the first direction. By providing the first guiding groove 31 and the second connecting member, the bracket 30 is fixed on the rotating seat 20, and the second connecting member can slide in the first guiding groove 31, so that the relative position between the bracket 30 and the rotating seat 20 along the first direction can be adjusted. In other embodiments, in order to make the bracket 30 and the CCD camera 40 movable, a slide rail structure can also be used.
[0047] See Figure 5, in this embodiment, there are four first threaded holes 21 provided on the rotating seat 20, and the four first threaded holes 21 are arranged in a square. There are two first guiding grooves 31 arranged side by side. Two second connecting members respectively pass through the first guiding grooves 31 and are in threaded cooperation with two adjacent first threaded holes 21. By providing four first threaded holes 21 arranged in a square on the rotating seat 20 and arranging two first guiding grooves 31 side by side on the bracket 30, when installing the bracket 30, two adjacent first threaded holes 21 on the rotating seat 20 can be selected according to the actual required angle, and a second connecting member is installed in the first threaded hole 21, so that the relative position angle between the bracket 30 and the rotating seat 20 meets the actual requirements.
[0048] In this embodiment, the bracket 30 is in the shape of an L-shaped plate; the bracket 30 includes a top plate and a side plate connected to the top plate. The plane where the top plate is located and the plane where the side plate is located are perpendicular. The first guiding groove 31 penetrates through the top plate along the second direction; the bracket 30 is made of aluminum alloy material. By making the bracket 30 of aluminum alloy material, it has the characteristics of light weight and low cost.
[0049] Optionally, the first connecting member is a bolt or a screw. The first connecting member first passes through the first guiding groove 31 and the end is in threaded connection with the rotating seat 20. In this embodiment, the first threaded hole 21 is a countersunk threaded hole. The first connecting member includes a countersunk head screw and a nut. The countersunk head screw penetrates into the first threaded hole 21 from the top of the rotating seat 20 and is inserted into the first guiding groove 31. The end of the countersunk head screw extends out from the bottom of the top plate of the bracket 30 and is locked with the nut, so as to install the rotating seat 20 on the top plate of the bracket 30.
[0050] In order to fix the CCD camera 40 on the side plate of the bracket 30, the CCD camera replacement device includes a third connecting member. A second guiding groove 32 is also provided on the side plate of the bracket 30. The third connecting member passes through the second guiding groove 32 and the end is in threaded connection with the CCD camera 40. The third connecting member can slide along the second direction in the second guiding groove 32. By providing the second guiding groove 32, the CCD camera 40 is installed on the side plate of the bracket 30 by using the third connecting member, and the third connecting member can slide in the second guiding groove 32, so that the CCD camera 40 can move along the second direction.
[0051] In this embodiment, the second guiding groove 32 penetrates through the side plate along the first direction; there are two second guiding grooves 32 arranged side by side, and the third connecting members are arranged in one-to-one correspondence with the second guiding grooves 32. The third connecting member can be a bolt or a screw. By providing two second guiding grooves 32 arranged side by side, it helps to ensure the installation stability of the CCD camera 40.
[0052] The following is the specific use process of the CCD camera replacement device:
[0053] Remove the original damaged CCD camera, fix the mounting base 10 on the main body of the lithography machine, place the rotating seat 20 in the mounting groove 11 of the mounting base 10, align the second threaded hole 22 on the rotating seat 20 with the kidney-shaped hole 13 on the mounting base 10, insert the first connecting piece into the kidney-shaped hole 13 and thread the end with the second threaded hole 22, so as to mount the rotating seat 20 on the mounting base 10.
[0054] According to the position of the bracket 30 required in actuality, select two adjacent first threaded holes 21 on the rotating seat 20, align the first guiding groove 31 of the bracket 30 with the two first threaded holes 21, and use the second connecting piece to mount the bracket 30 on the rotating seat 20.
[0055] Insert the third connecting piece into the second guiding groove 32 and thread it with the CCD camera 40, so as to mount the CCD camera 40 on the bracket 30.
[0056] The rotating seat 20 can be rotated, or the bracket 30 can be moved in the first direction and the CCD camera 40 can be moved in the second direction, which can ensure clear focus during the alignment adjustment; after the alignment is adjusted, tighten the first connecting piece, the second connecting piece and the third connecting piece, so as to fix the bracket 30 and the CCD camera 40 on the rotating seat 20. It can be understood that the specific operation sequence of adjusting the alignment and the installation sequence of the CCD camera replacement device can be adjusted adaptively according to the actual operation.
[0057] Obviously, the above embodiments of the present invention are only examples for clearly explaining the present invention, rather than limiting the implementation manners of the present invention. For those of ordinary skill in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present invention. It is not necessary and impossible to enumerate all the implementation manners here. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the claims of the present invention.
Claims
1. A CCD camera replacement device, characterized in that: include: A mounting base (10), wherein the mounting base (10) is provided with a mounting groove (11); A rotating seat (20) is disposed in the mounting groove (11) and is capable of rotating in the mounting groove (11); A bracket (30) is arranged on the rotating seat (20), and the bracket (30) and the rotating seat (20) are capable of relative movement along a first direction; A CCD camera (40) is arranged on the bracket (30), and the CCD camera (40) and the bracket (30) are capable of moving relative to each other along a second direction.
2. The CCD camera replacement device according to claim 1, characterized in that: It also includes a first connecting piece, the mounting base (10) is provided with a waist-shaped hole (13), the first connecting piece passes through the waist-shaped hole (13) and the end portion is threadedly connected to the rotating seat (20), and the rotation of the rotating seat (20) can drive the first connecting piece to slide in the waist-shaped hole (13).
3. The CCD camera replacement device according to claim 2, characterized in that: At least two waist-shaped holes (13) are provided around the circumference of the mounting groove (11), and the first connecting piece and the waist-shaped holes (13) are provided in a one-to-one correspondence.
4. The CCD camera replacement device according to claim 1, characterized in that: It also includes a second connecting member, a first guide groove (31) is provided on the bracket (30), the second connecting member passes through the first guide groove (31) and the end portion is threadedly connected to the rotating seat (20), and the second connecting member can slide in the first guide groove (31) along the first direction.
5. The CCD camera replacement device according to claim 4, characterized in that: The rotating seat (20) is provided with four first threaded holes (21), the four first threaded holes (21) are arranged in a square, two first guide grooves (31) are arranged side by side, and two second connecting members respectively pass through the first guide grooves (31) and are threadedly matched with two adjacent first threaded holes (21).
6. The CCD camera replacement device according to claim 4, characterized in that: It also includes a third connecting member, and the bracket (30) is also provided with a second guide groove (32). The third connecting member passes through the second guide groove (32) and the end portion is threadedly connected to the CCD camera (40). The third connecting member can slide in the second guide groove (32) along the second direction.
7. The CCD camera replacement device according to claim 6, characterized in that: Two second guide grooves (32) are arranged side by side, and the third connecting members are arranged in a one-to-one correspondence with the second guide grooves (32).
8. The CCD camera replacement device according to any one of claims 1 to 7, characterized in that: The thickness of the rotating seat (20) is equal to or less than the depth of the mounting groove (11).
9. The CCD camera replacement device according to any one of claims 1 to 7, characterized in that: The rotating seat (20) is provided with an avoidance through hole (23), and the CCD camera (40) can be exposed from the avoidance through hole (23).
10. A photolithography machine, characterized in that: The lithography machine includes a main body and a CCD camera replacement device as described in any one of claims 1 to 9, and the CCD camera replacement device is arranged on the main body.