Light source detection sealing device and light source detection device

Abstract

The utility model discloses a light source detection sealing device and a light source detection device, and belongs to the technical field of semiconductor chip detection equipment. The utility model relates to a light source detection sealing device which comprises a connecting frame which is used for being connected with a detection light source and can move between a first position and a second position relative to a detection light source box; light-transmitting glass is arranged on the connecting frame and is positioned on one side of the lower opening of the detection light source box; a sealing piece is arranged between the light-transmitting glass and the lower side of the detection light source box; and when the connecting frame moves to the first position, the connecting frame drives the light-transmitting glass to be matched with the sealing piece at the same time so as to seal the lower opening of the detection light source box. The chip is located on the outer side of the detection light source box, after the lower opening of the detection light source box is sealed, steam generated after high-temperature plastic packaging of the chip is completed cannot affect and pollute the light source light splitting lens in the detection light source box, the imaging effect is prevented from being affected, and the appearance detection accuracy of the chip is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor chip detection equipment, and more specifically, to a light source detection sealing device and a light source detection device. Background Art

[0002] In the process of semiconductor chip production, it is necessary to seal the silicon chip. This process is called injection molding. Specifically, the plastic encapsulation raw material is melted by high temperature and extruded into the plastic encapsulation mold to achieve the purpose of sealing the silicon chip. After high-temperature injection molding, the chip needs to be subjected to appearance defect detection before entering the next process. The coaxial light source has the best effect in the appearance detection of this link. However, the following problems will occur during the detection:

[0003] (1) The chip just after injection molding will generate high-temperature steam, and the steam will rise upward to contaminate the beam splitter lens of the coaxial light source, thereby affecting the imaging of the vision system. In severe cases, it will also affect the detection of products;

[0004] (2) It is very difficult to clean the beam splitter lens of the coaxial light after being contaminated, and it is easy to be damaged. Summary of the Utility Model

[0005] The utility model provides a light source detection sealing device, which can seal the light source and avoid the steam rising upward to contaminate the beam splitter lens of the coaxial light source.

[0006] It also provides a light source detection device, which uses the light source detection sealing device for sealing to avoid being affected by the high-temperature chip.

[0007] To achieve the above object, the technical solution provided by the utility model is as follows:

[0008] A light source detection sealing device includes:

[0009] A connecting frame, which is used to connect with the detection light source box and can move relative to the detection light source box between a first position and a second position;

[0010] A light-transmitting glass is arranged on the connecting frame, and the light-transmitting glass is located on one side of the lower opening of the detection light source box; a sealing member is arranged between the light-transmitting glass and the lower side of the detection light source box;

[0011] When the connecting frame moves to the first position, it simultaneously drives the light-transmitting glass and the sealing member to cooperate to seal the lower opening of the detection light source box.

[0012] Further, the connecting frame includes a support plate, the light-transmitting glass is detachably arranged on the support plate, and a support plate opening is also formed on the support plate, and the support plate opening is arranged corresponding to the position of the lower opening.

[0013] Further, the connecting frame further includes a slide rail connected to the support plate, and the slide rail is used for sliding connection relative to the detection light source box.

[0014] Further, a transition support frame is further included. The transition support frame is used for connecting with the detection light source box. The transition support frame includes a first-side locking plate, and the slide rail is slidably connected to the first-side locking plate.

[0015] Further, a first locking pin hole corresponding to a first position is provided on the first-side locking plate, and a locking member is connected to the slide rail;

[0016] When the connecting frame moves to the first position, the locking member is in mating connection with the first locking pin hole for fixing the connecting frame.

[0017] Further, a long hole is provided on the slide rail, and the long hole extends in the displacement direction of the connecting frame.

[0018] Further, an auxiliary fixing plate is connected to the first-side locking plate, and a limiting rod is connected to the auxiliary fixing plate. The limiting rod passes through the long hole;

[0019] When the slide rail slides to make the connecting frame reach the first position, the limiting rod is located at one end of the long hole;

[0020] When the slide rail slides to make the connecting frame reach the second position, the limiting rod is located at the other end of the long hole.

[0021] Further, the transition support frame further includes a second-side locking plate. The first-side locking plate and the second-side locking plate are respectively located on opposite sides of the detection light source box, and the structures and connection methods of the first-side locking plate and the second-side locking plate are mirror images; the first-side locking plate and the second-side locking plate are connected by a connecting plate.

[0022] Further, the sealing member is connected around the outside of the lower opening.

[0023] A light source detection device includes a detection light source box and the light source detection sealing device connected thereto;

[0024] A lower opening is provided on one side of the detection light source box;

[0025] When the connecting frame moves to the first position, it simultaneously drives the transparent glass and the sealing member to cooperate to seal the lower opening of the detection light source box.

[0026] Adopting the technical solution provided by the present utility model, compared with the prior art, it has the following beneficial effects:

[0027] (1)A light source detection sealing device of the present utility model includes a connecting frame, on which a light-transmitting glass is provided. The connecting frame is connected to the detection light source box. The connecting frame is moved to the first position, so that the light-transmitting glass cooperates with the sealing member to seal the lower opening of the detection light source box. The chip is located outside the detection light source box. After the lower opening of the detection light source box is sealed, the steam generated just after the chip is completed by high-temperature plastic sealing can no longer affect and contaminate the light source splitting lens inside the detection light source box, avoiding affecting the imaging effect and improving the appearance detection accuracy of the chip.

[0028] (2)A light source detection sealing device of the present utility model, the connecting frame includes a support plate, and the light-transmitting glass is detachably arranged on the support plate. When the steam affects the light-transmitting glass, the light-transmitting glass can be disassembled in a timely, rapid and convenient manner for replacement or cleaning.

[0029] (3)A light source detection sealing device of the present utility model, a first locking pin hole corresponding to the first position is provided on the first side locking plate, and a locking member is connected to the slide rail; when the connecting frame is moved to the first position, the light-transmitting glass cooperates with the sealing member to seal the lower opening of the detection light source box, and at the same time, the locking member is connected with the first locking pin hole to fix the connecting frame, so that the light-transmitting glass and the sealing member maintain the sealing of the lower opening, thereby enabling chip detection.

[0030] (4)A light source detection sealing device of the present utility model, a long hole is provided on the slide rail, and a limiting rod is connected to the auxiliary fixing plate. After the slide rail is moved upward to make the connecting frame reach the first position, the locking member is connected with the first locking pin hole. At this time, the limiting rod is located at the lowest end of the long hole; when the slide rail is moved upward to make the connecting frame reach the second position, the limiting rod is located at the uppermost end of the long hole. The long hole not only guides the slide rail during the up and down movement of the slide rail, but also cooperates with the limiting rod to limit the connecting frame, avoiding the connecting frame from falling off, and can also quickly move to the first position and the second position.

[0031] (5)A light source detection device of the present utility model includes a light source detection sealing device and has the beneficial effects brought by the light source detection sealing device. Description of the Drawings

[0032] Figure 1 It is a schematic diagram of the overall structure of the detection device;

[0033] Figure 2 It is another angle schematic diagram of the overall structure of the detection device;

[0034] Figure 3 It is an exploded schematic diagram of the overall structure of the detection device;

[0035] Figure 4 It is another angle exploded schematic diagram of the overall structure of the detection device.

[0036] Label description:

[0037] 1. Detection light source box; 11. Lower opening; 2. Connection plate; 3. First side locking plate; 31. First locking pin hole; 4. Second side locking plate; 41. Second locking pin hole; 5. Sealing member; 6. Support plate; 61. Slide rail; 611. Long hole; 62. Support plate opening; 7. Locking member; 8. Auxiliary fixing plate; 81. Fixing plate through hole; 9. Transparent glass. Detailed implementation mode

[0038] To further understand the content of the present invention, the present invention will be described in detail in combination with the drawings and embodiments.

[0039] The structures, ratios, sizes, etc. shown in the drawings of this specification are only used to cooperate with the content disclosed in the specification for those skilled in this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the present invention. Therefore, they do not have technical essence. Any modification of the structure, change of the proportional relationship or adjustment of the size, without affecting the effects that the present invention can produce and the purposes that can be achieved, should still fall within the scope that can be covered by the technical content disclosed in the present invention.

[0040] The terms "first", "second", etc. in the specification, claims and above-mentioned drawings of this application are used to distinguish similar objects and do not have to be used to describe a specific order or sequence. It should be understood that such data can be interchanged under appropriate circumstances so as to implement the embodiments of this application described here.

[0041] In this application, the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", etc. is based on the orientation or positional relationship shown in the drawings. These terms are mainly used to better describe this application and its embodiments, and are not used to limit that the indicated devices, elements or components must have a specific orientation or be constructed and operated in a specific orientation. And, in addition to being able to represent the orientation or positional relationship, some of the above terms may also be used to represent other meanings. For example, the term "upper" may also be used to represent a certain attachment relationship or connection relationship in some cases. For those of ordinary skill in the art, the specific meanings of these terms in this application can be understood according to specific circumstances.

[0042] During the production process of semiconductor chips, the chips after high-temperature injection molding need to be subjected to appearance defect detection before entering the next process. Coaxial light sources are usually used for detection, but steam will be generated in the chips after high-temperature injection molding, which will affect and contaminate the beam splitting lenses of the coaxial light sources.

[0043] Such as Figure 1 AndFigure 2 As shown, in this embodiment, a light source detection sealing device is provided, including a connecting frame for connecting with the detection light source box 1 and capable of moving relative to the detection light source box 1 between a first position and a second position.

[0044] A detection light source, such as a coaxial light source, is arranged in the detection light source box 1. A lower opening 11 is arranged on the lower side of the detection light source box 1 (taking the Figure 1 viewing azimuth in the middle view as an example), and the light rays of the light source pass through the lower opening 11.

[0045] A light-transmitting glass 9 is arranged on the connecting frame, and the light-transmitting glass 9 is located on one side of the lower opening 11 of the detection light source box 1; a sealing member 5 is arranged between the light-transmitting glass 9 and the lower side of the detection light source box 1. When the connecting frame moves to the first position, it drives the light-transmitting glass 9 and the sealing member 5 to cooperate to seal the lower opening 11 of the detection light source box 1.

[0046] More specifically, when it is necessary to detect the chip after high-temperature injection molding, the connecting frame is connected to the detection light source box 1, and the connecting frame moves to the first position to make the light-transmitting glass 9 and the sealing member 5 cooperate to seal the lower opening 11 of the detection light source box 1. The chip is located outside the detection light source box 1. After the lower opening 11 of the detection light source box 1 is sealed, the steam generated by the chip can no longer affect and contaminate the light source splitting lens inside the detection light source box 1, avoiding affecting the imaging effect and improving the appearance detection accuracy of the chip.

[0047] In this embodiment, the connecting frame includes a support plate 6, the light-transmitting glass 9 is located on the support plate 6, and a support plate opening 62 is also formed on the support plate 6, and the support plate opening 62 is arranged corresponding to the position of the lower opening 11. The light-transmitting glass 9 has a high light transmittance ratio and a high light transmittance. The support plate opening 62 corresponds to the position of the lower opening 11, and the light source passes through the lower opening 11, the light-transmitting glass 9, and the support plate opening 62 in sequence.

[0048] The light-transmitting glass 9 is detachably arranged on the support plate 6. In this embodiment, the steam generated by the chip cannot affect the internal components of the detection light source box 1, especially the splitting lens. Once it is contaminated, on the one hand, it affects the detection effect, on the other hand, it is very difficult to clean and replace, and it is easy to be damaged. Seriously, it will affect the use of the entire device. After the lower opening 11 of the detection light source box 1 is sealed by the sealing device in this embodiment, the steam will still have a certain impact on the light-transmitting glass 9, but by promptly disassembling the light-transmitting glass 9 for replacement or cleaning, the impact on the detection can be reduced.

[0049] Combined with Figure 3 and Figure 4As shown, in this embodiment, the light-transmitting glass 9 can be placed on the support plate 6. In another case, a clamping groove can be provided on the support plate 6, and the light-transmitting glass 9 is inserted into the clamping groove. Of course, other connection methods can also be set as long as it is convenient to disassemble the light-transmitting glass 9.

[0050] Further, the connecting frame further includes a slide rail 61 connected to the support plate 6, and the slide rail 61 is used for slidably connecting relative to the detection light source box 1. Specifically, the slide rail 61 is vertically arranged relative to the support plate 6 and is located on both sides of the support plate 6, and two slide rails 61 are provided on each side. Taking Figure 1 the view orientation in the figure as an example, when the slide rail 61 moves up and down relative to the detection light source box 1, it drives the support plate 6 to move up and down at the same time.

[0051] The sealing device in this embodiment further includes a transition support frame for connecting to the detection light source box 1. The transition support frame includes a first side locking plate 3, and the slide rail 61 is slidably connected to the first side locking plate 3. When the sealing device is connected to the detection light source box 1, the transition support frame is connected to the outside of the detection light source box 1, and the slide rail 61 is connected to the transition support frame.

[0052] Specifically, a first locking pin hole 31 corresponding to the first position is provided on the first side locking plate 3, and a locking member 7 is connected to the slide rail 61; when the connecting frame moves to the first position, the locking member 7 is in fit connection with the first locking pin hole 31 for fixing the connecting frame. The position of the first locking pin hole 31 is set corresponding to the first position of the connecting frame. When the connecting frame moves to the first position, the light-transmitting glass 9 cooperates with the sealing member 5 to seal the lower opening 11 of the detection light source box 1. At the same time, the locking member 7 is in fit connection with the first locking pin hole 31 to fix the connecting frame, and the light-transmitting glass 9 and the sealing member 5 maintain the sealing of the lower opening 11, so as to perform chip detection.

[0053] In this embodiment, the locking member 7 is a indexing spring pin or an indexing pin, which can be threadedly fixed to the slide rail 61, and at the same time, when the connecting frame reaches the first position, the spring pin automatically pops out and is in fit connection with the first locking pin hole 31. After the detection is completed, by pulling the nut on the indexing spring pin, the spring pin can be disengaged from the first locking pin hole 31, so that the connecting frame moves down, and the operation is simple and convenient. In other cases, the locking member 7 can also adopt other structures, such as a bolt. The bolt passes through the slide rail 61 and is threadedly connected to it. When the connecting frame reaches the first position, the bolt rotates and is in fit connection with the first locking pin hole 31. After the detection is completed, the bolt is loosened to disengage it from the first locking pin hole 31.

[0054] Further, a long hole 611 is provided on the slide rail 61, and the long hole 611 extends in the displacement direction of the connecting frame. An auxiliary fixing plate 8 is connected to the first-side locking plate 3, and a limiting rod is connected to the auxiliary fixing plate 8. The limiting rod passes through the long hole 611; when the slide rail 61 slides to make the connecting frame reach the first position, the limiting rod is located at one end of the long hole 611; when the slide rail 61 slides to make the connecting frame reach the second position, the limiting rod is located at the other end of the long hole 611.

[0055] Specifically, the limiting rod can be a screw rod. A through hole 81 of the fixing plate is provided on the auxiliary fixing plate 8, and the screw rod passes through the through hole 81 of the fixing plate and is connected to the auxiliary fixing plate 8. At the same time, the other end of the screw rod is located in the long hole 611. For Figure 2 detailed description in the middle view orientation, Figure 2 in the figure, the slide rail 61 moves upward. After the connecting frame reaches the first position, the locking member 7 is connected and matched with the first locking pin hole 31. At this time, the limiting rod is located at the lowermost end of the long hole 611; when the slide rail 61 moves upward to make the connecting frame reach the second position, the limiting rod is located at the uppermost end of the long hole 611. On the one hand, the long hole 611 guides the slide rail 61 during the up and down movement of the slide rail 61. On the other hand, it cooperates with the limiting rod to limit the connecting frame to prevent the connecting frame from falling off, and can also quickly move to the first position and the second position.

[0056] In addition, it should be noted that the first position in this embodiment needs to correspond to the sealing position of the light-transmitting glass 9, and the second position is the maximum position where the connecting frame moves to the lower end.

[0057] In this embodiment, the transition support frame further includes a second-side locking plate 4. The first-side locking plate 3 and the second-side locking plate 4 are respectively located on opposite sides of the detection light source box 1, and the structures of the first-side locking plate 3 and the second-side locking plate 4 and the connecting structures thereon are mirror images of each other; the first-side locking plate 3 and the second-side locking plate 4 are connected by a connecting plate 2.

[0058] The seal 5 is connected to the periphery of the outside of the lower opening 11. In this embodiment, the seal 5 is made of an elastic sealing strip, and the elastic sealing strip can be squeezed by the light-transmitting glass 9 to seal the lower opening 11 and prevent steam from entering.

[0059] The present utility model also provides a light source detection device, including a detection light source box 1 and the light source detection sealing device connected thereto; a lower opening 11 is provided on one side of the detection light source box 1; when the connecting frame moves to the first position, it simultaneously drives the light-transmitting glass 9 to cooperate with the seal 5 to seal the lower opening 11 of the detection light source box 1.

[0060] When the detection device conducts detection, the steam generated by the chip after high-temperature injection molding cannot contaminate the inside of the detection light source box 1, preventing the internal components from being affected by the steam.

[0061] In addition, the sealing device can also be applied to other occasions. For example, in a workshop with a large amount of dust, when the lower opening 11 of the detection light source box 1 faces upward, the sealing device can prevent dust.

[0062] The terms "installation", "setting", "provided with", and "connection" referred to herein should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be directly connected, or indirectly connected through an intermediate medium, or there can be internal communication between two devices, components, or parts. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0063] The above schematically describes the present invention and its implementation manners. This description is not restrictive. What is shown in the drawings is only one of the implementation manners of the present invention, and the actual structure is not limited thereto. Therefore, if those of ordinary skill in the art are inspired by it and, without departing from the gist of the present invention, design similar structural manners and embodiments to this technical solution without creative efforts, they shall fall within the protection scope of the present invention.

Claims

1. A light source detection sealing device, characterized in that: include, A connecting frame, used for connecting to the detection light source box (1), and capable of moving between a first position and a second position relative to the detection light source box (1); A light-transmitting glass (9) is arranged on the connecting frame, and the light-transmitting glass (9) is located on one side of the lower opening (11) of the detection light source box (1); a sealing member (5) is arranged between the light-transmitting glass (9) and the lower side of the detection light source box (1); When the connecting frame moves to the first position, it simultaneously drives the light-transmitting glass (9) to cooperate with the sealing member (5) to seal the lower opening (11) of the detection light source box (1).

2. The light source detection sealing device according to claim 1, characterized in that: The connecting frame comprises a support plate (6), the light-transmitting glass (9) is detachably arranged on the support plate (6), and a support plate opening (62) is also provided on the support plate (6), wherein the support plate opening (62) is arranged corresponding to the position of the lower opening (11).

3. The light source detection sealing device according to claim 2, characterized in that: The connecting frame further comprises a slide rail (61) connected to the support plate (6), and the slide rail (61) is used for sliding connection relative to the detection light source box (1).

4. The light source detection sealing device according to claim 3, characterized in that: It also comprises a transition support frame, the transition support frame is used to connect with the detection light source box (1), the transition support frame comprises a first side locking plate (3), and the slide rail (61) is slidably connected to the first side locking plate (3).

5. The light source detection sealing device according to claim 4, characterized in that: A first locking pin hole (31) corresponding to the first position is provided on the first side locking plate (3), and a locking member (7) is connected to the slide rail (61); When the connecting frame moves to the first position, the locking member (7) is connected in cooperation with the first locking pin hole (31) to fix the connecting frame.

6. The light source detection sealing device according to claim 4, characterized in that: The slide rail (61) is provided with a long hole (611), and the long hole (611) extends towards the displacement direction of the connecting frame.

7. The light source detection sealing device according to claim 6, characterized in that: The first side locking plate (3) is connected to an auxiliary fixing plate (8), the auxiliary fixing plate (8) is connected to a limiting rod, and the limiting rod passes through the long hole (611); When the slide rail (61) slides to make the connecting frame reach the first position, the limiting rod is located at one end of the long hole (611); When the slide rail (61) slides to make the connecting frame reach the second position, the limiting rod is located at the other end of the long hole (611).

8. The light source detection sealing device according to any one of claims 4 to 7, characterized in that: The transition support frame further comprises a second side locking plate (4); the first side locking plate (3) and the second side locking plate (4) are respectively located on two opposite sides of the detection light source box (1); and the structures and connection methods of the first side locking plate (3) and the second side locking plate (4) are mirror-imaged; the first side locking plate (3) and the second side locking plate (4) are connected via a connecting plate (2).

9. The light source detection sealing device according to claim 1, characterized in that: The sealing member (5) is connected around the outer side of the lower opening (11).

10. A light source detection device, characterized in that: It comprises a detection light source box (1) and a light source detection sealing device according to any one of claims 1 to 9 connected thereto; A lower opening (11) is provided on one side of the detection light source box (1); When the connecting frame moves to the first position, it simultaneously drives the light-transmitting glass (9) and the sealing member (5) to cooperate to seal the lower opening (11) of the detection light source box (1).

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