Wafer box overturning structure
By designing the wafer box flip structure, the connecting rod flip mechanism is used to achieve 90° rotation of the mounting frame, and the wafer is rotated to a vertical state, solving the problem of wafer slipping during the conveying process and improving the stability of wafer transport.
Patent Information
- Application Number
- CN202421808907.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-30
- Publication Date
- 2025-06-17
- Estimated Expiration
- 2034-07-30
AI Technical Summary
During the wafer transportation process, due to vibration and other factors, the wafer can easily slide out of the wafer box, affecting the stability of wafer transport.
A wafer box flip structure is designed, using a connecting rod flip mechanism to realize 90° rotation of the mounting frame, rotating the horizontally placed wafer to a vertical state, and preventing the wafer from slipping.
It effectively avoids the risk of falling during wafer transfer, ensures the stability of wafer transport, and meets actual use needs.
Smart Images
Figure CN222995382U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of wafer processing, in particular to a wafer cassette flipping structure. Background Technique
[0002] The wafer cassette mainly plays the role of placing and transporting wafers in semiconductor production. During actual use, the wafers in the wafer cassette are generally placed horizontally, resulting in an open structure on the side of the wafer cassette where the wafers are placed. As a result, during the wafer transportation process, the wafers are likely to slide out towards the open mouth of the wafer cassette due to vibration or other factors, thereby affecting the stability of wafer transfer. Therefore, in response to the above problems, a wafer cassette flipping structure is designed to better meet the actual wafer cassette transfer requirements. Content of the Utility Model
[0003] The purpose of the utility model is to provide a wafer cassette flipping structure to solve the problems raised in the above background technique.
[0004] To achieve the above purpose, the utility model provides the following technical solution: A wafer cassette flipping structure, including a fixing plate, a cylinder is vertically fixed on the upper end surface of the fixing plate, the output end of the cylinder penetrates through the fixing plate and is rotatably connected to a connecting block, the connecting block is fixed on a mounting frame by bolts, a fixing rod is fixed on the mounting frame, the fixing rod is connected to a side plate, and the side plate and the mounting frame are locked by bolts. A placing frame is also fixed on the side plate by bolts.
[0005] Preferably, fixing frames are fixed before and after the lower end surface of the fixing plate, one end of a connecting rod is rotatably connected to the fixing frame, and the other end of the connecting rod is rotatably connected to the connecting block. At the same time, the connecting rods are symmetrically distributed about the center line of the fixing plate. Through the above mechanism, when the cylinder extends to drive the connecting block to move, through the action of the connecting rod, it can provide a basic guarantee for the rotation of the connecting block, and thus provide a basic guarantee for the flipping of the mounting frame.
[0006] Preferably, the fixing rods are symmetrically distributed about the center line of the mounting frame, there are four fixing rods, and the fixing rods and the side plate are nested. Through the above structure, the stability of the side plate installation can be ensured.
[0007] Preferably, a baffle is also fixed on the side plate, a first stop rod is fixed on the baffle, and the first stop rod is arranged behind the placing frame. Through the action of the first stop rod, the wafer can be lifted after rotating 90°, ensuring the stability of the wafer.
[0008] Preferably, the placing frame is provided with card slots at equal intervals, and a second stop rod is fixed behind the placing frame. Through the action of the card slots, the placement of the wafer can be conveniently limited, and combined with the action of the second stop rod, the position of the wafer can be limited.
[0009] Preferably, a support rod is fixed to the lower end of the placing rack, and the support rod and the fixed rod are parallel to each other. The function of the support rod can ensure the distance between the two placing racks, thereby ensuring the stability of the placing rack.
[0010] Compared with the prior art, the beneficial effect of the present utility model is that: the wafer cassette flipping structure adopts a link flipping mechanism, which can realize the 90° rotation of the mounting rack, thereby rotating the horizontally placed wafer to a vertical state, and effectively avoiding the outward sliding of the wafer during the transfer process, ensuring the stability during the wafer transfer process, and thus better meeting the actual use requirements. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] Figure 1 is a front perspective structural schematic diagram of the whole device of the present utility model;
[0012] Figure 2 is a rear perspective structural schematic diagram of the whole device of the present utility model;
[0013] Figure 3 is a front perspective structural schematic diagram of the mounting rack of the present utility model;
[0014] Figure 4 is a side view structural schematic diagram of the mounting rack of the present utility model;
[0015] Figure 5 is a side view structural schematic diagram of the mounting rack of the present utility model after flipping 90°.
[0016] In the figure: 1, fixing plate; 101, fixing frame; 102, connecting rod; 2, cylinder; 3, connecting block; 4, mounting rack; 5, fixed rod; 6, side plate; 601, baffle; 602, first stop rod; 7, placing rack; 701, card slot; 702, second stop rod; 8, support rod. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0017] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.
[0018] Please refer to Figures 1 - 5, the present utility model provides a technical solution: a wafer cassette flipping structure, which includes a fixing plate 1. A cylinder 2 is vertically fixed on the upper end surface of the fixing plate 1. The output end of the cylinder 2 penetrates through the fixing plate 1 and is rotatably connected to a connecting block 3. The connecting block 3 is fixed on a mounting bracket 4 by bolts. A fixing rod 5 is fixed on the mounting bracket 4. The fixing rod 5 is connected to a side plate 6. The side plate 6 and the mounting bracket 4 are locked by bolts. A placing rack 7 is also fixed on the side plate 6 by bolts.
[0019] The fixing rods 5 are symmetrically distributed left and right with respect to the center line of the mounting bracket 4, and there are four fixing rods 5. The fixing rods 5 and the side plate 6 are nested. A baffle 601 is also fixed on the side plate 6. A first stop rod 602 is fixed on the baffle 601, and the first stop rod 602 is arranged at the rear of the placing rack 7. Slots 701 are equally spaced on the placing rack 7, and a second stop rod 702 is fixed at the rear of the placing rack 7. A support rod 8 is fixed at the lower end of the placing rack 7, and the support rod 8 and the fixing rod 5 are parallel.
[0020] When using this wafer cassette flipping structure, as Figures 1 - 4 shown, first assemble the entire device. In the normal working state, the position of the mounting bracket 4 is as Figure 1 shown. At this time, the staff places the wafers in the horizontally arranged slots 701. Through the slots 701, the left and right limits of the wafers can be achieved, and the isolation of the upper and lower wafers can be achieved. When placing the wafers, through the sliding action between the wafers and the slots 701, the wafers can be placed at the preset position until the rear edge of the wafers contacts the first stop rod 602 and the second stop rod 702, thus realizing the limiting effect of the wafers. According to the above principle, multiple wafers can be stored.
[0021] Fixing frames 101 are fixed before and after the lower end surface of the fixing plate 1. One end of a connecting rod 102 is rotatably connected to the fixing frames 101, and the other end of the connecting rod 102 is rotatably connected to the connecting block 3. At the same time, the connecting rod 102 is symmetrically distributed left and right with respect to the center line of the fixing plate 1.
[0022] After the wafers are placed, as Figures 1 - 4 shown, before transferring the wafers, by controlling the cylinder 2 to extend, the connecting block 3 is driven to move downward. With the cooperation of the connecting rod 102, the connecting block 3 can be forced to rotate around the output shaft of the cylinder 2 until the connecting block 3 rotates 90°. When the connecting block 3 rotates, the mounting bracket 4, the placing rack 7 and the wafers are driven to rotate at the same time, thus realizing the rotation of the wafers. After the rotation is completed, as Figure 5 shown, at this time the slots 701 and the wafers are in a vertical state, which effectively avoids the wafers slipping outward during the later wafer transfer and ensures the stability of the wafer transfer process. This is the working principle of this wafer cassette flipping structure.
[0023] Although embodiments of the present utility model have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.
Claims
1. A wafer box flipping structure, comprising a fixing plate (1), characterized in that: A cylinder (2) is vertically fixed on the upper end surface of the fixing plate (1); the output end of the cylinder (2) passes through the fixing plate (1) and is rotatably connected to a connecting block (3); the connecting block (3) is fixed to a mounting frame (4) by bolts; a fixing rod (5) is fixed to the mounting frame (4); the fixing rod (5) is connected to a side plate (6); the side plate (6) and the mounting frame (4) are locked by bolts; a placement frame (7) is also fixed to the side plate (6) by bolts.
2. The wafer box flipping structure according to claim 1, characterized in that: A fixing frame (101) is fixed to the front and rear of the lower end of the fixing plate (1), and one end of a connecting rod (102) is rotatably connected to the fixing frame (101), and the other end of the connecting rod (102) is rotatably connected to the connecting block (3), and the connecting rod (102) is symmetrically distributed with respect to the center line of the fixing plate (1).
3. The wafer box flipping structure according to claim 1, characterized in that: The fixing rods (5) are symmetrically distributed with respect to the center line of the mounting frame (4), four fixing rods (5) are provided, and the fixing rods (5) and the side plates (6) are nestedly connected.
4. The wafer box flipping structure according to claim 1, characterized in that: A baffle plate (601) is also fixed on the side plate (6), and a first baffle rod (602) is fixed on the baffle plate (601), and the first baffle rod (602) is arranged on the rear side of the placement rack (7).
5. The wafer box flipping structure according to claim 1, characterized in that: The placement rack (7) is provided with card slots (701) at equal intervals, and a second stop rod (702) is fixed to the rear side of the placement rack (7).
6. The wafer box flipping structure according to claim 1, characterized in that: A support rod (8) is fixed at the lower end of the placement rack (7), and the support rod (8) and the fixing rod (5) are arranged in parallel.