Carrier and reaction furnace

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to a carrier and a reaction furnace, and solves the problem of low heating efficiency of products in the reaction furnace in the related technology. The carrier includes a body configured to carry at least one boat structure configured to carry a product. The main body comprises at least one conductive part extending linearly, under the condition that the carrier is located in the cavity, the first end of the conductive part is used for being connected with one electrode, the second end of the conductive part is used for being connected with the other electrode, and under the condition that the electrode connected with the conductive part is powered on, the conductive part is powered on and generates heat. Due to the fact that the carrier is close to the product, the heating efficiency of the product can be improved by heating the product through heat generated by the carrier.

Description

Technical Field

[0001] This application relates to the fields of semiconductor and photovoltaic technologies, and particularly to a carrier and a reaction furnace. Background Art

[0002] Some processing processes of semiconductor and photovoltaic products need to be carried out in a specific reaction furnace and under high-temperature conditions. Currently, the most commonly used heating method is resistance heating, and the application of linear resistance wires is the most extensive.

[0003] Currently, the resistance wires are usually arranged on the inner wall of the reaction furnace, and the resistance wires are far from the products. In addition, in order to avoid the corrosion of the resistance wires by the process environment, a protective layer is usually provided on the outer surface of the resistance wires to armor the resistance wires, reducing the heat transfer efficiency of the resistance wires and resulting in low heating efficiency of the products in the reaction furnace. Summary of the Utility Model

[0004] In view of this, an embodiment of this application provides a carrier and a reaction furnace, which solve the problem of low heating efficiency of products in the reaction furnace in the related art.

[0005] In a first aspect, an embodiment of this application provides a carrier that can be placed in a reaction furnace. The reaction furnace includes a cavity and at least two electrodes. The cavity has a chamber configured to accommodate products, and the at least two electrodes extend into the chamber. Wherein, the carrier includes: a main body configured to carry at least one boat structure, the boat structure being configured to carry the products, and the main body includes at least one conductive part extending linearly. Wherein, when the carrier is located in the chamber, the first end of the conductive part is used to connect to one of the electrodes, and the second end of the conductive part is used to connect to another electrode; when the electrode connecting the conductive part is energized, the conductive part is energized and generates heat.

[0006] In some embodiments, the main body extends in a first direction, the conductive part includes a first conductive part extending in the first direction and a second conductive part extending in the first direction. The first end of the first conductive part is electrically connected to the first end of the second conductive part, the second end of the first conductive part is connected to one of the electrodes, and the second end of the second conductive part is connected to another electrode.

[0007] In some embodiments, the first end of the first conductive part is located at the first end of the main body, and the second end of the first conductive part is located at the second end of the main body; the first end of the second conductive part is located at the first end of the main body, and the second end of the second conductive part is located at the second end of the main body.

[0008] In some embodiments, the body includes: a first component portion extending along the first direction, a first conductive portion disposed on the first component portion, and a first end of the first conductive portion located at a first end of the first component portion; a second component portion extending along the first direction, disposed opposite to the first component portion, a second conductive portion disposed on the second component portion, and a first end of the second conductive portion located at a first end of the second component portion; a third component portion connecting the first end of the first component portion and the first end of the second component portion; and a conductive connection portion disposed on the third component portion, the conductive connection portion electrically connecting the first end of the first conductive portion and the first end of the second conductive portion.

[0009] In some embodiments, the body includes: at least one insulating portion disposed between a second end of the first component portion and a second end of the second component portion and isolating a second end of the first conductive portion from a second end of the second conductive portion.

[0010] In some embodiments, the material of the first component portion is a conductive material, and the first component portion forms the first conductive portion; the material of the second component portion is the conductive material, and the second component portion forms the second conductive portion; the material of the third component portion is the conductive material, and the third component portion forms the conductive connection portion.

[0011] In some embodiments, the vehicle further includes: an insulating layer disposed on an outer surface of the body, and the material of the insulating layer is an insulating material.

[0012] In some embodiments, the conductive material is silicon carbide.

[0013] In some embodiments, the electrode includes an electrode rod; the second end of the first component portion has a first groove; the second end of the second component portion has a second groove; when the vehicle is located in the chamber, the electrode rod of one electrode is inserted into the first groove so that the electrode rod of the one electrode is electrically connected to the first component portion, and the electrode rod of the other electrode is inserted into the second groove so that the electrode rod of the other electrode is electrically connected to the second component portion.

[0014] In some embodiments, the cavity has a bearing portion; the body further includes: a lapping portion disposed at an edge of the body and capable of lapping on the bearing portion so that the bearing portion bears the vehicle.

[0015] In a second aspect, an embodiment of the present application provides a reaction furnace, including: a cavity having a chamber configured to accommodate a product; at least two electrodes extending into the chamber; and the carrier described in the first aspect, configured to carry a boat structure, and when the carrier is located in the chamber, the carrier is electrically connected to the electrodes so that the carrier is energized and generates heat, and the boat structure is configured to carry the product.

[0016] In some embodiments, the electrode includes: an elastic structure, and during the process of the carrier entering the chamber, the electrode is converted from being separated from the carrier to being electrically connected to the carrier.

[0017] The carrier provided by the embodiment of the present application can carry a product, can be placed in a reaction furnace, and the carrier can be energized and generate heat. Since the carrier is very close to the product, heating the product with the heat generated by the carrier can improve the heating efficiency of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] By describing the embodiments of the present application in more detail in conjunction with the drawings, the above and other objects, features, and advantages of the present application will become more obvious. The drawings are used to provide a further understanding of the embodiments of the present application, and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation to the present application. In the drawings, the same reference numerals generally represent the same components or steps.

[0019] Figure 1 The structural schematic diagrams of a reaction furnace, a carrier, and a carrier driving assembly provided by an embodiment of the present application are shown.

[0020] Figure 2 The structural schematic diagram of a carrier provided by an embodiment of the present application is shown.

[0021] Figure 3 Shown is Figure 2 The partial enlarged view of the carrier shown in the A area.

[0022] Figure 4 The structural schematic diagram of an electrode provided by an embodiment of the present application is shown.

[0023] Figure 5 The structural schematic diagrams of a cavity and a furnace door provided by an embodiment of the present application are shown.

[0024] Reference Numerals:

[0025] 1. Reaction furnace; 10. Carrier; 100. Main body; 101. First end of the main body; 102. Second end of the main body; 103. Lapping part; 110. Conductive part; 1101. First end of the conductive part; 1102. Second end of the conductive part; 1110. First conductive part; 1111. First end of the first conductive part; 1112. Second end of the first conductive part; 1120. Second conductive part; 1121. First end of the second conductive part; 1122. Second end of the second conductive part; 1001. First component part; 1011. First end of the first component part; 1021. Second end of the first component part; 1031. First groove; 1002. Second component part; 1012. First end of the second component part; 1022. Second end of the second component part; 1032. Second groove; 1003. Third component part; 1004. Conductive connection part; 1005. Insulating part; 1010. Insulating layer; 200. Boat structure; 20. Cavity; 2001. Chamber; 2002. Carrying part; 2003. Furnace opening; 30. Electrode; 310. Electrode rod; 320. Elastic structure; 40. Furnace door; 2. Product; 3. Carrier drive assembly; X1. First direction. Detailed implementation manners

[0026] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0027] Common heating methods in the industry include resistance heating, induction heating, radiation heating, laser heating, etc. Among them, the equipment cost of induction heating is relatively high, the requirements for the working environment are relatively strict, there are certain requirements for the electromagnetic characteristics of materials, and the requirements for the use and maintenance of the equipment are relatively high. Radiation heating has a directionality of energy transmission and a poor heating uniformity. The equipment cost of laser heating is relatively high, the equipment structure is complex, and the requirements for the skills of operators are relatively high. In addition, during the laser processing process, the stability of the optical path needs to be maintained, and the requirements for the environment are relatively high.

[0028] Currently, the most commonly used heating method is resistance heating, and the application of linear resistance wires is the most extensive. Currently, the resistance wires are usually arranged on the inner wall of the reaction furnace, and the resistance wires are far from the product. In addition, in order to avoid the corrosion of the resistance wires by the process environment, the outer surface of the resistance wires is usually protected to armor the resistance wires, which reduces the heat transfer efficiency of the resistance wires, resulting in a low heating efficiency of the products in the reaction furnace.

[0029] In addition, sheathing the resistance wire makes the manufacturing process of the resistance wire complex, with high manufacturing and maintenance costs, great difficulty in the sheathing process, and the length and extension direction of the resistance wire being restricted by the shape and size of the sheathing structure.

[0030] In addition, the resistance wire may be subject to electromagnetic interference and the limitation of conductive materials, with high energy consumption, and the resistance wire is prone to thermal deformation or damage due to the influence of temperature, dust, etc., resulting in poor heating stability and poor heating uniformity.

[0031] To address the above problems, the present application provides a vehicle and a reaction furnace. The specific structures of the vehicle and the reaction furnace will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0032] Figure 1 The figure shows a schematic structural diagram of a reaction furnace, a vehicle, and a vehicle driving assembly provided by an embodiment of the present application. Figure 2 The figure shows a schematic structural diagram of a vehicle provided by an embodiment of the present application. Figure 3 As shown Figure 2 A partial enlarged view of the vehicle shown in the A area. As Figures 1 to 3 As shown, the vehicle 10 can be placed in the reaction furnace 1. The reaction furnace 1 includes a cavity 20 and at least two electrodes 30. The cavity 20 has a chamber 2001, and the chamber 2001 is configured to accommodate the product 2. At least two electrodes 30 extend into the chamber 2001. The vehicle 10 includes a main body 100. The main body 100 is configured to carry at least one boat structure 200. The boat structure 200 is configured to carry the product 2. The main body 100 includes at least one linear extending conductive part 110. When the vehicle 10 is located in the chamber 2001, the first end 1101 of the conductive part is used to connect to one electrode 30, and the second end 1102 of the conductive part is used to connect to another electrode 30. When the electrode 30 connected to the conductive part 110 is energized, the conductive part 110 is energized and generates heat.

[0033] Exemplarily, the reaction furnace 1 includes two electrodes 30. The two electrodes 30 are arranged in the chamber 2001 and connected to the chamber 2001. One electrode 30 is connected to the positive pole of an external power source through a wire, and the other electrode 30 is connected to the negative pole of the external power source through a wire. The main body 100 includes a linear extending conductive part 110. When the vehicle 10 is located in the chamber 2001, the first end 1101 of the conductive part is connected to one electrode 30, and the second end 1102 of the conductive part is connected to the other electrode 30, so as to form a closed current loop between one electrode 30, one conductive part 110, and the other electrode 30, thereby energizing the conductive part 110.

[0034] Exemplarily, the material of the conductive part 110 is a material that generates heat when energized, such as silicon carbide or graphite, so that the main body 100 is energized and generates heat.

[0035] The product 2 can be products such as silicon wafers, wafers, battery panels, glass substrates, etc.

[0036] The carrier 10 provided by the embodiment of the present application can carry the product 2, can be placed in the reaction furnace 1, and the carrier 10 can be electrified and generate heat. Since the carrier 10 is very close to the product 2, heating the product 2 by using the heat generated by the carrier 10 can improve the heating efficiency of the product 2.

[0037] The structure of the carrier 10 is simple, the manufacturing process is simple, and the manufacturing and maintenance costs are low.

[0038] In some embodiments, as Figure 2 shown, the main body extends along the first direction X1. The conductive part 110 includes a first conductive part 1110 extending along the first direction X1 and a second conductive part 1120 extending along the first direction X1. The first end 1111 of the first conductive part is electrically connected to the first end 1121 of the second conductive part. The second end 1112 of the first conductive part is connected to one electrode 30, and the second end 1122 of the second conductive part is connected to the other electrode 30. The extending direction of the conductive part 110 is the same as the extending direction of the main body 100 to increase the heating area of the conductive part 110. The main body 100 is used to carry multiple boat structures 200, and the conductive part 110 is used to heat the products 2 carried by the multiple boat structures 200 simultaneously to improve the production capacity of the reaction furnace 1.

[0039] In some embodiments, the first end 1111 of the first conductive part is located at the first end 101 of the main body, and the second end 1112 of the first conductive part is located at the second end 102 of the main body. The first end 1121 of the second conductive part is located at the first end 101 of the main body, and the second end 1122 of the second conductive part is located at the second end 102 of the main body. The above setting method can ensure that the conductive part 110 is long enough to increase the heating area of the conductive part 110. The main body 100 is used to carry multiple boat structures 200, and the conductive part 110 is used to heat the products 2 carried by the multiple boat structures 200 simultaneously to improve the production capacity of the reaction furnace 1.

[0040] In some embodiments, the main body 100 includes: a first component part 1001, a second component part 1002, a third component part 1003, and a conductive connection part 1004. The first component part 1001 extends along a first direction X1, and a first conductive part 1110 is disposed on the first component part 1001. A first end 1111 of the first conductive part is located at a first end 1011 of the first component part. The second component part 1002 extends along the first direction X1. The second component part 1002 is disposed opposite to the first component part 1001, and a second conductive part 1120 is disposed on the second component part 1002. A first end 1121 of the second conductive part is located at a first end 1012 of the second component part. The third component part 1003 connects the first end 1011 of the first component part and the first end 1012 of the second component part. The conductive connection part 1004 is disposed on the third component part 1003, and the conductive connection part 1004 electrically connects the first end 1111 of the first conductive part and the first end 1121 of the second conductive part. The structure of the main body 100 is simple, the area of the main body 100 is large, the main body 100 can carry a plurality of boat structures 200, and the plurality of boat structures 200 are arranged along the first direction X1. The area heated by the conductive part 110 is large, and the products 2 carried by the plurality of boat structures 200 are heated simultaneously by using the conductive part 110 to improve the production capacity of the reaction furnace 1. Figure 2 The arrow direction shown is the current flow direction of the main body 100 when the main body 100 is energized.

[0041] In some embodiments, the main body 100 includes at least one insulating part 1005. The insulating part 1005 is disposed between a second end 1021 of the first component part and a second end 1022 of the second component part, and isolates a second end 1112 of the first conductive part from a second end 1122 of the second conductive part to prevent electrical connection between the two ends of the first conductive part 1110.

[0042] Exemplarily, the material of the insulating part 1005 may be ceramic, plastic. The insulating part 1005 can be connected to the second end 1021 of the first component part and the second end 1022 of the second component part respectively through a heat-resistant adhesive. The insulating part 1005 can also be connected to the second end 1021 of the first component part and the second end 1022 of the second component part respectively through screws made of insulating materials. Exemplarily, the insulating material may be ceramic, plastic, etc.

[0043] In some embodiments, the material of the first component part 1001 is a conductive material, and the first component part 1001 forms the first conductive part 1110. The material of the second component part 1002 is a conductive material, and the second component part 1002 forms the second conductive part 1120. The material of the third component part 1003 is a conductive material, and the third component part 1003 forms the conductive connection part 1004. The first component part 1001 and the first conductive part 1110 are integrally formed, the second component part 1002 and the second conductive part 1120 are integrally formed, and the third component part 1003 and the conductive connection part 1004 are integrally formed, with a simple structure. Exemplarily, the conductive material can be silicon carbide or graphite.

[0044] In some embodiments, the carrier 10 further includes an insulating layer 1010, which is disposed on the outer surface of the main body 100, and the material of the insulating layer 1010 is an insulating material.

[0045] Exemplarily, when the main body 100 does not need to supply power to other structures it carries, the entire outer surface of the main body 100 is provided with the insulating layer 1010 to prevent the main body 100 from forming an electrical connection with other structures.

[0046] Exemplarily, a part of the outer surface of the main body 100 is provided with the insulating layer 1010, and a part of the outer surface of the main body 100 is exposed to facilitate the connection of this part with other structures so that the main body 100 can supply power to other structures. By providing different insulating layers 1010, it is suitable for different production process requirements.

[0047] The insulating material can be gallium oxide, zinc oxide or other insulating materials.

[0048] In some embodiments, the conductive material is silicon carbide. The main body 100 made of silicon carbide material has characteristics such as high melting point, good thermal conductivity, small thermal deformation amount, and corrosion resistance, which can improve the stability and uniformity of heating of the main body 100.

[0049] In some embodiments, as Figures 1 to 4 shown, the electrode 30 includes an electrode rod 310. The second end 1021 of the first component part has a first groove 1031, and the second end 1022 of the second component part has a second groove 1032. When the carrier 10 is located in the chamber 2001, the electrode rod 310 of one electrode 30 is inserted into the first groove 1031 so that the electrode rod 310 of this one electrode 30 is electrically connected to the first component part 1001, and the electrode rod 310 of the other electrode 30 is inserted into the second groove 1032 so that the electrode rod 310 of the other electrode 30 is electrically connected to the second component part 1002. The electrode rod 310 is detachably connected to the carrier 10, and the connection method is simple and reliable.

[0050] In some embodiments, as Figure 2 and Figure 5As shown, the cavity 20 has a bearing part 2002. The main body 100 further includes a lapping part 103. The lapping part 103 is arranged at the edge of the main body 100 and can lap on the bearing part 2002 so that the bearing part 2002 bears the carrier 10, thus facilitating the placement of the carrier 10 in the reaction furnace 1.

[0051] As Figure 1 shown, the reaction furnace 1 includes the carrier 10, the cavity 20 and at least two electrodes 30 mentioned in the above embodiments. The cavity 20 has a chamber 2001, and the chamber 2001 is configured to accommodate the product 2. At least two electrodes 30 extend into the chamber 2001. The carrier 10 is configured to bear the boat structure 200, and when the carrier 10 is located in the chamber 2001, the carrier 10 is electrically connected to the electrodes 30 so that the carrier 10 is powered on and generates heat, and the boat structure 200 is configured to bear the product 2.

[0052] Exemplarily, the reaction furnace 1 has a furnace opening 2003 which faces downward and is communicated with the chamber 2001. The reaction furnace 1 further includes a furnace door 40 which is hinged to the cavity 20 so that the furnace door 40 can rotate relative to the cavity 20 around the rotation axis to cover or open the furnace opening 2003.

[0053] A carrier driving assembly 3 is arranged below the carrier 10. The carrier driving assembly 3 can bear the carrier 10 and place the carrier 10 into the chamber 2001 or send it out from the chamber 2001.

[0054] Exemplarily, the carrier driving assembly 3 can include a linear module or a robotic arm. The linear module or the robotic arm is connected to the main body 100 and drives the main body 100 to move in a direction close to or away from the chamber 2001 so that the carrier 10 enters or exits the chamber 2001.

[0055] The carrier driving assembly 3 can also have a lifting assembly and a conveyor belt streamline connected to the lifting assembly. The conveyor belt streamline is arranged above the lifting assembly and can bear the carrier 10. The lifting assembly moves in a direction close to or away from the chamber 2001 to drive the conveyor belt streamline and the carrier 10 borne by the conveyor belt streamline to enter or exit the chamber 2001.

[0056] In some embodiments, the electrode 30 includes an elastic structure 320. During the process of the carrier 10 entering the chamber 2001, the electrode 30 changes from being separated from the carrier 10 to being electrically connected to the carrier 10.

[0057] The use of the elastic electrode 30 can avoid stress concentration when the electrode 30 contacts the first component 1001 and the second component 1002, thereby preventing damage to the electrode 30, the first component 1001 or the second component 1002, and extending the service life of the electrode 30 and the main body 100. Additionally, when the main body 100 undergoes minor thermal deformation, it can always maintain good contact with the elastic electrode 30 to avoid open circuit or poor contact situations, thereby maintaining the power supply stability of the main body 100, and further ensuring the heating stability and continuity of the main body 100 to ensure that the main body 100 can be stably and reliably powered on and generate heat.

[0058] Since the reaction furnace 1 includes the carrier 10, the reaction furnace 1 includes all the technical features and technical effects of the carrier 10, which will not be elaborated here.

[0059] In each embodiment of the present application, if not clearly defined, the connection form can be detachable connection by means such as bolt nuts, screws, buckles, magnetic attraction, etc. In some connections, if there is no special requirement for the form of detachable cooperation, non-detachable connection can be achieved by means such as welding and bonding.

[0060] The basic principles of the present application have been described above in combination with specific embodiments. However, it should be noted that the advantages, benefits, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, benefits, effects, etc. are essential for each embodiment of the present application. Additionally, the above-disclosed specific details are only for illustrative and easy-to-understand purposes, rather than limitations, and these details do not limit the present application to necessarily adopt the above specific details for implementation.

[0061] The block diagrams of the devices, apparatuses, equipment, and systems involved in the present application are only illustrative examples and do not intend to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open-ended words, meaning "including but not limited to", and can be used interchangeably with each other. The words "or" and "and" used here refer to "and / or", and can be used interchangeably with each other, unless the context clearly indicates otherwise. The word "such as" used here refers to the phrase "such as but not limited to", and can be used interchangeably with each other.

[0062] It should also be noted that in the devices, equipment, and methods of the present application, each component or each step can be decomposed and / or recombined. These decompositions and / or recombinations should be regarded as equivalent solutions of the present application.

[0063] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Accordingly, this application is not intended to be limited to the aspects shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0064] The above description has been presented for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the form disclosed herein. Although several example aspects and embodiments have been discussed above, those skilled in the art will recognize some of their variations, modifications, alterations, additions, and subcombinations.

Claims

1. A vehicle, characterized in that: capable of being placed in a reaction furnace, the reaction furnace comprising a chamber and at least two electrodes, the chamber having a chamber configured to contain a product, the at least two electrodes extending into the chamber; Wherein, the carrier comprises: A main body, configured to carry at least one boat structure, wherein the boat structure is configured to carry the product, wherein the main body includes at least one conductive portion extending in a linear shape; Wherein, when the carrier is located in the chamber, the first end of the conductive portion is used to connect to one of the electrodes, and the second end of the conductive portion is used to connect to another of the electrodes; When the electrode connected to the conductive portion is energized, the conductive portion is energized and generates heat.

2. The carrier according to claim 1, characterized in that: The main body extends along a first direction, and the conductive part includes a first conductive part extending along the first direction and a second conductive part extending along the first direction, a first end of the first conductive part is electrically connected to a first end of the second conductive part, a second end of the first conductive part is connected to one of the electrodes, and a second end of the second conductive part is connected to another of the electrodes.

3. The carrier according to claim 2, characterized in that: The first end of the first conductive part is located at the first end of the main body, and the second end of the first conductive part is located at the second end of the main body; The first end of the second conductive portion is located at the first end of the main body, and the second end of the second conductive portion is located at the second end of the main body.

4. The carrier according to claim 2, characterized in that: The subject includes: A first component part extending along the first direction, the first conductive part is arranged on the first component part, and the first end of the first conductive part is located at the first end of the first component part; a second component extending along the first direction and arranged opposite to the first component, wherein the second conductive portion is arranged on the second component, and the first end of the second conductive portion is located at the first end of the second component; a third component connecting the first end of the first component and the first end of the second component; The conductive connecting portion is provided on the third component, and the conductive connecting portion electrically connects the first end of the first conductive portion and the first end of the second conductive portion.

5. The carrier according to claim 4, characterized in that: The subject includes: At least one insulating portion is disposed between the second end of the first component and the second end of the second component and isolates the second end of the first conductive portion from the second end of the second conductive portion.

6. The carrier according to claim 4, characterized in that: The material of the first component is a conductive material, and the first component forms the first conductive part; The material of the second component is the conductive material, and the second component forms the second conductive part; The material of the third component is the conductive material, and the third component forms the conductive connecting portion.

7. The carrier according to claim 6, characterized in that: Also includes: The insulating layer is arranged on the outer surface of the main body, and the material of the insulating layer is insulating material.

8. The carrier according to claim 6, characterized in that: The conductive material is silicon carbide.

9. The carrier according to any one of claims 4 to 8, characterized in that: The electrode comprises an electrode rod; The second end of the first component has a first groove; The second end of the second component has a second groove; When the carrier is located in the chamber, the electrode rod of one of the electrodes is inserted into the first groove so that the electrode rod of the one electrode is electrically connected to the first component, and the electrode rod of the other electrode is inserted into the second groove so that the electrode rod of the other electrode is electrically connected to the second component.

10. The carrier according to claim 9, characterized in that: The cavity has a bearing portion; The subject also includes: The overlapping portion is arranged at the edge of the main body and can be overlapped with the bearing portion so that the bearing portion bears the carrier.

11. A reactor, characterized in that: include: a cavity having a chamber configured to contain a product; at least two electrodes extending into the chamber; The carrier according to any one of claims 1 to 10 is configured as a carrying boat structure, and when the carrier is located in the chamber, the carrier is electrically connected to the electrode so that the carrier is energized and generates heat, and the boat structure is configured to carry the product.

12. The reaction furnace according to claim 11, characterized in that: The electrode comprises: The elastic structure is such that when the carrier enters the chamber, the electrode and the carrier are changed from being separated to being electrically connected.

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