Curtain type air bath mechanism and curtain type air bath device

Abstract

The utility model discloses a weather screen type air bath mechanism and a weather screen type air bath device, and mainly discloses a weather screen type air bath mechanism which comprises a main channel, the main channel is provided with a main air bath spraying hole, working fluid in the main channel can be sprayed out through the main air bath spraying hole, further, clamping and conveying channels are further arranged on the two sides of the main channel, and the clamping and conveying channels are communicated with the main air bath spraying hole. The pinch channel is provided with a pinch air bath spraying hole, and pinch fluid in the pinch channel can be sprayed out through the pinch air bath spraying hole. As the pinch channels are arranged on the two sides of the main channel, high-pressure air curtains can be formed on the two sides of the main channel after the pinch fluid in the pinch channels is sprayed out, so that a one-way negative pressure area is formed, the working fluid is unidirectionally pinched to the surface of a base material, the working fluid is prevented from being diffused in advance to cause waste and pollution, meanwhile, the uniformity of the working fluid is controlled, and the service life of the working fluid is prolonged. In addition, the external air curtain is synchronously pressed to the plane of the base material to form a non-contact static pressure field, and the flatness of the base material is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of air bath spraying, in particular to a curtain-type air bath mechanism and a curtain-type air bath device. Background Art

[0002] At present, air bath spray heads are widely used in ultra-thin surface treatment processes. A micro-nano coating is formed on the surface of a substrate through a spraying method, and after a curing process, a uniform coating is formed on the surface of the substrate, playing roles such as anti-corrosion, wear resistance, and surface modification. The traditional spraying method is a single fluid. A pressure difference is formed through fluid pressurization, and the fluid diffuses through a nozzle to form a single-fluid spray. This method has a simple process, but when applied in conventional construction, the fluid will diffuse in advance when sprayed onto the substrate, thus facing technical problems such as material waste, environmental pollution, and uneven coating. Summary of the Invention

[0003] The purpose of the utility model is to address the technical problems existing in the background art and propose a curtain-type air bath mechanism, including a main channel. The main channel is provided with main air bath spray holes, and the working fluid in the main channel can be ejected through the main air bath spray holes. The main channel is also provided with clamping channels on both sides. The clamping channels are provided with clamping air bath spray holes, and the clamping fluid in the clamping channels can pass through the clamping air bath spray holes to form air curtains on both sides of the main channel.

[0004] Further, a temperature adjustment channel is also provided on one side of the main channel.

[0005] Further, the pushing pressure of the working fluid is equal to / less than the pushing pressure of the clamping fluid.

[0006] Further, the curtain-type air bath mechanism is applied to laser processing technology, surface coating and surface treatment technology, chemical vapor deposition and thin film forming technology.

[0007] Further, the utility model also provides a curtain-type air bath spraying device, including a curtain-type air bath mechanism of the utility model.

[0008] Compared with the prior art, the utility model has the following beneficial technical effects: Since the utility model is provided with clamping channels on both sides of the main channel, the clamping fluid in the clamping channels can be ejected through the clamping air bath spray holes to form high-pressure air curtains on both sides of the main channel, thereby forming a unidirectional negative pressure area, enabling the working fluid to be unidirectionally clamped to the surface of the substrate to prevent the working fluid from diffusing in advance, causing waste and pollution. At the same time, the uniformity of the working fluid is also controlled, improving the uniformity and deposition rate of the interface film. In addition, the external air curtain is synchronously pressed onto the plane of the substrate to form a non-contact static pressure field, improving the flatness of the substrate, and being more applicable in vacuum environments and scenarios where materials cannot be fixed. Brief Description of the Drawings

[0009] Figure 1It is a side cross-sectional view of the curtain-type air bath mechanism. Specific Embodiment

[0010] It should be noted that, without conflict, the embodiments and features in the embodiments of the present invention can be combined with each other.

[0011] In the description of the present invention, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined with "first", "second", etc. may explicitly or implicitly include one or more features. In the description of the present invention, unless otherwise specified, the meaning of "a plurality" is two or more.

[0012] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or a specific connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood through specific situations.

[0013] The following will describe in detail the specific embodiments of the present invention with reference to the drawings.

[0014] As Figure 1 shown in the figure, the present invention provides a curtain-type air bath mechanism, which includes a main channel 1. The main channel 1 is provided with main air bath spray holes, and the working fluid in the main channel 1 can be ejected through the main air bath spray holes. Further, clamping channels 2 are provided on both sides of the main channel 1. The clamping channels 2 are provided with clamping air bath spray holes, and the clamping fluid in the clamping channels 2 can be ejected through the clamping air bath spray holes.

[0015] It can be understood that since the present utility model is provided with pinch channels 2 on both sides of the main channel 1, the pinch fluid in the pinch channels 2 can be ejected through the pinch air bath spray holes to form a high-pressure air curtain on both sides of the main channel 1, thereby forming a unidirectional negative pressure area, so that the working fluid is unidirectionally pinched onto the substrate surface to prevent the premature diffusion of the working fluid, resulting in waste and pollution. At the same time, the uniformity of the working fluid is controlled, the uniformity and deposition rate of the interface film are improved. In addition, the external air curtain is synchronously pressed onto the plane of the substrate to form a non-contact static pressure field, improving the flatness of the substrate, which is more applicable in a vacuum environment and scenarios where the material cannot be fixed.

[0016] Furthermore, in this embodiment, in order to ensure that the working fluid is unidirectionally pinched onto the substrate surface to prevent the premature diffusion of the working fluid, the pushing pressure of the working fluid is equal to / less than the pushing pressure of the pinch fluid.

[0017] Furthermore, in this embodiment, on one side of the main channel 1, a temperature adjustment channel 3 is further provided. The temperature adjustment channel 3 is provided with a temperature adjustment fluid. By controlling the temperature of the temperature adjustment fluid, the temperature adjustment of the curtain-type air bath mechanism can be realized.

[0018] Furthermore, in this embodiment, preferably, the main channel 1 includes a first spray channel and a second spray channel. The first spray channel is sleeved inside the second spray channel, and a spray chamber is formed between the first spray channel and the second spray channel. The main air bath spray holes include a plurality of first spray holes and a plurality of second spray holes. The first spray holes are provided on the first spray channel, and the second spray holes are provided on the second spray channel.

[0019] Through the above settings, the working fluid ejected from the first spray holes will enter the spray chamber. The spray chamber can eliminate the pressure difference of the working fluid entering the first spray channel to achieve the uniform ejection of the working fluid from the second spray holes. The structure is simple and the setting is ingenious.

[0020] Furthermore, in this embodiment, the first spray holes are arranged along the length direction of the first spray channel. The aperture of the first spray holes gradually decreases from the middle of the first spray channel to both ends of the first spray channel. Through the above settings, since the aperture of the first spray holes gradually decreases from the middle to both ends, when the working fluid enters the first spray channel from both ends of the first spray channel, the working fluid near both ends of the first spray channel has a smaller aperture, thus reducing the ejection amount of the working fluid at the near ports, while the working fluid far from both ends of the first spray channel has a larger aperture, thus increasing the ejection amount of the working fluid at the far ports to ensure that the amount of the working fluid ejected from the first spray holes remains consistent.

[0021] Furthermore, in this embodiment, the aperture size specification of the second spray holes should meet the requirement that "the working fluid entering the spray chamber 13 cannot be discharged from the second spray holes without applying additional pressure".

[0022] It can be understood that the working fluid ejected from the first spray channel will enter the spray chamber. At this time, the working fluid will not be discharged through the second spray holes. When the spray chamber is filled with the working fluid, as the working fluid continues to enter the spray chamber, under the action of pressure, the working fluid will be ejected through the second spray holes. That is, through the above structural arrangement, the present utility model can ensure that the working fluid is evenly ejected under the state of balanced pressure by setting the first spray channel, the second spray channel and the spray chamber, and cooperating with the first spray holes and the second spray holes.

[0023] Furthermore, in this embodiment, the curtain-type air bath mechanism can be applied to laser processing technology, surface coating and surface treatment technology, chemical vapor deposition and thin film forming technology, etc.

[0024] Furthermore, this embodiment also provides a curtain-type air bath spraying device, which includes a curtain-type air bath mechanism of this embodiment.

[0025] The above are one or more implementation manners provided in combination with specific contents, and it is not determined that the specific implementation of the present utility model is only limited to these descriptions. Any approximation or similarity to the method, structure, etc. of the present utility model, or any technical deduction or replacement made under the premise of the concept of the present utility model, should be regarded as the protection scope of the present utility model.

Claims

1. A curtain-type air bath mechanism, comprising a main channel (1), wherein the main channel (1) is provided with a main air bath spray hole, and the working fluid in the main channel (1) can be sprayed out through the main air bath spray hole, characterized in that: The main channel (1) is also provided with pinch channels (2) on both sides. The pinch channels (2) are provided with pinch air shower spray holes. The pinch fluid in the pinch channels (2) can be sprayed out through the pinch air shower spray holes to form air curtains on both sides of the main channel (1).

2. A curtain-type air bath mechanism according to claim 1, characterized in that: The main channel (1) is also provided with a temperature adjustment channel (3) on one side.

3. A curtain-type air bath mechanism according to claim 1, characterized in that: The pushing pressure of the working fluid is equal to / less than the pushing pressure of the entraining fluid.

4. A curtain-type air bath device, characterized in that: It comprises a curtain-type air bath mechanism as described in any one of claims 1-3.

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