Sheet drying supporting device
By designing a sheet drying support device including the base plate and the side plate, the problem of excessive drying of side wall coatings during the silicon wafer drying process is solved, and the drying effect is achieved without indentation and damage is improved, and the drying quality and efficiency are improved.
Patent Information
- Application Number
- CN202421846957.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-01
- Publication Date
- 2025-06-24
- Estimated Expiration
- 2034-08-01
AI Technical Summary
During the drying process of silicon wafers, the first side wall will be overdry during subsequent drying, resulting in indentation and damage of the paint, affecting the subsequent process.
A sheet drying support device is designed, including a bottom plate and a side plate, the side plate forms an obtuse angle with the bottom plate to form an accommodating space, and a first opening and a second opening are provided on the side plate to speed up the drying speed and uniform heating.
Through this device, the side wall surface of the sheet to be dried does not need to contact the support device, avoiding indentation and damage of the paint, and improving drying quality and efficiency.
Smart Images
Figure CN223011030U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of support devices, in particular to a sheet drying support device. Background Art
[0002] During the production and processing of silicon wafers, bilateral spraying and drying are required. To ensure the quality of spraying and drying, currently, the method of spraying and drying the first side wall first and then the second side wall is mainly adopted. Since the first side wall that has been dried first will also be heated while the second side wall is being dried subsequently, in order to prevent the first side wall that has been dried first from being over-dried during the subsequent drying of the second side wall, the first side wall is not dried until the surface coating is completely solidified during drying. During the drying process of the second side wall, the surface coating on the first side wall gradually solidifies. However, currently, the silicon wafers are placed on a mesh rack for drying, and the coating on the first side wall will contact the mesh rack during the drying of the second side wall, resulting in indentations, damage, etc. to the coating on the first side wall, thus affecting the subsequent process. Summary of the Utility Model
[0003] Therefore, the technical problem to be solved by the utility model is to provide a sheet drying support device that can prevent indentations, damage, etc. to the coating on the side wall of the sheet.
[0004] To solve the above technical problem, the utility model provides a sheet drying support device, including: a bottom plate; side plates, at least two side plates are connected to opposite ends of the bottom plate, the included angle formed by the plane where the side plates are located and the plane where the bottom plate is located is an obtuse angle, and a receiving space for receiving the sheet to be dried is formed between the two side plates, and the side plates are provided with a first opening.
[0005] In an embodiment of the utility model, the included angle formed by the plane where the two side plates are located and the plane where the bottom plate is located is the same.
[0006] In an embodiment of the utility model, there are multiple first openings on the side plates, and the first openings on the two side plates are arranged oppositely.
[0007] In an embodiment of the utility model, the first openings on the side plates are arranged in parallel along the connection position of the side plates and the bottom plate.
[0008] In an embodiment of the utility model, there are multiple second openings on the bottom plate, and the second openings are arranged in parallel along the side plates.
[0009] In an embodiment of the utility model, a support rod is provided at the corner position of the end of the side plate away from the bottom plate, and the support rod extends away from the side plate.
[0010] In one embodiment of the present utility model, the end of the support rod away from the side plate is arc-shaped.
[0011] In one embodiment of the present utility model, a cooling member is further provided between the two side plates, and the cooling member is used to abut against the sheet to be dried.
[0012] In one embodiment of the present utility model, the cooling member includes a cooling plate, the cooling plate is connected to a cooling source, and the cooling source is connected to a controller.
[0013] In one embodiment of the present utility model, a temperature detection member is provided on the side of the cooling plate for abutting against the sheet to be dried, and the temperature detection member is connected to the controller.
[0014] The above technical solution of the present utility model has the following advantages compared with the prior art:
[0015] For the sheet drying support device of the present utility model, the sheet to be dried can be stuck between the two side plates. Since only the edges of the sheet to be dried abut against the two side plates, the side wall surface of the sheet to be dried does not need to contact the sheet drying support device, so that the paint on the side wall of the sheet to be dried will not have indentations, breakages, etc. after drying. Through the settings of the first opening and the second opening, the drying speed of the sheet to be dried on the sheet drying support device can be accelerated, the sheet to be dried is evenly heated, and the drying quality is improved. Description of the Drawings
[0016] In order to make the content of the present utility model easier to be clearly understood, the following further details the present utility model according to the specific embodiments of the present utility model and in conjunction with the drawings, where
[0017] Figure 1 is a schematic structural diagram of a sheet drying support device of the present utility model;
[0018] Figure 2 is an assembly structural diagram of the cooling plate and the side plate.
[0019] Explanation of the reference numerals in the drawings: 1, bottom plate; 2, side plate; 3, cooling plate; 11, second opening; 21, first opening; 22, support rod. Detailed Embodiments
[0020] The following further illustrates the present utility model in conjunction with the drawings and specific embodiments, so that those skilled in the art can better understand the present utility model and be able to implement it, but the embodiments cited do not limit the present utility model.
[0021] Refer to Figure 1As shown in the figure, a sheet drying support device of the present utility model includes: a bottom plate 1; side plates 2, at least two of the side plates 2 are connected to opposite ends of the bottom plate 1, and the included angle formed by the plane where the side plates 2 are located and the plane where the bottom plate 1 is located is an obtuse angle. An accommodation space for accommodating the sheet to be dried is formed between the two side plates 2, and the side plates 2 are provided with first openings 21.
[0022] In a sheet drying support device of this embodiment, since the included angle formed by the plane where the side plates 2 are located and the plane where the bottom plate 1 is located is an obtuse angle, the edges of the sheet to be dried abut against the two side plates 2, so that the sheet to be dried can be stuck between the two side plates 2. Since only the edges of the sheet to be dried abut against the two side plates 2, the side wall surface of the sheet to be dried does not need to contact the sheet drying support device, so that the coating on the side wall of the sheet to be dried will not have indentations, breakages, etc. after drying.
[0023] The sheet drying support device is used to be placed in a drying device. The sheet drying support device includes a bottom plate 1 and side plates 2, and at least two side plates 2 are connected to opposite ends of the bottom plate 1.
[0024] The bottom plate 1 is used to abut against the base in the drying area of the drying device. The base is in the shape of a rectangular flat plate as a whole. A plurality of second openings 11 are provided on the bottom plate 1, and the plurality of second openings 11 are arranged in parallel along the side plates 2. In this embodiment, the second openings 11 are rectangular, and the four corners of the second openings 11 are arc-shaped. The second openings 11 can also be set as circular, triangular, etc. Preferably, the edges of the second openings 11 are arranged close to the edges of the bottom plate 1, that is, the size of the second openings 11 is maximized while ensuring the structural stability of the bottom plate 1. The second openings 11 are used for the gas flow between the base of the drying device and the drying area, so as to accelerate the drying speed of the sheet to be dried on the sheet drying support device, and can also make the sheet to be dried evenly heated and improve the drying quality.
[0025] The end of the side plate 2 is connected to the longer end of the bottom plate 1, and the lengths of the connection positions between the side plate 2 and the bottom plate 1 are equal. At least two side plates 2 are connected to the two opposite ends on the bottom plate 1, so that the two side plates 2 are arranged oppositely. The included angle formed by the plane where the side plate 2 is located and the plane where the bottom plate 1 is located is an obtuse angle, so that the sheet to be dried can be stuck between the two side plates 2, and a receiving space for accommodating the sheet to be dried is formed between the two side plates 2. Preferably, the included angles formed by the planes where the two side plates 2 are located and the plane where the bottom plate 1 is located are equal respectively, that is, the two side plates 2 are symmetrically arranged, and the cross-section formed by the bottom plate 1 and the two side plates 2 is an isosceles trapezoid, so that the sheet to be dried is more stable when stuck between the two side plates 2, and the size of the sheet to be dried that can be clamped between the two side plates 2 gradually increases in the vertical direction away from the bottom plate 1, so that different sizes of sheets to be dried can be clamped between the two side plates 2, and the applicable range of the sheet drying support device is relatively wide.
[0026] The side plate 2 is provided with a first opening 21, and there are multiple first openings 21 on the side plate 2. In this embodiment, the first opening 21 is rectangular, and the four corner positions of the first opening 21 are arc-shaped. The first opening 21 can also be set as circular, triangular, etc. Preferably, the first openings 21 on the two side plates 2 are arranged oppositely and symmetrically, and the multiple first openings 21 are arranged in parallel along the connection position between the side plate 2 and the bottom plate 1. The edge of the first opening 21 is arranged close to the edge of the side plate 2, that is, the size of the first opening 21 is maximized while ensuring the structural stability of the side plate 2. The first opening 21 is used for the gas flow on both sides of the receiving space, so as to prevent the drying quality of the sheet to be dried from being reduced due to the temperature difference between the inside and the outside of the receiving space, and can also accelerate the drying speed of the sheet to be dried on the sheet drying support device, make the sheet to be dried evenly heated, improve the drying quality, and the setting of the first opening 21 is also convenient for the taking and storing of the support frame.
[0027] A support rod 22 is provided at the corner position of the side plate 2 away from the bottom plate 1. The support rod 22 extends away from the side plate 2, and the opposite side of the support rod 22 is coplanar with the opposite side of the side plate 2, so that there is no protrusion or depression at the connection position between the support rod 22 and the side plate 2 in the receiving space. The support rods 22 are also used for clamping the sheet to be dried, and compared with the sheet to be dried clamped between the side plates 2, the contact area between the sheet to be dried between the support rods 22 and the support rods 22 is smaller. Preferably, the end of the support rod 22 away from the side plate 2 is arc-shaped, so as to prevent the end of the support rod 22 from scratching the sheet to be dried when the sheet to be dried is placed between the support rods 22 or the side plates 2. Preferably, the bottom plate 1, the side plate 2 and the support rod 22 are of an integral structure, so that the structure of the sheet drying support device is more stable.
[0028] Refer to Figure 2As shown, a cooling member can also be clamped between the two side plates 2, and the cooling member is used to abut against the sheet to be dried. Specifically, the cooling member includes a cooling plate 3, and the cooling plate 3 is connected to a cooling source, and the cooling source is connected to a controller. The cooling source is controlled by the controller, thereby controlling the temperature of the cooling plate 3. The size of the cooling plate 3 is larger than the size of the sheet to be dried. After the cooling plate 3 is clamped between the two side plates 2, the sheet to be dried can be placed on the cooling plate 3. Preferably, a temperature detection member is provided on the side of the cooling plate 3 that is used to abut against the sheet to be dried, and the temperature detection member is connected to the controller. The temperature detection member can detect the temperature of the sheet to be dried, and the temperature of the sheet to be dried is monitored by the temperature detection member, so that the controller can adjust the temperature of the cooling plate 3 through the cooling source, so that the temperature of the side of the sheet to be dried that abuts against the cooling plate 3 can be maintained within a set range. After the first side wall of the sheet to be dried is dried, the second side wall of the sheet to be dried is dried. When the paint on the surface of the first side wall has been dried, the cooling plate 3 is clamped between the two side plates 2, and the sheet to be dried is placed on the cooling plate 3 so that the first side wall is against the cooling plate 3. By controlling the temperature of the cooling plate 3, the paint on the surface of the first side wall is prevented from being over-dried, thereby improving the drying quality of the sheet to be dried. At the same time, the support rod 22 and the side plate 2 can prevent the sheet to be dried from detaching from the cooling plate 3.
[0029] When in use, after coating the first side wall of the sheet to be dried, the sheet to be dried is clamped between the two side plates 2, with the first side wall facing away from the bottom plate 1. After the coating on the first side wall is dried, the second side wall of the sheet to be dried is coated, and then the sheet to be dried is clamped between the two side plates 2 again, with the second side wall facing away from the bottom plate 1. When the coating on the surface of the first side wall has been dried, the cooling plate 3 is clamped between the two side plates 2, and the sheet to be dried is placed on the cooling plate 3 so that the first side wall is against the cooling plate 3. By controlling the temperature of the cooling plate 3, the coating on the surface of the first side wall is prevented from being over-dried.
[0030] The utility model provides a sheet drying support device, in which the sheet to be dried can be stuck between the two side plates 2. Since only the edge of the sheet to be dried abuts against the two side plates 2, the side wall surface of the sheet to be dried does not need to contact the sheet drying support device, so that after the sheet to be dried is dried, the paint on the side wall will not be indented or damaged. By setting the first opening 21 and the second opening 11, the drying speed of the sheet to be dried on the sheet drying support device can be accelerated, the sheet to be dried is heated evenly, and the drying quality is improved.
[0031] Obviously, the above embodiments are merely examples for clear illustration and are not limitations on the implementation manners. For those of ordinary skill in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to enumerate all the implementation manners here. And the obvious changes or modifications derived therefrom are still within the protection scope of the creation of this utility model.
Claims
1. A sheet drying support device, characterized in that: include: Base plate; Side panels, at least two of which are connected to opposite ends of the bottom panel, the angle formed by the plane where the side panels are located and the plane where the bottom panel is located is an obtuse angle, a storage space for accommodating sheets to be dried is formed between the two side panels, and the side panel is provided with a first opening.
2. The sheet material drying support device according to claim 1, characterized in that: The included angles formed by the planes where the two side plates are located and the plane where the bottom plate is located are respectively the same.
3. The sheet material drying support device according to claim 1, characterized in that: A plurality of first openings are provided on the side plate, and the first openings of two side plates are arranged opposite to each other.
4. The sheet material drying support device according to claim 3, characterized in that: The first opening on the side plate is arranged parallel to a connection position between the side plate and the bottom plate.
5. The sheet material drying support device according to claim 1, characterized in that: The bottom plate is provided with a plurality of second openings, and the second openings are arranged in parallel along the side plates.
6. The sheet material drying support device according to claim 1, characterized in that: A support rod is provided at a corner position of the side plate away from one end of the bottom plate, and the support rod extends in a direction away from the side plate.
7. The sheet material drying support device according to claim 6, characterized in that: One end of the support rod away from the side plate is in an arc shape.
8. The sheet material drying support device according to claim 1, characterized in that: A cooling member is also provided between the two side plates, and the cooling member is used to abut against the sheet to be dried.
9. The sheet material drying support device according to claim 8, characterized in that: The cooling member includes a cooling plate, the cooling plate is connected to a cooling source, and the cooling source is connected to a controller.
10. The sheet material drying support device according to claim 9, characterized in that: A temperature detection component is provided on the side of the cooling plate that is against the sheet to be dried, and the temperature detection component is connected to the controller.