Double-station etching cleaning machine for PCB (Printed Circuit Board) production

By designing a compact structure dual-station etching and cleaning machine, the existing equipment has solved the problems of complex structure, large size and low cleaning efficiency, and the automated processing and efficient cleaning of PCB boards are realized.

CN223011373UActive Publication Date: 2025-06-24ZHUHAI HENGER MICROELECTRONIC EAUIPMENT CO LTD
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Patent Information

Application Number
CN202421788375.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-25
Publication Date
2025-06-24
Estimated Expiration
2034-07-25

AI Technical Summary

Technical Problem

The existing plasma cleaning equipment has a complex structure and large size, so it cannot be effectively assembled in the existing PCB board production line or production workshop, and the cleaning efficiency is low.

Method used

A double-station etching and cleaning machine was designed. The body structure is compact and the layout of each part is reasonable, including two parallel plasma etching and cleaning chambers. The vacuum assembly and air source assembly are installed on the lower side of each cavity. The electrical control cabinet adopts the horizontal sliding door method to save installation space.

Benefits of technology

It realizes automatic processing of PCB boards, saves installation space, facilitates maintenance and debugging, and improves cleaning efficiency.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a double-station etching cleaning machine for PCB production, which comprises a bottom cavity seat, and two plasma etching cleaning cavities which are arranged side by side left and right are arranged on the top side of the bottom cavity seat; a door body sealing mechanism which is used for controlling up and down and sealing the front side material inlet and outlet in a vacuum manner is arranged at the front side material inlet and outlet of each plasma etching cleaning cavity; middle stand columns used for supporting and fixing the respective door body sealing mechanisms are arranged between the two parallel plasma etching cleaning cavities. A vacuumizing assembly and an air source assembly for vacuumizing the two plasma etching cleaning cavities are arranged in the bottom cavity seat corresponding to the lower side of each plasma etching cleaning cavity; an electric control cabinet is arranged beside the side surface of each plasma etching cleaning cavity in a manner of being adjacent to the side surface of the plasma etching cleaning cavity; the whole machine is compact in structure and small in occupied space, and a plurality of PCBs in the same batch can be synchronously cleaned and desmeared in one cavity or two cavities.
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Description

Technical Field

[0001] The utility model relates to plasma cleaning technology, in particular to a double-station etching and cleaning machine for PCB board production.

Background Art

[0002] Plasma cleaning means that highly activated plasma moves directionally under the action of an electric field, undergoes a gas-solid chemical reaction with the smears on the hole wall, and at the same time, the generated gas products and some unreacted particles are discharged by a suction pump. With the development of technology, the existing multi-layer PCB circuit board structure seeks a high aspect ratio and smaller hole diameters. The traditional desmear cleaning method (i.e., wet processing) for drilling and in the holes is greatly limited. Especially due to the characteristics of the PCB boards to be cleaned having different specifications, it is not easy to fix the PCB boards during the cleaning process, and the operation of the sequential single cleaning method is very cumbersome, and the cleaning efficiency is low.

[0003] In the existing cleaning and processing of PCB boards, since the PCB boards used in electronic products are getting thinner and thinner; therefore, when the PCB boards need to be cleaned and processed, the PCB boards need to be placed in a special carrier for positioning and support. On the one hand, the reliability during the transfer of the PCB boards is improved, on the other hand, the positioning accuracy during etching or cleaning processing is improved, and at the same time, the automatic loading and unloading of the PCB boards are realized; for the above reasons, the existing plasma cleaning equipment has a complex structure and a large volume, and cannot be effectively assembled in the existing PCB board production line or production workshop.

Content of the Utility Model

[0004] The double-station etching and cleaning machine for PCB board production provided by the utility model has a compact body structure, reasonable layout of each part, effectively saves the installation space and is convenient for maintenance and debugging, and effectively realizes the automatic processing of PCB boards.

[0005] The technical solution adopted in the embodiment of the utility model is as follows:

[0006] The double-station etching and cleaning machine for PCB board production is used for multiple PCB boards of the same batch to synchronously perform cleaning and desmear processing in one cavity or two cavities, and includes a bottom cavity seat, and two plasma etching and cleaning cavities arranged side by side are installed on the top side of the bottom cavity seat;

[0007] At the front inlet and outlet of each of the plasma etching and cleaning cavities, a door body closing mechanism for up and down lifting control and vacuum closing of the front inlet and outlet is respectively arranged;

[0008] An intermediate column for supporting and fixing the respective door body closing mechanisms is arranged between the two juxtaposed plasma etching and cleaning cavities;

[0009] A vacuum pumping assembly and a gas source assembly for evacuating the two plasma etching and cleaning chambers are respectively arranged in the bottom cavity seats corresponding to the lower sides of each of the plasma etching and cleaning chambers.

[0010] An electrical control cabinet is closely arranged beside the side of each plasma etching and cleaning chamber.

[0011] Preferably, at least one cabinet door that opens the internal space of the cabinet by lateral translation after unlocking is installed on each electrical control cabinet, and two handles for easily pushing, pulling, and lifting the cabinet door are arranged at intervals along the same height on the upper edge of the cabinet door.

[0012] Preferably, maintenance hatches for quickly disassembling and maintaining the internal vacuum pumping assembly and gas source assembly are respectively arranged on the front wall surfaces of the bottom cavity seats corresponding to each plasma etching and cleaning chamber.

[0013] Preferably, each door body closing mechanism includes a hatch door panel, a screw guide rail assembly, and three pairs of pneumatic driving assemblies symmetrically arranged left and right. The hatch door panel moves up and down in the vertical direction under the drive of the screw guide rail assemblies on both sides, and the three pairs of pneumatic driving assemblies are symmetrically installed on the sliders of the screw guide rail assemblies on both sides of the hatch door panel. The three pairs of pneumatic driving assemblies drive the hatch door panel to move forward and backward to open or close the front side inlet and outlet of the corresponding plasma etching and cleaning chamber.

[0014] The beneficial effects of the present utility model are as follows:

[0015] In the present utility model, a vacuum pumping assembly and a gas source assembly for evacuating the two plasma etching and cleaning chambers are respectively arranged in the bottom cavity seats corresponding to the lower sides of each plasma etching and cleaning chamber. Compared with the prior art where the vacuum pumping assembly and the gas source assembly are directly installed in the gas source cabinet at the rear side of the rear wall of the plasma etching and cleaning chamber, the longitudinal installation space of the whole machine can be effectively saved.

[0016] Two cabinet doors that open the internal space of the cabinet by lateral translation after unlocking are installed on each electrical control cabinet. Compared with the existing cabinet doors that open by means of hinge deflection, the opening method of lateral translation after unlocking can effectively save the space for the deflection of the door body and effectively save the installation space of the corresponding double-station etching and cleaning machine.

[0017] The above layout makes the whole machine structure compact, the layout of each part is reasonable, effectively saves the installation space and is convenient for maintenance and debugging.

Description of the Drawings

[0018] Figure 1 It is the front view structural schematic diagram in the embodiment of the present utility model;

[0019] Figure 2 It is the left view three-dimensional structural schematic diagram in the embodiment of the present utility model;

[0020] Figure 3 is a schematic right - view three - dimensional structure diagram in an embodiment of the present utility model;

[0021] Figure 4 is a schematic bottom - view three - dimensional structure diagram in an embodiment of the present utility model.

Specific embodiments

[0022] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope of protection of the present utility model.

[0023] In the description of the present utility model, it should be noted that unless otherwise clearly defined and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood through specific situations.

[0024] A double - station etching and cleaning machine for PCB board production, such as Figures 1 to 4As shown in the figure, multiple PCB boards of the same batch are synchronously cleaned and degummed in one cavity or two cavities, including a bottom cavity base 1. Two plasma etching and cleaning cavities 2 arranged side by side left and right are installed on the top side of the bottom cavity base 1. At the front inlet and outlet of each plasma etching and cleaning cavity 2, there is respectively a door closing mechanism 3 for up and down lifting control and vacuum sealing of the front inlet and outlet. An intermediate column 4 for supporting and fixing the respective door closing mechanisms 3 is arranged between the two juxtaposed plasma etching and cleaning cavities 2. Inside the bottom cavity base 1 corresponding to the lower side of each plasma etching and cleaning cavity 2, there are respectively a vacuum pumping assembly (not shown in the figure) and a gas source assembly (not shown in the figure) for evacuating the two plasma etching and cleaning cavities 2. Compared with the prior art where the vacuum pumping assembly and the gas source assembly are directly installed in the gas source cabinet body behind the rear wall of the plasma etching and cleaning cavity 2, the longitudinal installation space of the whole machine can be effectively saved in this embodiment. An electrical control cabinet 5 is respectively arranged adjacent to the side of each plasma etching and cleaning cavity 2. Two cabinet doors 50 that open the internal space of the cabinet by lateral movement after unlocking are installed on each electrical control cabinet 5. Two handles 51 for easily pushing, pulling, and lifting the cabinet door are arranged at the same height and at intervals along the upper edge of the cabinet door. Compared with the existing cabinet door that opens by hinge deflection, the opening method of lateral movement after unlocking can effectively save the space for the cabinet door to deflect and effectively save the installation space of the corresponding double-station etching and cleaning machine.

[0025] Continue as Figures 1 to 4 As shown in the figure, two maintenance hatches 6 for quick disassembly and maintenance of the internal vacuum pumping assembly and gas source assembly are respectively arranged on the front wall surface of the bottom cavity base 1 corresponding to each plasma etching and cleaning cavity 2. Each door closing mechanism 3 includes a hatch door panel 30, a screw guide rail assembly 31, and three pairs of pneumatic driving assemblies 32 arranged symmetrically left and right. The hatch door panel 30 moves up and down in the vertical direction under the drive of the screw guide rail assemblies 31 on both sides. The three pairs of pneumatic driving assemblies 32 are symmetrically installed on the sliders of the screw guide rail assemblies 31 on both sides of the hatch door panel 30. The three pairs of pneumatic driving assemblies 32 drive the hatch door panel 30 to move forward and backward to open or close the front inlet and outlet of the corresponding plasma etching and cleaning cavity 2.

[0026] In this embodiment, the whole machine has a compact structure and small occupied space, is effectively applicable to the assembly of production workshops with relatively small on-site space, and is convenient for synchronously cleaning and degumming multiple PCB boards of the same batch in one cavity or two cavities.

[0027] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by terms such as "top", "bottom", "upper", "lower", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present utility model is usually placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0028] The above-described embodiments are only preferred embodiments of the present utility model, and do not limit the scope of implementation of the present utility model. Any equivalent changes made according to the shape, structure and principle of the present utility model should be covered within the protection scope of the present utility model.

Claims

1. A dual-station etching and cleaning machine for PCB production, which is used for simultaneous cleaning and desmearing of multiple PCBs of the same batch in one or two chambers, characterized in that: It comprises a bottom cavity seat, and two plasma etching cleaning cavities arranged side by side on the top side of the bottom cavity seat are installed; A door body sealing mechanism with up and down lifting control and used for vacuum sealing the front inlet and outlet of each plasma etching cleaning chamber is respectively provided at the front inlet and outlet of each plasma etching cleaning chamber; An intermediate column for supporting and fixing the respective door body closing mechanisms is provided between the two parallel plasma etching cleaning chambers; A vacuuming component and a gas source component for vacuuming the two plasma etching cleaning chambers are respectively arranged in the bottom chamber seat corresponding to the lower side of each plasma etching cleaning chamber; An electrical control cabinet is disposed adjacent to the side of each plasma etching cleaning chamber.

2. The double-station etching and cleaning machine for PCB board production according to claim 1 is characterized in that: Each of the electrical control cabinets is provided with at least one cabinet door which can open the inner space of the cabinet by sliding sideways after being unlocked, and two handles which are convenient for pushing, pulling and lifting the cabinet door are arranged at the same height intervals on the upper edge of the cabinet door.

3. The double-station etching and cleaning machine for PCB board production according to claim 1 is characterized in that: An inspection hatch for quick disassembly, inspection and maintenance of the internal vacuum assembly and gas source assembly is also provided on the front wall surface of the bottom chamber seat corresponding to each of the plasma etching cleaning chambers.

4. The double-station etching and cleaning machine for PCB board production according to claim 1 is characterized in that: Each of the door body closing mechanisms includes a hatch plate, a screw guide rail assembly and three pairs of pneumatic drive assemblies symmetrically arranged on the left and right. The hatch plate is lifted and lowered in the vertical direction under the drive of the screw guide rail assemblies on both sides. The three pairs of pneumatic drive assemblies are symmetrically installed on the sliders of the screw guide rail assemblies on both sides of the hatch plate. The three pairs of pneumatic drive assemblies drive the hatch plate to move forward and backward to open or close the corresponding front inlet and outlet of the plasma etching cleaning chamber.