Device for cleaning dust on inner wall of silane exhaust pipeline

Abstract

The utility model relates to the technical field of pipeline cleaning equipment, in particular to a device for cleaning dust on the inner wall of a silane discharge pipeline, which comprises a box body mounted on the outer wall of the silane discharge pipeline, a fixing component mounted on the outer wall of the silane discharge pipeline is arranged in the box body, and a pipeline vibrator is mounted on the fixing component. A rotary driving mechanism for carrying out vibration cleaning on different positions of the silane discharge pipeline is arranged at the bottom of the fixing assembly, and the rotary driving mechanism is mounted at the inner bottom of the box body; according to the device for cleaning the dust on the inner wall of the silane exhaust pipeline, the pipeline vibrator is mounted on the silane exhaust pipeline to continuously vibrate the silane exhaust pipeline, so that the dust on the inner wall of the silane exhaust pipeline falls off, and dust-containing gas enters the peripheral combustion cylinder along the airflow direction under the operation of a main fan of a system, so that the purpose of cleaning the dust on the inner wall of the silane exhaust pipeline is achieved; and the existing silane discharge pipeline can be directly transformed, the transformation cost is low, and the cleaning effect is good.

Description

Technical Field

[0001] The utility model relates to the technical field of pipeline cleaning equipment, in particular to a device for cleaning dust on the inner wall of a silane exhaust pipeline. Background Art

[0002] The silane exhaust pipeline usually refers to a silane exhaust pipeline system that uses silane as a raw material to manufacture pipelines for transporting gases or liquids. Such silane exhaust pipeline systems are common in industries such as chemical engineering, semiconductors, and optoelectronics. Currently, the silane exhaust in the workshop machine has been operating normally for more than 6 months, and the silane exhaust in the interlayer It is inevitable that a layer of silicon dioxide dust will adhere to the inner wall of the main silane exhaust pipeline. The longer the operation time, the thicker the dust accumulation, and even the pipeline may be blocked, causing the risk of silane backflow. Since there is no spare silane exhaust pipeline, when the workshop machine is not shut down, the corresponding silane exhaust pipeline cannot be removed from the KF interface to directly clean the inner wall of the silane exhaust pipeline, resulting in difficulties in cleaning. Content of the Utility Model

[0003] Aiming at the deficiencies of the prior art, the utility model provides a device for cleaning dust on the inner wall of a silane exhaust pipeline, which solves the technical problem of difficult cleaning of the silane exhaust pipeline without shutting down the machine.

[0004] To solve the above technical problems, the utility model provides the following technical solutions: A device for cleaning dust on the inner wall of a silane exhaust pipeline, including a box body installed on the outer wall of the silane exhaust pipeline. A fixing component installed on the outer wall of the silane exhaust pipeline is arranged inside the box body. A pipeline vibrator is installed on the fixing component, and a rotary drive mechanism for vibrating and cleaning different positions of the silane exhaust pipeline is arranged at the bottom of the fixing component. The rotary drive mechanism is installed on the inner bottom of the box body;

[0005] The rotary drive mechanism includes a motor installed on the inner bottom of the lower box body. A gear is fixedly arranged on the output shaft of the motor, and the gear meshes with a toothed plate fixedly arranged at the bottom of the fixing component.

[0006] Preferably, the box body is composed of an upper box body and a lower box body sleeved on the silane exhaust pipeline.

[0007] Preferably, the fixing component includes a fixing ring installed on the outer wall of the silane exhaust pipeline. An installation groove is opened at the top of the fixing ring, and the pipeline vibrator is detachably connected to the installation groove through bolts. Two fitting wedge-shaped gaskets are also sleeved on the bolts.

[0008] Preferably, the fixing ring is composed of an upper half ring and a lower half ring sleeved on the silane exhaust pipeline. One end of the upper half ring and the lower half ring is rotatably connected, and the other end is inserted with a double-headed stud. Nuts are threadedly connected to both ends of the double-headed stud.

[0009] Preferably, a plurality of rollers rolling on the outer wall of the silane discharge pipe are equidistantly distributed on the inner wall of the fixing ring.

[0010] Preferably, a sound-absorbing cotton with a porous structure is fixedly arranged on the inner wall of the box body.

[0011] By means of the above technical solution, the utility model provides a device for cleaning dust on the inner wall of a silane discharge pipe, which at least has the following beneficial effects:

[0012] 1. For the device for cleaning dust on the inner wall of the silane discharge pipe, by setting a fixing component, without stopping the workshop machine, a pipe vibrator is installed on the silane discharge pipe to continuously vibrate the silane discharge pipe, so that the dust on the inner wall of the silane discharge pipe falls off. Under the operation of the main fan of the system, the dust-containing gas enters the peripheral combustion cylinder along the air flow direction, thereby achieving the purpose of cleaning the dust on the inner wall of the silane discharge pipe. The existing silane discharge pipe can be directly transformed, with low transformation cost and good cleaning effect.

[0013] 2. For the device for cleaning dust on the inner wall of the silane discharge pipe, by setting a rotary drive mechanism, the pipe vibrator can be adjusted in position on the silane discharge pipe, which is convenient for vibrating and cleaning the silane discharge pipe from different positions, and is beneficial to improving the cleaning effect.

[0014] 3. For the device for cleaning dust on the inner wall of the silane discharge pipe, by setting sound-absorbing cotton, the whole pipe vibrator is covered in the box body, and the noise generated during the operation of the pipe vibrator can be absorbed by the sound-absorbing cotton, thereby reducing noise pollution. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The drawings described herein are used to provide a further understanding of the utility model and constitute a part of this application:

[0016] Figure 1 It is a schematic three-dimensional structure diagram of the whole utility model;

[0017] Figure 2 It is a schematic structural diagram of the fixing component and the rotary drive mechanism on the outer wall of the silane discharge pipe of the utility model;

[0018] Figure 3 It is a schematic structural diagram of the connection between the fixing component and the pipe vibrator of the utility model;

[0019] Figure 4 It is a schematic structural diagram of the pipe vibrator of the utility model;

[0020] Figure 5 It is a schematic structural diagram of the inside of the lower box body of the utility model;

[0021] Figure 6 It is a schematic structural diagram of the partial section of the upper box body of the utility model;

[0022] Reference numerals:

[0023] 1. Silane discharge pipe; 2. Box body; 21. Upper box body; 22. Lower box body; 3. Sound-absorbing cotton; 4. Fixing component; 41. Fixing ring; 411. Lower half ring; 412. Upper half ring; 42. Stud; 43. Nut; 44. Bolt; 45. Wedge-shaped gasket; 46. Tooth plate; 47. Roller; 5. Pipe vibrator; 6. Rotary drive mechanism; 61. Motor; 62. Gear. Detailed implementation manners

[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0025] Silane is a silicon-containing compound, commonly used in the preparation of semiconductor materials and thin films. The silane discharge pipe 1 is generally made of polymer or other corrosion-resistant materials and can withstand chemical corrosion and high temperatures.

[0026] Based on the technical defects existing in the prior art, please refer to Figures 1-6 , a dust cleaning device for the inner wall of the silane discharge pipe 1 provided by the present invention installs a pipe vibrator 5 on the silane discharge pipe 1 to continuously vibrate the silane discharge pipe 1, so that the dust on the inner wall of the silane discharge pipe 1 falls off. Under the operation of the main fan of the system, the dust-containing gas enters the peripheral combustion cylinder along the air flow direction, so as to achieve the purpose of cleaning the dust on the inner wall of the silane discharge pipe 1. The device includes a box body 2 installed on the outer wall of the silane discharge pipe 1. A fixing component 4 installed on the outer wall of the silane discharge pipe 1 is arranged inside the box body 2. A pipe vibrator 5 is installed on the fixing component 4. A rotary drive mechanism 6 for vibrating and cleaning different positions of the silane discharge pipe 1 is arranged at the bottom of the fixing component 4. The rotary drive mechanism 6 is installed on the inner bottom of the box body 2. First, the pipe vibrator 5 is installed on the silane discharge pipe 1 through the fixing component 4, and then the pipe vibrator 5 is started to make the silane discharge pipe 1 vibrate, so as to shake off the dust adhering to the inner wall of the silane discharge pipe 1.

[0027] To improve the cleaning effect on the silane discharge pipe 1, please refer to Fig. 2 and Figure 5, the rotation drive mechanism 6 includes a motor 61 installed at the bottom inside the lower box body 22. A gear 62 is fixedly provided on the output shaft of the motor 61, and the gear 62 meshes with a toothed plate 46 fixedly provided at the bottom of the fixed assembly 4. By operating the motor 61 and driving the fixed assembly 4 to rotate through the meshing of the gear 62 and the toothed plate 46, the pipe vibrator 5 can adjust its position on the silane discharge pipe 1, facilitating the vibration cleaning operation of the silane discharge pipe 1 from different positions, which is beneficial to improving the cleaning effect.

[0028] For the convenience of installing the box body 2, please refer to Figure 1 , the box body 2 is composed of an upper box body 21 and a lower box body 22 sleeved on the silane discharge pipe 1. When installing the box body 2, the upper box body 21 and the lower box body 22 can be combined.

[0029] For the convenience of installing the pipe vibrator 5, please refer to Figure 3 and Figure 4 , the fixed assembly 4 includes a fixing ring 41 installed on the outer wall of the silane discharge pipe 1. An installation groove is opened at the top of the fixing ring 41, and the pipe vibrator 5 is detachably connected to the installation groove through a bolt 44. Two fitting wedge-shaped gaskets 45 are also sleeved on the bolt 44. Install the fixing ring 41 on the silane discharge pipe 1, and then use the bolt 44 to install the pipe vibrator 5 onto the fixing ring 41. Through the setting of the wedge-shaped gasket 45, the influence on the tightening of the bolt 44 caused by the vibration of the pipe vibrator 5 can be avoided, and the situation where the pipe vibrator 5 falls off and cannot be used can be avoided.

[0030] For the convenience of installing the fixing ring 41, please refer to Figure 3 , the fixing ring 41 is composed of an upper half ring 412 and a lower half ring 411 sleeved on the silane discharge pipe 1. One end of the upper half ring 412 and the lower half ring 411 is rotatably connected, and the other end is inserted with a stud 42. Nuts 43 are threadedly connected to both ends of the stud 42. Open the fixing ring 41, then sleeve the fixing ring 41 on the silane discharge pipe 1, set the stud 42 at the other end of the fixing ring 41 and lock it with the nut 43.

[0031] To enable the fixing ring 41 to smoothly rotate and move on the silane discharge pipe 1, a plurality of rollers 47 rolling on the outer wall of the silane discharge pipe 1 are equidistantly distributed on the inner wall of the fixing ring 41. Through the rollers 47, the fixing ring 41 and the silane discharge pipe 1 are in rolling connection, so that the rotation can be smoother.

[0032] To reduce noise pollution, sound-absorbing cotton 3 with a porous structure is fixedly provided on the inner wall of the box body 2. The entire pipe vibrator 5 is covered in the box body 2, and the noise generated during the operation of the pipe vibrator 5 can be absorbed by the sound-absorbing cotton 3, thereby reducing noise pollution.

[0033] As can be seen from the above embodiments: First, under the action of the fixing component 4, the fixing ring 41 is opened, and then the fixing ring 41 is sleeved on the silane discharge pipe 1. A stud 42 is provided at the other end of the fixing ring 41 and locked with a nut 43. Then, the pipe vibrator 5 is installed on the fixing ring 41 by using a bolt 44. Through the setting of the wedge-shaped gasket 45, the influence on the locking of the bolt 44 caused by the vibration of the pipe vibrator 5 can be avoided. After the pipe vibrator 5 is installed, the pipe vibrator 5 is started to vibrate the silane discharge pipe 1, so as to shake off the dust adhering to the inner wall of the silane discharge pipe 1. Finally, under the action of the rotary drive mechanism 6, the motor 61 works and drives the fixing component 4 to rotate through the meshing of the gear 62 and the toothed plate 46, so that the pipe vibrator 5 adjusts its position on the silane discharge pipe 1, facilitating the vibration cleaning operation of the silane discharge pipe 1 from different positions.

[0034] It should be noted that the term "comprising", "including" or any other variation thereof is intended to cover a non-exclusive inclusion, so that a process, method, article or device comprising a series of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article or device.

[0035] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A device for cleaning dust on the inner wall of a silane exhaust pipe, comprising a box (2) installed on the outer wall of a silane exhaust pipe (1), characterized in that: The box (2) is provided with a fixing assembly (4) mounted on the outer wall of the silane exhaust pipe (1), a pipe vibrator (5) is mounted on the fixing assembly (4), a rotating drive mechanism (6) for vibrating and cleaning different positions of the silane exhaust pipe (1) is provided at the bottom of the fixing assembly (4), and the rotating drive mechanism (6) is mounted on the inner bottom of the box (2); The rotary drive mechanism (6) comprises a motor (61) mounted on the bottom of the lower box (22); a gear (62) is fixedly arranged on the output shaft of the motor (61); and the gear (62) meshes with a toothed plate (46) fixedly arranged on the bottom of the fixed assembly (4).

2. The device for cleaning the inner wall dust of the silane exhaust pipe according to claim 1 is characterized in that: The box body (2) is composed of an upper box body (21) and a lower box body (22) which are sleeved on the silane exhaust pipe (1).

3. The dust cleaning device for the inner wall of the silane exhaust pipe according to claim 1 is characterized in that: The fixing assembly (4) comprises a fixing ring (41) mounted on the outer wall of the silane exhaust pipe (1), a mounting groove being provided at the top of the fixing ring (41), the mounting groove being detachably connected to the pipe vibrator (5) via a bolt (44), and two fitting wedge-shaped gaskets (45) being sleeved on the bolt (44).

4. The device for cleaning the inner wall dust of the silane exhaust pipe according to claim 3 is characterized in that: The fixing ring (41) is composed of an upper half ring (412) and a lower half ring (411) which are sleeved on the silane exhaust pipe (1); one end of the upper half ring (412) and the lower half ring (411) are rotatably connected, and a stud bolt (42) is inserted on the other end; both ends of the stud bolt (42) are threadedly connected with nuts (43).

5. The device for cleaning the inner wall dust of the silane exhaust pipe according to claim 3, characterized in that: A plurality of rollers (47) are evenly distributed on the inner wall of the fixed ring (41) and roll on the outer wall of the silane exhaust pipe (1).

6. The device for cleaning the inner wall dust of the silane exhaust pipe according to claim 1, characterized in that: A sound-absorbing cotton (3) with a porous structure is fixedly arranged on the inner wall of the box body (2).

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