Vacuum coating device capable of rapidly cooling
By adding air fans and blower pipes to accelerate material cooling in the vacuum coating device, and using rotary structure to improve coating uniformity, the problem of slow cooling speed and inability to rotate coating in the prior art is solved, and rapid cooling and high-efficiency coating are achieved.
Patent Information
- Application Number
- CN202421923302.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-09
- Publication Date
- 2025-06-24
- Estimated Expiration
- 2034-08-09
AI Technical Summary
The existing vacuum coating devices are slow during the cooling process of materials, resulting in a prolonged processing cycle and the inability to rotate coating, affecting the bonding force between the substrates.
A vacuum coating device that can be quickly cooled is designed. By adding air fans and blowing pipes to the equipment, the air fan is rotated and the air blowing pipes are used to accelerate the heat dissipation of the material; at the same time, the rotating rod and belt are driven by the servo motor to realize the rotation coating of the material.
The rapid cooling of the material is achieved, the processing cycle is shortened, the production efficiency is improved, and the bonding force between the substrate is improved through spin coating, improving the uniformity and adhesion of the coating.
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Figure CN223016957U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of vacuum coating, in particular to a vacuum coating device capable of rapid cooling. Background Technique
[0002] The origin of vacuum coating technology can be traced back to the early 20th century. With the development of physics, material science and vacuum technology, vacuum coating devices have gradually become an indispensable part of modern industry. Early vacuum technology was mainly used in the manufacture of light bulbs and electron tubes. Scientists found that heating metals in a vacuum would cause the metals to evaporate and deposit on adjacent cold surfaces, forming uniform and strongly adherent metal films. This phenomenon laid the foundation for later vacuum coating technology.
[0003] In the field of vacuum coating technology, a vacuum coating device bombards an alloy target 3 in a vacuum environment with ions, so that atoms on the alloy target break away and deposit on the material, forming one or more layers of thin films on the surface of the object. This technology can provide high-quality, uniform and durable coatings for the surfaces of various objects, thereby improving or enhancing the performance of the objects.
[0004] The inventor found the following problems in the process of implementing the utility model: 1. After the device coats the material, the material is placed in the device for cooling, and the natural cooling speed is slow, which will increase the processing cycle of the product; 2. When the device is coating, static coating will produce a thinner film layer at the concave part, affecting the bonding force between the base materials. Content of the Utility Model
[0005] The purpose of the utility model is to provide a vacuum coating device capable of rapid cooling to solve the problems of slow material cooling speed and inability to perform rotary coating mentioned in the above background technique. To achieve the above purpose, the utility model provides the following technical solution: A vacuum coating device capable of rapid cooling, including a machine body, a connector is installed on one side of the machine body, an alloy target is connected to one side of the connector, a U-shaped heating pipe is installed on one side of the alloy target, an air suction pipe is installed on the inner wall of the machine body, a servo motor is installed on the left side of the machine body, a main rotating rod is installed at the bottom of the servo motor, the main rotating rod is connected to a secondary rotating rod through a belt, a placement table is installed at the upper end of the secondary rotating rod, a top cover is installed at the upper end of the machine body, a blowing pipe is installed at the bottom of the top cover, an air outlet is installed at the upper end of the top cover, a fan is installed on one side of the air outlet, an air intake housing is installed on one side of the fan, a small motor is installed at the upper end of the air intake housing, a threaded rod is connected to the bottom of the small motor, the threaded rod is threadedly connected to a sliding block, and a baffle is attached to one side of the sliding block.
[0006] Further preferably, the alloy targets are uniformly arranged and installed along the inner wall of the machine body.
[0007] Further preferably, the suction pipes are symmetrically installed with respect to the horizontal center line of the machine body.
[0008] Further preferably, the placement table forms a rotating structure through the cooperation of a belt and a secondary rotating rod.
[0009] Further preferably, the air fans are symmetrically installed with respect to the horizontal center line of the air inlet housing.
[0010] Further preferably, the baffle forms a sliding structure through the cooperation of a threaded rod and a sliding block.
[0011] Compared with the prior art, the beneficial effects of the present utility model are as follows:
[0012] In the present utility model, by adding air fans and blowing pipes, when the equipment cools the material coating, the air fans at the upper end of the air inlet housing rotate to allow air to enter the suction pipes, and the suction pipes blow air on the material to accelerate the heat dissipation of the material, avoiding interfacial reactions or weakening caused by long-term high temperature, shortening the processing cycle of the coated product, accelerating the production process, and improving the overall production efficiency.
[0013] In the present utility model, by adding a small motor and a secondary rotating rod, when the equipment coats the material, the servo motor drives the main rotating rod and the belt to rotate, and the belt drives the secondary rotating rod and the placement table to rotate. When coating a workpiece with a complex shape or a substrate with a concave-convex structure, rotation can reduce the film layer unevenness caused by the shadow effect in these areas and improve the consistency of the overall coating. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 is a front view structural schematic diagram of the present utility model;
[0015] Figure 2 is a top view structural schematic diagram of the present utility model;
[0016] Figure 3 is a left view structural schematic diagram of the present utility model;
[0017] Figure 4 is a structural schematic diagram of the sliding block of the present utility model.
[0018] In the figure: 1, machine body; 2, connection head; 3, alloy target; 4, U-shaped heating tube; 5, suction pipe; 6, servo motor; 7, main rotating rod; 8, belt; 9, secondary rotating rod; 10, placement table; 11, top cover; 12, blowing pipe; 13, air outlet; 14, air fan; 15, air inlet housing; 16, small motor; 17, threaded rod; 18, sliding block; 19, baffle. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0019] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.
[0020] Please refer to Figures 1 to 4 , the present utility model provides a technical solution: a vacuum coating device capable of rapid cooling, including a machine body 1, a connector 2 is installed on one side of the machine body 1, an alloy target 3 is connected to one side of the connector 2, a U-shaped heating pipe 4 is installed on one side of the alloy target 3, an air suction pipe 5 is installed on the inner wall of the machine body 1, a servo motor 6 is installed on the left side of the machine body 1, a main rotating rod 7 is installed at the bottom of the servo motor 6, the main rotating rod 7 is connected to a secondary rotating rod 9 through a belt 8, a placement table 10 is installed at the upper end of the secondary rotating rod 9, a top cover 11 is installed at the upper end of the machine body 1, a blowing pipe 12 is installed at the bottom of the top cover 11, an air outlet 13 is installed at the upper end of the top cover 11, a fan 14 is installed on one side of the air outlet 13, an air intake housing 15 is installed on one side of the fan 14, a small motor 16 is installed at the upper end of the air intake housing 15, a threaded rod 17 is connected to the bottom of the small motor 16, the threaded rod 17 is threadedly connected to a sliding block 18, and a baffle 19 is attached to one side of the sliding block 18.
[0021] In this embodiment, as Figure 2 and Figure 3 shown, the alloy targets 3 are evenly arranged and installed along the inner wall of the machine body 1; by installing the alloy targets 3 on one side of the machine body 1, the alloy targets 3 are bombarded by ions in a vacuum environment, so that the atoms on the alloy targets 3 are detached and deposited on the material to form a dense and strongly adherent film, thereby coating the material.
[0022] In this embodiment, as Figure 2 and Figure 3 shown, the air suction pipes 5 are symmetrically installed with respect to the horizontal center line of the machine body 1; by installing the air suction pipes 5 inside the machine body 1, the air suction pipes 5 inhale air through the air outlet 13, so that a vacuum is formed inside the machine body 1, which can make the film layer deposit on the material more evenly and tightly, and improve the density, hardness and bonding force of the film layer.
[0023] In this embodiment, as Figure 2 and Figure 3As shown, the placement table 10 forms a rotating structure through the cooperation of the belt 8 and the secondary rotating rod 9. By installing the secondary rotating rod 9 at the bottom of the placement table 10, the secondary rotating rod 9 rotates driven by the servo motor 6 and the belt 8. Through rotation, the film layer unevenness caused by the shadow effect in these material areas can be reduced, and the consistency of the overall coating can be improved.
[0024] In this embodiment, as Figure 1 and Figure 3 shown, the air fans 14 are symmetrically installed about the horizontal center line of the intake housing 15. By installing the air fans 14 at the upper end of the intake housing 15, the air fans 14 can rotate to allow air to enter the suction pipe 5, enabling the suction pipe 5 to blow air on the material and accelerating the heat dissipation of the material.
[0025] In this embodiment, as Figure 4 shown, the baffle 19 forms a sliding structure through the cooperation of the threaded rod 17 and the sliding block 18. By installing the baffle 19 on one side of the sliding block 18, the baffle 19 slides driven by the threaded rod 17, closing the inside of the intake housing 15 to prevent air from entering the device through the suction pipe 5 when the suction pipe 5 is inhaling.
[0026] The usage method and advantages of the present utility model: When in use, the working process of this quickly-coolable vacuum coating device is as follows:
[0027] As Figure 1 , Figure 2 , Figure 3 and Figure 4 shown, first place or arrange the material to be coated on the placement table 10, then close the chamber door and start the device. The suction pipe 5 will inhale through the air outlet 13, creating a vacuum state inside the body 1. Then the servo motor 6 drives the main rotating rod 7 and the belt 8 to rotate, and the belt 8 drives the secondary rotating rod 9 and the placement table 10 to rotate. The alloy target 3 is ion bombarded in a vacuum environment to coat the material. After the alloy target 3 finishes coating the material, the air fans 14 at the upper end of the intake housing 15 will rotate to allow air to enter the suction pipe 5, enabling the suction pipe 5 to blow air on the material and accelerating the heat dissipation of the material, avoiding interface reaction or weakening caused by long-term high temperature, shortening the processing cycle of the coated product, accelerating the production process, and improving the overall production efficiency.
[0028] The basic principles, main features and advantages of the present utility model have been shown and described above. Those skilled in the art should understand that the present utility model is not limited by the above embodiments. The above embodiments and the descriptions in the specification are only preferred examples of the present utility model and are not used to limit the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model will have various changes and improvements, and these changes and improvements all fall within the scope of the present utility model claimed. The scope of protection claimed by the present utility model is defined by the appended claims and their equivalents.
Claims
1. A vacuum coating device capable of rapid cooling, comprising a body (1), characterized in that: A connector (2) is installed on one side of the machine body (1), an alloy target (3) is connected to one side of the connector (2), a U-shaped heating tube (4) is installed on one side of the alloy target (3), an air intake tube (5) is installed on the inner wall of the machine body (1), a servo motor (6) is installed on the left side of the machine body (1), a main rotating rod (7) is installed at the bottom of the servo motor (6), the main rotating rod (7) is connected to a secondary rotating rod (9) via a belt (8), a placing table (10) is installed at the upper end of the secondary rotating rod (9), and a A top cover (11) is provided, a blow pipe (12) is installed at the bottom of the top cover (11), an air outlet (13) is installed at the upper end of the top cover (11), an air fan (14) is installed on one side of the air outlet (13), an air intake shell (15) is installed on one side of the air fan (14), a small motor (16) is installed at the upper end of the air intake shell (15), a threaded rod (17) is connected to the bottom of the small motor (16), a sliding block (18) is threadedly connected to the threaded rod (17), and a baffle (19) is attached to one side of the sliding block (18).
2. A vacuum coating device capable of rapid cooling according to claim 1, characterized in that: The alloy targets (3) are evenly arranged and installed along the inner wall of the machine body (1).
3. The vacuum coating device capable of rapid cooling according to claim 1, characterized in that: The air intake pipes (5) are symmetrically installed with respect to the transverse center line of the machine body (1).
4. The vacuum coating device capable of rapid cooling according to claim 1, characterized in that: The placement platform (10) forms a rotating structure through the cooperation of a belt (8) and a secondary rotating rod (9).
5. The vacuum coating device capable of rapid cooling according to claim 1, characterized in that: The air fans (14) are symmetrically installed with respect to the transverse center line of the air inlet housing (15).
6. The vacuum coating device capable of rapid cooling according to claim 1, characterized in that: The baffle (19) forms a sliding structure through the cooperation of the threaded rod (17) and the sliding block (18).