Ultra-vacuum valve device

Abstract

The utility model discloses an ultra-vacuum valve device, and relates to the technical field of valves. The valve cover comprises a cover plate, a penetrating hole is formed in one side of the cover plate in a penetrating mode, valve pipes are connected to the two opposite sides of the cover plate, the valve pipes and the penetrating hole are coaxial, the free ends of the valve pipes are sleeved with flange plates, a valve plate is vertically installed in the cover plate in a sliding mode, the interior of the valve plate is hollow, and a connecting convex plate is constructed on one side of the interior of the valve plate; a through hole is formed in one side of the valve plate in a penetrating mode, and a connecting disc coaxial with the through hole is arranged on the connecting protruding plate. After the two valve pipes are blocked by the valve plate, the two tight ring plates abut against the cover plate through the abutting pieces, so that the situation that when a certain gap occurs due to long-time friction between the valve plate and the cover plate, the tight ring plates can abut against the cover plate through the abutting pieces can be effectively prevented, and therefore the sealing performance is guaranteed; and the service life is prolonged, and the labor amount of workers is reduced.

Description

Technical Field

[0001] This application relates to the technical field of valves, and particularly to an ultra-high vacuum valve device. Background Art

[0002] Ultra-high vacuum valves are valves designed specifically for ultra-high vacuum environments. They can operate under extremely low pressure conditions and are usually used in industrial and scientific research fields with extremely high requirements.

[0003] The ultra-high vacuum valve plate is a type of ultra-high vacuum valve plate. It realizes the opening and closing of the valve by controlling the movement of the internal valve plate. When the existing ultra-high vacuum valve plate is used for a long time, the friction between the movement of the valve plate and the valve body will gradually affect the accuracy of the valve. The accuracy of the existing valves will decrease due to repeated friction during long-term use, and regular maintenance is required to increase the service life, which increases the workload of the staff. Summary of the Utility Model

[0004] The purpose of this application is to provide an ultra-high vacuum valve device to solve the problems raised in the above background art.

[0005] To achieve the above purpose, this application specifically adopts the following technical solutions:

[0006] An ultra-high vacuum valve device includes a cover plate. A perforation is formed through one side of the cover plate. Valve pipes are connected to both opposite sides of the cover plate, and the valve pipes are coaxial with the perforation. A flange is sleeved on the free end of the valve pipe. A valve plate is vertically and slidably installed inside the cover plate. The inside of the valve plate is hollow. A connecting convex plate is constructed on one side inside the valve plate. A through hole is formed through one side of the valve plate. A connecting disk coaxial with the through hole is constructed on the connecting convex plate. The diameter of the connecting disk is smaller than that of the through hole, and the diameter of the connecting disk is larger than that of the perforation. Elastic stretching members are symmetrically connected between the connecting disk and the through hole. A tight ring plate is installed on the elastic stretching members. In the normal state, the tight ring plate is flush with the outer side of the valve plate. A pressing member is installed inside the cover plate, which is used to drive the tight ring plate and abut against one side inside the cover plate. A driving member for driving the movement of the valve plate is installed inside the cover plate.

[0007] Further, the bottom of the cover plate is open. The pressing member includes a blocking plate horizontally constructed inside the cover plate. When the connecting disk is coaxial with the perforation, the top of the blocking plate contacts the valve plate. An air intake assembly for delivering gas into the valve plate is installed inside the cover plate.

[0008] Further, the intake assembly includes a first sleeve and a second sleeve constructed at the inner bottom end of the cover plate. The inner diameter of the first sleeve is greater than that of the second sleeve. A connecting pipe is connected between the first sleeve and the second sleeve. An intake member for delivering gas into the first sleeve is installed in the valve plate. The top end of the second sleeve passes through the blocking plate.

[0009] Further, the driving member includes an adjusting screw rod vertically and rotatably installed on the valve plate. A threaded barrel is sleeved on the adjusting screw rod. The threaded barrel is connected to the intake member. When the valve plate contacts the blocking plate, gas is delivered into the first sleeve through the intake member. A motor connected to the adjusting screw rod is installed outside the cover plate.

[0010] Further, a guide rod is vertically installed on the cover plate. The intake member includes two connecting rods symmetrically and vertically slidably installed on the valve plate. A sliding cylinder is slidably installed on the guide rod. Connecting plates are constructed on both the threaded barrel and the sliding cylinder. The two connecting plates are respectively connected to the two connecting rods. A return spring is sleeved on the connecting rod. One end of the return spring is connected to the connecting plate, and the other end is connected to the valve plate. A piston block is constructed at the bottom end of the connecting rod. The piston block is coaxial with the first sleeve.

[0011] Further, the elastic stretching member includes two rubber rings. One ends of the two rubber rings are respectively connected to the connecting disk and the edge of the through hole. The two edges of the tight ring plate are respectively connected to one ends of the two rubber rings.

[0012] Further, annular grooves are formed on both opposite sides of the two tight ring plates. Sealing rings are installed in the annular grooves.

[0013] The beneficial effects of the present application are as follows:

[0014] After the valve plate blocks the two valve pipes in the present application, at this time, through the pressing member, the two tight ring plates respectively abut against the cover plate, so as to effectively prevent a certain gap from occurring when the valve plate and the cover plate are in long-term friction. At this time, through the pressing member, the tight ring plate abuts against the cover plate, thereby ensuring the sealing performance, improving the service life, and reducing the workload of the staff. Description of the Drawings

[0015] Figure 1 is the three-dimensional structural view of the present application;

[0016] Figure 2 is the present application Figure 1 partial three-dimensional sectional view;

[0017] Figure 3 is the present application Figure 1 another partial three-dimensional sectional view;

[0018] Figure 4 is an exploded view of the structure of the figure part of this application;

[0019] Figure 5 is this application Figure 2 an enlarged view of the structure at position A in;

[0020] Figure 6 is this application Figure 3 an enlarged view of the structure at position B in;

[0021] Reference numerals: 1, cover plate; 2, valve pipe; 3, flange; 4, perforation; 5, valve plate; 6, connecting convex plate; 7, through hole; 8, connecting plate; 9, elastic tension member; 901, rubber ring; 10, tight ring plate; 11, air intake assembly; 1101, first sleeve; 1102, second sleeve; 1103, communicating pipe; 12, pressing member; 1201, blocking plate; 13, air intake member; 1301, connecting rod; 1302, connecting plate; 1303, return spring; 1304, sliding cylinder; 1305, piston block; 14, driving member; 1401, adjusting screw; 1402, threaded cylinder; 15, motor; 16, sealing ring; 17, annular groove; 18, guide rod. Detailed implementation manners

[0022] To make the objectives, technical solutions and advantages of the embodiments of this application clearer, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of this application.

[0023] Such as Figures 1-6As shown in the figure, a super-vacuum valve device proposed in an embodiment of the present application includes a cover plate 1. A through hole 4 is formed through one side of the cover plate 1. Valve pipes 2 are connected to both opposite sides of the cover plate 1. The valve pipes 2 are coaxial with the through hole 4. A flange plate 3 is sleeved on the free end of the valve pipe 2. A valve plate 5 is vertically and slidably installed inside the cover plate 1. The inside of the valve plate 5 is hollow. A connecting convex plate 6 is constructed on one side inside the valve plate 5. A through hole 7 is formed through one side of the valve plate 5. A connecting disk 8 coaxial with the through hole 7 is constructed on the connecting convex plate 6. The diameter of the connecting disk 8 is smaller than the diameter of the through hole 7, and the diameter of the connecting disk 8 is larger than the diameter of the through hole 4. Elastic tension members 9 are symmetrically connected between the connecting disk 8 and the through hole 7. A tight ring plate 10 is installed on the elastic tension members 9. Under normal conditions, the tight ring plate 10 is flush with the outside of the valve plate 5. A pressing member 12 is installed inside the cover plate 1, which is used to drive the tight ring plate 10 and abut against one side inside the cover plate 1. A driving member 14 for driving the movement of the valve plate 5 is installed inside the cover plate 1. In this embodiment, the driving member 14 can be an existing electric telescopic rod or a hydraulic rod to control the movement of the valve plate 5. When in use, only need to drive the valve plate 5 to move through the driving member 14. When the through hole 7 on the valve plate 5 is coaxial with the through hole 4, at this time, make the tight ring plate 10 abut against one side inside the cover plate 1 through the pressing member 12. The number of the tight ring plates 10 is two. After the valve plate 5 blocks the two valve pipes 2, at this time, make the two tight ring plates 10 respectively abut against the cover plate 1 through the pressing member 12, so as to effectively prevent a certain gap from appearing when the valve plate 5 and the cover plate 1 rub against each other for a long time. At this time, through the pressing member 12, the tight ring plate 10 can abut against the cover plate 1, thus ensuring the sealing performance, improving the service life, and reducing the labor intensity of the staff.

[0024] As Figure 2 , Figure 4 and Figure 5 shown, in some embodiments, the bottom of the cover plate 1 is open. The pressing member 12 includes a blocking plate 1201 horizontally constructed inside the cover plate 1. When the connecting disk 8 is coaxial with the through hole 4, the top of the blocking plate 1201 contacts the valve plate 5. An air inlet assembly 11 for delivering gas into the valve plate 5 is installed inside the cover plate 1. That is to say, when the valve plate 5 is in the closed state, at this time, the connecting disk 8 is coaxial with the through hole 4, and the top of the blocking plate 1201 contacts the valve plate 5. At this time, the valve plate 5 moves downward to the maximum limit position, and a closed cavity is formed between the inside of the valve plate 5 and the blocking plate 1201. At this time, gas is delivered into the valve plate 5 through the air inlet assembly 11, so that the air pressure inside the valve plate 5 increases, so that the elastic tension members 9 are stretched due to excessive pressure, and then the movement of the tight ring plate 10 is realized, so that the tight ring plate 10 abuts against one side inside the cover plate 1, thus completing the sealing. Such a design can drive the tight ring plate 10 to move after the valve plate 5 moves, prevent the tight ring plate 10 from moving while the valve plate 5 is moving, prevent the tight valve plate 5 from increasing friction and causing the movement of the valve plate 5 to be blocked, and protect the tight valve plate 5 from being damaged due to moving friction.

[0025] As Figure 5 shown, in some embodiments, the intake assembly 11 includes a first sleeve 1101 and a second sleeve 1102 constructed at the inner bottom end of the cover plate 1. The inner diameter of the first sleeve 1101 is larger than that of the second sleeve 1102. A connecting pipe 1103 is connected between the first sleeve 1101 and the second sleeve 1102. An intake member 13 for delivering gas into the first sleeve 1101 is installed in the valve plate 5. The top end of the second sleeve 1102 passes through the blocking plate 1201. The larger inner diameter of the first sleeve 1101 than that of the second sleeve 1102 enables the intake member 13 to deliver gas into the first sleeve 1101. Since the inner diameter of the second sleeve 1102 is smaller, the pressure can be increased, and it will be more labor-saving to intake gas through the intake member 13.

[0026] As Figure 5 shown, in some embodiments, the driving member 14 includes an adjusting screw 1401 vertically and rotatably installed on the valve plate 5. A threaded cylinder 1402 is sleeved on the adjusting screw 1401. The threaded cylinder 1402 is connected to the intake member 13. When the valve plate 5 contacts the blocking plate 1201, gas is delivered into the first sleeve 1101 through the intake member 13. A motor 15 connected to the adjusting screw 1401 is installed outside the cover plate 1. That is to say, the adjusting screw 1401 is driven to rotate by the motor 15. The rotation of the adjusting screw 1401 drives the threaded cylinder 1402 to move. Since the threaded cylinder 1402 is connected to the valve plate 5 through the intake member 13, the valve plate 5 will move vertically at this time, thereby realizing the movement of the valve plate 5. The screw thread has self-locking property, so the valve plate 5 is not easily opened accidentally due to external bumps after moving.

[0027] As Figure 2 and Figure 5As shown, in some embodiments, a guide rod 18 is vertically installed on the cover plate 1. The air inlet member 13 includes two connecting rods 1301 symmetrically and vertically slidably installed on the valve plate 5. A sliding cylinder 1304 is slidably installed on the guide rod 18. Connecting plates 1302 are constructed on both the threaded cylinder 1402 and the sliding cylinder 1304. The two connecting plates 1302 are respectively connected to the two connecting rods 1301. A return spring 1303 is sleeved on the connecting rod 1301. One end of the return spring 1303 is connected to the connecting plate 1302, and the other end of the return spring 1303 is connected to the valve plate 5. A piston block 1305 is constructed at the bottom end of the connecting rod 1301. The piston block 1305 is coaxial with the first sleeve 1101. When the valve plate 5 moves downward to block the two valve pipes 2, at this time, the motor 15 rotates to drive the adjusting screw rod 1401 to rotate, so as to drive the threaded cylinder 1402 to move vertically downward. Since the threaded cylinder 1402 is connected to the connecting rod 1301 through the connecting plate 1302, and the valve plate 5 is supported by the return spring 1303, when the threaded cylinder 1402 moves downward, the connecting rod 1301 at this time will also move downward, thereby causing the valve plate 5 to move downward. When the bottom of the valve plate 5 contacts the blocking plate 1201, at this time, the threaded cylinder 1402 continues to move downward. At this time, the bottom of the valve plate 5 cannot move because it contacts the blocking plate 1201. Therefore, when the threaded cylinder 1402 continues to move downward, it will cause the connecting rod 1301 to move downward, thereby causing the piston block 1305 to enter the first sleeve 1101, so as to squeeze the air inside the first sleeve 1101 into the second sleeve 1102. Finally, the gas enters the valve plate 5 to increase the air pressure inside the valve plate 5, so that the elastic stretching member 9 is stretched, and the tight ring plate 10 abuts against the cover plate 1. Only when the threaded cylinder 1402 moves upward, first, the return spring 1303 will cause the connecting rod 1301 to move back to its original position first and then drive the valve plate 5 to move upward. No additional driving force is required to deliver gas into the first sleeve 1101, and the tight ring plate 10 is moved after the valve plate 5 is moved, and the overall use is coherent.

[0028] As Figure 2 , Figure 4 and Figure 6 shown, in some embodiments, the elastic stretching member 9 includes two rubber rings 901. One ends of the two rubber rings 901 are respectively connected to the connecting disk 8 and the edge of the through hole 7. The two edges of the tight ring plate 10 are respectively connected to one ends of the two rubber rings 901. When the internal pressure of the valve plate 5 is too high, the cross sections of the tight ring plate 10 and the two rubber rings 901 are concave, so the tight ring plate 10 will be pushed towards the cover plate 1, thereby abutting against the cover plate 1 and improving the sealing performance.

[0029] As Figure 4 and Figure 6As shown, in some embodiments, annular grooves 17 are formed on both opposite sides of the two closely arranged ring plates 10. A sealing ring 16 is installed in the annular groove 17. After the closely arranged ring plate 10 contacts the cover plate 1, at this time, the sealing ring 16 first contacts the cover plate 1. The sealing ring 16 is made of existing materials and has good sealing performance. It not only prevents wear caused by friction between the closely arranged ring plate 10 and the cover plate 1, but also has a certain elastic deformation and has good sealing performance after being compressed.

[0030] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present application. Various modifications to these embodiments will be obvious to those skilled in the art. The general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An ultra-vacuum valve device, characterized in that: The invention comprises a cover plate (1), one side of the cover plate (1) is provided with a through hole (4), the two opposite sides of the cover plate (1) are connected with valve tubes (2), the valve tube (2) is coaxial with the through hole (4), the free end of the valve tube (2) is sleeved with a flange (3), a valve plate (5) is vertically slidably mounted in the cover plate (1), the interior of the valve plate (5) is hollow, one side of the interior of the valve plate (5) is provided with a connecting convex plate (6), one side of the valve plate (5) is provided with a through hole (7), the connecting convex plate (6) is provided with a connecting plate (8) coaxial with the through hole (7), the The diameter of the connecting plate (8) is smaller than the diameter of the through hole (7), and the diameter of the connecting plate (8) is larger than the diameter of the through hole (4). An elastic stretching member (9) is symmetrically connected between the connecting plate (8) and the through hole (7). A tight ring plate (10) is installed on the elastic stretching member (9). Under normal conditions, the tight ring plate (10) is flush with the outer side of the valve plate (5). A pressing member (12) is installed inside the cover plate (1), which is used to drive the tight ring plate (10) and abut against one side inside the cover plate (1). A driving member (14) for driving the valve plate (5) to move is installed inside the cover plate (1).

2. An ultra-vacuum valve device according to claim 1, characterized in that: The bottom of the cover plate (1) is open, and the abutment member (12) includes a sealing plate (1201) horizontally constructed inside the cover plate (1); when the connecting plate (8) is coaxial with the through hole (4), the top of the sealing plate (1201) contacts the valve plate (5), and an air intake assembly (11) for conveying gas to the valve plate (5) is installed inside the cover plate (1).

3. An ultra-vacuum valve device according to claim 2, characterized in that: The air intake assembly (11) comprises a first sleeve (1101) and a second sleeve (1102) which are constructed at the bottom end of the cover plate (1); the inner diameter of the first sleeve (1101) is larger than the inner diameter of the second sleeve (1102); a connecting pipe (1103) is connected between the first sleeve (1101) and the second sleeve (1102); an air intake member (13) for conveying gas into the first sleeve (1101) is installed in the valve plate (5); and the top end of the second sleeve (1102) passes through a sealing plate (1201).

4. The ultra-vacuum valve device according to claim 3, characterized in that: The driving member (14) includes an adjusting screw (1401) vertically and rotatably mounted on the valve plate (5); a threaded sleeve (1402) is threadedly sleeved on the adjusting screw (1401); the threaded sleeve (1402) is connected to the air inlet member (13); when the valve plate (5) contacts the sealing plate (1201), gas is transported into the first sleeve (1101) through the air inlet member (13); and a motor (15) connected to the adjusting screw (1401) is mounted on the outer side of the cover plate (1).

5. The ultra-vacuum valve device according to claim 4, characterized in that: A guide rod (18) is vertically mounted on the cover plate (1), and the air intake member (13) includes two connecting rods (1301) symmetrically and vertically slidably mounted on the valve plate (5). A sliding cylinder (1304) is slidably mounted on the guide rod (18), and connecting plates (1302) are constructed on the threaded cylinder (1402) and the sliding cylinder (1304). The two connecting plates (1302) are respectively connected to the two connecting rods (1301), and a return spring (1303) is sleeved on the connecting rod (1301), one end of the return spring (1303) is connected to the connecting plate (1302), and the other end of the return spring (1303) is connected to the valve plate (5). A piston block (1305) is constructed at the bottom end of the connecting rod (1301), and the piston block (1305) is coaxial with the first sleeve (1101).

6. The ultra-vacuum valve device according to claim 5, characterized in that: The elastic stretching member (9) comprises two rubber rings (901), one end of the two rubber rings (901) being respectively connected to the edges of the connection plate (8) and the through hole (7), and the two edges of the tight ring plate (10) being respectively connected to one end of the two rubber rings (901).

7. The ultra-vacuum valve device according to claim 6, characterized in that: The two opposite sides of the two tight ring plates (10) are each provided with an annular groove (17), and a sealing ring (16) is installed in the annular groove (17).

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