Furnace tube sealing structure and furnace tube

Abstract

An upper furnace cover is installed at the upper end of an outer furnace tube and the upper end of an inner furnace tube in a sealed mode, a lower furnace door is installed at the lower end of the outer furnace tube in a sealed mode, and a magnetic fluid sealing assembly is connected to a center hole of the lower furnace door in a sealed mode. One end of a transmission shaft of the magnetofluid sealing assembly is located in a sealed cavity formed by furnace tube sealing, the other end of the transmission shaft is located outside the sealed cavity, and the rotating device is located in the sealed cavity and drives a transmission part of the carrier to rotate to be connected with the transmission shaft of the magnetofluid sealing assembly. The carrier in the furnace tube can be driven by the rotating device to rotate, and the furnace tube is sealed by the magnetic fluid sealing assembly, so that a rotating power source of the rotating device can be externally arranged and is driven by the magnetic fluid sealing assembly, and meanwhile, a vacuum environment in the furnace tube is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of solar energy, in particular to a furnace tube sealing structure and a furnace tube. Background Art

[0002] With the current spread of the photovoltaic industry, there are two types of vertical furnaces and horizontal furnaces for processes such as diffusion, oxidation, annealing, doping, PECVD, and LPCVD. The structures of both types require wafers to be loaded into specific carriers and transferred into the reaction chamber for processing. By introducing specific reaction gases, specific coating, diffusion, oxidation, and thin film deposition processes can be achieved on the wafers. In the existing two-layer furnace tube design, the two ends of the double-layer furnace tube are sealed by a base and a top wall respectively to form a straight-through cavity. The wafers to be processed are placed in the straight-through cavity, and the straight-through cavity is heated by the heating layer on the double-layer furnace tube, or the furnace body is set as an inner and outer furnace body with the inner furnace cavity closed.

[0003] In the prior art, for example, the bearing structure of the carrier in the furnace tube is fixed and cannot adjust the position and angle. If a rotating device needs to be set in the closed chamber of the furnace tube to adjust the position of the carrier, due to the high temperature in the furnace, the power source of the rotating device cannot be directly set in the furnace tube. Therefore, its transmission part needs to penetrate the closed space of the furnace tube. How to ensure rotation while achieving vacuum sealing is an urgent problem to be solved. Summary of the Utility Model

[0004] In order to solve the technical problem of sealing the closed space of the transmission device inside the furnace tube in the above-mentioned prior art, the utility model provides a furnace tube sealing structure and a furnace tube.

[0005] The technical solution adopted by the utility model is as follows:

[0006] The utility model provides a furnace tube sealing structure. The furnace tube includes: an outer furnace tube, an inner furnace tube, an upper furnace cover, a lower furnace door, and a rotating device; the inner furnace tube is installed inside the outer furnace tube; the sealing structure is: the upper furnace cover is hermetically installed at the upper ends of the outer furnace tube and the inner furnace tube, the lower furnace door is hermetically installed at the lower end of the outer furnace tube, a magnetic fluid sealing component is hermetically connected at the central hole of the lower furnace door, one end of the transmission shaft of the magnetic fluid sealing component is located inside the closed chamber formed by the furnace tube sealing, and the other end is located outside the closed chamber. The transmission part that drives the carrier to rotate inside the closed chamber of the rotating device is connected to the transmission shaft of the magnetic fluid sealing component.

[0007] Further, an outer sealing flange is provided on the outer wall at the upper end of the outer furnace tube, and an inner sealing flange is provided on the inner wall of the inner furnace tube; the upper furnace cover covers the upper end faces of the outer furnace tube and the inner furnace tube, its outer edge is sealingly connected to the outer sealing flange, and its inner edge is connected to the inner sealing flange, and the outer edge of the lower furnace door is sealingly connected to the lower end of the outer furnace tube.

[0008] The present utility model also proposes a furnace tube, including the above-mentioned furnace tube sealing structure. The lower end of the lower furnace tube is open and passes through the central hole of the lower furnace door; the magneto - fluid sealing assembly is annular, and a corresponding central hole is also provided in the middle, and it is divided into an inner ring part, an outer ring part, and a drive shaft in the shape of a ring located between the inner ring part and the outer ring part. Its inner ring part is sealingly connected to the support base at the bottom of the inner furnace tube, the outer ring part is sealingly connected to the outside of the inner edge of the lower furnace door, and the inner ring part and the outer ring part are rotationally sealed with the drive shaft.

[0009] Further, at least one inner ring permanent magnet is provided inside the inner ring part of the magneto - fluid sealing assembly. Two inner pole shoes of the inner ring permanent magnet surround the inner wall surface of the drive shaft. Inner annular grooves corresponding to the inner pole shoes are provided on the inner wall surface of the drive shaft, and magneto - fluid is arranged in the inner annular grooves; at least one outer ring permanent magnet is provided inside the outer ring part of the magneto - fluid sealing assembly. Two outer pole shoes of the outer ring permanent magnet surround the outer wall surface of the drive shaft. Outer annular grooves corresponding to the outer pole shoes are provided on the outer wall surface of the drive shaft, and magneto - fluid is arranged in the outer annular grooves.

[0010] The present utility model also proposes a furnace tube, including the above - mentioned furnace tube sealing structure. The lower end of the inner furnace tube near the lower furnace door is a closed end, and there is a distance between the closed end and the lower furnace door. The magneto - fluid sealing assembly is sealingly installed outside the lower side of the lower furnace door and covers the central hole of the lower furnace door.

[0011] Further, the rotating device includes: a boat support base provided in the closed chamber of the furnace tube and having a plurality of carrier placement positions. The boat support base is connected to the drive shaft of the magneto - fluid sealing assembly; a rotation power source located outside the closed chamber and connected to the drive shaft to drive the boat support base to rotate.

[0012] The rotation power source and the drive shaft are driven by gear transmission or pulley transmission.

[0013] In the first embodiment, the boat support base includes:

[0014] A rotating base, and the rotating base is located at the bottom of the closed chamber;

[0015] A hanging plate, which is arranged on the rotating base, and a plurality of carrier placement positions for hanging the carriers are provided on the hanging plate.

[0016] In the first embodiment, the boat support base includes:

[0017] A rotating base having a plurality of vehicle placement positions for a carrier boat to pass through or be placed on;

[0018] Multiple pairs of bearing members, each pair of bearing members being located at both side edges of a vehicle placement position and being foldably arranged on the rotating base;

[0019] When the bearing member is switched to the folded state, the vehicle can pass upward through the vehicle placement position corresponding to the bearing member from the bottom; when the bearing member is switched to the unfolded state, the vehicle can be placed on the bearing member.

[0020] Furthermore, the outer end faces of the upper furnace cover and the lower furnace door away from the sealed chamber bulge outward to form spherical protrusions.

[0021] Compared with the prior art, the present utility model has the following advantages:

[0022] 1. The vehicle in the furnace tube is placed on a rotatable boat support base, enabling the vehicle to adjust its position and angle in the furnace. When reaction gas is introduced into the sealed chamber or there are temperature differences during heating, the gas field and thermal field inside the sealed chamber are made uniform, improving the overall process yield. At the same time, the bottom is sealed by a magnetohydrodynamic sealing component, which can place the driving components of the boat support base outside while ensuring the sealed chamber through which the reaction gas passes remains sealed.

[0023] 2. The lower furnace door and the upper furnace cover are designed as outwardly bulging drum surfaces, having better pressure-bearing capacity and being not easily deformed.

[0024] 3. By providing multiple small furnace doors on the lower furnace door, a single small furnace door can be opened when loading and unloading the vehicle, avoiding heat loss in the furnace and affecting the processing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the following drawings are only some embodiments of the present utility model, and those of ordinary skill in the art can also obtain other drawings based on these drawings without creative efforts.

[0026] Figure 1 It is the front view of the through-type furnace tube in the embodiment of the present utility model;

[0027] Figure 2 It is the A-A cross-sectional view of the through-type furnace tube in the embodiment of the present utility model;

[0028] Figure 3 It is the front view of the non-through furnace tube in the embodiment of the present utility model;

[0029] Figure 4 This is the A-A cross-sectional view of the non-penetrating furnace tube in the embodiment of the present utility model;

[0030] Figure 5 This is the three-dimensional structure diagram of the second perspective of the penetrating furnace tube in the embodiment of the present utility model;

[0031] Figure 6 This is the front view of the second embodiment of the penetrating furnace tube in the present utility model;

[0032] Figure 7 This is the A-A cross-sectional view of the second embodiment of the penetrating furnace tube in the present utility model;

[0033] Figure 8 This is the top view structure diagram of the second embodiment of the penetrating furnace tube in the present utility model;

[0034] Figure 9 This is the three-dimensional structure diagram of the first perspective of the second embodiment of the penetrating furnace tube in the present utility model;

[0035] Figure 10 This is the three-dimensional structure diagram of the second perspective of the second embodiment of the penetrating furnace tube in the present utility model;

[0036] Figure 11 This is the three-dimensional structure diagram of the lower furnace door in the embodiment of the present utility model;

[0037] Figure 12 This is the structure diagram of the lower furnace door and the driving structure in the embodiment of the present utility model;

[0038] Figure 13 This is the three-dimensional structure diagram of the driving structure cooperating with the furnace cover in the embodiment of the present utility model;

[0039] Figure 14 This is the structure diagram of the driving structure cooperating with the furnace cover in the embodiment of the present utility model;

[0040] Figure 15 This is the structure diagram of the driving structure cooperating with the furnace tube in the embodiment of the present utility model;

[0041] Figure 16 This is the front view of the first embodiment of the boat support base in the present utility model;

[0042] Figure 17 This is the structure diagram of the second embodiment of the boat support base in the present utility model;

[0043] Figure 18 This is the three-dimensional structure diagram of the second embodiment of the boat support base in the present utility model;

[0044] Figure 19This is the front view schematic diagram of the heating source, heat dissipation device and furnace tube of the through-type furnace tube in the embodiment of the utility model;

[0045] Figure 20 It is Figure 19 the C-direction view of;

[0046] 1. Furnace tube;

[0047] 11. Outer furnace tube; 111. Bracket flange; 112. Outer sealing flange; 12. Inner furnace tube; 121. Inner sealing flange; 122. Annular step; 123. Annular heat insulation pad; 13. Sealed chamber;

[0048] 2. Upper furnace cover;

[0049] 21. Reinforcing rib; 22. Lower layer plate; 23. Inner side layer plate; 24. Outer side layer plate;

[0050] 3. Lower furnace door;

[0051] 31. Furnace opening; 311. First convex block; 312. Annular cavity;

[0052] 32. Furnace cover; 321. Second convex block; 322. Mounting plate; 323. First guiding column; 324. Weight reduction hole;

[0053] 33. Driving structure; 331. Rotating driving device; 332. Coupling; 333. Rotating shaft; 334. Rotating plate; 335. Pushing and pulling driving device; 336. Mounting area; 337. Second guiding column; 338. First electrical interface; 339. Second electrical interface; 340. Connecting plate; 341. First partition; 342. Second partition; 343. Third partition; 344. First accommodation space; 345. Second accommodation space;

[0054] 41. Connector; 42. Hanging seat; 81. Top bracket; 82. Bottom bracket;

[0055] 5. Boat support base; 50. Carrier; 59. Transmission shaft; 591. Gear;

[0056] 51. Rotating base; 52. Fixed ring; 53. Hanging plate; 54. Hook hole;

[0057] 501. Carrier placement position; 55. Bearing member; 551. Bearing fixing part; 552. Bearing movable part; 553. Rotating shaft;

[0058] 6. Magnetic fluid sealing assembly;

[0059] 61. Outer ring part; 62. Inner ring part; 63. Rotating power source; 64. Housing; 65. Sealing ring;

[0060] 71. External heat source; 72. Internal heat source; 73. Heat dissipation device; 74. Water cooling interface. Detailed implementation manner

[0061] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present utility model clearer and more understandable, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0062] The principle and structure of the present utility model will be described in detail below with reference to the accompanying drawings and embodiments.

[0063] Existing vertical furnaces generally have inner and outer double-layer furnace tubes, and the bearing structure of the carrier in the furnace tube is fixed, and the position and angle cannot be adjusted. If a rotating device needs to be set in the closed chamber of the furnace tube to adjust the position of the carrier, since the temperature in the furnace is generally as high as 500° or higher, an ordinary motor cannot work properly. Because the power source of the rotating device cannot be directly set in the furnace tube, the transmission part needs to penetrate the closed space of the furnace tube. Therefore, it is an urgent problem to ensure rotation while completing vacuum sealing.

[0064] In response to this, as Figures 1 to 4 shown, the present utility model proposes a furnace tube sealing structure. The furnace tube includes an outer furnace tube 11, an inner furnace tube 12, an upper furnace cover 2, a lower furnace door 3 and a rotating device; both the inner and outer furnace tubes are circular tubes. The upper and lower ends of the outer furnace tube 11 are open, and the inner furnace tube 12 is installed inside. After installation, a containing space is formed between the outer wall of the inner furnace tube 12 and the inner wall of the outer furnace tube; the specific sealing structure is: the upper furnace cover 2 and the lower furnace door 3 are respectively installed at the upper and lower ends of the outer furnace tube 11 and the inner furnace tube 12. The upper furnace cover is sealed and installed at the upper ends of the outer furnace tube and the inner furnace tube to seal the upper end of the containing space between the outer furnace tube and the inner furnace tube; the lower furnace door is sealed and installed at the lower end of the outer furnace tube. The outer edge of the lower furnace door is sealed with the lower end face of the outer furnace tube. At the same time, a central hole is provided in the middle of the lower furnace door, and a magnetic fluid sealing component is installed outside the central hole. One end of the transmission shaft of the magnetic fluid sealing component is located in the closed chamber formed by the furnace tube sealing, and the other end is located outside the closed chamber. The transmission part of the rotating device that drives the carrier to rotate in the closed chamber is connected to one end of the transmission shaft of the magnetic fluid sealing component, so that while sealing the lower end of the closed chamber, the transmission part of the rotating device can perform energy transmission through the magnetic fluid sealing component.

[0065] The magnetic fluid sealing component seals the rotation of its transmission shaft through magnetic fluid. Its sealing effect is good. Magnetic fluid sealing can form a uniform magnetic field between the transmission shaft rotating at high speed and the stationary housing, effectively sealing the fluid between the transmission shaft and the housing, avoiding leakage, and ensuring the safety and reliability of equipment operation.

[0066] At the same time, since the magnetic fluid seal has no dynamic part of the traditional mechanical seal, there will be no wear and pollutants such as dust and impurities generated by wear. It can reduce the energy consumption caused by friction and wear, lower the operating cost of the equipment, and improve the operating efficiency of the equipment.

[0067] Moreover, it has good corrosion resistance and there will be no electrochemical reaction with metal materials. It can operate in harsh environments such as acids, alkalis, and salts, and will not affect the sealing performance of the magnetic fluid seal components during high-temperature chemical reactions in the furnace body.

[0068] A specific embodiment of the seal at the upper end of the furnace tube is as follows:

[0069] The structure of the upper furnace cover 2 and the specific implementation of the sealed connection are as follows:

[0070] The outer end face of the upper furnace cover 2 away from the closed chamber 13 bulges outward to form a spherical protrusion. Since the closed chamber 13 needs to be evacuated, setting the outer end face of the upper furnace cover to an upwardly convex spherical protrusion can withstand greater pressure and prevent it from being sucked and deformed during internal evacuation.

[0071] The interior of the upper furnace cover 2 is also provided with a lower layer plate 22, an outer layer plate 24, and an inner layer plate 23 that cooperate with the inner side of the outer end face to enclose a cavity. The lower layer plate 22, the outer layer plate 24, and the inner layer plate 23 are all annular, enclosing an annular cavity on the inner side of the outer end face of the upper furnace cover 2. Multiple reinforcing ribs 21 are arranged in the annular cavity, specifically between the upper and lower inner walls of the cavity. The reinforcing ribs 21 are plate-shaped and have multiple through holes on the plate surface. The reinforcing ribs 21 are arranged at annular intervals in the annular cavity.

[0072] Preferably, the lower layer plate 22, the outer layer plate 24, and the inner layer plate 23 are hollow layer plates, and the interior of the hollow layer plates can be used as a water cooling channel or for installing water cooling components, such as installing water cooling pipes, etc., to prevent heat from dissipating from the upper furnace cover and affecting the processing.

[0073] As Figure 2 、 4 shown, the specific implementation examples of the sealing method at the top of the furnace tube are as follows:

[0074] An outer sealing flange 112 is provided on the outer wall at the upper end of the outer furnace tube 11 (the outer sealing flange is located above the support flange), and an inner sealing flange 121 is provided on the inner wall of the inner furnace tube 12 (this inner sealing flange can also be used as a connecting member, that is, it seals and connects the upper furnace cover at the same time and is also used for hanging connection); the upper furnace cover 2 covers the upper end faces of the outer furnace tube and the inner furnace tube. A central hole is provided in the middle of the upper furnace cover 2, that is, the whole is in a circular ring shape. The outer edge of the upper furnace cover 2 buckles the upper end face of the outer furnace tube 11 and is hermetically connected to the outer sealing flange 112 of the outer furnace tube 11, and the inner edge buckles the upper end of the inner furnace tube 12 and is hermetically connected to the inner sealing flange 121 of the inner furnace tube 12.

[0075] The specific sealing connection methods of the inner and outer sealing flanges and the upper furnace cover are conventional sealing means in the prior art. For example, screws, gaskets, sealing rings, etc. are also required. Those skilled in the art can fully reproduce them, and no repeated description is made in the present invention.

[0076] As Figure 1 、 2 As shown, the present invention also proposes a through-type furnace tube with both the upper and lower ends of the inner furnace tube penetrating, including the above-mentioned furnace tube sealing structure. The upper and lower ends of the inner furnace tube 12 of the furnace tube are open. An inner heating source 72 is provided inside the inner furnace tube 12. A connecting member for hoisting connection is provided at the upper end opening, and a support table surface is provided at the lower end opening. The support table surface can install a support base, so that the inner furnace tube 12 can be hoisted from the top of the outer furnace tube 11 and installed into the outer furnace tube 11, or inserted into the outer furnace tube 11 from the bottom of the outer furnace tube 11 for installation; and an inner heating source 72 is provided inside the inner furnace tube 12, and an outer heating source 71 is provided outside the outer furnace tube 11. The inner and outer heating sources can heat the sealed chamber 13 of the furnace tube 1 through the tube walls of the inner and outer furnace tubes; the rotating device is provided with a plurality of carrier placement positions corresponding to the sealed chamber. When the rotating device rotates, it drives the carriers on the carrier placement positions to adjust their positions and angles in the sealed chamber, so as to make the wafers on the carriers heat evenly.

[0077] By providing a through-type inner furnace tube in the present invention, a connecting member is provided at the top opening of the inner furnace tube, and a support table surface is provided at the lower end opening to install a support base, so that the installation of the inner furnace tube can be completed not only by hoisting from the top, but also by inserting from the bottom of the vertical furnace, which is more convenient. At the same time, the carriers in the furnace tube are placed on a rotatable rotating device, so that the carriers can adjust their positions and angles in the furnace. When reaction gas is introduced into the sealed chamber or there is a temperature difference during heating, the gas field and thermal field inside the sealed chamber are uniform, improving the overall process yield.

[0078] In a specific embodiment, as Figure 2As shown, a support flange (specifically, the subsequent inner sealing flange 121) is provided on the inner wall at the upper end of the inner furnace tube 12. The support flange is a connecting member, and the inner furnace tube can adopt various hoisting and fixing methods. Now, two examples are given;

[0079] The first embodiment is as follows Figures 1 to 4 As shown, a connector 41 for hanging is directly installed on the support flange (i.e., the inner sealing flange 121) by means of screw connection. The connector 41 can be directly connected to the hoisting equipment. At the same time, a screw hole is also provided in the support part at the upper end of the inner heat source 72. The connecting foot of the connector 41 passes through the inner sealing flange 121 and a nut is screwed, so that the inner sealing flange 121 can be hung on the connecting foot of the connector 14. At the same time, the connecting foot is also threadedly connected to the support at the upper end of the inner heat source 72, ensuring that the entire inner furnace tube 12 is stably hoisted;

[0080] The second embodiment is as follows Figures 6 to 10 As shown, a support flange 111 is provided on the outer wall of the outer furnace tube 11 near the upper end face for installing the top support 81. The cross beam of the top support 81 hangs above the inner furnace tube 12. A hanging seat 42 is connected between the cross beam and the support flange (i.e., the inner sealing flange 121) of the inner furnace tube 12, so that the upper end of the inner furnace tube 12 is directly connected to the top support 81 of the furnace tube 1 through the hanging seat 42, that is, the inner furnace tube 12 is supported and hung by the flange of the furnace tube 1 itself.

[0081] Specifically, a support flange 111 is also provided on the outer wall of the outer furnace tube 11 near the lower end face for installing the bottom support 82. The bottom support 82 can be used to assist in fixing the peripheral components of the furnace tube, such as water-cooled pipes, etc., and can also play a role in supporting the entire furnace tube.

[0082] In specific embodiments, there are also various setting methods for the support table at the lower end of the inner furnace tube 12. Now, two implementation methods are specifically exemplified;

[0083] The first embodiment is as follows Figure 2 As shown, a ring-shaped step 122 protrudes from the inner wall at the lower end of the inner furnace tube 12. The lower side of the ring-shaped step 122 can be used as a support table for installing or connecting a support base to stably place the bottom of the inner furnace tube.

[0084] In the second embodiment, a support flange (not shown in the figure) is installed on the inner wall of the inner furnace tube 12 near the lower end face, and the support base is connected through the support flange to support the bottom of the inner furnace tube.

[0085] In further embodiments of the above two implementations, as Figure 2As shown, a ring-shaped step or a support flange can be provided with a ring-shaped heat insulation pad 123. The ring-shaped heat insulation pad 123 can serve as a support base. At the same time, the lower end face of the ring-shaped heat insulation pad 123 extends beyond the lower end of the inner furnace tube 12, which can not only play a supporting role but also play a heat insulation role.

[0086] Specifically, the ring-shaped heat insulation pad 123 is fixedly connected to the ring-shaped step or the support flange of the inner furnace tube 12 in a sealed connection manner, that is, the connection between the ring-shaped heat insulation pad 123 and the inner furnace tube is in a sealed state.

[0087] In a specific embodiment, as Figure 2 shown, central holes are provided in the middle of the upper furnace cover 2 and the lower furnace door 3. The central hole of the upper furnace cover can penetrate through the upper end of the inner furnace tube 12 or penetrate through the hanging members (such as connectors and hanging seats) connecting the upper end of the inner furnace tube; the central hole of the lower furnace door 3 can penetrate through the lower end of the inner furnace tube 12.

[0088] Specifically, as Figure 2 shown, the structure and specific implementation manner of the sealed connection of the upper furnace cover 2 are as follows:

[0089] The outer end face of the upper furnace cover 2, which is away from the sealed chamber 13, protrudes outward to form a spherical protrusion. Since the sealed chamber 13 needs to be evacuated, setting the outer end face of the upper furnace cover as an upwardly protruding spherical protrusion can withstand greater pressure and prevent it from being sucked and deformed during internal evacuation.

[0090] The interior of the upper furnace cover 2 further includes a lower layer plate 22, an outer layer plate 24, and an inner layer plate 23 that cooperate with the inner side of the outer end face to enclose a cavity. The lower layer plate 22, the outer layer plate 24, and the inner layer plate 23 are all ring-shaped and enclose a ring-shaped cavity inside the outer end face of the upper furnace cover 2. A plurality of reinforcing ribs 21 are arranged in the ring-shaped cavity, specifically between the upper and lower inner walls of the cavity. The reinforcing ribs 21 are plate-shaped and have a plurality of through holes on the plate surface. The reinforcing ribs 21 are arranged at annular intervals in the ring-shaped cavity.

[0091] Preferably, the lower layer plate 22, the outer layer plate 24, and the inner layer plate 23 are hollow layer plates, and the interior of the hollow layer plates can be used as a water cooling channel or for installing water cooling components, such as installing water cooling pipes, etc., to prevent heat from dissipating from the upper furnace cover and affecting the processing.

[0092] As Figure 2 shown, the following is a specific example of the sealing method at the top of the furnace tube:

[0093] An outer sealing flange 112 is provided on the outer wall at the upper end of the outer furnace tube 11 (the outer sealing flange is located above the support flange), and an inner sealing flange 121 is provided on the inner wall of the inner furnace tube 12 (this inner sealing flange can also be used as a connecting member, that is, it seals and connects the upper furnace cover at the same time and is also used for hanging connection); the upper furnace cover 2 covers the upper end faces of the outer furnace tube and the inner furnace tube. A central hole is provided in the middle of the upper furnace cover 2, that is, the whole is in a circular ring shape. The outer edge of the upper furnace cover 2 buckles the upper end face of the outer furnace tube 11 and is hermetically connected to the outer sealing flange 112 of the outer furnace tube 11, and the inner edge buckles the upper end of the inner furnace tube 12 and is hermetically connected to the inner sealing flange 121 of the inner furnace tube 12.

[0094] It should be noted that the inner sealing flange is also used as a support flange, that is, the inner sealing flange is a connecting member. The part of the inner sealing flange close to the inner wall of the inner furnace tube is hermetically connected to the upper furnace cover, and the part of the inner sealing flange close to the center of the inner furnace tube can pass through the connecting feet of the connector or the lifting seat.

[0095] The specific sealing connection method between the inner and outer sealing flanges and the upper furnace cover is a conventional sealing means in the prior art. For example, screws, gaskets, sealing rings, etc. are also required. Those skilled in the art can fully reproduce it, and no repeated description is made in the present invention.

[0096] As Figure 2 、 16 shown, in a specific embodiment, a magnetohydrodynamic sealing assembly is hermetically connected to the central hole of the lower furnace door for the rotational sealing of the rotating device.

[0097] Furthermore, the rotational sealing rotating device specifically includes: a boat support base and a rotational power source. The boat support base is arranged in the closed chamber of the furnace tube and has a plurality of carrier placement positions. The inner edge at the bottom of the boat support base protrudes downward in a circle and is connected to the transmission shaft of the magnetohydrodynamic sealing assembly, so that the boat support base rotates along with the rotation of the rotating shaft; the rotational power source is directly connected to the lower end of the transmission shaft of the magnetohydrodynamic sealing assembly outside the closed chamber of the furnace tube to provide a power source outside the furnace tube, avoiding the influence of the high temperature inside the furnace on the normal operation of the rotational power source. That is, because the temperature inside the furnace tube is about 500 or above, the motor as the rotational power source cannot work normally at this temperature. Placing the rotational power source outside can ensure the normal operation of the rotating device.

[0098] By providing a rotatable boat support base 5, the position and angle of the carrier can be adjusted, so that when reaction gas is introduced into the closed chamber or there is a temperature difference during heating, the gas field and thermal field inside the closed chamber are made uniform, and the overall process yield is improved.

[0099] Specifically, as Figure 2As shown, the magneto - hydrodynamic seal assembly 6 is located at the bottom of the furnace tube 1. The magneto - hydrodynamic seal assembly 6 specifically includes an annular outer ring part 61, an inner ring part 62, and a transmission shaft 59. The top surface of its outer ring part 61 is hermetically connected to the edge of the central hole of the lower furnace door 3, and a first sealing ring 611 can be seen in the figure; the top surface of the inner ring part 62 is hermetically connected to the lower end surface of the annular heat - insulating pad 123 at the bottom of the inner furnace tube 12, and a second sealing ring 621 can be seen in the figure. The gap between the inner ring part 62 and the outer ring part 61 of the magneto - hydrodynamic seal assembly 6 is an annular rotating sealing space, and the transmission shaft 59 passes through this rotating sealing space of the magneto - hydrodynamic seal assembly 6.

[0100] The inner side of the boat support base 5 surrounds the inner furnace tube 12 and has a plurality of carrier placement positions 501. The rotating base 51 at the bottom is annular and passes through the central hole of the lower furnace door. The lower part of the rotating base 51 is connected to the annular transmission shaft 59. The upper end of the transmission shaft 59 is connected to the bottom of the rotating base 51 and passes through the rotating sealing space of the magneto - hydrodynamic seal assembly 6. The lower end of the transmission shaft 59 is located outside the furnace tube, and a gear or a pulley is provided at the lower end and is rotationally connected to the rotation power source. Thus, the rotation power source drives the entire boat support base 5 to rotate around the inner furnace tube 12 through the transmission shaft 59.

[0101] Magneto - hydrodynamic fluid (not shown in the figure) is provided in the gap between the inner wall surface of the transmission shaft 59 and the outer wall surface of the inner ring part 62 of the magneto - hydrodynamic seal assembly. Specifically, multiple annular grooves can be provided on the inner wall surface of the transmission shaft 59 or multiple annular grooves can be provided on the outer wall surface of the inner ring part of the magneto - hydrodynamic seal assembly to place the magneto - hydrodynamic fluid, forming multiple sealing rings in the gap between the inner wall surface of the transmission shaft 59 and the outer wall surface of the inner ring part 62 of the magneto - hydrodynamic seal assembly 6.

[0102] The magneto - hydrodynamic fluid is also arranged in the same way between the outer wall surface of the rotating shaft and the inner wall surface of the outer ring part of the magneto - hydrodynamic seal assembly. Permanent magnets are provided inside both the outer ring part 61 and the inner ring part 62, and the magnetic poles serve as the inner wall of the rotating sealing space, enabling the magneto - hydrodynamic fluid to surround the transmission shaft 59, thereby forming multiple sealing rings in the gap between the outer wall surface of the transmission shaft and the inner wall surface of the outer ring part of the magneto - hydrodynamic seal assembly.

[0103] In a specific embodiment, at least one inner ring permanent magnet is provided inside the inner ring portion of the magneto - fluid sealing assembly. The two inner pole shoes of the inner ring permanent magnet surround the inner wall surface of the transmission shaft. Inner annular grooves corresponding to the inner pole shoes are provided on the inner wall surface of the transmission shaft, and magneto - fluid is arranged in the inner annular grooves. After a magnetic field is generated, the magneto - fluid forms a plurality of inner sealing rings on the inner annular grooves of the inner wall surface of the transmission shaft; at least one outer ring permanent magnet is provided inside the outer ring portion of the magneto - fluid sealing assembly. The two outer pole shoes of the outer ring permanent magnet surround the outer wall surface of the transmission shaft. Outer annular grooves corresponding to the outer pole shoes are provided on the outer wall surface of the transmission shaft, and magneto - fluid is arranged in the outer annular grooves. After a magnetic field is generated, the magneto - fluid forms a plurality of outer sealing rings on the outer annular grooves of the outer wall surface of the transmission shaft.

[0104] Specifically, the outer edge of the lower furnace door 3 is hermetically connected to the step at the bottom of the outer furnace tube 11, and the inner edge of the lower furnace door 3 is hermetically connected to the outer ring portion 61 of the magneto - fluid sealing assembly 6. That is, the annular heat - insulating pad (support base) at the bottom of the inner furnace tube, the inner edge of the lower furnace door, and the transmission shaft (which can be called a transmission tube in the form of an annular tube, specifically visible in the attached drawings) passing through the magneto - fluid sealing assembly are directly hermetically connected through the magneto - fluid sealing assembly to seal the lower end of the sealed chamber 13 inside the furnace tube 1.

[0105] In a specific embodiment, a circle of gears 591 is provided on the outer wall surface where the transmission shaft 59 passes through the rotational sealing space of the magneto - fluid sealing assembly 6, and the rotational power source drives the internal boat support base to rotate in the form of external motor gear transmission.

[0106] In other embodiments, a pulley can also be sleeved on the outer wall surface where the transmission shaft passes through the rotational sealing space of the magneto - fluid sealing assembly, and the rotational power source drives the transmission shaft to rotate through pulley transmission.

[0107] Such as Figure 3 、 4As shown, the utility model also proposes a furnace tube in which the upper end of the inner furnace tube passes through and the lower end does not pass through, and also includes the above-mentioned furnace tube sealing structure, wherein the inner furnace tube 12 is coaxially arranged with the outer furnace tube 11. The lower end of the outer furnace tube 11 is an open end, and the lower furnace door 3 is arranged at the open end of the outer furnace tube 11. The upper end of the inner furnace tube 12 of the furnace tube is open, and the lower end of the inner furnace tube 12 is a closed end, and a distance is maintained between the lower end of the inner furnace tube 12 and the lower furnace door 3, and the magnetic fluid sealing component 6 is sealed and installed outside the lower side of the lower furnace door and covers the center hole of the lower furnace door; at this time, the inner furnace tube 12, the outer furnace tube 11, the upper furnace cover 2 and the lower furnace door 3 together constitute a closed chamber with a concave cross-section. The boat support base 5 of the rotating device is arranged in the closed chamber for carrying the carrier, and can drive the carrier 50 to rotate and adjust the position and angle in the closed chamber 13. The rotating power source 63 of the rotating device is arranged on the bracket on the side of the lower furnace door 3 away from the accommodating chamber; wherein, the upper end of the transmission shaft 59 of the magnetic fluid sealing assembly 6 is located in the closed chamber of the furnace tube, and the lower end of the transmission shaft 59 of the magnetic fluid sealing assembly 6 is located outside the closed chamber. The boat support base of the rotating device located in the closed chamber is connected to the upper end of the transmission shaft, so that when the rotating shaft rotates, the boat support base can be driven to rotate. The rotating power source of the rotating device is connected to the lower end of the transmission shaft, which can drive the transmission shaft 59 to rotate, so that the rotating power source of the rotating device is externally placed outside the furnace tube.

[0108] In the present embodiment, the upper end of the inner furnace tube 12 is higher than the upper end of the outer furnace tube 11, and the upper end of the inner furnace tube 12 is an open end. The upper end of the inner furnace tube 12 is provided with a connector 41 for hoisting. The arrangement of the connector 41 enables the inner furnace tube 12 to be connected to an external hoisting connector, which can provide strength to the inner furnace tube so as to ensure that the inner furnace tube is suspended on the inner side of the outer furnace tube. The hoisting connector is not limited to piles arranged on the ceiling, etc. The lower end of the inner furnace tube 12 is a closed end and is hemispherical. By arranging the lower end of the inner furnace tube 12 to be hemispherical, it can withstand greater pressure and is more suitable for the demand of vacuuming inside the vertical furnace. The outer wall of the inner furnace tube 12 and the inner wall of the outer furnace tube 11 form a reaction chamber, which is a part of the aforementioned closed chamber 13. When the carrier enters the interior of the vertical furnace tube, the carrier 50 is mainly placed in the reaction chamber.

[0109] In a specific embodiment, Figure 4As shown in the figure, the magnetic fluid sealing assembly 6 includes a housing 64 with a vertical transmission shaft installation channel in the middle and a transmission shaft 59. At the upper end of the housing 64, there is an annular sealing cover 65 which is sealingly connected to the lower side end face of the lower furnace door 3. At the same time, the housing 64 and the sealing cover 65 are also sealingly connected, so that the central hole of the lower furnace door 3 is sealed by the magnetic fluid sealing assembly 6. The transmission shaft installation channel in the housing 64 corresponds to the central hole of the lower furnace door. Bearings (not shown in the figure) are provided at positions near the upper and lower ends of the transmission shaft 59 installation channel. The transmission shaft passes through the two bearings, enabling the transmission shaft to rotate relative to the housing. In the middle of the transmission shaft installation channel, there is a permanent magnet (not shown in the figure). The outer wall of the permanent magnet is sealingly connected to the inner wall of the transmission shaft installation channel of the housing (not shown in the figure). The two magnetic poles of the permanent magnet surround the transmission shaft in a ring shape. At the same time, an annular groove (not shown in the figure) is provided on the outer wall surface of the corresponding magnetic pole of the transmission shaft for placing magnetic fluid. After the magnetic field is formed, the magnetic fluid will be affected by the magnetic poles and gather at the annular groove position on the outer wall surface of the transmission shaft to form multiple sealing rings, which hermetically separate the transmission shaft installation channel, so that the sealed chamber of the furnace tube can be connected with a rotating transmission shaft while maintaining sealing and without pressure loss.

[0110] The above two furnace tubes also have the following common structures and specific embodiments:

[0111] As Figure 16 shown, the first embodiment of the boat support base is:

[0112] The boat support base includes: a rotating base 51, a fixing ring 52, and a hanging plate 53;

[0113] The rotating base 51 is disc-shaped. Multiple hanging plates are vertically and spacedly arranged in a circle along the annular edge of the upper surface of the base. The fixing ring 52 is connected to the top of the hanging plate 53 to fix the top of the hanging plate 53, so that the hanging plate 53 is in a stable vertical state. Multiple hanging and taking positions (i.e., carrier placement positions) are provided at intervals along the length direction of the outer side surface of the hanging plate 53 for hanging carriers. That is, multiple carriers 50 can be hung on the hanging plate 53 along the height direction. Specifically, carriers 50 can be hung at different heights of the boat support base, enabling the carriers to be hung in multiple layers along the entire height direction of the boat support base.

[0114] Among them, in the through-type furnace tube that penetrates through the upper and lower ends of the above inner furnace tube, the transmission shaft 59 of the magnetic fluid sealing assembly is in a ring shape and is connected in a circle along the inner edge of the rotating base 51. It can not only support the rotating base 51 but also drive the rotating base 51 to rotate around its central axis. When the rotating base 51 rotates, the carriers 50 located on the outer side surface of the hanging plate 53 rotate around the central axis of the base following the rotating base 51, so that the position and angle of the carriers can be changed during the processing.

[0115] Among them, in the furnace tubes that do not penetrate the lower part of the inner furnace tube, the transmission shaft 59 of the magneto-fluid seal assembly is columnar. The center of the inner edge of the rotating base 51 extends directly downward to form a jack into which the transmission shaft can be inserted. The transmission shaft 59 is inserted into the jack and fixed to the rotating base 51.

[0116] In a specific embodiment, a hook hole 54 is provided at the hanging and taking place of the hanging plate 53 for hanging the carrier. The upper part of the hook hole 54 is wider and the lower part is narrower, which is convenient for the hook of the carrier to be hung in.

[0117] The carrier 50 is a vertical quartz boat, and a hook that can be snapped downward into the hook hole is provided thereon. The hook of the vertical quartz boat is snapped into the hook hole, so that the vertical quartz boat is suspended at the hanging and taking place.

[0118] Specifically, two hooks are provided on the side of each vertical quartz boat along the height direction. Every two hook holes on the hanging plate correspond to hanging one vertical quartz boat. In a specific embodiment, each hanging plate 53 can hang two vertical quartz boats along the height direction, so that the quartz boats can be arranged in two upper and lower circles around the boat support base, so that various heating forms such as layered heating, local heating, and overall heating can be performed on multiple vertical quartz boats placed on the boat support base.

[0119] Specifically, the rotating base 51 can also be provided with a heat insulation cover (not shown in the figure). The heat insulation cover is provided with a plurality of through holes for passing through the hanging plate. A water cooling component is provided inside the heat insulation cover (the specific water cooling source can be provided through the water cooling joint of the lower furnace cover). The setting of the heat insulation cover does not affect the rotation of the rotating base 51 and the hanging of the carrier by the hanging plate, and at the same time can prevent the temperature at the position of the rotating base from being too high and affecting the stability.

[0120] Such as Figure 17 、 18 As shown, the second embodiment of the boat support base is:

[0121] The boat support base includes: a rotating base 51, multiple pairs of bearing members 55. The rotating base 51 has a plurality of carrier placement positions 501 for the carrier boat to pass through or be placed; each pair of bearing members 55 is located on both side edges of a carrier placement position 501 and is foldably arranged on the rotating base 51. At the same time, each pair of bearing members 55 has a folded state and an unfolded state; if a carrier 50 is to be placed, each pair of bearing members 55 is switched to the folded state, so that the carrier 50 can pass upward through the carrier placement position 501 from the bottom. When the bottom of the carrier 50 moves above the horizontal plane of the carrier placement position 501, each pair of bearing members 55 is switched to the unfolded state, so that the carrier 50 is placed on the bearing member. Subsequently, if the carrier 50 is to be taken out, each pair of bearing members 55 is switched to the folded state, so that the carrier 50 can pass through the carrier placement position 501 and be taken out downward from the furnace door, thereby realizing the taking and placing of the carrier boat.

[0122] In each pair of carrier members 55, each carrier member 55 includes a carrier fixed part 551 and a carrier movable part 552. The carrier fixed part 551 is fixedly arranged on the rotating base 51, and the carrier movable part 552 is rotatably arranged on the carrier fixed part 551. In each carrier member 55, a rotating shaft 553 is provided on the carrier fixed part. The carrier movable part 552 includes two opposite first carrier rods and a second carrier rod connected to the two first carrier rods. The ends of the two carrier rods away from the second carrier rod are sleeved on both ends of the rotating shaft. It can be understood that the rotating base further includes a driving member (not shown in the figure), and the driving member is used to drive the rotation of the rotating shaft. The driving member can be a motor. And a self-locking support structure, such as motor self-locking (not shown in the figure), and the self-locking support structure is used to limit the rotation angle of the carrier movable part.

[0123] When each pair of carrier members 55 is in the folded state, the carrier movable part 552 in each carrier member 55 is arranged away from the vehicle placement position 501. When each pair of carrier members 55 is in the unfolded state, the carrier movable part 552 in each carrier member 55 is arranged towards the vehicle placement position and abuts against the vehicle.

[0124] Taking the rotation angle of the carrier movable part in each carrier member 55 as 90 degrees as an example, when each pair of carrier members 55 is in the folded state, the carrier movable part 552 in each carrier member 55 is in a vertical state. At this time, the carrier movable part 552 in each carrier member 55 will not block the vehicle placement position 501 of the rotating base 51, so it will not interfere with the up and down movement of the vehicle boat. When each pair of carrier members is in the unfolded state, the carrier movable part in each carrier member is in a horizontal state. At this time, the carrier movable part in each carrier member extends into the vehicle placement position of the rotating base, so as to be able to carry the vehicle boat.

[0125] In this embodiment, among any two adjacent pairs of carrier members, a carrier fixed part belonging to one pair of carrier members is connected to a carrier fixed part belonging to another pair of carrier members. In practical applications, among any two adjacent pairs of carrier members, the two connected carrier fixed parts can be integrally formed. Such a design can reduce the number of parts and also save installation time.

[0126] In this embodiment, the vehicle placement position 501 is a notch provided on the rotating base 51. The shape and size of the vehicle placement position 501 are adapted to the shape and size of the vehicle boat, which can ensure that the vehicle boat can pass through the vehicle placement position smoothly. It can be understood that in other embodiments, the vehicle placement position can be a through hole provided on the rotating base.

[0127] Such as Figure 18As shown, the vehicles can be stacked in the height direction, that is, multiple vehicles can be placed on one vehicle placement position. At the same time, in order to prevent the vehicles from tipping over, a circle of vertically upward guardrails can be arranged along the outer edge of the rotating base. Since the inner edge of the rotating base is close to the outer wall of the inner furnace tube, the outer wall of the inner furnace tube and the guardrails can ensure that the stacked vehicles will not tip over.

[0128] Specifically, the rotating base of this embodiment is also connected to the upper end of the transmission shaft of the magneto - fluid sealing assembly, and the specific connection form is the same as that of the previous embodiment.

[0129] In a specific embodiment, the external heat source and the internal heat source are an integral whole, that is, the way of directly using electric heating wires is directly wound on the inner and outer furnace tubes to directly heat the sealed cavity.

[0130] As Figure 19 、 20 shown, in a preferred embodiment, both the external heat source 71 and the internal heat source 72 are arranged in a ring shape and are arranged along the height direction of the inner and outer furnace tubes. Specifically, they can be divided into multiple independent heating sections along the height direction of the furnace tubes, and the boat support base can also correspondingly hang the vehicles in layers along the height direction, so as to achieve layered corresponding heating and improve the overall heating efficiency.

[0131] Or, the external heat source and the internal heat source are divided into multiple independent heating sections, and multiple groups of heating sections are arranged at intervals around the inner furnace tube and the outer furnace tube.

[0132] The internal and external heat sources can specifically adopt methods such as resistance wire heating furnace tubes, infrared heating, electromagnetic induction heating, etc.

[0133] In a further embodiment, a heat dissipation device 73 is arranged around the external heat source and the internal heat source to quickly and stably adjust the temperature of the reaction furnace tube. The heat dissipation device can be independent or integrated with the heating device. The heat dissipation device can be manually controlled or automatically controlled by collecting temperature signals, pressure signals, etc. Any method that can achieve automatic control is included within this range. The heat dissipation device 73 can adopt an air - cooled structure or a water - cooled structure. However, it is not limited to the above structures, and any mechanism with a heat exchange and heat dissipation function is included within this range.

[0134] Specifically, Figure 2 in the outer furnace tube 11, as well as the end face positions of the upper furnace cover 2 and the lower furnace door 3, there are water - cooling joints 74 for supplying water to the heat dissipation device arranged inside them.

[0135] As shown in the figure, at the position where the bottom of the furnace tube is located inside the bottom bracket, there is a water - slip ring for supplying water to the water - cooling pipeline (not shown in the figure).

[0136] In a specific embodiment, the inner and outer furnace tubes are specifically quartz tubes or silicon nitride tubes. For the furnace tubes proposed by the present utility model, the inner furnace tube adopts a through-type design, which can be hoisted from the top or supported from the bottom and inserted upward for installation, diversifying the installation methods of the inner furnace tube.

[0137] Specifically, as Figures 11 to 15 shown, the specific implementation manner of the lower furnace door structure is as follows:

[0138] In the first embodiment, the lower furnace door 3 is an integral body with a central hole in the middle. When opened, the entire lower furnace door is directly opened.

[0139] Moreover, the lower furnace door 3 protrudes downward to form a drum surface, that is, a spherical convex structure is provided. Similar to the function of the upper furnace cover, it can withstand greater pressure.

[0140] In the second embodiment, a central hole is provided in the middle of the lower furnace door 3. A plurality of small furnace doors, that is, furnace openings 31, and furnace covers 32 corresponding to each small furnace door are provided on the lower furnace door. The size and shape of the furnace opening 31 match the size and shape of the side of the carrier. Specifically, the shape of the furnace opening 31 can be made consistent with the shape of the side of the carrier, and the size is slightly larger than the size of the side of the carrier, so that the carrier can just pass through the furnace opening 31. The furnace cover 32 is connected with a driving structure 33, and the driving structure 33 is used to drive the furnace cover 32 to open or close relative to the furnace opening 31, so that the small furnace doors can be opened separately, reducing the heat loss in the furnace tube.

[0141] In this embodiment, both the lower furnace door 3 and the furnace cover 32 are preferably spherical convex structures protruding downward. This enables the lower furnace door and the furnace cover to withstand greater pressure, preventing the lower furnace door and the furnace cover from being sucked in and damaged when the enclosed space in the furnace tube is evacuated.

[0142] In order to enable the furnace cover 32 to better fit tightly with the corresponding furnace opening 31, improve the sealing performance, and reduce the heat loss in the furnace tube, a first convex block 311 is provided on one side of the furnace opening 31 facing the furnace cover 32. The first convex block 311 forms an annular cavity 312 around the circumference of the furnace opening 31, and the furnace opening 31 is completely located within the annular cavity 312.

[0143] On one side of the furnace cover 32 matching the furnace opening 31 facing the furnace opening 31, a second convex block 321 is provided. The second convex block 321 can be inserted into the annular cavity 312 in a matching manner. In order to further improve the sealing performance between the furnace cover 132 and the corresponding furnace opening 31, a high-temperature resistant sealing strip can also be provided around the second convex block 321.

[0144] Specifically, the driving structure 33 includes a rotational driving device 331, a coupling 332, a rotating shaft 333, a rotating plate 334, a push-pull driving device 335, and a connecting plate 340;

[0145] Among them, the rotation driving device 331 is preferably a rotation motor, and the push-pull driving device 335 is preferably a push-pull motor.

[0146] On one side of the lower furnace door 3, a rotation driving device 331 is provided corresponding to each of the furnace openings 31. The rotation end of the rotation driving device 331 is connected to the rotating shaft 333 through the coupling 332. A rotatable rotating plate 334 is connected to the end of the rotating shaft 333, and the rotating plate 334 is located in front of the furnace opening 31. The coupling 332 can firmly connect the rotation end of the rotation driving device 331 and the rotating shaft 333, so that the rotation end of the rotation driving device 331 and the rotating shaft 333 rotate together and transmit torque and motion, ensuring that the relative position between the rotation end of the rotation driving device 331 and the rotating shaft 333 remains unchanged during the transmission of motion and power to achieve reliable transmission. Moreover, the coupling 332 can also compensate for the offset between the rotation end of the rotation driving device 331 and the rotating shaft 333 to ensure the continuity and smoothness of the transmission. In addition, the coupling 332 can also mitigate shocks and absorb vibrations, reducing the wear and failure risks of the rotation end of the rotation driving device 331 and the rotating shaft 333, and improving the stability and reliability of the driving structure 33.

[0147] The middle part of the rotating plate 334 is bolted with a push-pull driving device 335, and the push-pull end of the push-pull driving device 335 penetrates through the rotating plate 334 and is connected to the furnace cover 32.

[0148] Specifically, one end of the connecting plate 340 of the driving structure 33 is provided with a first partition plate 341 and a second partition plate 342 at intervals, and a third partition plate 343 is provided at the other end of the connecting plate 340; a first accommodating space 344 is formed between the first partition plate 341, the second partition plate 342 and the corresponding part of the connecting plate 340; a second accommodating space 345 is formed between the second partition plate 342, the third partition plate 343 and the corresponding part of the connecting plate 340; and a through hole (not shown, the same throughout the text) is provided at the same position of the first partition plate 341, the second partition plate 342 and the third partition plate 343. Among them, the rotation driving device 331 is fixed on the side of the third partition plate 343 away from the second partition plate 342, and then the rotating end of the rotation driving device 331 passes through the through hole of the third partition plate 343 and is connected to the coupling 332. The coupling 332 is located in the second accommodating space 345; one end of the rotating shaft 333 is rotatably connected in the through hole of the first partition plate 341, and the other end of the rotating shaft 333 passes through the through hole of the second partition plate 342 and is connected to the coupling 332, and the rotating plate 334 is sleeved on the rotating shaft 333 located in the first accommodating space 344. In this way, the first accommodating space 344 and the second accommodating space 345 can effectively isolate the space between the coupling 332 and the rotating shaft 333 sleeved with the rotating plate 334, prevent accidental contact caused by mechanical failure or improper operation, reduce the potential injury risk, and protect the safety of the staff and equipment; and the first accommodating space 344 and the second accommodating space 345 can reduce the mutual influence between the coupling 332 and the rotating shaft 333 sleeved with the rotating plate 334, prevent the vibration and force generated when the rotation driving device 331 works from being transmitted between the coupling 332 and the rotating shaft 333 sleeved with the rotating plate 334, and improve the stability of the entire driving structure 33.

[0149] Among them, the lower furnace door further includes a control unit. The rotation driving device 331 is equipped with a first electrical interface 338, and the push-pull driving device 335 is equipped with a second electrical interface 139. Both the first electrical interface 338 and the second electrical interface 339 are used for electrically connecting to the control unit that controls the furnace door structure.

[0150] In this way, when it is necessary to open the furnace lid 32 relative to the furnace opening 31, the staff clicks "Start" on the operation panel corresponding to the control unit. Then, when the control unit receives the opening signal sent by the operation panel, it will first start the push-pull drive device 335, and the push-pull drive device 335 will control the furnace lid 32 to move away from the corresponding furnace opening 31. When the furnace lid 32 is no longer in contact with the corresponding furnace opening 31, the control center will turn off the push-pull drive device 335 and simultaneously start the rotation drive device 331. At this time, the rotation drive device 331 will control the rotating plate 334 and the furnace lid 32 located on the rotating plate 334 to move towards the outer side away from the center of the furnace lid 32, so as to completely expose the corresponding furnace opening 31. Then the control unit will turn off the rotation drive device 331. Then the staff will insert the carrier for placing the wafer to be processed into the furnace opening 31 and place it in the furnace tube 1, and then perform the process, that is, introduce specific reaction gases into the furnace tube 1, so as to realize specific processes such as coating, diffusion, oxidation, and thin film deposition on the wafer to be processed.

[0151] When it is necessary to close the furnace lid 32 relative to the furnace opening 31, the staff clicks "Close" on the operation panel corresponding to the control unit. Then, when the control unit receives the closing signal sent by the operation panel, the control unit will first start the rotation drive device 331, and the rotation drive device 331 will control the rotating plate 334 and the furnace lid 32 located on the rotating plate 334 to move towards the inner side away from the center of the furnace lid 32 for resetting. Then the control center will turn off the rotation drive device 331 and simultaneously start the push-pull drive device 335, and the push-pull drive device 335 will control the furnace lid 32 to approach the corresponding furnace opening 31 until the second convex block 321 of the furnace lid 32 is inserted into the annular cavity 312 of the corresponding furnace opening 31 in a matching manner, so that the furnace lid 32 completely covers the corresponding furnace opening 31, and then the control unit will turn off the push-pull drive device 335.

[0152] Wherein, a rectangular mounting plate 322 is further provided on one side of the furnace lid 32 facing the rotating plate 334. The push-pull end of the push-pull drive device 335 is connected to the middle of the mounting plate 322, and the four sides of the mounting plate 322 are connected to the furnace lid 32 through the first guide posts 323. The mounting plate 322 can share part of the weight and load between the furnace lid 32 and the push-pull drive device 335, enhancing the stability and reliability of the overall structure; and the mounting plate 322 can also absorb the vibration and impact force generated when the furnace lid 32 rotates, so as to reduce the damage to the furnace lid 32 and the push-pull drive device 335 and extend their service life; and the mounting plate 322 can be connected to the furnace lid 32 through the first guide posts 323, so that the relative position between the furnace lid 32 and the push-pull drive device 335 can be better adjusted to ensure the accuracy and stability of the rotation of the furnace lid 32.

[0153] Moreover, a plurality of weight-reducing holes 324 are provided on the mounting plate 322. The weight-reducing holes 324 can reduce the weight of the mounting plate 322, enabling the rotation driving device 331 and the push-pull driving device 335 to better control the movement of the furnace cover 32.

[0154] Among them, a rectangular mounting area 336 is provided in the middle of the rotating plate 334. A push-pull driving device 335 is provided in the middle of the mounting area 336. The four sides of the mounting area 336 are all connected to the mounting plate 322 through second guiding columns 337.

[0155] In this embodiment, the second guiding columns 337 are exemplified by being installed at the four corners of the mounting area 336.

[0156] The second guiding columns 337 can ensure the accurate alignment of the relative positions between the mounting plate 322 and the furnace cover 32. In this way, during the rotation of the furnace cover 32, the second guiding columns 337 can guide the mounting plate 322 and the furnace cover 32 to move along a predetermined path, preventing them from deviating from the correct position or shifting, which helps to maintain the stability and accuracy of the rotation of the furnace cover 32.

[0157] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. For those skilled in the art, the present invention can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A furnace tube sealing structure, characterized in that: The furnace tube comprises: an outer furnace tube, an inner furnace tube, an upper furnace cover, a lower furnace door and a rotating device; the inner furnace tube is installed in the outer furnace tube, and the upper furnace cover is sealingly installed at the upper ends of the outer furnace tube and the inner furnace tube; the sealing structure comprises: the lower furnace door is sealingly installed at the lower end of the outer furnace tube, and a magnetic fluid sealing component is sealingly connected to the center hole of the lower furnace door, one end of the transmission shaft of the magnetic fluid sealing component is located in the closed chamber formed by the furnace tube seal, and the other end is located outside the closed chamber, and the rotating device is located in the closed chamber, and the transmission component that drives the carrier to rotate is connected to the transmission shaft of the magnetic fluid sealing component.

2. The furnace tube sealing structure according to claim 1, characterized in that: An outer sealing flange is provided on the outer wall of the upper end of the outer furnace tube, and an inner sealing flange is provided on the inner wall of the inner furnace tube; the upper furnace cover covers the upper end surfaces of the outer furnace tube and the inner furnace tube, and its outer edge is sealedly connected to the outer sealing flange, and its inner edge is connected to the inner sealing flange; the outer edge of the lower furnace door is sealedly connected to the lower end of the outer furnace tube.

3. A furnace tube, characterized in that: It comprises the furnace tube sealing structure as described in any one of claims 1 to 2, wherein the lower end of the inner furnace tube is open and passes through the central hole of the lower furnace door; the magnetic fluid sealing assembly is annular, and a corresponding central hole is also provided in the middle, and is divided into an inner ring part, an outer ring part and an annular transmission shaft located between the inner ring part and the outer ring part, wherein the inner ring part is sealedly connected to the supporting base at the bottom of the inner furnace tube, the outer ring part is sealedly connected to the outer side of the inner edge of the lower furnace door, and the inner ring part and the outer ring part are rotationally sealed with the transmission shaft.

4. The furnace tube according to claim 3, characterized in that The inner ring part of the magnetic fluid sealing component is provided with at least one inner ring permanent magnet, and the two inner pole shoes of the inner ring permanent magnet surround the inner wall surface of the transmission shaft, and the inner wall surface of the transmission shaft is provided with an inner annular groove corresponding to the inner pole shoe, and the magnetic fluid is arranged in the inner annular groove; the outer ring part of the magnetic fluid sealing component is provided with at least one outer ring permanent magnet, and the two outer pole shoes of the outer ring permanent magnet surround the outer wall surface of the transmission shaft, and the outer wall surface of the transmission shaft is provided with an outer annular groove corresponding to the outer pole shoe, and the magnetic fluid is arranged in the outer annular groove.

5. A furnace tube, characterized in that: It comprises the furnace tube sealing structure as described in any one of claims 1 to 2, wherein the lower end of the inner furnace tube close to the lower furnace door is a closed end, and a distance is maintained between the closed end and the lower furnace door, and the magnetic fluid sealing assembly is sealingly installed outside the lower side of the lower furnace door and covers the center hole of the lower furnace door.

6. The furnace tube according to claim 3 or 5, characterized in that The rotating device includes: a boat support base arranged in the closed chamber of the furnace tube and having a plurality of carrier placement positions, the boat support base being connected to the transmission shaft of the magnetic fluid sealing assembly; and a rotating power source located outside the closed chamber and connected to the transmission shaft to drive the boat support base to rotate.

7. The furnace tube according to claim 6, characterized in that The rotating power source and the transmission shaft are driven by gears or pulleys.

8. The furnace tube according to claim 6, characterized in that The boat support base comprises: A rotating base, the rotating base is located at the bottom of the closed chamber; A hanging plate is arranged on the rotating base, and a plurality of carrier placement positions for hanging the carrier are provided on the hanging plate.

9. The furnace tube according to claim 6, characterized in that A rotating base, wherein the rotating base has a plurality of carrier placement positions for the carrier boat to pass through or be placed; A plurality of pairs of bearing members, each pair of bearing members is located at two side edges of a carrier placement position and is foldably arranged on a rotating base; When the carrier is switched to a folded state, the carrier can pass upward from the bottom through a carrier placement position corresponding to the carrier; when the carrier is switched to an unfolded state, the carrier can be placed on the carrier.

10. The furnace tube according to claim 3 or 5, characterized in that: The outer end surfaces of the upper furnace cover and the lower furnace door away from the closed chamber protrude outward to form a spherical protrusion.

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