Jig for measuring heights of wafer workbench and ejector pin cap

Abstract

The utility model provides a jig for measuring the heights of a wafer workbench and an ejector pin cap, which comprises a base and a dial indicator, the bottom of the base is fixed on the ejector pin cap, the base is provided with a first through hole and a second through hole, and the first through hole is arranged on the upper surface of the ejector pin cap; the second through hole is formed in the upper surface of the wafer workbench, the dial indicator is slidably installed above the base, and a measuring head of the dial indicator penetrates through the first through hole or the second through hole to measure the height of the ejector pin cap and the height of the wafer workbench respectively. The jig disclosed by the utility model can be fixed on the ejector pin cap, the heights of the ejector pin cap and the wafer workbench can be respectively measured through the dial indicator on the jig, whether a height difference exists between the ejector pin cap and the wafer workbench or not can be quickly known, and product abnormity caused by the height difference problem is avoided.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor packaging, and particularly relates to a jig for measuring the height between a wafer table and a thimble cap. Background Art

[0002] There is a height difference between the thimble cap and the wafer table, which is a common and inevitable phenomenon existing in the die bonder for a long time. The height difference will cause problems such as the chip cannot be picked up, the die bonding position is unstable, the chip flies off, and the chip cracks.

[0003] At present, the software of the die bonder (taking the ESEC2100 model as an example) has a built-in height calibration for the thimble cap. After the machine is calibrated, through the algorithm of the software, the height difference between the thimble cap and the wafer table is automatically compensated to make them horizontal. However, the software cannot display the actual height values of the thimble cap and the wafer table and the compensated height value between the two, and it is impossible to intuitively judge whether the two are at the same level. Only the operator can judge whether they are horizontal through the actual operation status of the machine, and there will still be a large error in the operator's observation, which will still cause problems such as the chip cannot be picked up, the die bonding position is unstable, the chip flies off, and the chip cracks.

[0004] Therefore, there is an urgent need for a technical solution to solve the problem of the height difference between the thimble cap and the wafer table. Summary of the Invention

[0005] The purpose of the utility model is to provide a jig for measuring the height between a wafer table and a thimble cap; the jig can be fixed on the thimble cap, and the height of the thimble cap and the wafer table can be measured respectively by the dial indicator on the jig, so as to quickly know whether there is a height difference between the two and avoid product abnormalities caused by the height difference problem.

[0006] To achieve the above purpose, the utility model provides a jig for measuring the height between a wafer table and a thimble cap, which includes a base and a dial indicator. The bottom of the base is fixed on the thimble cap. The base is provided with a first through hole and a second through hole. The first through hole is arranged on the upper surface of the thimble cap; the second through hole is arranged on the upper surface of the wafer table. The dial indicator is slidably installed above the base, so that the measuring head of the dial indicator passes through the first through hole or the second through hole to measure the height of the thimble cap and the wafer table respectively.

[0007] Preferably, the dial indicator is installed above the base through a sliding component. The sliding component includes a longitudinal fixing rod and a transverse fixing rod. The longitudinal fixing rod is fixed at one end of the base. One end of the transverse fixing rod is fixedly connected to the longitudinal fixing rod. A clamping portion is provided on the transverse fixing rod. The clamping portion slides left and right along the transverse fixing rod, and the end of the clamping portion clamps the dial indicator.

[0008] Preferably, the transverse fixing rod slides up and down in the vertical direction of the longitudinal fixing rod. A fastener is provided at the end of the transverse fixing rod. The fastener fixes the transverse fixing rod and prohibits the transverse fixing rod from sliding up and down.

[0009] Preferably, fixing blocks are symmetrically arranged at the bottom of the base. A thimble cap is placed between the two fixing blocks. At least two adjusting bolts are provided on each fixing block, and the adjusting bolts abut against the thimble cap.

[0010] Preferably, the second through hole is a strip-shaped hole horizontally provided on the base.

[0011] Preferably, a limiting ring is provided on the upper surface of the first through hole. The height of the limiting ring is 3 mm - 5 mm, and the upper surface of the thimble cap does not exceed the top of the limiting ring.

[0012] Compared with the prior art, the present utility model has the following beneficial effects:

[0013] 1. The jig disclosed by the present utility model can be fixed on the thimble cap. The height of the thimble cap and the wafer stage can be respectively measured through the dial indicator on the jig, and it can be quickly known whether there is a height difference between the two, avoiding product abnormalities caused by height difference problems.

[0014] 2. The jig disclosed by the present utility model has a simple structure and is easy to operate; it does not require the observation of operators to determine the height difference between the thimble cap and the wafer stage, which can avoid damage to the chip caused by the height difference and improve the product yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 Shows the structural schematic diagram of the jig in the present utility model;

[0016] Figure 2 Shows the structural schematic diagram of the jig from another angle in the present utility model;

[0017] Figure 3 Shows the structural schematic diagram of the jig from another angle in the present utility model. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0018] In order to make the purpose, technical solutions and advantages of the present utility model clearer, the technical solutions of the present application will be clearly and completely described below with reference to the accompanying drawings.

[0019] This embodiment provides a fixture for measuring the height between a wafer stage and a thimble cap. The schematic structural diagram is as follows Figures 1 to 3 shown. It includes a base 1 and a dial indicator 2. This fixture can be fixed on the thimble cap 3. The height of the thimble cap 3 and the wafer stage 4 can be measured respectively through the dial indicator 2 on the fixture, so as to quickly know whether there is a height difference between the two, and avoid product abnormalities caused by height difference problems.

[0020] The base 1 in the above fixture can be a plate-like structure made of a hard material, and its shape can be square, circular or other special shapes. In this embodiment, the base 1 is taken as an example of a rectangular structure. The bottom of the rectangular base 1 is fixed on the thimble cap 3. Specifically, fixing blocks 7 are symmetrically arranged at the bottom of the base 1, and the thimble cap 3 is placed between the two fixing blocks 7. At least 2 adjusting bolts 701 are arranged on each fixing block 7 in a matching manner, and the end of the adjusting bolt 701 abuts against the thimble cap 3. After the fixing block 7 sleeves the thimble cap 3, the 4 adjusting bolts 701 are respectively screwed to fix the base 1 on the thimble cap 3. Moreover, there is another advantage in using the structure of the adjusting bolt 701 to fix the thimble cap 3, that is, the gap between the fixing blocks 7 can accommodate thimble caps 3 of different sizes. The diameter of the thimble cap 3 is generally between 22 - 28 mm. Through the structure of the adjusting bolt 701 and the fixing block 7, thimble caps 3 of different diameters can be fixed.

[0021] Two holes are opened on the base 1, namely a first through hole 101 and a second through hole 102. The position of the first through hole 101 is set on the upper surface of the thimble cap 3; the position of the second through hole 102 is set on the upper surface of the wafer stage 4.

[0022] Specifically, the second through hole 102 is a strip-shaped hole horizontally arranged on the base 1. The sizes of the wafer stages 4 are different. By setting the second through hole 102 as a strip-shaped hole, no matter the size of the wafer stage 4, it can ensure that the upper surface of the wafer stage 4 can be exposed in the strip-shaped hole. So as to facilitate the dial indicator 2 to measure the height of the wafer stage 4.

[0023] In this embodiment, a limit ring 8 is also provided on the upper surface of the first through hole 101. The height of the limit ring 8 is 3 mm - 5 mm, and the upper surface of the thimble cap 3 does not exceed the top of the limit ring 8. The limit ring 8 plays a role in limiting the height, giving an intuitive prompt to the operator, so that the upper surface of the thimble cap 3 does not exceed the top of the limit ring 8. Because the dial indicator 2 has a corresponding measuring range, the height of the thimble cap 3 is limited within the measuring range of the dial indicator 2.

[0024] The dial indicator 2 is slidably installed above the base 1, so that the measuring head of the dial indicator 2 can pass through the first through hole 101 or the second through hole 102 to measure the height of the thimble cap 3 and the wafer stage 4 respectively.

[0025] Specifically, the dial indicator 2 is installed above the base 1 through a sliding component.

[0026] The sliding component includes a longitudinal fixed rod 5 and a transverse fixed rod 6, both of which are cylinders. The longitudinal fixed rod 5 is fixed at one end of the base 1, one end of the transverse fixed rod 6 is fixedly connected to the longitudinal fixed rod 5, a clamping portion 601 is provided on the transverse fixed rod 6, the clamping portion 601 slides left and right along the transverse fixed rod 6, and the end of the clamping portion 601 clamps the dial indicator 2. As shown Figure 1 in the figure, the end of the clamping portion 601 has an opening, and the opening clamps the shaft rod below the dial of the dial indicator 2.

[0027] Furthermore, in order to facilitate the adjustment of the vertical position of the dial indicator 2, it can be achieved by the scheme that the transverse fixed rod 6 slides up and down in the vertical direction along the longitudinal fixed rod 5. The two claws at the end of the transverse fixed rod 6 are sleeved at appropriate positions on the longitudinal fixed rod 5, and a fastener 602 is provided on the claw 603 at the end of the transverse fixed rod 6. The fastener tightens the distance between the claws 603, and the fastener can fix the transverse fixed rod 6 at any position on the longitudinal fixed rod 5, prohibiting the transverse fixed rod 6 from sliding up and down.

[0028] In the specific implementation of this embodiment, the fixture is installed on the thimble cap 3, and it should be noted that the upper surface of the thimble cap 3 does not exceed the top of the limit ring 8. According to the range of the dial indicator 2 and the approximate height from the dial indicator 2 to the thimble cap 3 and the wafer stage 4, adjust the position of the transverse fixed rod 6 based on the longitudinal fixed rod 5 so that the subsequent measurement height is within the range of the dial indicator 2. According to the positions of the wafer stage 4 and the thimble cap 3, adjust the position of the clamping portion 601 on the transverse fixed rod 6 to above the wafer stage 4, measure the height of the wafer stage 4, and record the value; adjust to above the thimble cap 3, measure the height of the thimble cap 3, record the vertical value, and automatically calculate the height difference between the two. After measurement, the corresponding height can be adjusted through the computer of the loader machine table to make the two flush.

[0029] The fixture disclosed by the present utility model has a simple structure and is convenient to operate; it does not require the operator to observe to determine the height difference between the thimble cap 3 and the wafer stage 4. Through the fixture, it can quickly be known whether there is a height difference between the two, avoiding product abnormalities caused by the height difference problem and improving the product yield.

[0030] The above is only the preferred embodiment of the present utility model and is not used to limit the present utility model. For those skilled in the art, the present utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A jig for measuring the height between a wafer workbench and an ejector cap, characterized in that: The invention comprises a base (1) and a micrometer (2), wherein the bottom of the base (1) is fixed on a pin cap (3), and the base (1) is provided with a first through hole (101) and a second through hole (102), wherein the first through hole (101) is provided on the upper surface of the pin cap (3); and the second through hole (102) is provided on the upper surface of a wafer workbench (4); and the micrometer (2) is slidably mounted above the base (1) so that a probe of the micrometer (2) is inserted into the first through hole (101) or the second through hole (102) to measure the height of the pin cap (3) and the height of the wafer workbench (4) respectively.

2. The fixture according to claim 1, characterized in that: The micrometer (2) is mounted above the base (1) via a sliding assembly, the sliding assembly comprising a longitudinal fixing rod (5) and a transverse fixing rod (6), the longitudinal fixing rod (5) being fixed to one end of the base (1), one end of the transverse fixing rod (6) being fixedly connected to the longitudinal fixing rod (5), the transverse fixing rod (6) being provided with a clamping portion (601), the clamping portion (601) sliding left and right along the transverse fixing rod (6), the end of the clamping portion (601) clamping the micrometer (2).

3. The fixture according to claim 2, characterized in that: The transverse fixing rod (6) slides up and down in the vertical direction along the longitudinal fixing rod (5); a fastener (602) is provided at the end of the transverse fixing rod (6); the fastener (602) fixes the transverse fixing rod (6) and prohibits the transverse fixing rod (6) from sliding up and down.

4. The fixture according to claim 1, characterized in that: The base (1) is symmetrically provided with fixed blocks (7), a pin cap (3) is placed between the two fixed blocks (7), and each of the fixed blocks (7) is provided with at least two adjusting bolts (701), the adjusting bolts (701) being against the pin cap (3).

5. The fixture according to any one of claims 2 to 4, characterized in that: The second through hole (102) is a strip-shaped hole arranged transversely on the base (1).

6. The fixture according to claim 5, characterized in that: A limiting ring (8) is provided on the upper surface of the first through hole (101); the limiting ring (8) has a height of 3 mm to 5 mm, and the upper surface of the ejector cap (3) does not exceed the top of the limiting ring (8).

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