Light splitting interferometer

Abstract

The utility model discloses a light splitting interferometer, which comprises an optical machine box body, a sample scanning head and a light splitting interference system, and the light splitting interference system comprises a wide-spectrum light source, an optical fiber coupler, a sample arm, a reference arm and a spectrograph. The wide-spectrum light source and the optical fiber coupler are positioned in the optical machine box body; the wide-spectrum light source, the spectrograph, the sample arm and the reference arm are respectively and optically connected with the optical fiber coupler through optical fibers; the sample arm extends from the inside of the ray machine box body to the outside and is optically connected with the sample scanning head; the reference arm comprises a compensation optical fiber patch cord, and the compensation optical fiber patch cord is located outside the optical machine box body and is in detachable optical connection with the part, located inside the optical machine box body, of the reference arm; the optical path difference between the sample arm and the reference arm is within a preset range. By means of the structure, the detachable compensation optical fiber patch cord is arranged, it can be guaranteed that the difference between the optical path of the reference arm and the optical path of the sample arm is within the preset range in different detection scenes, operation is easy, and cost is reduced.

Description

Technical Field

[0001] The embodiments of the present utility model relate to the technology of a spectroscopic interferometer, and particularly to a spectroscopic interferometer. Background Art

[0002] An interferometer is a precision instrument that accurately measures changes in geometric height or refractive index through changes in the optical path difference between two coherent light beams. Any change in the optical path difference between the two coherent light beams will very sensitively cause the movement of interference fringes. Therefore, by measuring the movement and change of interference fringes, small changes in geometric length or refractive index can be measured, and other physical quantities related thereto can be measured. Traditional spectroscopic interferometers do not require scanning in the depth direction of the sample, and the measurement of the surface height of the sample is relatively accurate, and the overall morphology of the measured sample can be restored. Therefore, the application of spectroscopic interferometers is becoming more and more extensive.

[0003] In a traditional spectroscopic interferometer, the length of the optical fiber of the sample arm outside is fixed. However, when applied to different detection scenarios, the distance between the sample scanning head and the optical machine box will change greatly, and it is necessary to change the length of the optical fiber of the sample arm outside the optical machine box. At this time, the optical path of the sample arm will be changed. Therefore, in order to ensure that the total optical path of the sample arm optical path is the same as the total optical path of the reference arm optical path, it is necessary to disassemble the optical machine box, correspondingly change the length of the optical fiber of the reference arm, and reassemble the optical machine box. And each time the detection scenario is changed, it is necessary to disassemble and reassemble again. A great deal of manpower and material resources are consumed in this process, and the cost is relatively high, resulting in a reduction in detection efficiency. Summary of the Utility Model

[0004] The present utility model provides a spectroscopic interferometer, which realizes that the optical path difference between the reference arm and the sample arm can be ensured within a preset range in different detection scenarios by setting a detachable compensation optical fiber jumper on the reference arm, without repeatedly disassembling and assembling the optical machine box multiple times, reducing costs and improving detection efficiency.

[0005] The present utility model provides a spectroscopic interferometer, which includes an optical machine box, a sample scanning head, and a spectroscopic interference system. The spectroscopic interference system includes a broadband light source, an optical fiber coupler, a sample arm, a reference arm, and a spectrometer;

[0006] The broadband light source, the optical fiber coupler, and the spectrometer are located inside the optical machine box; the broadband light source, the spectrometer, the sample arm, and the reference arm are respectively optically connected to the optical fiber coupler through optical fibers;

[0007] The sample arm extends from inside the optical machine box to the outside and is optically connected to the sample scanning head; the reference arm includes a compensation optical fiber jumper, the compensation optical fiber jumper is located outside the optical machine box, and is detachably optically connected to the part of the reference arm located inside the optical machine box; the optical path difference between the sample arm and the reference arm is within a preset range.

[0008] Optionally, two first optical fiber adapters are provided on the optomechanical housing, and both ends of the compensation optical fiber jumper are optically connected to the part of the reference arm inside the optomechanical housing through the two first optical fiber adapters respectively.

[0009] Optionally, the part of the reference arm inside the optomechanical housing includes a first reference arm optical fiber, a second reference arm optical fiber, a first optical fiber collimator, a first lens and a reflector;

[0010] The first reference arm optical fiber, the compensation optical fiber jumper, the second reference arm optical fiber, and the first optical fiber collimator are optically connected in sequence, and the first lens and the reflector are located on the outgoing light path of the first optical fiber collimator in sequence.

[0011] Optionally, the sample arm includes a second optical fiber adapter, a first sample arm optical fiber and a second sample arm optical fiber, the first sample arm optical fiber is located inside the optomechanical housing, and the second sample arm optical fiber is located outside the optomechanical housing;

[0012] The second optical fiber adapter is provided on the optomechanical housing;

[0013] The first sample arm optical fiber is optically connected to the second sample arm optical fiber through the second optical fiber adapter.

[0014] Optionally, the sample scanning head includes a second optical fiber collimator and a second lens, and the second lens and the sample to be measured are located on the outgoing light path of the second optical fiber collimator in sequence.

[0015] Optionally, the sample scanning head further includes a scanning mirror module, and the scanning mirror module is located on the outgoing light path of the second optical fiber collimator and before the second lens.

[0016] Optionally, the scanning mirror module includes any one of a galvanometer scanning mirror module, a resonant galvanometer or a MEMS galvanometer.

[0017] Optionally, the sample scanning head further includes a telescopic mechanism, and both ends of the telescopic mechanism are respectively connected to the second optical fiber collimator and the scanning mirror module, and the telescopic mechanism is telescopable in the optical axis direction to adjust the distance between the second optical fiber collimator and the scanning mirror module.

[0018] Optionally, the telescopic mechanism includes a first lens barrel part and a second lens barrel part that are screwed together, and the first lens barrel part and the second lens barrel part are axially telescoped by rotating the thread, and the sides of the first lens barrel part and the second lens barrel part facing away from each other respectively abut against the second optical fiber collimator and the scanning mirror module.

[0019] Optionally, the spectroscopic interferometer further includes an image processing module, and the image processing module is electrically connected to the broadband light source and the spectrometer respectively;

[0020] The image processing module is used to sample and obtain interference spectral data, and perform data processing on the interference spectral data to obtain the depth information, phase information, and reflectivity information of the sample to be measured.

[0021] In the technical solution of the present utility model, by optically connecting a broadband light source, a spectrometer, a sample arm, and a reference arm to a fiber optic coupler through optical fibers respectively, the broadband light emitted by the broadband light source is divided into reference light and sample light after being transmitted to the fiber optic coupler. The reference light is transmitted along the optical path of the reference arm, and the sample light is transmitted along the optical path of the sample arm. When the sample light is transmitted to the sample to be measured, it will be reflected. At the same time, when the reference light is transmitted to the reference arm, it will be reflected. The reflected sample light and reference light will both be transmitted back to the fiber optic coupler along the original optical path. When the length of the compensating fiber optic jumper that can be detachably replaced on the reference arm can ensure that the optical path difference between the sample arm and the reference arm is within a preset range, the reference light and the sample light will interfere in the fiber optic coupler to generate interference fringes. The interference light of the interference fringes will be transmitted to the spectrometer to analyze the spectrum of the interference light through the spectrometer. By using the above device, by setting a detachable compensating fiber optic jumper, it is realized that in different detection scenarios, the optical path of the reference arm and the optical path difference between the sample arm can be ensured to be within a preset range, without repeatedly disassembling and assembling the optical machine box multiple times. The operation is simple, the cost is reduced, and the detection efficiency is improved. Brief Description of the Drawings

[0022] Figure 1 It is a schematic structural diagram of a spectroscopic interferometer provided by an embodiment of the present utility model;

[0023] Figure 2 It is a schematic structural diagram of a second spectroscopic interferometer provided by an embodiment of the present utility model. Detailed Description of the Embodiment

[0024] The present utility model will be further described in detail below with reference to the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the present utility model, rather than limiting the present utility model. In addition, it should be noted that for the convenience of description, only parts related to the present utility model are shown in the drawings, rather than all the structures.

[0025] Figure 1 It is a schematic structural diagram of a spectroscopic interferometer provided by an embodiment of the present utility model, refer to Figure 1As shown in the figure, the spectroscopic interferometer includes an optomechanical housing 1, a sample scanning head 2, and a spectroscopic interference system 3. The spectroscopic interference system 3 includes a broadband light source 31, an optical fiber coupler 32, a sample arm 33, a reference arm 34, and a spectrometer 35. The broadband light source 31, the optical fiber coupler 32, and the spectrometer 35 are located inside the optomechanical housing 1. The broadband light source 31, the spectrometer 35, the sample arm 33, and the reference arm 34 are respectively optically connected to the optical fiber coupler 32 through optical fibers. The sample arm 33 extends from inside the optomechanical housing 1 to the outside and is optically connected to the sample scanning head 2. The reference arm 34 includes a compensation fiber jumper 341, and the compensation fiber jumper 341 is located outside the optomechanical housing 1 and is detachably optically connected to the part of the reference arm 34 located inside the optomechanical housing 1. The optical path difference between the sample arm 33 and the reference arm 34 is within a preset range.

[0026] Among them, the optomechanical housing 1 is a housing with specific dimensions and sizes, which is used to accommodate some devices of the spectroscopic interferometer. The optomechanical housing 1 can protect the devices accommodated inside the optomechanical housing 1 from being damaged and is convenient for carrying. The sample scanning head 2 is used to perform lateral scanning on different lateral position points of the sample to be measured, so as to obtain the depth information, phase information, and reflectivity information of the sample to be measured at different lateral position points. The broadband light source 31 is used to emit a light source with a certain pulse width. In this embodiment, the broadband light source 31 may include, but is not limited to, an SLD light source, etc. The optical fiber coupler 32 is a device used to split the broadband optical signal emitted by the broadband light source 31 to form a reference light and a sample light, or to combine two optical signals. The sample arm 33 is an optical path for the sample light to transmit. The reference arm 34 is an optical path for the reference light to transmit. The spectrometer 35 is an optical instrument used to receive the interference light, decompose the received interference light into a spectrum, and record the interference spectrum data. The fiber jumper is a connector with connector plugs installed at both ends of the optical fiber, which is used to realize the flexible connection of the optical path. In this embodiment, the compensation fiber jumper 341 is an optical fiber used to compensate the optical path of the reference arm 34 under different detection environments.

[0027] Specifically, after the broadband light emitted by the broadband light source 31 is transmitted to the fiber optic coupler 32 through an optical fiber, the fiber optic coupler 32 splits the broadband light into a reference light and a sample light. The reference light is transmitted along the reference arm 34, and the sample light is transmitted along the sample arm 33. After the sample light is transmitted to the sample to be measured, it is reflected or backscattered by the sample to be measured. The sample light after reflection or backscattering returns to the fiber optic coupler 32 along the original optical path of the sample arm 33. At the same time, when the reference light is transmitted along the reference arm 34 to the mirror of the reference arm 34, reflection occurs, and the reflected reference light returns to the fiber optic coupler 32 along the original optical path. After the fiber optic coupler 32 receives the sample light returned from the sample arm 33 and the reference light returned from the reference arm 34, it combines the two beams of light. Since the optical path difference between the sample arm 33 and the reference arm 34 is within a preset range, it indicates that the optical path of the optical path of the sample arm 33 and the optical path of the reference arm 34 are consistent within an allowable error range. At this time, the combined light will interfere to generate interference fringes. The interference light of the interference fringes is transmitted through an optical fiber from another transmission path of the fiber optic coupler 32 to the spectrometer 35 to record the interference spectrum data of the interference light by the spectrometer 35.

[0028] It should be noted that in this embodiment, a compensation fiber optic jumper 341 is provided in the optical path of the reference arm 34. The compensation fiber optic jumper 341 is located outside the optical machine housing 1 and is detachably optically connected to the part of the reference arm 34 located inside the optical machine housing 1. In this way, when the spectroscopic interferometer is applied to different detection scenarios, the distance between the sample to be measured and the optical machine housing 1 will change greatly. At this time, the compensation fiber optic jumper 341 cannot meet the optical path requirements of the reference arm 34 and the sample arm 33, so the compensation fiber optic jumper 341 can be disassembled outside the optical machine housing 1 and replaced with the length required for the compensation fiber optic jumper 341 corresponding to the optical path of the current reference arm 34, so that the optical path of the reference arm 34 is kept consistent with the optical path of the sample arm 33. Even affected by jumper tolerances, temperature, etc., it can ensure that the optical path difference between the sample arm 33 and the reference arm 34 is within a preset range, achieving the purpose of realizing the interference effect of the reference light and the sample light.

[0029] In the technical solution of the embodiment of the present utility model, by optically connecting a broadband light source, a spectrometer, a sample arm, and a reference arm to a fiber optic coupler through optical fibers respectively, the broadband light emitted by the broadband light source is divided into reference light and sample light after being transmitted to the fiber optic coupler. The reference light is transmitted along the optical path of the reference arm, and the sample light is transmitted along the optical path of the sample arm. When the sample light is transmitted to the sample to be measured, it will be reflected. At the same time, when the reference light is transmitted to the reference arm, it will be reflected. The reflected sample light and reference light will both be transmitted back to the fiber optic coupler along the original optical path. When the length of the compensating fiber optic jumper that can be detachably replaced on the reference arm enables the optical path difference between the sample arm and the reference arm to be within a preset range, the reference light and the sample light will interfere in the fiber optic coupler to generate interference fringes. The interference light of the interference fringes will be transmitted to the spectrometer to analyze the spectrum of the interference light through the spectrometer. By using the above device, by setting a detachable compensating fiber optic jumper, it is realized that the optical path difference between the reference arm and the sample arm can be guaranteed to be within a preset range in different detection scenarios, without repeatedly disassembling and assembling the optical machine box multiple times. The operation is simple, the cost is reduced, and the detection efficiency is improved.

[0030] In another specific embodiment, Figure 2 is a schematic structural diagram of the second spectroscopic interferometer provided by the embodiment of the present utility model. Refer to Figure 2 As shown, two first fiber optic adapters 11 are provided on the optical machine box 1. Both ends of the compensating fiber optic jumper 341 are optically connected to the part of the reference arm 34 inside the optical machine box 1 through the two first fiber optic adapters 11 respectively.

[0031] Among them, the first fiber optic adapter 11 is a connector used in a fiber optic communication system, which can realize the connection and interconnection of different types of optical fibers. In this embodiment, one end of each of the two first fiber optic adapters 11 is connected to both ends of the compensating fiber optic jumper 341 respectively, and the other end of the two first fiber optic adapters 11 is optically connected to the part of the reference arm 34 inside the optical machine box 1. Among them, when the length of the compensating fiber optic jumper 341 is different, the optical path of the corresponding reference arm 34 is different. Therefore, when the distance between the sample to be measured and the optical machine box 1 changes, the compensating fiber optic jumper 341 with different lengths can be replaced outside the optical machine box 1 to meet the optical path matching between the reference arm 34 and the sample arm 33. The operation is simple and the cost is low.

[0032] Optionally, continue to refer to Figure 2 , the part of the reference arm 34 inside the optical machine box 1 includes a first reference arm optical fiber 342, a second reference arm optical fiber 343, a first fiber optic collimator 344, a first lens 345, and a reflector 346; the first reference arm optical fiber 342, the compensating fiber optic jumper 341, the second reference arm optical fiber 343, and the first fiber optic collimator 344 are optically connected in sequence, and the first lens 345 and the reflector 346 are located on the outgoing light path of the first fiber optic collimator 344 in sequence.

[0033] Among them, both the first reference arm optical fiber 342 and the second reference arm optical fiber 343 are used to transmit optical signals. The first fiber collimator 344 is used to collimate the reference transmitted through the optical fiber by the reference arm 34. The first lens 345 is used to focus the reference light so that the reference light is focused on the mirror 346. The mirror 346 is used to reflect the focused reference light so that the reference light returns along the original optical path to the fiber coupler 32.

[0034] Specifically, after the compensation fiber jumper 341 is replaced, the reference light emitted from the fiber coupler 32 will sequentially pass through the first reference arm optical fiber 342, the compensation fiber jumper 341, the second reference arm optical fiber 343, and the first fiber collimator 344. The first fiber collimator 344 collimates the reference light transmitted through the optical fiber. The collimated reference light is transmitted to the first lens 345 and then focused. The focused reference light is finally transmitted to the mirror 346 and then reflected, and is transmitted along the original optical path to the fiber coupler 32 to interfere with the returned sample light in the fiber coupler 32.

[0035] Optionally, continue to refer to Figure 2 , the sample arm 33 includes a second fiber adapter 331, a first sample arm optical fiber 332, and a second sample arm optical fiber 333. The first sample arm optical fiber 332 is located inside the optomechanical box 1, and the second sample arm optical fiber 333 is located outside the optomechanical box 1; the second fiber adapter 331 is disposed on the optomechanical box 1; the first sample arm optical fiber 332 is optically connected to the second sample arm optical fiber 332 through the second fiber adapter 331.

[0036] Among them, both the first sample arm optical fiber 332 and the second sample arm optical fiber 333 are used to transmit optical signals. The second fiber adapter 331 is a connector used in an optical fiber communication system, and it can realize the connection and interconnection of different types of optical fibers. In this embodiment, the second fiber adapter 331 is detachably optically connected to the second sample arm optical fiber 333. Therefore, when the distance between the sample to be measured and the optomechanical box 1 is relatively far and the optical path of the sample arm 33 changes, the second sample arm optical fiber 333 can be detached from the second fiber adapter 331, and the detached second sample arm optical fiber 333 can be replaced to change the optical path of the sample arm 33. The operation is simple, the cost is low, and the applicable range is wide.

[0037] Optionally, continue to refer to Figure 2 , the sample scanning head 2 includes a second fiber collimator 21 and a second lens 22, and the second lens 22 and the sample to be measured are sequentially located on the outgoing light path of the second fiber collimator 21.

[0038] Among them, the second fiber collimator 21 is used to collimate the sample light transmitted by the sample arm 33 through the optical fiber. The second lens 22 is used to focus the sample light so that the sample light is focused on the sample to be measured.

[0039] Specifically, after the sample arm 33 transmits the sample light to the second fiber collimator 21 through the first sample arm optical fiber 332 and the second sample arm optical fiber 333, the second fiber collimator 21 can collimate the sample light. The collimated sample light will be transmitted to the second lens 22, and the second lens 22 will focus the received sample light so that the sample light is focused on a certain position point of the sample to be measured.

[0040] Optionally, the sample scanning head 2 further includes a scanning mirror module 23, and the scanning mirror module 23 is located on the outgoing light path of the second fiber collimator 21 and before the second lens 22.

[0041] Among them, the scanning mirror module 23 is a structure that uses two galvanometer motors to control the scanning of the sample light on a two-dimensional plane. The scanning mirror module 23 is usually used for precise positioning and fast scanning applications, and can be independently controlled and moved in two directions of the X-axis and the Y-axis, so as to realize the scanning pattern of different position points of the sample to be measured. In this embodiment, the scanning mirror module 23 includes any one of a galvanometer scanning mirror module, a resonant galvanometer, or a MEMS galvanometer.

[0042] Specifically, the scanning mirror module 23 usually includes a driving motor. Among them, the driving motor is controlled by the control unit so that the sample light transmitted to the scanning mirror module 23 and then focused on the sample to be measured by the second lens 22 moves to different position points in the first direction or the second direction. When the sample light is incident on a certain position point of the sample to be measured, the scanning mirror module 23 will return the sample light containing the information of the sample to be measured at this position point to the optical fiber coupler 22 and then interfere with the returned reference light. When the interference spectrum data is transmitted to the external control unit, the interference spectrum data will be processed to obtain the image information of this position point of the sample to be measured. The image information can include depth information, phase information, reflectivity information, etc. After obtaining the image information of this position point, the driving motor can be used to control the scanning mirror module 23 to move the sample light to the next position point of the sample to be measured, so that the image information of the next position point can be obtained, and so on. Finally, the image information of all preset position points on the sample to be measured can be obtained.

[0043] Optionally, continue to refer to Figure 2 The sample scanning head 2 further includes a telescopic mechanism 24. Two ends of the telescopic mechanism 24 are respectively connected to the second fiber collimator 21 and the scanning mirror module 23. The telescopic mechanism 24 can be telescoped in the optical axis direction to adjust the distance between the second fiber collimator 21 and the scanning mirror module 23.

[0044] Optionally, continue to refer to Figure 2 , the telescopic mechanism 24 includes a first lens barrel part (not shown in the figure) and a second lens barrel part (not shown in the figure) that are screwed together. The first lens barrel part and the second lens barrel part axially expand and contract by screw rotation. The sides of the first lens barrel part and the second lens barrel part facing away from each other respectively abut against the second fiber optic collimator 21 and the scanning mirror module 23.

[0045] Among them, the telescopic mechanism 24 is used to finely adjust the optical path of the sample arm 33 so that the optical path of the sample arm 33 is adjusted to be consistent with the optical path of the reference arm 34 to meet the interference condition.

[0046] Specifically, due to different lengths of the second sample arm optical fiber 333 in different application scenarios, that is, the optical path of the sample arm 33 will be different, so it is necessary to adjust the optical path of the reference arm 34 to be consistent with the sample arm 33. In this embodiment, the adjustment of the reference arm 34 is achieved by replacing the compensation fiber optic jumper 341 with a suitable length. Considering that factors such as the tolerance and temperature of the compensation fiber optic jumper 341 will cause a certain amount of error between the optical path of the reference arm 34 and the optical path of the sample arm 33, therefore, the optical path of the sample arm 33 can be accurately adjusted to ensure that the optical paths of the sample arm 33 and the reference arm 34 are equal, and improve the intensity of the interference signal and the clarity of the image. In this embodiment, after replacing the second sample arm optical fiber 333 with different lengths, the first lens barrel part and the second lens barrel part are adjusted manually or automatically to make the telescopic mechanism 24 expand and contract axially by rotating along the thread, so as to accurately adjust the optical path of the sample arm 33 until the optical path of the sample arm 33 is consistent with the optical path of the reference arm 34. Among them, the expansion and contraction direction of the telescopic mechanism 24 can refer to Figure 2 the bidirectional arrow shown in

[0047] Optionally, the spectral interferometer further includes an image processing module 4. The image processing module 4 is electrically connected to the broadband light source 31 and the spectrometer 35 respectively; the image processing module 4 is used to sample and obtain interference spectral data, and perform data processing on the interference spectral data to obtain the depth information, phase information and reflectivity information of the sample to be measured.

[0048] Among them, the image processing module 4 is used to perform data processing on the obtained interference image information to obtain the depth information, phase information and reflectivity information of the sample to be measured. In addition, the image processing module 4 can be a computer or a computer.

[0049] Specifically, after the spectrometer 35 obtains the interference spectrum data, it will transmit the interference spectrum data to the image processing module 4, that is, a processor or a computer. After receiving the interference spectrum data, the image processing module 4 will resample each line of the interference spectrum data in the wavenumber space to obtain the interference spectrum data linearly sampled in the wavenumber space, and perform Fourier transform on each line of the linearly sampled interference spectrum data in the wavenumber space, so as to obtain the depth information, phase information and reflectivity information of the sample to be measured, and then the reconstruction of the sample to be measured can be realized.

[0050] Note that the above is only the preferred embodiment of the present invention and the applied technical principle. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described here, and various obvious changes, re-adjustments, combinations with each other and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in more detail through the above embodiments, the present invention is not limited to the above embodiments only. Without departing from the concept of the present invention, more other equivalent embodiments can be included, and the scope of the present invention is determined by the scope of the appended claims.

Claims

1. A spectroscopic interferometer, characterized in that: It includes an optical machine box, a sample scanning head and a spectroscopic interference system, wherein the spectroscopic interference system includes a broadband light source, a fiber coupler, a sample arm, a reference arm and a spectrometer; The broadband light source, the optical fiber coupler and the spectrometer are located inside the optical machine housing; the broadband light source, the spectrometer, the sample arm and the reference arm are respectively connected to the optical fiber coupler via optical fibers; The sample arm extends from the inside of the optical machine housing to the outside and is optically connected to the sample scanning head; the reference arm includes a compensation fiber jumper, which is located outside the optical machine housing and is optically connected to a portion of the reference arm located inside the optical machine housing in a detachable manner; the optical path difference between the sample arm and the reference arm is within a preset range.

2. The spectroscopic interferometer according to claim 1, characterized in that: Two first optical fiber adapters are arranged on the optical machine housing, and two ends of the compensation optical fiber jumper are respectively optically connected to a portion of the reference arm located inside the optical machine housing through the two first optical fiber adapters.

3. The spectroscopic interferometer according to claim 1, characterized in that: The part of the reference arm located inside the optical machine housing includes a first reference arm optical fiber, a second reference arm optical fiber, a first optical fiber collimator, a first lens and a reflector; The first reference arm optical fiber, the compensation optical fiber jumper, the second reference arm optical fiber, and the first optical fiber collimator are optically connected in sequence, and the first lens and the reflector are located in sequence on the output light path of the first optical fiber collimator.

4. The spectroscopic interferometer according to claim 1, characterized in that: The sample arm comprises a second optical fiber adapter, a first sample arm optical fiber and a second sample arm optical fiber, wherein the first sample arm optical fiber is located inside the optical machine housing, and the second sample arm optical fiber is located outside the optical machine housing; The second optical fiber adapter is arranged on the optical machine housing; The first sample arm optical fiber is optically connected to the second sample arm optical fiber through the second optical fiber adapter.

5. The spectroscopic interferometer according to claim 1, characterized in that: The sample scanning head comprises a second optical fiber collimator and a second lens, and the second lens and the sample to be measured are sequentially located on the outgoing light path of the second optical fiber collimator.

6. The spectroscopic interferometer according to claim 5, characterized in that: The sample scanning head further includes a scanning mirror module, which is located on the outgoing light path of the second optical fiber collimator and in front of the second lens.

7. The spectroscopic interferometer according to claim 6, characterized in that: The scanning mirror module includes any one of a galvanometer scanning mirror module, a resonant galvanometer mirror or a MEMS galvanometer mirror.

8. The spectroscopic interferometer according to claim 6, characterized in that: The sample scanning head also includes a retractable mechanism, two ends of which are respectively connected to the second fiber collimator and the scanning mirror module, and the retractable mechanism is retractable in the optical axis direction to adjust the distance between the second fiber collimator and the scanning mirror module.

9. The spectroscopic interferometer according to claim 8, characterized in that: The retractable mechanism includes a first lens barrel section and a second lens barrel section which are screwed to each other. The first lens barrel section and the second lens barrel section are axially retracted and retracted by screw rotation. The sides of the first lens barrel section and the second lens barrel section which face away from each other respectively abut against the second optical fiber collimator and the scanning mirror module.

10. The spectroscopic interferometer according to claim 1, characterized in that: It also includes an image processing module, which is electrically connected to the broadband light source and the spectrometer respectively; The image processing module is used to sample and acquire interference spectrum data, and perform data processing on the interference spectrum data to obtain depth information, phase information and reflectivity information of the sample to be tested.

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