Turnover mechanism of chip testing machine

Abstract

The utility model relates to a turnover mechanism of a chip testing machine. The turnover mechanism comprises a machine body and a driving mechanism, the machine body is provided with a wafer placing position and a mounting part, and the mounting part is used for mounting a chip testing machine; the driving mechanism is used for driving the mounting part to move, so that the mounting part drives the chip testing machine to move to a first position or a second position; wherein when the chip testing machine is located at the first position, the chip testing machine is located above the wafer placing position so as to test a wafer at the wafer placing position; when the chip testing machine is at the second position, the chip testing machine leaves the space above the wafer placing position. According to the technical scheme provided by the utility model, when the wafer does not need to be tested, the driving mechanism drives the mounting part to move, so that the mounting part drives the chip testing machine to move to the second position so as to leave the space above the wafer placing position, thereby facilitating subsequent other treatment on the wafer and avoiding obstruction.

Description

Technical Field

[0001] The utility model relates to the technical field of chip testing, in particular to a flipping mechanism of a chip tester. Background Art

[0002] Existing chip testers are generally fixed relative to the machine body. The machine body has a wafer placement position, and the chip tester is located above the wafer placement position to test the wafers at the wafer placement position. After the chip tester finishes testing the wafers, subsequent other processes need to be carried out on the wafers. However, at this time, the chip tester is located above the wafer placement position, which will hinder the subsequent other processes of the wafers. Therefore, this problem needs to be solved. Summary of the Utility Model

[0003] In view of this, the utility model provides a flipping mechanism of a chip tester, mainly solving the technical problem that the chip tester fixed above the wafer placement position in the prior art will hinder the subsequent other processes of the wafers.

[0004] To achieve the above object, the utility model mainly provides the following technical solutions:

[0005] An embodiment of the utility model provides a flipping mechanism of a chip tester, which includes a machine body and a driving mechanism;

[0006] A wafer placement position and a mounting part are arranged on the machine body, and the mounting part is used for installing the chip tester;

[0007] The driving mechanism is used to drive the mounting part to move, so that the mounting part drives the chip tester to move to a first position or a second position; wherein, when the chip tester is in the first position, it is located above the wafer placement position to test the wafers at the wafer placement position; when the chip tester is in the second position, it vacates the space above the wafer placement position.

[0008] In some embodiments, the driving mechanism includes a power device and a rotating shaft, and the mounting part is fixed on the rotating shaft through a fixing structure;

[0009] The driving mechanism drives the rotating shaft to rotate through the power device, so that the rotating shaft drives the mounting part to rotate.

[0010] In some embodiments, the power device includes a motor, a first reducer and a second reducer;

[0011] The motor is connected to the second reducer through the first reducer, and the output end of the second reducer is connected to the rotating shaft;

[0012] Among them, the motor drives the second reducer to operate through the first reducer, so that the output end of the second reducer drives the rotating shaft to rotate.

[0013] In some embodiments, the fixing structure includes a circumferential fixing structure and an axial fixing structure. The circumferential fixing structure is used to keep the mounting portion and the rotating shaft circumferentially fixed, and the axial fixing structure is used to keep the mounting portion and the rotating shaft axially fixed.

[0014] In some embodiments, the circumferential fixing structure includes a key. The mounting portion and the rotating shaft are connected through the key to keep the mounting portion and the rotating shaft circumferentially fixed.

[0015] In some embodiments, the axial fixing structure includes a positioning groove and a positioning protrusion. One of the positioning groove and the positioning protrusion is arranged on the rotating shaft, and the other is arranged on the mounting portion. The axial fixing structure makes the mounting portion and the rotating shaft axially fixed through the insertion and cooperation of the positioning protrusion and the positioning groove.

[0016] In some embodiments, a first connecting piece is detachably fixed on the mounting portion. One of the positioning groove and the positioning protrusion is arranged on the first connecting piece to be arranged on the mounting portion through the first connecting piece; wherein, the mounting portion is axially fixed to the rotating shaft through the first connecting piece.

[0017] In some embodiments, a second connecting piece is detachably fixed on the mounting portion. The mounting portion is used for installing the chip tester through the second connecting piece;

[0018] Among them, the second connecting piece can be replaced with different types for installing corresponding types of chip testers.

[0019] In some embodiments, the position of the second connecting piece on the mounting portion is adjustable.

[0020] In some embodiments, the second connecting piece is L-shaped. The two side plates of the L shape are respectively a first side plate and a second side plate. The second connecting piece is detachably connected to the mounting portion through the first side plate and is used for installing the chip tester through the second side plate;

[0021] Among them, the first side plate and the mounting portion are detachably connected through a first screw. One of the first side plate and the mounting portion is provided with a strip-shaped groove, and the other is provided with a first threaded hole. The first screw is used to pass through the strip-shaped groove and be threadedly connected in the first threaded hole; the second connecting piece can move along the extension direction of the strip-shaped groove when the first screw is loosened, so that the position of the second connecting piece is adjustable;

[0022] The mounting part is further provided with a fixing block, and the fixing block is provided with a second threaded hole. A second screw passes through the second threaded hole, and the end of the second screw abuts against the second connecting member. The central axis direction of the second screw is parallel to the extending direction of the strip-shaped groove.

[0023] By means of the above technical solutions, the flipping mechanism of the chip testing machine of the present invention has at least the following beneficial effects:

[0024] 1. When it is necessary to test the wafer, the driving mechanism drives the mounting part to move, so that the mounting part drives the chip testing machine to move to the first position above the wafer placement position. When it is not necessary to test the wafer, the driving mechanism drives the mounting part to move, so that the mounting part drives the chip testing machine to move to the second position, so as to vacate the space above the wafer placement position, which is convenient for subsequent other processing of the wafer, avoids causing obstacles, and at the same time can also facilitate personnel to debug the chip testing machine.

[0025] 2. The output shaft of the motor can generate high torque through two speed reducers, so as to drive the chip testing machine to rotate smoothly to the specified position, realizing the conversion from high speed and low torque to low speed and high torque.

[0026] 3. Different types of chip testing machines correspond to different types of second connecting members. Among them, by replacing the second connecting member, it can be applied to chip testing machines of different models.

[0027] The above description is only an overview of the technical solutions of the present invention. In order to be able to understand the technical means of the present invention more clearly and implement them according to the content of the specification, the following takes the preferred embodiments of the present invention and combines with the drawings to describe in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the structures shown in these drawings.

[0029] Figure 1 It is a schematic structural diagram of a flipping mechanism of a chip testing machine provided by an embodiment of the present invention;

[0030] Figure 2 is Figure 1 a partial structural diagram of the flipping mechanism of the chip testing machine in

[0031] Figure 3 is Figure 2Enlarged schematic view of part A

[0032] Figure 4 It is a schematic assembly view of the first connecting piece and the rotating shaft

[0033] Figure 5 It is a schematic assembly view of the installation part with the first connecting piece and the second connecting piece

[0034] Reference numerals: 1, body; 2, installation part; 3, rotating shaft; 4, first connecting piece; 5, second connecting piece; 7, fixing block; 9, key; 10, motor; 11, first reducer; 12, second reducer; 41, positioning protrusion; 42, positioning groove; 51, first side plate; 52, second side plate; 61, first screw; 62, strip-shaped groove; 81, second screw; 82, second threaded hole Specific embodiments

[0035] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention

[0036] It should be noted that if there are directional indications (such as up, down, left, right, front, back...) involved in the embodiments of the present invention, then the directional indications are only used to explain the relative position relationship and movement conditions between components in a specific posture (as shown in the accompanying drawings). If this specific posture changes, the directional indications will also change accordingly

[0037] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, then the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions between various embodiments can be combined with each other, but it must be based on the fact that those of ordinary skill in the art can implement them. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the protection scope required by the present invention

[0038] Such as Figures 1 to 5As shown in the figure, a flipping mechanism of a chip testing machine proposed in an embodiment of the present utility model includes a machine body 1 and a driving mechanism. A wafer placement position and a mounting portion 2 are provided on the machine body 1. The mounting portion 2 is used for installing the chip testing machine. The driving mechanism is used to drive the mounting portion 2 to move, so that the mounting portion 2 drives the chip testing machine to move to a first position or a second position. Among them, when the chip testing machine is in the first position, it is located above the wafer placement position to test the wafer at the wafer placement position. When the chip testing machine is in the second position, it vacates the space above the wafer placement position.

[0039] In the above example, when it is necessary to test the wafer, the driving mechanism drives the mounting portion 2 to move, so that the mounting portion 2 drives the chip testing machine to move to the first position above the wafer placement position. When it is not necessary to test the wafer, the driving mechanism drives the mounting portion 2 to move, so that the mounting portion 2 drives the chip testing machine to move to the second position to vacate the space above the wafer placement position, which is convenient for subsequent other processing of the wafer, avoids obstruction, and at the same time is also convenient for personnel to debug the chip testing machine.

[0040] In order to realize the function of the foregoing driving mechanism, in some embodiments, as Figure 1 and Figure 2 shown, the foregoing driving mechanism may include a power device and a rotating shaft 3. The foregoing mounting portion 2 is fixed on the rotating shaft 3 through a fixing structure. The driving mechanism drives the rotating shaft 3 to rotate through the power device, so that the rotating shaft 3 drives the mounting portion 2 to rotate.

[0041] In the above example, since the mounting portion 2 is fixed on the rotating shaft 3, the mounting portion 2 can rotate together with the rotating shaft 3. When the mounting portion 2 rotates, it can drive the chip testing machine to rotate together, so that the chip testing machine rotates to the foregoing first position or second position.

[0042] In some embodiments, as Figure 2 shown, the foregoing power device may include a motor 10, a first reducer 11 and a second reducer 12. The motor 10 is connected to the second reducer 12 through the first reducer 11, and the output end of the second reducer 12 is connected to the rotating shaft 3. Among them, the motor 10 drives the second reducer 12 to operate through the first reducer 11, so that the output end of the second reducer 12 drives the rotating shaft 3 to rotate.

[0043] In the above example, the output shaft of the motor 10 can generate high torque through two reducers to drive the chip testing machine to rotate smoothly to the specified position, realizing the conversion from high speed and low torque to low speed and high torque.

[0044] In some embodiments, when the rotating shaft 3 drives the chip testing machine to rotate from the first position to the second position, or drives the chip testing machine to rotate from the second position to the first position, the chip testing machine rotates 180 degrees.

[0045] In some embodiments, the aforementioned first reducer 11 may be a worm and worm gear reducer, which has a self-locking function. The aforementioned second reducer 12 may be a gearbox reducer or the like. The aforementioned motor 10 may have a self-locking function.

[0046] To implement the functions of the aforementioned fixing structure, the mounting portion 2 can be fixed to the rotating shaft 3 through the fixing structure. In some embodiments, the aforementioned fixing structure may include a circumferential fixing structure and an axial fixing structure. The circumferential fixing structure is used to keep the mounting portion 2 and the rotating shaft 3 circumferentially fixed, and the axial fixing structure is used to keep the mounting portion 2 and the rotating shaft 3 axially fixed.

[0047] The cooperation of the above-mentioned circumferential fixing structure and axial fixing structure can keep the mounting portion 2 and the rotating shaft 3 relatively fixed.

[0048] In some embodiments, as Figure 4 shown, the aforementioned circumferential fixing structure includes a key 9. The mounting portion 2 and the rotating shaft 3 are connected through the key 9 to keep the mounting portion 2 and the rotating shaft 3 circumferentially fixed.

[0049] In some embodiments, as Figure 4 shown, the aforementioned axial fixing structure may include a positioning groove 42 and a positioning protrusion 41. One of the positioning groove 42 and the positioning protrusion 41 is provided on the rotating shaft 3, and the other is provided on the mounting portion 2. The aforementioned axial fixing structure makes the mounting portion 2 and the rotating shaft 3 axially fixed through the insertion fit of the positioning protrusion 41 and the positioning groove 42.

[0050] To facilitate the assembly of the aforementioned positioning protrusion 41 and the positioning groove 42, in some embodiments, as Figure 4 shown, a first connecting member 4 is detachably fixed to the aforementioned mounting portion 2. The first connecting member 4 can be detachably connected to the mounting portion 2 through screws. One of the aforementioned positioning groove 42 and the positioning protrusion 41 is provided on the first connecting member 4 to be provided on the mounting portion 2 through the first connecting member 4. Among them, the aforementioned mounting portion 2 is axially fixed to the rotating shaft 3 through the first connecting member 4.

[0051] In the above example, since the first connecting member 4 can be detached relative to the mounting portion 2, the first connecting member 4 can be first assembled to the rotating shaft 3 to insert the positioning protrusion 41 into the positioning groove 42; then the first connecting member 4 is fixed to the mounting portion 2 through screws or the like, so that it is convenient to insert the positioning protrusion 41 into the positioning groove 42.

[0052] It should be noted here that: the above-mentioned positioning protrusion 41 can be integrally formed on the first connecting member 4 or the rotating shaft 3. In a specific application example, the above-mentioned positioning protrusion 41 is integrally formed on the first connecting member 4, and the positioning groove 42 is provided on the rotating shaft 3.

[0053] As Figure 4 shown, the above-mentioned first connecting member 4 can be of a split structure, and the two halves of the first connecting member 4 can be detachably fixedly connected by screws or the like.

[0054] In some embodiments, a second connecting member 5 is detachably fixed on the aforementioned mounting portion 2, and the mounting portion 2 is used for installing the chip tester through the second connecting member 5. Among them, the second connecting member 5 can be replaced with different types for installing corresponding types of chip testers.

[0055] In the above example, different types of chip testers correspond to different types of second connecting members 5. Among them, by replacing the second connecting member 5, it can be applicable to chip testers of different models.

[0056] In some embodiments, the position of the aforementioned second connecting member 5 on the mounting portion 2 is adjustable.

[0057] Among them, since the chip tester is arranged on the second connecting member 5, when the position of the second connecting member 5 changes, it can drive the position of the chip tester to change together, so that the position of the chip tester can be adjusted to make up for the position deviation during the installation process.

[0058] In some embodiments, as Figure 5 shown, the aforementioned second connecting member 5 can be L-shaped, and the two side plates of the L shape are respectively a first side plate 51 and a second side plate 52. The second connecting member 5 is detachably connected to the mounting portion 2 through the first side plate 51, and the chip tester is installed through the second side plate 52. The chip tester can be fixed on the second side plate by screws or the like. Among them, the first side plate 51 and the mounting portion 2 are detachably connected by a first screw 61. A strip-shaped groove 62 is provided on one of the first side plate 51 and the mounting portion 2, and a first threaded hole is provided on the other. The first screw 61 is used to pass through the strip-shaped groove 62 and be threadedly connected in the first threaded hole. The second connecting member 5 can move along the extending direction of the strip-shaped groove 62 when the first screw 61 is loosened, so that the position of the second connecting member 5 is adjustable. Among them, when the first screw 61 is tightened, the second connecting member 5 and the mounting portion 2 are fixed by the first screw 61.

[0059] As Figure 5As shown, a fixing block 7 may also be provided on the aforementioned mounting portion 2. A second threaded hole 82 is provided on the fixing block 7, and a second screw 81 passes through the second threaded hole 82, and the end of the second screw 81 abuts against the second connecting member 5. Among them, the central line direction of the second screw 81 is parallel to the extending direction of the strip-shaped groove 62.

[0060] In the above example, the end of the second screw 81 can stop the second connecting member 5 to improve the position adjustment accuracy of the second connecting member 5. Among them, when the second screw 81 is screwed to different positions, the position of the second connecting member 5 can also be adjusted to different positions accordingly.

[0061] In some embodiments, as Figure 1 shown, the number of the aforementioned mounting portions 2 may be two, and the two mounting portions 2 may be symmetrically arranged, so as to improve the mounting stability of the chip tester.

[0062] The above are only the preferred embodiments of the present invention, and do not limit the patent scope of the present invention accordingly. Any equivalent structural transformation made by using the content of the specification and drawings of the present invention under the inventive concept of the present invention, or direct / indirect application in other related technical fields are all included in the patent protection scope of the present invention.

Claims

1. A flip mechanism of a chip testing machine, characterized in that: It comprises a body (1) and a driving mechanism; The machine body (1) is provided with a wafer placement position and a mounting portion (2), and the mounting portion (2) is used for mounting the chip testing machine; The driving mechanism is used to drive the mounting part (2) to move, so that the mounting part (2) drives the chip tester to move to a first position or a second position; wherein, when the chip tester is in the first position, it is located above the wafer placement position to test the wafer at the wafer placement position; and when the chip tester is in the second position, it leaves space above the wafer placement position.

2. The flipping mechanism of the chip testing machine as claimed in claim 1, characterized in that: The driving mechanism comprises a power device and a rotating shaft (3), and the mounting portion (2) is fixed on the rotating shaft (3) via a fixing structure; The driving mechanism drives the rotating shaft (3) to rotate through a power device, so that the rotating shaft (3) drives the mounting part (2) to rotate.

3. The flipping mechanism of the chip testing machine as claimed in claim 2, characterized in that: The power device comprises a motor (10), a first reducer (11) and a second reducer (12); The motor (10) is connected to the second reducer (12) via a first reducer (11), and an output end of the second reducer (12) is connected to the rotating shaft (3); The motor (10) drives the second reducer (12) to operate via the first reducer (11), so that the output end of the second reducer (12) drives the rotating shaft (3) to rotate.

4. The flipping mechanism of the chip testing machine according to claim 2 or 3, characterized in that: The fixing structure comprises a circumferential fixing structure and an axial fixing structure; the circumferential fixing structure is used to keep the mounting portion (2) and the rotating shaft (3) circumferentially fixed, and the axial fixing structure is used to keep the mounting portion (2) and the rotating shaft (3) axially fixed.

5. The flipping mechanism of the chip testing machine as claimed in claim 4, characterized in that: The circumferential fixing structure comprises a key (9), and the mounting portion (2) and the rotating shaft (3) are connected via the key (9) so that the mounting portion (2) and the rotating shaft (3) are kept circumferentially fixed.

6. The flipping mechanism of the chip testing machine as claimed in claim 4, characterized in that: The axial fixing structure comprises a positioning groove (42) and a positioning protrusion (41); one of the positioning groove (42) and the positioning protrusion (41) is arranged on the rotating shaft (3), and the other is arranged on the mounting portion (2); the axial fixing structure maintains axial fixing between the mounting portion (2) and the rotating shaft (3) by plugging and fitting the positioning protrusion (41) with the positioning groove (42).

7. The flipping mechanism of the chip testing machine as claimed in claim 6, characterized in that: A first connecting member (4) is detachably fixed to the mounting portion (2); one of the positioning groove (42) and the positioning protrusion (41) is arranged on the first connecting member (4) so ​​as to be arranged on the mounting portion (2) through the first connecting member (4); wherein the mounting portion (2) is axially fixed to the rotating shaft (3) through the first connecting member (4).

8. The flipping mechanism of a chip testing machine according to any one of claims 1 to 3 and 5 to 7, characterized in that: A second connecting member (5) is detachably fixed to the mounting portion (2), and the mounting portion (2) is mounted on the chip testing machine via the second connecting member (5); The second connecting member (5) can be replaced with different types to facilitate installation on corresponding types of chip testing machines.

9. The flipping mechanism of the chip testing machine as claimed in claim 8, characterized in that: The position of the second connecting member (5) on the mounting portion (2) is adjustable.

10. The flipping mechanism of the chip testing machine according to claim 9, characterized in that: The second connecting member (5) is L-shaped, and the two side plates of the L-shape are respectively a first side plate (51) and a second side plate (52); the second connecting member (5) is detachably connected to the mounting portion (2) via the first side plate (51), and the chip tester is mounted via the second side plate (52); The first side plate (51) and the mounting portion (2) are detachably connected via a first screw (61); one of the first side plate (51) and the mounting portion (2) is provided with a strip groove (62), and the other is provided with a first threaded hole; the first screw (61) is used to pass through the strip groove (62) and be threadedly connected in the first threaded hole; when the first screw (61) is loosened, the second connecting member (5) can move along the extension direction of the strip groove (62), so that the position of the second connecting member (5) can be adjusted; The mounting portion (2) is also provided with a fixing block (7), the fixing block (7) being provided with a second threaded hole (82), the second screw (81) passing through the second threaded hole (82), and the end of the second screw (81) abutting against the second connecting member (5), and the center line direction of the second screw (81) being parallel to the extension direction of the strip groove (62).

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