Self-adaptive leveling device with upper floating plate

Abstract

The utility model discloses a self-adaptive leveling device with an upper floating plate, which comprises the upper floating plate and a lower fixing plate, an impressing surface of the upper floating plate is used for adsorbing a template or a wafer, an impressing surface of the lower fixing plate is used for bearing the wafer, and a plurality of pressure sensors are arranged below the lower fixing plate; the two ends of the upper floating plate are in transmission connection with the two lifting driving devices correspondingly. The driving end of each lifting driving device is provided with a driving end plate, and the two driving end plates are connected with the two opposite sides of the upper floating plate through a plurality of floating assemblies correspondingly. The floating assembly comprises a bolt, a first spring arranged on the rod portion of the bolt in a sleeving mode and a second spring arranged on the rod portion of the bolt in a sleeving mode, the rod portion of the bolt is used for connecting the driving end plate and the upper floating plate, the first spring is arranged between the driving end plate and the upper floating plate, and the second spring is arranged between the head of the bolt and the upper surface of the upper floating plate; and the upper floating plate floats under the action of the first spring and the second spring. The self-adaptive leveling device can effectively realize self-adaptive leveling.

Description

Technical Field

[0001] The utility model specifically relates to an adaptive leveling device with an upper floating plate. Background Art

[0002] With the continuous development and progress of micro-nano processing technology, nanoimprint lithography technology has broken through the problems in the process of reducing feature size in traditional lithography. It has the characteristics of high resolution, low cost, and high yield, and is widely used in various fields involving micro-nano processing such as semiconductor manufacturing, MEMS, and biochips.

[0003] Nanoimprint lithography technology mainly transfers the micro-nano structure on the template to the substrate to be processed through nanoimprint resist. Since the micro-nano structure is extremely small, very small deviations will affect the imprinting effect, so there are high requirements for the parallelism between the template and the wafer. Summary of the Utility Model

[0004] In order to solve the above technical problems, the utility model proposes an adaptive leveling device with an upper floating plate.

[0005] In order to achieve the above object, the technical solution of the utility model is as follows:

[0006] The utility model discloses an adaptive leveling device with an upper floating plate, including: an upper floating plate and a lower fixed plate. The imprinting surface of the upper floating plate is used to adsorb the template or the wafer, the imprinting surface of the lower fixed plate is used to carry the wafer, and several pressure sensors are arranged under the lower fixed plate;

[0007] Both ends of the upper floating plate are respectively connected to two lifting driving devices in a transmission manner;

[0008] A driving end plate is installed at the driving end of each lifting driving device, and the two driving end plates are respectively connected to two opposite sides of the upper floating plate through several floating components;

[0009] The floating component includes: a bolt, a first spring sleeved on the rod part of the bolt, and a second spring sleeved on the rod part of the bolt. The rod part of the bolt is used to connect the driving end plate and the upper floating plate. The first spring is placed between the driving end plate and the upper floating plate, and the second spring is placed between the head of the bolt and the upper surface of the upper floating plate;

[0010] The upper floating plate floats under the action of the first spring and the second spring.

[0011] On the basis of the above technical solution, the following improvements can be made:

[0012] As a preferred solution, the driving end of the lifting driving device is fixedly connected to the center of the driving end plate through a locking member.

[0013] As a preferred solution, each driving end plate is connected to the upper floating plate through two floating components.

[0014] As a preferred solution, the two floating components on one driving end plate are respectively arranged at the edge positions of the two opposite ends of the driving end plate.

[0015] As a preferred solution, the two driving end plates are respectively connected to the two opposite sides of the upper floating plate through a plurality of guiding members, and the guiding members are used to guide the floating direction of the upper floating plate.

[0016] As a preferred solution, the number of guiding members is the same as the number of floating components, and one guiding member corresponds to one floating component.

[0017] As a preferred solution, each guiding member is arranged at a position close to the corresponding floating component.

[0018] As a preferred solution, each guiding member is arranged at an inner position close to the corresponding floating component.

[0019] As a preferred solution, a UV curing component is installed on the top of the upper floating plate, and the UV curing component is used to cure the imprinting glue.

[0020] As a preferred solution, an adsorption component is arranged on the upper floating plate, and the adsorption component is used to adsorb the template or the wafer.

[0021] The utility model discloses an adaptive leveling device with an upper floating plate, which is applied to the field of nanoimprinting technology. When the lower fixing plate is attached to the upper floating plate, the upper floating plate adaptively eliminates the angular deviation by using the deformation characteristics of the spring, and its structure is simple, and the adaptive leveling can be effectively realized. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the drawings required to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present utility model, and therefore should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained according to these drawings without creative efforts.

[0023] Figure 1 It is a schematic structural diagram of the adaptive leveling device provided by the embodiment of the present utility model.

[0024] Figure 2 It is a front view of the adaptive leveling device provided by the embodiment of the present utility model.

[0025] Figure 3 It is a side view of the adaptive leveling device provided by the embodiment of the present utility model.

[0026] Among them: 1-upper floating plate, 2-lower fixed plate, 3-lifting drive device, 4-driving end plate, 5-guide, 6-floating assembly, 60-bolt, 61-first spring, 62-second spring, 7-locking member, 8-UV curing assembly. DETAILED DESCRIPTION

[0027] The preferred embodiments of the present utility model are described in detail below with reference to the accompanying drawings.

[0028] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0029] Meanwhile, expressions such as “first” and “second” are only used to distinguish multiple configurations, rather than to limit the order between configurations or other features.

[0030] In addition, the expression of “comprising” an element is an “open” expression, which simply means that a corresponding component exists, and should not be interpreted as excluding additional components.

[0031] In order to achieve the purpose of the utility model, in some embodiments of the adaptive leveling device with an upper floating plate, the adaptive leveling device comprises: an upper floating plate 1 and a lower fixed plate 2, the stamping surface of the upper floating plate 1 is used to adsorb the template or wafer, the stamping surface of the lower fixed plate 2 is used to carry the wafer, and a plurality of pressure sensors are provided under the lower fixed plate 2;

[0032] The two ends of the upper floating plate 1 are respectively connected to two lifting drive devices 3 (such as electric cylinders);

[0033] A driving end plate 4 is installed at the driving end of each lifting driving device 3, and the two driving end plates 4 are respectively connected to the two opposite sides of the upper floating plate 1 through a plurality of floating components 6;

[0034] The guide member 5 is used to adjust the distance between the driving end plate 4 and the upper floating plate 1;

[0035] The floating assembly 6 includes: a bolt 60, a first spring 61 sleeved on the rod of the bolt 60, and a second spring 62 sleeved on the rod of the bolt 60. The rod of the bolt 60 is used to connect the driving end plate 4 and the upper floating plate 1. The first spring 61 (such as a rectangular spring) is placed between the driving end plate 4 and the upper floating plate 1, and the second spring 62 is placed between the head of the bolt 60 and the upper surface of the upper floating plate 1.

[0036] The upper floating plate 1 floats under the action of the first spring 61 and the second spring 62.

[0037] The utility model uses two lifting drive devices 3 to drive two drive end plates 4 to drive the two sides of the upper floating plate 1 to lift, and its overall transmission is more stable.

[0038] The utility model realizes the adaptive floating of the upper floating plate 1 by using the first spring 61 and the second spring 62. Specifically, the working process of the utility model is as follows:

[0039] Step S1: A wafer coated with imprinting glue is carried on the lower fixing plate 2;

[0040] Step S2: The lifting drive device 3 drives the upper floating plate 1 to descend through the drive end plate 4. When the template or wafer on the upper floating plate 1 touches the wafer on the lower fixing plate 2, the upper floating plate 1 floats under the action of the first spring 61 and the second spring 62;

[0041] Step S3: Based on the feedback pressure value of the pressure sensor, adjust the bolts 60 at the non-uniform positions of the pressure sensor, and adjust the deformation amount of the corresponding second spring 62 so that the difference between each pressure sensor is within ±0.5.

[0042] In order to further optimize the implementation effect of the utility model, in some other embodiments, the other characteristic technologies are the same, and the difference is that the drive end of the lifting drive device 3 is fixedly connected to the center of the drive end plate 4 through a locking member 7 (such as: a nut).

[0043] Furthermore, each drive end plate 4 is connected to the upper floating plate 1 through two floating components 6.

[0044] Furthermore, the two floating components 6 on one drive end plate 4 are respectively arranged at the edge positions of the two opposite ends of the drive end plate 4.

[0045] Furthermore, the two drive end plates 4 are respectively connected to the two opposite sides of the upper floating plate 1 through a plurality of guiding members 5 (such as: equal-height screws), and the guiding members 5 are used to guide the floating direction of the upper floating plate.

[0046] Furthermore, the number of the guiding members 5 is the same as the number of the floating components, and one guiding member 5 corresponds to one floating component 6.

[0047] Furthermore, each guiding member 5 is arranged at a position close to the corresponding floating component 6.

[0048] Furthermore, each guiding member 5 is arranged at an inner position close to the corresponding floating component 6. The above inner position is referenced to the floating component 6. The direction extending towards the edge of the drive end plate 4 is the outer side, and the direction extending towards the center of the drive end plate 4 is the inner side.

[0049] In order to further optimize the implementation effect of the present utility model, in some other embodiments, the remaining characteristic technologies are the same, except that a UV curing component 8 (only a part of the UV curing component is shown in the figure) is installed on the top of the upper floating plate 1, and the UV curing component 8 is used to cure the imprinting glue.

[0050] The UV curing component 8 may include, but is not limited to, a UV lamp fixing bracket, a UV lamp, etc.

[0051] In order to further optimize the implementation effect of the present utility model, in some other embodiments, the remaining characteristic technologies are the same, except that an adsorption component (not shown in the figure) is provided on the upper floating plate 1, and the adsorption component is used to adsorb the template or the wafer.

[0052] The present utility model discloses an adaptive leveling device with an upper floating plate, which is applied to the field of nanoimprinting technology. When the lower fixing plate 2 is attached to the upper floating plate 1, the upper floating plate 1 adaptively eliminates the angular deviation by using the deformation characteristics of the spring, and its structure is simple, and the adaptive leveling can be effectively realized.

[0053] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "coaxial", "bottom", "one end", "top", "middle", "the other end", "upper", "one side", "top", "inner", "front", "center", "both ends", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0054] In the present utility model, unless otherwise clearly defined and limited, the terms "installed", "set", "connected", "fixed", "swiveling connection", etc. should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the internal communication of two elements or the interaction relationship between two elements. Unless otherwise clearly defined, for those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0055] The foregoing has shown and described the basic principles, main features and advantages of the present utility model. Those skilled in the art should understand that the present utility model is not limited by the above-mentioned embodiments. The above-mentioned embodiments and the descriptions in the specification only illustrate the principles of the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model will have various changes and improvements, and these changes and improvements all fall within the scope of the present utility model claimed. The scope of protection claimed by the present utility model is defined by the appended claims and their equivalents.

Claims

1. An adaptive leveling device with an upper floating plate, characterized in that: include: An upper floating plate and a lower fixed plate, wherein the imprinting surface of the upper floating plate is used to absorb the template or the wafer, and the imprinting surface of the lower fixed plate is used to carry the wafer, and a plurality of pressure sensors are arranged under the lower fixed plate; The two ends of the upper floating plate are respectively connected to the two lifting drive devices in a transmission manner; A driving end plate is installed at the driving end of each lifting drive device, and the two driving end plates are respectively connected to two opposite sides of the upper floating plate through a plurality of floating components; The floating assembly includes: a bolt, a first spring sleeved on the rod of the bolt, and a second spring sleeved on the rod of the bolt, the rod of the bolt is used to connect the driving end plate and the upper floating plate, the first spring is placed between the driving end plate and the upper floating plate, and the second spring is placed between the head of the bolt and the upper surface of the upper floating plate; The upper floating plate floats under the action of the first spring and the second spring.

2. The adaptive leveling device according to claim 1, characterized in that: The driving end of the lifting drive device is fixedly connected to the center of the driving end plate through a locking piece.

3. The adaptive leveling device according to claim 2, characterized in that: Each of the driving end plates is connected to the upper floating plate via two floating assemblies.

4. The adaptive leveling device according to claim 3, characterized in that: Two floating assemblies on a driving end plate are respectively arranged at edge positions of two opposite ends of the driving end plate.

5. The adaptive leveling device according to claim 1, characterized in that: The two driving end plates are respectively connected to two opposite sides of the upper floating plate through a plurality of guide members, and the guide members are used to guide the floating direction of the upper floating plate.

6. The adaptive leveling device according to claim 5, characterized in that: The number of the guide members is the same as the number of the floating assemblies, and one guide member corresponds to one floating assembly.

7. The adaptive leveling device according to claim 6, characterized in that: Each of the guide members is arranged at a position close to a corresponding floating assembly.

8. The adaptive leveling device according to claim 7, characterized in that: Each of the guide members is arranged at an inner side position close to the corresponding floating assembly.

9. The adaptive leveling device according to any one of claims 1 to 8, characterized in that: A UV curing component is installed on the top of the upper floating plate, and the UV curing component is used to cure the embossing glue.

10. The adaptive leveling device according to any one of claims 1 to 8, characterized in that: An adsorption component is arranged on the upper floating plate, and the adsorption component is used for adsorbing a template or a wafer.

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