Purification equipment getter assembling device

By adopting a modular and regular assembly process and uniform heating design in the catalytic tower of high-purity gas purification equipment, multiple problems in the bulk assembly process are solved, and the use cycle of getters is extended, the purity of high-purity gas and the improvement of equipment output are achieved.

CN223027086UActive Publication Date: 2025-06-27ANHUI MAGANG GAS TECH CO LTD
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Patent Information

Application Number
CN202422151056.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-03
Publication Date
2025-06-27
Estimated Expiration
2034-09-03

AI Technical Summary

Technical Problem

The non-evaporative metal or non-metal getter stack assembly process in the catalytic tower of the existing high-purity gas purification equipment has problems such as different flow velocity distribution of the purified gas, uneven temperature field distribution of getter filler, short service life of getter, low gas flow rate, and cumbersome assembly process, long working hours and large loss.

Method used

The modular and regular assembly process of getter filler is adopted to design a multi-layer filler adsorber module in the catalytic tower, and uniformly heated through an electric heating pipe, canceling the leak port and charging port of the catalytic tower. The top cover directly loading and unloading the filler module to ensure that a certain distance is maintained between each layer of filler adsorber module, and the filler fastening plate and the airflow distribution plate are designed for uniform airflow distribution and tight packing.

Benefits of technology

The actual use cycle of getter is extended, the purity of high-purity gas is improved, the purified gas processing volume of a single catalytic tower is increased, the operating cost is reduced, the assembly process is simplified, and the equipment design output is improved.

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Abstract

The utility model relates to a purifying equipment getter assembling device which comprises a catalytic tower, a filler adsorber module filled in the catalytic tower and an electric heating tube, and the catalytic tower is a cylindrical metal wall closed container. Each packing adsorber module is composed of a cylindrical barrel, getter packing, a packing fastening plate, an airflow distribution plate, a grating net, a sealing ring and a clamping ring which are sequentially assembled in the catalytic tower in a layered mode from bottom to top, a certain distance is kept between every two layers of packing adsorber modules, and the electric heating pipes vertically penetrate through the packing adsorber modules and are evenly distributed in the catalytic tower. The device disclosed by the utility model is simple and practical, can effectively solve the problems of airflow impact and non-uniform heating of random getter packing of a catalytic tower of high-purity gas purification equipment, and effectively reduces the operation cost of the high-purity gas purification equipment.
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Description

Technical Field

[0001] The utility model belongs to the field of high-purity gas production, and particularly relates to a getter assembly device for a high-purity gas purification device. Background Art

[0002] The adsorption method is used for purifying high-purity gas produced by the normal temperature method or the high temperature method. The adsorption method is divided into two categories: physical adsorption and chemical adsorption. Physical adsorption is caused by the dispersion effect and electrostatic effect between molecules and is suitable for occurring at normal temperature. Physical adsorption is a reversible process. Chemical adsorption is caused by the chemical bond force and is suitable for occurring at high temperature. Chemical adsorption is an irreversible process.

[0003] For producing high-purity gas by the normal temperature method or the high temperature method, the adsorption process is divided into two steps, that is, at normal temperature, a molecular sieve adsorbent is used to remove some impurity gas components; at high temperature, a non-evaporable metal or non-metal getter is used to remove the remaining impurity gas components to produce high-purity gas.

[0004] The non-evaporable metal or non-metal getter must be activated at high temperature to enable the getter to have adsorption and removal activity; therefore, when the high-purity gas purification device operates, the non-evaporable metal or non-metal getter must be heated to increase the adsorption temperature of the non-evaporable metal or non-metal getter, so as to increase its removal efficiency and shorten the service life of the getter. Since the adsorption of the non-evaporable metal or non-metal getter is an irreversible process, the getter cannot be recycled and must be replaced regularly.

[0005] The high-purity gas purification device is a special device for removing impurity gas components from the raw material gas. The purification device is composed of an adsorption tower and a catalytic tower (also called a purification tower). The adsorption tower is filled with a molecular sieve adsorbent, and the catalytic tower is filled with a non-evaporable metal or non-metal getter. At present, for the assembly process of the non-evaporable metal or non-metal getter in the catalytic tower in the prior art, all design and manufacturing units of high-purity gas purification devices adopt a bulk packing assembly method, that is, all the non-evaporable metal or non-metal getter fillers are directly loaded into the catalytic tower. The raw material gas enters from the bottom of the catalytic tower and rises layer by layer in the non-evaporable metal or non-metal getter fillers to gradually remove the impurity gas in the raw material gas. The high-purity gas is extracted from the non-evaporable metal or non-metal getter fillers at the top of the catalytic tower. See the appendix Figure 1 .

[0006] The bulk packing assembly process of the non-evaporable metal or non-metal getter fillers in the catalytic tower has a great influence on the height of the getter fillers, the flow rate distribution of the purified gas, the temperature field distribution of the getter fillers, the service life of the getter, and the gas flow rate processed by the catalytic tower. Therefore, the following problems in the bulk packing assembly process of the non-evaporable metal or non-metal getter in the catalytic tower of the prior art high-purity gas purification device need to be improved.

[0007] Problem 1: The flow rate distribution of the purified gas in the catalytic tower is uneven. In the process of randomly packing the getter fillers, the packing density of the getter fillers is different, and the flow rate distribution of the purified gas in the non-evaporable metal or non-metal getter fillers is uneven, reducing the effective adsorption time of the purified gas and resulting in a low removal rate of impurity gases in the raw material gas.

[0008] Problem 2: The temperature field distribution of the getter fillers in the catalytic tower is uneven. In the process of randomly packing the getter fillers, the thickness of the getter fillers is different, and the electric heating tubes cannot heat evenly. There is a large temperature difference in the non-evaporable metal or non-metal getter fillers, reducing the overall removal activity of the getter fillers.

[0009] Problem 3: The service life of the getter in the catalytic tower is short. Due to the impact of the gas flow, the powdering rate of the getter fillers at the bottom of the catalytic tower is high. At the same time, due to the impact of the gas flow, the removal load of the getter fillers at the bottom of the catalytic tower is the largest, and the attenuation rate of the removal activity of the getter fillers at the bottom of the catalytic tower is the largest, resulting in a short service life of the getter fillers at the bottom of the catalytic tower. Due to the random packing method of the getter fillers, all the getter fillers in the catalytic tower need to be replaced.

[0010] Problem 4: The gas flow rate processed by the catalytic tower is low. Due to the random packing process of the getter fillers, the flow rate distribution of the purified gas in the getter fillers is different, and the phenomenon of purified gas deviation is serious, restricting the gas flow rate processed by a single catalytic tower and resulting in a low designed output of a single catalytic tower of the high-purity gas purification equipment.

[0011] Problem 5: The assembly process of the getter fillers is cumbersome, time-consuming, and has a large loss. Due to the random packing process of the getter fillers, the equipment design and manufacturing unit sets several discharge ports and loading ports at the bottom and top of the catalytic tower, and uses discharge and loading tools to discharge and load the getter fillers in the catalytic tower, resulting in a cumbersome assembly process, long working hours, and large losses of the getter fillers.

[0012] For example, for the domestic-designed and manufactured high-purity nitrogen purification equipment of the CN2-50 model, carbon-supported getter is loaded in the purification tower to remove oxygen, methane, hydrogen, hydrocarbons, and nitrogen oxides in the raw material nitrogen. The carbon-supported getter in the purification tower is randomly packed. When the cumulative operation time of the high-purity nitrogen purification equipment reaches 4000 hours, the parameter values of the impurity gas components in the high-purity nitrogen do not meet the national standard indication values, and all the carbon-supported getter fillers have to be replaced. The discharge and loading time of the carbon-supported getter fillers is more than 7 hours.

[0013] The replaced carbon-supported getter fillers are sent back to the factory for testing. The physical parameter values of the carbon-supported getter at the lower part of the purification tower are unqualified, while those at the upper part are qualified. At the same time, after being sieved, weighed, and calculated by the manufacturer, the powdering rate of the carbon-supported getter fillers is more than 7%.

[0014] The schematic diagram of the random packing process of the getter in the catalytic tower of the existing high-purity gas purification equipment is shown in the appendixFigure 1 。 SUMMARY OF THE INVENTION

[0015] (1) Technical problems to be solved

[0016] In view of the defects existing in the prior art, in order to minimize the time difference between the actual service life and the theoretical service life of the getter in the catalytic tower of the high-purity gas purification equipment, reduce the operation cost of the high-purity gas purification equipment, improve the getter removal efficiency, and increase the purified gas treatment capacity of a single catalytic tower, the purpose of the present invention is to provide an assembly device for the getter of the purification equipment, so as to extend the actual operation period of the getter in the catalytic tower of the high-purity gas purification equipment, ensure that the purity of the high-purity gas meets the national standard, and improve the designed output of the high-purity gas purification equipment.

[0017] (2) Technical solutions

[0018] To achieve the above objectives, the present invention is realized through the following technical solutions:

[0019] An assembly device for the getter of a purification equipment according to the present invention, the device includes a catalytic tower, a packing adsorber module filled inside the catalytic tower, and an electric heating tube. The catalytic tower is a closed container with a cylindrical metal wall, and there are arc-shaped top covers and bottom covers at the upper and lower ends respectively. Two lifting lugs are symmetrically installed on the arc-shaped top cover respectively. The top cover is fixedly connected to the cylindrical metal wall of the catalytic tower by fixing bolts. A fixed clamping ring is arranged on the outer side of the packing adsorber module and is fixedly connected to the positioning component arranged on the inner wall of the metal of the catalytic tower, and they are assembled layer by layer from bottom to top in sequence. A certain distance is maintained between each layer of packing adsorber modules. The electric heating tube vertically penetrates the packing adsorber module and is evenly distributed inside the catalytic tower.

[0020] The assembly device for the getter of a purification equipment according to the present invention adopts a modular and regular assembly process for the getter packing. First, non-evaporable metal or non-metal getter packings are respectively arranged and stacked in multiple adsorbers of the same model to form a packing adsorber module, and all the discharge ports and charging ports provided in the catalytic tower of the prior art are cancelled, and only the top cover of the catalytic tower is retained. When loading or unloading the getter packing, the top cover of the catalytic tower is opened, and a lifting device is used to directly load or unload the packing adsorber module into or out of the catalytic tower layer by layer. The raw gas enters from the first packing adsorber module at the bottom of the catalytic tower, rises layer by layer in multiple packing adsorber modules, and the impurity gas in the raw gas is removed. The product high-purity gas is extracted from the packing adsorber module at the top of the catalytic tower.

[0021] Design the height of the packing adsorber module according to the inner wall height of the catalytic tower. All the models of multiple packing adsorber modules in the catalytic tower are the same, so that the thickness of the getter packing in each packing adsorber module is the same. Calculate the required quantity of the getter packing in the catalytic tower of the high-purity gas purification equipment, and calculate the number of packing adsorber modules required to be installed in the catalytic tower, so that the designed quantity of the getter packing is the same as the total quantity of the packing in the actually assembled packing adsorber modules.

[0022] A further technical solution of the present utility model is that the packing adsorber module is composed of a cylindrical barrel, a getter packing, a packing fastening plate, an air flow distribution plate, a grille, a sealing ring, and a snap ring. The packing fastening plate is installed at the top of the cylindrical barrel, the air flow distribution plate is installed at the bottom of the cylindrical barrel, and the grille is laid on the upper layer of the air flow distribution plate. The packing fastening plate, the air flow distribution plate, and the grille are circular plate-like objects, and their diameters are the same as the inner cross-sectional diameter of the cylindrical barrel of the packing adsorber module. The sealing ring is encapsulated on the outer periphery of the packing fastening plate and the air flow distribution plate, and the snap ring is symmetrically welded on the outer surface of the cylindrical barrel of the packing adsorber module.

[0023] Design a packing fastening plate at the top of each packing adsorber module. The geometric shape of this packing fastening plate is the same as the geometric shape of the top of the packing adsorber module. The packing fastening plate is embedded in the top of each packing adsorber module to fasten the packing and avoid the generation of cavities inside the regular getter packing, so that the packing density of the regular getter packing is the same; lay a grille with the same geometric shape as the upper part of the air flow distribution plate of each packing adsorber module to prevent the getter packing from leaking.

[0024] A further technical solution of the present utility model is that a number of circular small holes with the same diameter are evenly distributed on the air flow distribution plate, and the number of small holes is determined according to the designed air flow rate; a number of small holes with the same diameter are evenly distributed on the packing fastening plate, and the shape of the small holes is circular or other shapes, and the number of small holes is determined according to the minimum value of the air flow resistance. Design the air flow distribution plate as a porous type, and set a number of small holes in the distribution plate according to the air flow distribution calculation; according to the requirements of the air flow design calculation, the shape of the small holes is designed as concentric circles, and the gas flow rate through each small hole in the distributor is all equal, so that the flow rate distribution of the purified gas in the getter packing is uniform, and the designed output of a single catalytic tower is improved; at the same time, the powdering of the getter packing is effectively avoided.

[0025] At the same time, three or more groups of concentric and equally spaced electric heating tube openings are arranged in each packing adsorber module, so that the electric heating tubes penetrate through each packing adsorber module assembled in layers and are evenly distributed at equal intervals.

[0026] When assembling the packing adsorber module in the catalytic tower, the air flow distribution plate at the bottom of the upper packing adsorber module is not connected to the packing fastening plate at the top of the lower packing adsorber module, and a certain distance is maintained. The distance value is calculated and set according to the height of the catalytic tower and the packing adsorber module. Several fixing snap rings are provided for each packing adsorber module and fixed to the inner wall of the catalytic tower. From bottom to top, multiple packing adsorber modules in the catalytic tower are assembled in series.

[0027] The getter assembling device of a purification equipment of the present utility model prolongs the actual operation cycle of the getter in the catalytic tower of the high-purity gas purification equipment, ensures that the purity of the high-purity gas reaches the national standard, increases the designed output of the high-purity gas purification equipment, and reduces the air flow impact through the assembling method of the packing adsorber module, increases the contact area between the purified gas and the surface and internal voids of the getter packing, and improves the getter removal efficiency.

[0028] The structure of the present utility model is simple and practical, solves the problems of air flow impact and uneven heating of the bulk getter packing in the catalytic tower of the high-purity gas purification equipment, and effectively reduces the operation cost of the high-purity gas purification equipment. Brief Description of the Drawings

[0029] Figure 1 Schematic diagram of the bulk assembling of the getter in the catalytic tower of a prior art high-purity gas purification equipment;

[0030] Figure 2 Schematic diagram of the getter assembling device of a purification equipment in an embodiment of the present utility model;

[0031] Figure 3 Schematic diagram of the structure of the packing adsorber module of the getter assembling device of a purification equipment in an embodiment of the present utility model;

[0032] Figure 4 Schematic diagram of the structure of the air flow distribution plate of the packing adsorber module of the getter assembling device of a purification equipment in an embodiment of the present utility model;

[0033] Explanation of the reference symbols in the drawings: 1, catalytic tower; 2, packing adsorber module; 3, top cover; 4, bottom cover; 6, bulk getter packing; 17, discharge port; 18, loading port; 21, packing fastening plate; 22, air flow distribution plate; 23, grid; 25, fixing snap ring; 31, lifting lug; 32, fastening bolt; 222, electric heating tube passage opening; 223, air flow hole; 225, sealing ring. Detailed Description of the Embodiments

[0034] The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments.

[0035] Taking the assembly process of the carbon-supported getter filler in the catalytic tower 1 of the high-purity nitrogen purification equipment as an example, according to the working mechanism and structural characteristics of the catalytic tower 1 of the high-purity nitrogen purification equipment, a modular regular assembly method for the carbon-supported getter filler is designed.

[0036] The design principle of this embodiment is as follows: Design a regular carbon-supported filler adsorber module 2. Calculate the total amount of filler required according to the capacity of the carbon-supported getter filler in the original catalytic tower 1 of the high-purity nitrogen purification equipment. Arrange and stack the carbon-supported getter filler in multiple carbon-supported filler adsorber modules 2 of the same specification, and then sequentially install the required multiple regular carbon-supported filler adsorber modules 2 into the catalytic tower 1.

[0037] The raw material nitrogen enters from the first carbon-supported filler adsorber module 2 at the bottom of the catalytic tower 1, rises gradually through multiple layers of carbon-supported filler adsorber modules 2, and removes impurities such as oxygen, methane, hydrogen, hydrocarbons, and nitrogen oxides in the raw material nitrogen. The purified product high-purity nitrogen is extracted and output from the carbon-supported filler adsorber module 2 at the top of the catalytic tower 1.

[0038] Refer to Figure 1 、 2 、3 and 4, the specific implementation method of this embodiment is as follows:

[0039] First, simplify the equipment structure of the existing catalytic tower 1 of the high-purity nitrogen purification equipment, cancel the discharge port 17 and loading port 18 originally set in the catalytic tower 1, transform the top cover 3 of the catalytic tower 1 from a fixed and non-removable type to a movable and openable type, and at the same time retain the original lifting lugs 31 on the top cover 3, and evenly install 6 fastening bolts 32 around the top cover 3.

[0040] The inner wall of the catalytic tower 1 of this embodiment is cylindrical, with an inner diameter of 42 CM. Fixed devices are evenly distributed on the inner wall. Accordingly, design the carbon-supported filler adsorber module 2 as cylindrical, and design the diameter of the carbon-supported filler adsorber module 2 to be 4 CM smaller than the inner diameter of the catalytic tower 1, that is, the diameter of the filler adsorber module 2 is 38 CM.

[0041] By calculating the weight of a single carbon-supported filler adsorber module 2, weld 4 fixed clamping rings 25 that meet the load requirements on the outer wall of each carbon-supported filler adsorber module 2, and fix the carbon-supported filler adsorber module 2 on the fixed devices on the inner wall of the catalytic tower 1 in layers.

[0042] According to the height of the inner cylinder of the catalytic tower 1 of the embodiment of the high-purity nitrogen purification equipment, design the total height of a single carbon-supported filler adsorber module 2 to be 30 CM, and then combine the total demand of the getter filler in the purification process of the embodiment to calculate that 4 filler adsorber modules 2 need to be installed in the catalytic tower 1.

[0043] A single carbon-loaded filler adsorber module 2 consists of a module cylinder, an air flow distribution plate 22, a sealing ring 225, a filler fastening plate 21, a grille 23, a fixing snap ring 25, and the cylinder is filled with carbon-loaded getter. The height of the cylinder is 29.6 CM and the circumference is 119.32 CM, which undertakes the functions of sealing, supporting and bearing force; the diameter of the air flow distribution plate 22 is 38 CM, which is embedded in the bottom of the cylinder of each carbon-loaded filler adsorber module 2. At the same time, a grille 23 with a diameter of 38 CM and 120 meshes is laid on the upper part of the air flow distribution plate 22 to prevent the leakage of the carbon-loaded getter filler. The air flow distribution plate 22 and the grille 23 are connected by rivets, which is easy to replace. The air flow distribution plate 22 is evenly provided with 36 equally spaced circular small holes to make the purified nitrogen flow passing through evenly distributed. The diameter of the filler fastening plate 21 is 38 CM, which is embedded in the top of the cylinder of each carbon-loaded filler adsorber module 2 to press the filler so that the packing density of the getter filler in the module is the same. The filler fastening plate 21 is evenly provided with 18 concentric circular small holes to make the gas resistance of each small hole in the filler fastening plate 21 the same, all less than 0.1 KPa.

[0044] Assemble the carbon-loaded filler adsorber module 2 in the catalytic tower 1, and load 4 carbon-loaded filler adsorber modules 2 layer by layer from bottom to top in sequence, and the spacing value between each layer is set to 1 CM.

[0045] Circular sealing rings 225 are arranged on the outer edges of the air flow distribution plate 22 and the filler fastening plate 21 of a single carbon-loaded filler adsorber module 2; the outer diameters of the sealing rings 225 of the air flow distribution plate 22 and the filler fastening plate 21 are the same as the inner diameter of the inner wall of the catalytic tower 1, both being 42 CM.

[0046] The air flow distribution plate 22, the grille 23 and the filler fastening plate 21 of a single carbon-loaded filler adsorber module 2 are all provided with 3 concentric and equally spaced electric heating tube openings 222. Three electric heating tubes are used to heat the filler in the carbon-loaded filler adsorber module 2 in the catalytic tower 1. The inner diameter of the electric heating tube opening 222 is 1 MM larger than the outer diameter of the electric heating tube, and is set to 2.1 CM.

[0047] The materials of the cylinder, the air flow distribution plate 22, the grille 23, the filler fastening plate 21, the sealing ring 225 and the fixing snap ring 25 of the carbon-loaded filler adsorber module 2 are all selected as metal materials suitable for high-temperature environments.

[0048] The assembly process of the carbon-loaded getter filler module 2 in the catalytic tower 1 of the high-purity nitrogen purification equipment in this embodiment is as follows:

[0049] First, open the filler fastening plates 21 of 4 carbon-loaded getter filler modules 2, load the bulk carbon-loaded getter filler into the 4 carbon-loaded getter filler modules 2, and then fasten the filler fastening plates 21.

[0050] When loading and unloading the carbon-supported getter packing module 2, loosen the 6 fastening bolts 32 of the top cover 3 of the catalytic tower 1, use a manual hoist, and through the 2 lifting lugs 31, open the top cover 3 of the catalytic tower 1, and directly load and unload the carbon-supported getter packing module 2 into and out of the catalytic tower 1.

[0051] After that, open the top cover 3 of the catalytic tower 1. First, load the first carbon-supported getter packing module 2 into the bottom of the catalytic tower 1, install the sealing ring 225 of the gas distribution plate 22, fix the fixing snap ring 25 of the carbon-supported getter packing module 2 to the inner wall of the catalytic tower 1, then install the sealing ring 225 of the packing fastening plate 21, and then sequentially assemble the remaining 3 carbon-supported getter packing modules 2.

[0052] Finally, vertically insert 3 electric heating tubes into the 3 electric heating tube openings 222 of the 4 carbon-supported getter packing modules 2 installed in layers, hoist the top cover 3 of the catalytic tower 1, and install 6 fastening bolts 32 to fix the top cover 3.

[0053] In this embodiment, the cumulative operating design time of the high-purity nitrogen purification equipment is greater than 8000 hours. The parameter values of the impurity gas components in the product high-purity nitrogen are all better than the national standard indication values. The time for packing, discharging, and assembling the carbon-supported getter module is less than 2 hours, and the product output is 25% higher than the design output of the purification equipment with the same volume catalytic tower.

[0054] In summary, for the process and device of this embodiment, on the basis of implementing the technical solution of the present invention, the connection method of the device can be arbitrarily replaced; the low-temperature gas referred to in the present invention can be low-temperature oxygen or any other working medium applicable to the technical solution of the present invention. All the above situations are within the protection scope of this patent. According to the geometric shape of the inner wall of the catalytic tower, the geometric shape of the packing adsorber module is designed.

Claims

1. A purification equipment getter assembly device, the device comprising a catalytic tower, a getter filled in the catalytic tower and an electric heating tube, the catalytic tower is a cylindrical metal wall sealed container, with an arc-shaped top cover and a bottom cover at the upper and lower ends, two lifting ears are symmetrically installed on the arc-shaped top cover, the top cover is fixedly connected to the cylindrical metal wall of the catalytic tower by fastening bolts, characterized in that: The getter loaded inside the catalytic tower is loaded in a packed adsorber module. A fixing clamp is provided on the outer side of the packed adsorber module and fixedly connected to a positioning component provided on the inner side of the metal wall of the catalytic tower. The modules are assembled in layers from bottom to top in sequence. A certain distance is maintained between each layer of packed adsorber modules. The electric heating tube vertically penetrates the packed adsorber module and is evenly distributed inside the catalytic tower.

2. A purification equipment getter assembly device according to claim 1, characterized in that: The packed adsorber module is composed of a cylindrical body, an adsorbent packing, a packing fastening plate, an air flow distribution plate, a grid mesh, a sealing ring, and a retaining ring. The packing fastening plate is installed on the top of the cylindrical body, the air flow distribution plate is installed on the bottom of the cylindrical body, and the grid mesh is laid on the upper layer of the air flow distribution plate. The packing fastening plate, the air flow distribution plate and the grid mesh are circular plates, and their diameters are the same as the inner cross-sectional diameter of the cylindrical body of the packed adsorber module. The sealing ring is encapsulated on the outer periphery of the packing fastening plate and the air flow distribution plate, and the retaining ring is symmetrically welded on the outer surface of the cylindrical body of the packed adsorber module.

3. A purification equipment getter assembly device according to claim 2, characterized in that: The airflow distribution plate is evenly distributed with a plurality of circular holes having the same diameter, and the number of the holes is determined according to the design flow rate of the airflow.

4. A purification equipment getter assembly device according to claim 2, characterized in that: A plurality of small holes with the same diameter are evenly distributed on the packing fastening plate, the small holes are circular in shape, and the number of the small holes is determined according to the minimum value of the airflow resistance.

5. A purification equipment getter assembly device according to claim 2, characterized in that: Three or more groups of concentric electric heating pipe passage openings with equal spacing are arranged on the packing fastening plate, airflow distribution plate and grid net of the packing adsorber module, so that the electric heating pipes pass through each packing adsorber module assembled in layers and are evenly distributed with equal spacing.