Automatic spin-coating film preparation machine

Abstract

The utility model provides an automatic spin-coating film preparation machine, which comprises a substrate table, a reagent bottle table, a gun head table, a reagent bottle positioning device, a spin coater, a glue baking machine, a liquid adding carrier, a slide rail assembly and a controller, the substrate table, the reagent bottle table and the gun head table are respectively used for placing one or more substrates, reagent bottles and pipette heads, the reagent bottle positioning device, the spin coater, the glue baking machine, the liquid adding carrier and the sliding rail assembly are electrically connected with the controller, and the liquid adding carrier is connected with the sliding rail assembly. The liquid adding carrier is used for carrying the substrate to the spin coater, carrying the reagent bottle to the reagent bottle positioning device, opening a bottle cap, assembling the pipette tip, sucking a reagent in the reagent bottle and dropwise adding the reagent to the substrate, and the spin coater is used for spin-coating the substrate after the reagent is dropwise added. The liquid adding carrier is further used for carrying the substrate subjected to spin coating to the glue baking machine, and the glue baking machine is used for heating the substrate subjected to spin coating so that the reagent can be cured to form a thin film.

Description

Technical Field

[0001] This application belongs to the technical field of thin film preparation machines. Specifically, it relates to an automatic spin coating thin film preparation machine. Background Art

[0002] Quantum dot inks, photoresist liquids, etc. are used to prepare quantum dot optical thin films / membranes. Usually, methods such as spin coating, thermal evaporation, printing, electrodeposition, and chemical deposition are adopted. Among them, the spin coating method has been widely favored due to its advantages of non-vacuum preparation, simple equipment, and low energy consumption. The equipment for the spin coating method mainly requires a spin coater and a baking machine (heating equipment). The steps for preparing quantum dot optical thin films are as follows: place the substrate on the spin coater, open the reagent bottle containing quantum dot ink or photoresist liquid, use a pipette to aspirate a certain amount of reagent, then drop the reagent onto the substrate, cover the lid of the spin coater, set parameters such as the rotation rate, and the spin coater starts to work. Place the spin-coated substrate on the baking machine for heating, set parameters such as the heating time and temperature, and the reagent solidifies to form a thin film. Repeat this process for the next substrate. In the laboratory, the spin coating method is usually manually operated. In the above steps, except for the operation of the spin coater and the baking machine, other operations require manual labor. Manual operation is time-consuming and laborious, wasting the time cost of scientific researchers; and there are some factors that are difficult to control and detect. For example, the amount of liquid dropped each time and the position of the liquid drop are prone to deviation, which will affect the uniformity and thickness of the thin film.

[0003] Therefore, some semi-automatic / full-automatic spin coating devices have also been designed in the prior art to replace manual operation. For example, in patent CN115805167A, a robotic arm is used to transport the substrate, transport, open, and tighten the bottle cap, and drive the dispensing device to dispense glue. All these refined actions are completed by the robotic arm. Then the design of the robotic arm will be very complex and the price will be very expensive, which violates the low-cost advantage of the spin coating method and cannot be industrially applied.

[0004] In view of this, this application provides an automatic spin coating thin film preparation machine, which fully automates the thin film preparation and has a low equipment cost. Utility Model Content

[0005] The purpose of this application is to provide an automatic spin coating thin film preparation machine, which fully automates the thin film preparation and has a low equipment cost.

[0006] The present application provides an automatic spin-coating film preparation machine, comprising: a substrate stage 1, a reagent bottle stage 2, a pipette tip stage 3, a reagent bottle positioning device 4, a spin coater 5, a baking machine 6, a liquid adding transporter 7, a slide rail assembly 8 and a controller 9. The substrate stage 1, the reagent bottle stage 2 and the pipette tip stage 3 are respectively used for placing one or more substrates, reagent bottles and pipette tips. The reagent bottle positioning device 4, the spin coater 5, the baking machine 6, the liquid adding transporter 7 and the slide rail assembly 8 are respectively electrically connected to the controller 9. The liquid adding transporter 7 is connected to the slide rail assembly 8. The liquid adding transporter 7 is used for transporting the substrate to the spin coater 5, transporting the reagent bottle to the reagent bottle positioning device 4 and opening the bottle cap, assembling the pipette tip and sucking the reagent in the reagent bottle and dropping it onto the substrate. The spin coater 5 is used for spin-coating the substrate after the reagent is dropped. The liquid adding transporter 7 is further used for transporting the spin-coated substrate to the baking machine 6. The baking machine 6 is used for heating the spin-coated substrate to cure the reagent to form a film.

[0007] In some embodiments, the substrate stage 1 includes a plurality of grooves 11 for placing substrates and facilitating the liquid adding transporter 7 to clamp the substrates. The substrate is preferably a glass slide.

[0008] In some embodiments, the reagent bottle stage 2 is one or more snap-in boxes, and the reagent bottle stage 2 includes a plurality of storage grooves 21 for placing the reagent bottles.

[0009] In some embodiments, the pipette tip stage 3 includes one or more pipette tip placement plates 31, and a plurality of through holes 32 are provided on the pipette tip placement plates 31 for placing the pipette tips of corresponding sizes.

[0010] Furthermore, the pipette tip has one or more specification sizes. When the pipette tip has a plurality of specification sizes, the through holes 32 have corresponding area divisions.

[0011] In some embodiments, the reagent bottle positioning device 4 is used for fixing the reagent tube. The reagent bottle positioning device 4 includes a first clamping block 41 and a second clamping block 42. The first clamping block 41 and the second clamping block 42 can move relative to each other to increase or decrease the distance therebetween, so as to be able to fix the reagent bottle.

[0012] Furthermore, the first clamping block 41 includes a first clamping portion 411, and the second clamping block 42 includes a second clamping portion 421. When fixing the reagent bottle, the first clamping portion 411 and the second clamping portion 421 contact the reagent bottle.

[0013] Furthermore, the surfaces (upper surfaces) of the first clamping portion 411 and the second clamping portion 421 in contact with the reagent bottle are inner arc-shaped or inner V-shaped.

[0014] Preferably, the first clamping part 411 and the second clamping part 421 are made of plastic material.

[0015] Furthermore, the reagent bottle positioning device 4 further includes a liquid level sensor 43. The liquid level sensor 43 is used to sense the liquid level of the reagent in the reagent bottle fixed on the reagent bottle positioning device 4 and send the liquid level parameter to the controller 9. The controller 9 is used to control the depth to which the nozzle assembled on the liquid adding transporter 7 probes into the reagent bottle.

[0016] In some embodiments, the spin coater 5 rotates to make the reagent on the substrate evenly distributed on the substrate.

[0017] In some embodiments, the baking oven 6 can accommodate multiple substrates at the same time and heat multiple substrates simultaneously.

[0018] In some embodiments, the liquid adding transporter 7 includes a support frame 71 connected to the slide rail assembly 8. The support frame 71 can move horizontally along the slide rail assembly 8. The liquid adding transporter 7 further includes a substrate gripper 72, a bottle cap gripper 73 and a liquid suction device 74 fixed to the support frame 71. The support frame 71 drives the substrate gripper 72, the bottle cap gripper 73 and the liquid suction device 74 to move horizontally. At the same time, the substrate gripper 72, the bottle cap gripper 73 and the liquid suction device 74 can also move up and down relative to the support frame 71.

[0019] Furthermore, the support frame 71 includes a slider 711. The support frame 71 is connected to the track of the slide rail assembly 8 through the slider 711. The slider 711 can be engaged with the track of the slide rail assembly 8 and move horizontally relative to it.

[0020] Furthermore, the substrate gripper 72 includes two relatively arranged substrate gripper parts 721. The two substrate gripper parts 721 can move relative to each other to increase or decrease the distance between them, so as to be able to grip the substrate.

[0021] Furthermore, the substrate gripper 72 further includes a card slot part 722 and a stop block 723 arranged inside the substrate gripper part 721. The card slot part 722 is used to hold the substrate, and the stop block 723 serves to limit the position of the substrate.

[0022] Furthermore, the bottle cap gripper 73 includes a bottle cap gripper 731. The bottle cap gripper 731 is composed of two relatively arranged parts. The two parts can move relative to each other to increase or decrease the distance between them, so as to be able to grip the bottle cap of the reagent bottle. The bottle cap gripper 731 can also rotate to open or tighten the bottle cap of the reagent bottle.

[0023] Further, the surface (upper surface) of the bottle cap jaw 731 in contact with the reagent bottle cap is an inner arc. This inner arc better matches the shape of the reagent bottle cap, can better clamp the reagent bottle, and enables the reagent bottle to be evenly stressed and not easily broken.

[0024] Further, the liquid suction device 74 includes a pipette 741. The liquid suction device 74 can be assembled with the pipette 741 and adjust the amount of liquid sucked by the pipette 741.

[0025] In some embodiments, the slide rail assembly 8 includes an X-axis slide rail assembly 81 and a Y-axis slide rail assembly 82. The Y-axis slide rail assembly 82 can move horizontally relative to the X-axis slide rail assembly 81.

[0026] Further, the slide rail assembly 8 has two X-axis slide rail assemblies 81 and one Y-axis slide rail assembly 82. The two X-axis slide rail assemblies 81 are respectively arranged in parallel at the upper end and the lower end (length direction) of the automatic spin coating film preparation machine. The substrate table 1, the reagent bottle table 2, the nozzle table 3, the reagent bottle positioning device 4, the spin coater 5, and the baking machine 6 are all arranged between the two X-axis slide rail assemblies 81; the Y-axis slide rail assembly 82 is arranged on the left side or the right side of the automatic spin coating film preparation machine. The Y-axis slide rail assembly 82 is connected to the X-axis rails 811 of the two X-axis slide rail assemblies 81 respectively through two track sliders 821. Description of the Drawings

[0027] When read in conjunction with the following attached Figure 1 drawings, the above and other features of the present application will be more fully described. It can be understood that these drawings only depict several embodiments of the present application, and therefore should not be considered as limiting the scope of the present application. By using the drawings, the present application will be more clearly and detailedly described.

[0028] Figure 1 is a perspective view of the automatic spin coating film preparation machine of the present application.

[0029] Figure 2 is a perspective view of the automatic spin coating film preparation machine of the present application after removing the controller.

[0030] Figure 3 is a top view of the automatic spin coating film preparation machine of the present application after removing the controller.

[0031] Figure 4 is a perspective view of the substrate table of the automatic spin coating film preparation machine of the present application.

[0032] Figure 5 is a perspective view of the reagent bottle positioning device of the automatic spin coating film preparation machine of the present application.

[0033] Figure 6This is a perspective view of the liquid adding and handling device of the automatic spin coating film preparation machine of the present application.

[0034] Figure 7 For the present application Figure 6 Partial enlarged view of A in the figure.

[0035] Figure 8 For the present application Figure 6 Partial enlarged view of B in the figure.

[0036] Figure 9 This is another perspective view of the liquid adding and handling device of the automatic spin coating film preparation machine of the present application.

[0037] Figure 10 This is a perspective view of the X-axis slide rail assembly of the automatic spin coating film preparation machine of the present application.

[0038] Main component symbol description:

[0039] Substrate table 1, reagent bottle table 2, nozzle table 3, reagent bottle positioning device 4, spin coater 5, baking machine 6, liquid adding and handling device 7, slide rail assembly 8, controller 9, groove 11, storage groove 21, nozzle placement plate 31, through hole 32, first clamping block 41, second clamping block 42, liquid level sensor 43, first clamping part 411, second clamping part 421, support frame 71, substrate clamping jaw part 72, bottle cap clamping jaw part 73, liquid suction device 74, slider 711, substrate clamping jaw portion 721, card slot portion 722, stop block 723, bottle cap clamping jaw 731, pipette 741, X-axis slide rail assembly 81, Y-axis slide rail assembly 82, X-axis track 811, track slider 821. Detailed implementation manners

[0040] The following embodiments are described to assist in understanding the present application. The embodiments are not and should not be construed in any way as limiting the protection scope of the present application.

[0041] If not otherwise defined, all terms (including technical and scientific terms) in this specification can be defined as commonly understood by those skilled in the art to which the present disclosure belongs. It will be further understood that terms, such as those defined in a common dictionary, should be construed to have a meaning consistent with their meaning in the context of the present disclosure and the relevant art, and will not be construed in an idealized or overly formal sense unless clearly defined as such herein.

[0042] As used herein, the term "at least one", when preceding or following a list of elements, modifies the entire list of elements rather than individual elements of the list and will not be construed to limit "one". "Or" means "and / or". The terms "comprising" and "including", when used in this specification, indicate the presence of the stated features, regions, wholes, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, regions, wholes, steps, operations, elements, components, and / or their combinations. Thus, the above wording will be understood to mean including the stated elements but not precluding any other elements. The term "and / or" includes any and all combinations of one or more of the associated listed items. The term "plurality" refers to two or more. The term "connected" refers to direct connection or indirect connection. It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" another element, it can be directly on the other element or there can also be intervening elements. In contrast, when an element is referred to as being "directly on" another element, there are no intervening elements. To clearly illustrate the embodiments in the figures, some parts that are not actually relevant to the description may be omitted. The terms "first", "second", "third", etc. may be used herein to describe and distinguish various different elements, components, regions, layers, and / or parts, but these elements, components, regions, layers, and / or parts should not be limited by these terms.

[0043] This application provides an automatic spin-coating film preparation machine, comprising: a substrate table 1, a reagent bottle table 2, a pipette tip table 3, a reagent bottle positioning device 4, a spin coater 5, a baking machine 6, a liquid adding transporter 7, a slide rail assembly 8, and a controller 9. The substrate table 1, the reagent bottle table 2, and the pipette tip table 3 are respectively used for placing one or more substrates, reagent bottles, and pipette tips. The reagent bottle positioning device 4, the spin coater 5, the baking machine 6, the liquid adding transporter 7, and the slide rail assembly 8 are respectively electrically connected to the controller 9. The liquid adding transporter 7 is connected to the slide rail assembly 8. The liquid adding transporter 7 is used for transporting the substrate to the spin coater 5, transporting the reagent bottle to the reagent bottle positioning device 4 and opening the bottle cap, assembling the pipette tip and sucking the reagent in the reagent bottle and dropping it onto the substrate, the spin coater 5 is used for spin-coating the substrate after the reagent is dropped, the liquid adding transporter 7 is also used for transporting the spin-coated substrate to the baking machine 6, and the baking machine 6 is used for heating the spin-coated substrate to cure the reagent to form a film.

[0044] In some embodiments, the substrate table 1 includes a plurality of grooves 11 for placing the substrate and facilitating the liquid adding transporter 7 to clamp the substrate. The substrate is preferably a glass sheet.

[0045] In some embodiments, the reagent bottle platform 2 is one or more snap-in boxes. The reagent bottle platform 2 includes a plurality of storage slots 21, and the reagent bottles are placed in the storage slots 21.

[0046] In some embodiments, the pipette tip platform 3 includes one or more pipette tip placement plates 31. A plurality of through holes 32 are provided on the pipette tip placement plates 31, and the corresponding-sized pipette tips are placed in the through holes 32.

[0047] Furthermore, the pipette tips have one or more specification sizes. When the pipette tips have multiple specification sizes, the through holes 32 have corresponding area divisions.

[0048] In some embodiments, the reagent bottle positioning device 4 is used to fix the reagent tube. The reagent bottle positioning device 4 includes a first clamping block 41 and a second clamping block 42. The first clamping block 41 and the second clamping block 42 can move relative to each other to increase or decrease the distance therebetween, so as to be able to fix the reagent bottle.

[0049] Furthermore, the first clamping block 41 includes a first clamping portion 411, and the second clamping block 42 includes a second clamping portion 421. When fixing the reagent bottle, the first clamping portion 411 and the second clamping portion 421 contact the reagent bottle.

[0050] Furthermore, the surfaces (upper surfaces) of the first clamping portion 411 and the second clamping portion 421 in contact with the reagent bottle are inner arc-shaped or inner V-shaped. This inner arc-shaped or inner V-shaped structure is more matched with the shape of the reagent bottle, can better fix the reagent bottle, and enables the reagent bottle to be uniformly stressed and not easily broken.

[0051] Preferably, the first clamping portion 411 and the second clamping portion 421 are made of plastic material. It can play a role in preventing slipping. The plastic material has a certain rigidity and relatively low rigidity, and at the same time plays a role in preventing the reagent bottle from breaking.

[0052] Furthermore, the reagent bottle positioning device 4 further includes a liquid level sensor 43. The liquid level sensor 43 is used to sense the liquid level of the reagent in the reagent bottle fixed on the reagent bottle positioning device 4 and send the liquid level parameter to the controller 9. The controller 9 is used to control the depth to which the pipette tip assembled on the liquid adding and handling device 7 probes into the reagent bottle.

[0053] In some embodiments, the spin coater 5 includes: a rotating stage provided at the center of the spin coater 5, an air extraction through hole provided at the center of the rotating stage, an upper cover plate, a wall shell, a spin coating cavity between the upper cover plate and the wall shell, and a cylinder (not shown in the figure) connected to the air extraction through hole.

[0054] Further, there is a spacing between the rotating stage and the upper cover plate, that is, the height of the rotating stage is less than the height of the wall shell, which is used to prevent the reagent on the substrate from splashing out of the spin coater 5 when the rotating stage rotates.

[0055] Further, the bottom of the air extraction through hole is connected to the cylinder, which is used to adsorb the substrate through the air extraction airflow after the substrate is placed on the rotating stage, and prevent the substrate from falling off when the rotating stage rotates.

[0056] In some embodiments, the baking machine 6 can accommodate multiple substrates at the same time and heat multiple substrates simultaneously.

[0057] In some embodiments, the liquid adding transporter 7 includes a support frame 71 connected to the slide rail assembly 8, and the support frame 71 can move horizontally along the slide rail assembly 8; the liquid adding transporter 7 further includes a substrate gripper 72, a bottle cap gripper 73 and a liquid suction device 74 fixed to the support frame 71, and the support frame 71 drives the substrate gripper 72, the bottle cap gripper 73 and the liquid suction device 74 to move horizontally; at the same time, the substrate gripper 72, the bottle cap gripper 73 and the liquid suction device 74 can also move up and down relative to the support frame 71.

[0058] Further, the support frame 71 includes a slider 711, and the support frame 71 is connected to the track of the slide rail assembly 8 through the slider 711, and the slider 711 can be engaged with the track of the slide rail assembly 8 and move horizontally relative to it.

[0059] Further, the substrate gripper 72 includes two relatively arranged substrate gripper parts 721, and the two substrate gripper parts 721 can move relative to each other to increase or decrease the distance between them, so as to be able to grip the substrate.

[0060] Further, the substrate gripper 72 further includes a card slot part 722 and a stop block 723 arranged inside the substrate gripper part 721, the card slot part 722 is used to hold the substrate, and the stop block 723 plays a role in limiting the substrate.

[0061] Further, the bottle cap gripper 73 includes a bottle cap gripper 731, and the bottle cap gripper 731 is composed of two relatively arranged parts, and the two parts can move relative to each other to increase or decrease the distance between them, so as to be able to grip the bottle cap of the reagent bottle; the bottle cap gripper 731 can also rotate to open or tighten the bottle cap of the reagent bottle.

[0062] Further, the surface (upper surface) of the bottle cap gripper 731 in contact with the bottle cap of the reagent bottle is an inner arc. This inner arc is more matched with the shape of the bottle cap of the reagent bottle, can better grip the reagent bottle, and makes the reagent bottle not easy to break due to uniform force.

[0063] Further, the liquid suction device 74 includes a pipette 741. The liquid suction device 74 can be assembled with the pipette 741 and adjust the amount of liquid sucked by the pipette 741.

[0064] In some embodiments, the slide rail assembly 8 includes an X-axis slide rail assembly 81 and a Y-axis slide rail assembly 82. The Y-axis slide rail assembly 82 can move horizontally relative to the X-axis slide rail assembly 81.

[0065] Further, there are two X-axis slide rail assemblies 81 and one Y-axis slide rail assembly 82. The two X-axis slide rail assemblies 81 are respectively arranged in parallel at the upper end and the lower end (length direction) of the automatic spin coating film preparation machine. The substrate stage 1, the reagent bottle stage 2, the pipette tip stage 3, the reagent bottle positioning device 4, the spin coater 5 and the baking machine 6 are all arranged between the two X-axis slide rail assemblies 81. The Y-axis slide rail assembly 82 is arranged on the left side or the right side of the automatic spin coating film preparation machine. The Y-axis slide rail assembly 82 is connected to the X-axis rails 811 of the two X-axis slide rail assemblies 81 through two track sliders 821 respectively.

[0066] The present invention will be further described in detail below with reference to specific embodiments and comparative examples, but the present invention is not limited to the following embodiments. The implementation conditions adopted in the embodiments can be further adjusted according to different requirements of specific use, and the conditions not specified are conventional conditions in the industry.

[0067] An automatic spin coating film preparation machine includes: a substrate stage 1, a reagent bottle stage 2, a pipette tip stage 3, a reagent bottle positioning device 4, a spin coater 5, a baking machine 6, a liquid adding transporter 7, a slide rail assembly 8 and a controller 9. The substrate stage 1, the reagent bottle stage 2 and the pipette tip stage 3 are respectively used to place one or more substrates, reagent bottles and pipette tips. The reagent bottle positioning device 4, the spin coater 5, the baking machine 6, the liquid adding transporter 7 and the slide rail assembly 8 are respectively electrically connected to the controller 9. The liquid adding transporter 7 is connected to the slide rail assembly 8. The liquid adding transporter 7 is used to transport the substrate to the spin coater 5, transport the reagent bottle to the reagent bottle positioning device 4 and open the bottle cap, assemble the pipette tip and suck the reagent in the reagent bottle and drop it onto the substrate. The spin coater 5 is used to spin coat the substrate after the reagent is dropped. The liquid adding transporter 7 is also used to transport the spin-coated substrate to the baking machine 6. The baking machine 6 is used to heat the spin-coated substrate to cure the reagent to form a film.

[0068] As Figures 1 - 3As shown in the figure, on the two edges in the length direction of the automatic spin-coating film preparation machine, two X-axis slide rail assemblies 81 are respectively arranged, and on the right side, a Y-axis slide rail assembly 82 is arranged. Between the two X-axis slide rail assemblies 81 and the Y-axis slide rail assembly 82, a substrate table 1, a reagent bottle table 2, a pipette tip table 3, a reagent bottle positioning device 4, a spin coater 5 and a baking machine 6 are arranged. The spin coater 5 and the baking machine 6 are arranged side by side in a row, and the substrate table 1, the reagent bottle table 2, the pipette tip table 3 and the reagent bottle positioning device 4 are arranged side by side in another row, while the controller 9 is arranged on the right side of the Y-axis slide rail assembly 82. The two ends of the Y-axis slide rail assembly 82 are respectively connected to the two X-axis slide rail assemblies 81, and the Y-axis slide rail assembly 82 can move horizontally relative to the two X-axis slide rail assemblies 81 (i.e., move in the X-axis direction). The liquid addition transporter 7 is connected to the Y-axis slide rail assembly 82, and the liquid addition transporter 7 can move along the Y-axis slide rail assembly 82 (i.e., move in the Y-axis direction). The liquid addition transporter 7 can also move up and down by itself (i.e., move in the Z-axis direction), so as to realize that the liquid addition transporter 7 can move in the XYZ-axis directions. The reagent bottle positioning device 4, the spin coater 5, the baking machine 6, the liquid addition transporter 7 and the slide rail assembly 8 are respectively electrically connected to the controller 9. Wires are housed in the parts similar to tracks beside the tracks of the X-axis slide rail assembly 81 and the Y-axis slide rail assembly 82.

[0069] The substrate table 1, the reagent bottle table 2 and the pipette tip table 3 are respectively used for placing one or more substrates, reagent bottles and pipette tips. When starting to spin-coat and prepare the film, the controller 9 first controls the liquid addition transporter 7 to transport the substrate to the spin coater 5, then controls the liquid addition transporter 7 to transport the reagent bottle to the reagent bottle positioning device 4 and open the bottle cap, then controls the liquid addition transporter 7 to assemble the pipette tip, move to the position of the reagent bottle positioning device 4 to suck the reagent in the reagent bottle, move to the substrate position of the spin coater 5 and drop the sucked reagent onto the substrate, then controls the liquid addition transporter 7 to screw on the bottle cap of the reagent bottle and return the reagent bottle to the reagent bottle table 2, then controls the spin coater 5 to work to spin-coat the substrate after the reagent is dropped, and then controls the liquid addition transporter 7 to transport the spin-coated substrate to the baking machine 6, and controls the baking machine 6 to heat the spin-coated substrate to cure the reagent to form a film.

[0070] As Figure 3 and Figure 4As shown, the substrate stage 1 includes a plurality of grooves 11 for placing a substrate and facilitating the clamping of the substrate by the liquid addition transporter 7. The substrate is preferably a glass sheet. The reagent bottle stage 2 is one or more snap-in boxes, and the reagent bottle stage 2 includes a plurality of storage slots 21 for placing the reagent bottles. The pipette tip stage 3 includes one or more pipette tip placement plates 31, and a plurality of through holes 32 are provided on the pipette tip placement plates 31 for placing the pipette tips of corresponding sizes. The pipette tips have one or more specification sizes, and when the pipette tips have multiple specification sizes, the through holes 32 have corresponding area divisions.

[0071] As Figure 5 As shown, the reagent bottle positioning device 4 is used to fix the reagent tube. The reagent bottle positioning device 4 includes a first clamping block 41 and a second clamping block 42. The first clamping block 41 and the second clamping block 42 can move relative to each other to increase or decrease the distance therebetween, so as to fix the reagent bottle. The first clamping block 41 includes a first clamping portion 411, and the second clamping block 42 includes a second clamping portion 421. When fixing the reagent bottle, the first clamping portion 411 and the second clamping portion 421 contact the reagent bottle. The surfaces (upper surfaces) of the first clamping portion 411 and the second clamping portion 421 in contact with the reagent bottle are inner V-shaped. This inner V-shaped structure matches the shape of the reagent bottle better, can fix the reagent bottle better, and enables the reagent bottle to be uniformly stressed and not easily broken. The first clamping portion 411 and the second clamping portion 421 are made of plastic material, which can play a role in preventing slipping. The plastic material has a certain rigidity and a relatively low hardness, and can also play a role in preventing the reagent bottle from breaking. The reagent bottle positioning device 4 further includes a liquid level sensor 43 for sensing the liquid level of the reagent in the reagent bottle fixed on the reagent bottle positioning device 4 and sending the liquid level parameter to the controller 9, and the controller 9 is used to control the depth to which the pipette tip assembled on the liquid addition transporter 7 extends into the reagent bottle.

[0072] As Figures 6 - 10As shown, the liquid adding transporter 7 includes a support frame 71 connected to the slide rail assembly 8. The support frame 71 can move horizontally along the Y-axis slide rail assembly 82. The support frame 71 includes a slider 711. The support frame 71 is connected to the track of the Y-axis slide rail assembly 82 through the slider 711. The slider 711 can be engaged with the track of the Y-axis slide rail assembly 82 and move horizontally relative to it. The Y-axis slide rail assembly 82 can move along the X-axis slide rail assembly 81. The Y-axis slide rail assembly 82 is respectively connected to the X-axis tracks 811 of the two X-axis slide rail assemblies 81 through two track sliders 821, so as to realize that the liquid adding transporter 7 can move in the X-axis direction and the Y-axis direction (length direction and width direction). The liquid adding transporter 7 further includes a substrate gripper 72, a bottle cap gripper 73 and a liquid suction device 74 fixed to the support frame 71. The support frame 71 drives the substrate gripper 72, the bottle cap gripper 73 and the liquid suction device 74 to move along the Y-axis slide rail assembly 82. At the same time, the substrate gripper 72, the bottle cap gripper 73 and the liquid suction device 74 can also move up and down relative to the support frame 71, so as to realize that the substrate gripper 72, the bottle cap gripper 73 and the liquid suction device 74 can move in the XYZ-axis directions, facilitating the handling / operation of substrates, reagent bottles and pipette tips.

[0073] The substrate gripper 72 includes two relatively arranged substrate gripper parts 721. When it is necessary to transport the substrate to the spin coater, the two substrate gripper parts 721 can move relative to each other to increase or decrease the distance between them, so as to be able to grip the substrate. The substrate gripper 72 further includes a card slot part 722 and a stop block 723 arranged inside the substrate gripper part 721. The card slot part 722 is used to hold the substrate, and the stop block 723 serves to limit the position of the substrate. After the substrate is placed on the spin coater, it is necessary to suck the liquid reagent and drop it on the substrate. The bottle cap gripper 73 includes a bottle cap gripper 731, which is composed of two relatively arranged parts. These two parts can move relative to each other to increase or decrease the distance between them, so as to be able to grip the bottle cap of the reagent bottle; the bottle cap gripper 731 can also rotate to open or tighten the bottle cap of the reagent bottle. The surface (upper surface) of the bottle cap gripper 731 in contact with the bottle cap of the reagent bottle is an inner arc. This inner arc is more matched with the shape of the bottle cap of the reagent bottle, can better grip the reagent bottle, and makes the reagent bottle not easily break due to uniform force. After the bottle cap gripper 731 grips the reagent bottle, the reagent bottle is transferred and placed on the reagent bottle positioning device 4. The first clamping block 41 and the second clamping block 42 of the reagent bottle positioning device 4 fix the reagent bottle, and the bottle cap gripper 731 opens the bottle cap by rotating and keeps gripping the bottle cap. Then, the pipette gun 741 of the liquid suction device 74 sucks the liquid in the reagent bottle and transfers it to the position of the substrate to drop the reagent. The bottle cap gripper 731 rotates again to tighten the bottle cap and places the reagent bottle back to its original position in the reagent bottle stage 2. Then, the spin coater is used to perform spin coating on the substrate with the dropped reagent. The spin coater 5 includes: a rotating stage arranged at the center of the spin coater 5, an air extraction through hole arranged at the center of the rotating stage, an upper cover plate, a wall shell, a cavity between the upper cover plate and the wall shell, and a cylinder (not shown in the figure) connected to the air extraction through hole. There is a distance between the rotating stage and the upper cover plate, that is, the height of the rotating stage is less than the height of the wall shell, which is used to prevent the reagent on the substrate from splashing out of the spin coater 5 when the rotating stage rotates. The bottom of the air extraction through hole is connected to the cylinder, which is used to adsorb the substrate by the air extraction airflow after the substrate is placed on the rotating stage to prevent the substrate from falling off when the rotating stage rotates. The spin-coated substrate is transported to the baking machine 6 by the substrate gripper 72. The baking machine 6 can accommodate multiple substrates at the same time and heat multiple substrates at the same time. The heating makes the reagent solidify to form a film, such as an optical film such as a quantum dot color film.

[0074] Although the present application has disclosed multiple aspects and embodiments, other aspects and embodiments will be obvious to those skilled in the art. Without departing from the concept of the present application, several deformations and improvements can still be made, and these all belong to the protection scope of the present application. The multiple aspects and embodiments disclosed in the present application are only used for illustration, and they are not intended to limit the present application. The actual protection scope of the present application is subject to the claims.

Claims

1. An automatic spin coating thin film preparation machine, characterized in that, include: A substrate table (1), a reagent bottle table (2), a gun head table (3), a reagent bottle positioning device (4), a spin coater (5), a glue baking machine (6), a liquid adding conveyor (7), a slide rail assembly (8) and a controller (9), wherein the substrate table (1), the reagent bottle table (2) and the gun head table (3) are respectively used to place one or more substrates, reagent bottles and liquid transfer gun heads, and the reagent bottle positioning device (4), the spin coater (5), the glue baking machine (6), the liquid adding conveyor (7) and the slide rail assembly (8) are respectively electrically connected to the controller (9), and the liquid adding conveyor (7) is electrically connected to the controller (9). The liquid transporter (7) is connected to the slide rail assembly (8), and the liquid transporter (7) is used to transport the substrate to the spin coater (5), transport the reagent bottle to the reagent bottle positioning device (4) and open the bottle cap, assemble the pipette tip and absorb the reagent in the reagent bottle and drip it onto the substrate, the spin coater (5) is used to spin coat the substrate after the reagent is dripped, and the liquid transporter (7) is also used to transport the substrate after spin coating to the glue baking machine (6), and the glue baking machine (6) is used to heat the substrate after spin coating to solidify the reagent to form a film.

2. The automatic spin coating thin film preparation machine according to claim 1, characterized in that: Includes one or more features selected from the following group: a. The substrate stage (1) comprises a plurality of grooves (11), wherein the grooves (11) are used to place the substrate and facilitate the liquid carrier (7) to clamp the substrate; b. The reagent bottle platform (2) is one or more buckle slot boxes, and the reagent bottle platform (2) includes a plurality of storage slots (21), and the storage slots (21) are used to place the reagent bottles; c. The gun tip station (3) includes one or more gun tip placement plates (31), and the gun tip placement plates (31) are provided with a plurality of through holes (32), and the through holes (32) are used to place the pipette tips of corresponding sizes.

3. The automatic spin coating thin film preparation machine according to claim 1, characterized in that: The reagent bottle positioning device (4) is used to fix the reagent tube. The reagent bottle positioning device (4) comprises a first clamping block (41) and a second clamping block (42). The first clamping block (41) and the second clamping block (42) can move relative to each other to increase or decrease the distance between them, so as to fix the reagent bottle.

4. The automatic spin coating thin film preparation machine according to claim 3, characterized in that: The first clamping block (41) includes a first clamping portion (411), and the second clamping block (42) includes a second clamping portion (421). When fixing the reagent bottle, the first clamping portion (411) and the second clamping portion (421) contact the reagent bottle; the surfaces of the first clamping portion (411) and the second clamping portion (421) contacting the reagent bottle are inner arc-shaped or inner V-shaped.

5. The automatic spin coating thin film preparation machine according to claim 3, characterized in that: The reagent bottle positioning device (4) further comprises a liquid level sensor (43), the liquid level sensor (43) being used to sense the reagent liquid level in the reagent bottle fixed on the reagent bottle positioning device (4) and to send the liquid level parameter to the controller (9), and the controller (9) being used to control the depth of the gun head assembled on the liquid adding conveyor (7) probing into the reagent bottle.

6. The automatic spin coating thin film preparation machine according to claim 1, characterized in that: The liquid adding transporter (7) comprises a support frame (71) connected to the slide rail assembly (8), and the support frame (71) can move horizontally along the slide rail assembly (8); the liquid adding transporter (7) also comprises a substrate clamping jaw member (72), a bottle cap clamping jaw member (73) and a liquid suction device (74) fixed to the support frame (71), and the support frame (71) drives the substrate clamping jaw member (72), the bottle cap clamping jaw member (73) and the liquid suction device (74) to move horizontally; at the same time, the substrate clamping jaw member (72), the bottle cap clamping jaw member (73) and the liquid suction device (74) can also move up and down relative to the support frame (71).

7. The automatic spin coating thin film preparation machine according to claim 6, characterized in that: The substrate clamping jaw member (72) comprises two substrate clamping jaw portions (721) arranged opposite to each other, and the two substrate clamping jaw portions (721) can move relative to each other so as to increase or decrease the distance between them, thereby being able to clamp the substrate; the substrate clamping jaw member (72) also comprises a slot portion (722) and a stopper (723) arranged on the inner side of the substrate clamping jaw portion (721), the slot portion (722) being used to clamp the substrate, and the stopper (723) serving to limit the position of the substrate.

8. The automatic spin coating thin film preparation machine according to claim 6, characterized in that: The bottle cap clamping jaw (73) comprises a bottle cap clamping jaw (731), which is composed of two parts arranged opposite to each other. The two parts can move relative to each other to increase or decrease the distance between them, so as to clamp the bottle cap of the reagent bottle; the bottle cap clamping jaw (731) can also rotate to open or tighten the bottle cap of the reagent bottle.

9. The automatic spin coating thin film preparation machine according to claim 6, characterized in that: The liquid aspirating device (74) comprises a pipette (741), and the liquid aspirating device (74) can be equipped with the pipette (741) and adjust the amount of liquid aspirated by the pipette (741).

10. The automatic spin coating thin film preparation machine according to claim 1, characterized in that: The slide rail assembly (8) comprises an X-axis slide rail assembly (81) and a Y-axis slide rail assembly (82), wherein the Y-axis slide rail assembly (82) can move horizontally relative to the X-axis slide rail assembly (81); the slide rail assembly (8) comprises two X-axis slide rail assemblies (81) and one Y-axis slide rail assembly (82), wherein the two X-axis slide rail assemblies (81) are respectively arranged in parallel at the upper end and the lower end of the automatic spin coating thin film preparation machine, and the substrate table (1), the reagent bottle table (2), the gun head table (3), the reagent bottle positioning device (4), the spin coater (5) and the glue baking machine (6) are all arranged between the two X-axis slide rail assemblies (81); the Y-axis slide rail assembly (82) is arranged on the left side or the right side of the automatic spin coating thin film preparation machine, and the Y-axis slide rail assembly (82) is respectively connected to the X-axis tracks (811) of the two X-axis slide rail assemblies (81) through two track sliders (821).

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