Vacuum cavity with adjustable product width

Abstract

The utility model discloses a vacuum cavity with an adjustable product width, relates to the technical field of semiconductor chip welding, and aims to solve the problems that most of current welding furnaces have no vacuum areas, gas generated by welding cannot overflow from molten tin liquid, bubbles are generated, the product quality is influenced, the welding furnace with the vacuum areas can only be used for manufacturing products with fixed sizes, and the welding efficiency is low. The device comprises a box body part, a heating part, a conveying width adjusting part and a sealing part, the box body part comprises an upper vacuum box body and a lower vacuum box body, and a first sealing ring used for achieving the sealing effect after the upper vacuum box body and the lower vacuum box body are combined is installed on the upper portion of the lower vacuum box body; a water channel is arranged in the lower vacuum box body, a cold water pipeline used for introducing cooling liquid to prevent the first sealing ring from aging and hardening due to too high temperature is fixedly arranged in the water channel, and a vacuum pump connecting port is formed in the lower portion of the upper vacuum box body. The utility model has the advantages.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor chip welding, and more specifically, to a vacuum cavity with adjustable product width. Background Art

[0002] With the development of semiconductor technology, electronic technology is developing towards high power, high density and integration, and higher and more comprehensive reliability requirements are put forward for the packaging and welding of high-power devices. Most of the current welding furnaces do not have a vacuum area, and the gas generated during welding cannot overflow from the molten tin, resulting in bubbles that affect the product quality. And the welding furnaces with a vacuum area can only process products of a fixed size, with low versatility.

[0003] In view of this, we propose a vacuum cavity with adjustable product width. Summary of the Utility Model

[0004] The purpose of the utility model is to overcome the deficiencies of the prior art, meet the actual needs, and provide a vacuum cavity with adjustable product width to solve the technical problems that most of the current welding furnaces do not have a vacuum area, the gas generated during welding cannot overflow from the molten tin, resulting in bubbles that affect the product quality, and the welding furnaces with a vacuum area can only process products of a fixed size, with low versatility.

[0005] To solve the above technical problems, the utility model provides the following technical solutions: A vacuum cavity with adjustable product width, including a box body part, a heating part, a conveying and width-adjusting part, and a sealing part;

[0006] The box body part includes an upper vacuum box body and a lower vacuum box body. A first sealing ring for sealing effect after the upper vacuum box body and the lower vacuum box body are combined is installed on the upper part of the lower vacuum box body. A water channel is arranged inside the lower vacuum box body, and a cold water pipe for introducing coolant to prevent the first sealing ring from aging and hardening due to excessive temperature is fixedly arranged in the water channel. A vacuum pump connection port is arranged at the lower part of the upper vacuum box body.

[0007] The utility model forms a vacuum area inside the upper vacuum box body and the lower vacuum box body by connecting an external vacuum pumping device to the vacuum pump connection port for vacuum pumping treatment, so as to solve the problem of welding cavities in traditional models. The moving side conveying is driven to move and adjust by the rotation of the high-temperature lead screw, so as to form a width-adjusting structure inside the welding furnace, so as to realize the processing of products of multiple sizes, and the versatility is greatly improved.

[0008] Preferably, the heating part includes an infrared heating tube and a ceramic plate. The infrared heating tube is installed inside the lower vacuum box body, and a ceramic plate is laid under the infrared heating tube.

[0009] Preferably, the conveying width adjustment part includes a fixed-side conveyor, a movable-side conveyor, and a connecting width adjustment part. The fixed-side conveyor is fixedly installed inside the lower vacuum chamber, and the movable-side conveyor is movably arranged inside the lower vacuum chamber through the connecting width adjustment part.

[0010] Preferably, the connecting width adjustment part includes a high-temperature lead screw, a smooth shaft, a first high-temperature bearing, and a bearing seat. The bearing seat is installed inside the lower vacuum chamber. The first high-temperature bearing is arranged inside the bearing seat and is installed on the high-temperature lead screw. The nut of the high-temperature lead screw is installed on the movable-side conveyor, and the high-temperature lead screw rotates to realize the movement of the movable-side conveyor.

[0011] Preferably, the sealing part includes a vacuum sealing flange, a second sealing ring, a second high-temperature bearing, a skeleton oil seal, a star-shaped sealing ring, a fluororubber gasket, and an oil supply part. The second sealing ring is installed at the joint between one side of the vacuum sealing flange and the lower vacuum chamber. The second high-temperature bearing, the skeleton oil seal, the star-shaped sealing ring, the fluororubber gasket, and the oil supply part are installed inside the vacuum sealing flange. The second high-temperature bearing plays a role in assisting the rotation of the high-temperature lead screw.

[0012] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0013] By providing an upper vacuum chamber, a lower vacuum chamber, and a vacuum pump connection port, the present utility model uses an external vacuum pumping device to connect to the vacuum pump connection port to pump the inside of the upper vacuum chamber and the lower vacuum chamber to form a vacuum area inside the welding furnace, so as to solve the problem of welding voids in traditional models. By rotating the high-temperature lead screw to drive the movable-side conveyor to move and adjust, a width adjustment structure is formed inside the welding furnace to realize the processing of products of multiple sizes, and the versatility is greatly improved. Description of the Drawings

[0014] Figure 1 It is a split schematic diagram of the upper vacuum chamber and the lower vacuum chamber of the present utility model;

[0015] Figure 2 It is a structural schematic diagram of the lower vacuum chamber of the present utility model;

[0016] Figure 3 It is a top view of the lower vacuum chamber of the present utility model;

[0017] Figure 4 It is a structural schematic diagram of the sealing part of the present utility model;

[0018] Figure 5 It is a cross-sectional view of the sealing structure of the present utility model.

[0019] Explanation of the reference numerals in the drawings:

[0020] 1. Upper vacuum chamber; 2. Lower vacuum chamber; 3. Vacuum pump connection port; 4. Cold water pipe; 5. Moving side conveyor; 6. Ceramic plate; 7. Infrared heating tube; 8. Fixed side conveyor; 9. Vacuum sealing flange; 10. Sealing ring I; 11. Optical axis; 12. High-temperature lead screw; 13. Bearing seat; 14. High-temperature bearing I; 15. High-temperature bearing II; 16. Skeleton oil seal; 17. Fluoroelastomer gasket; 18. Star-shaped sealing ring; 19. Oil supply part; 20. Sealing ring II. Detailed implementation manner

[0021] As Figures 1-5 shown, a vacuum chamber with adjustable product width involved in the present utility model includes a chamber part, a heating part, a conveying and width-adjusting part, and a sealing part. The chamber part includes an upper vacuum chamber 1 and a lower vacuum chamber 2. A sealing ring I 10 for achieving a sealing effect after the upper vacuum chamber 1 and the lower vacuum chamber 2 are combined is installed on the upper part of the lower vacuum chamber 2. A water channel is provided inside the lower vacuum chamber 2, and a cold water pipe 4 for introducing coolant to prevent the sealing ring I 10 from aging and hardening due to excessive temperature is fixedly arranged in the water channel. A vacuum pump connection port 3 is provided at the lower part of the upper vacuum chamber 1.

[0022] In an embodiment of the present utility model, the heating part includes an infrared heating tube 7 and a ceramic plate 6. The infrared heating tube 7 is installed inside the lower vacuum chamber 2, and the ceramic plate 6 is laid at the lower part of the infrared heating tube 7.

[0023] In an embodiment of the present utility model, the conveying and width-adjusting part includes a fixed side conveyor 8, a moving side conveyor 5, and a connection width-adjusting part. The fixed side conveyor 8 is fixedly installed inside the lower vacuum chamber 2. The moving side conveyor 5 is movably arranged inside the lower vacuum chamber 2 through the connection width-adjusting part. The connection width-adjusting part includes a high-temperature lead screw 12, an optical axis 11, a high-temperature bearing I 14, and a bearing seat 13. The bearing seat 13 is installed inside the lower vacuum chamber 2. The high-temperature bearing I 14 is arranged inside the bearing seat 13, and the high-temperature bearing I 14 is installed on the high-temperature lead screw 12. The nut of the high-temperature lead screw 12 is installed on the moving side conveyor 5, and the high-temperature lead screw 12 rotates to realize the movement of the moving side conveyor 5. The so-called sealing part includes a vacuum sealing flange 9, a sealing ring II 20, a high-temperature bearing II 15, a skeleton oil seal 16, a star-shaped sealing ring 18, a fluoroelastomer gasket 17, and an oil supply part 19. The sealing ring II 20 is installed at the joint between one side of the vacuum sealing flange 9 and the lower vacuum chamber 2. The high-temperature bearing II 15, the skeleton oil seal 16, the star-shaped sealing ring 18, the fluoroelastomer gasket 17, and the oil supply part 19 are installed inside the vacuum sealing flange 9. The high-temperature bearing II 15 plays a role in assisting the rotation of the high-temperature lead screw 12.

[0024] Working principle: This embodiment provides a vacuum chamber with adjustable product width. During use, first, the rotation of the high-temperature lead screw 12 drives the movement adjustment of the moving side conveyor 5, thereby forming a width adjustment structure inside the welding furnace to achieve the processing of products with multiple sizes. Then, an external vacuum pumping device is connected to the vacuum pump connection port 3 to evacuate the interiors of the upper vacuum box 1 and the lower vacuum box 2, thereby forming a vacuum area inside the welding furnace. During the rotation of the high-temperature lead screw 12, the high-temperature bearing II 15 plays an auxiliary rotation role, and the skeleton oil seal 16, star-shaped seal ring 18, and fluororubber gasket 17 play a sealing role to isolate the inside and outside of the lower vacuum box 2. Among them, the oil supply part 19 is pre-filled with high-temperature lubricating grease, which lubricates the internal components of the vacuum sealing flange 9 during the rotation of the high-temperature lead screw 12 to prevent hard friction with the high-temperature lead screw 12.

[0025] The embodiments disclosed in this utility model are preferred embodiments, but not limited thereto. Those of ordinary skill in the art can easily understand the spirit of this utility model based on the above embodiments and make different extensions and changes. However, as long as they do not depart from the spirit of this utility model, they are within the protection scope of this utility model.

Claims

1. A vacuum chamber with adjustable product width, characterized in that: It includes a box part, a heating part, a conveying width adjustment part and a sealing part; The box body portion comprises an upper vacuum box body (1) and a lower vacuum box body (2); a sealing ring (10) is installed on the upper part of the lower vacuum box body (2) for achieving a sealing effect after the upper vacuum box body (1) and the lower vacuum box body (2) are combined; a water channel is provided inside the lower vacuum box body (2), and a cold water pipe (4) is fixedly provided in the water channel for passing a cooling liquid to prevent the sealing ring (10) from aging and hardening due to excessive temperature; and a vacuum pump connection port (3) is provided at the lower part of the upper vacuum box body (1).

2. The vacuum chamber with adjustable product width according to claim 1, characterized in that: The heating part comprises an infrared heating tube (7) and a ceramic plate (6); the infrared heating tube (7) is installed in the lower vacuum box (2), and the ceramic plate (6) is laid on the lower part of the infrared heating tube (7).

3. The vacuum chamber with adjustable product width according to claim 1, characterized in that: The conveying width-adjusting part comprises a fixed edge conveying (8), a movable edge conveying (5) and a connecting width-adjusting part, wherein the fixed edge conveying (8) is fixedly installed in the lower vacuum box (2), and the movable edge conveying (5) is movably arranged in the lower vacuum box (2) via the connecting width-adjusting part.

4. The vacuum chamber with adjustable product width according to claim 3, characterized in that: The connecting width adjustment portion comprises a high-temperature screw (12), an optical axis (11), a high-temperature bearing (14) and a bearing seat (13); the bearing seat (13) is installed in the lower vacuum box (2); the high-temperature bearing (14) is arranged in the bearing seat (13); and the high-temperature bearing (14) is installed on the high-temperature screw (12); the nut of the high-temperature screw (12) is installed on the moving conveyor (5); and the high-temperature screw (12) rotates to realize the movement of the moving conveyor (5).

5. The vacuum chamber with adjustable product width according to claim 1, characterized in that: The sealing part comprises a vacuum sealing flange (9), a sealing ring (20), a high-temperature bearing (15), a skeleton oil seal (16), a star-shaped sealing ring (18), a fluororubber gasket (17) and an oil supply part (19). The sealing ring (20) is installed at the joint between one side of the vacuum sealing flange (9) and the lower vacuum box (2). The high-temperature bearing (15), the skeleton oil seal (16), the star-shaped sealing ring (18), the fluororubber gasket (17) and the oil supply part (19) are installed inside the vacuum sealing flange (9). The high-temperature bearing (15) plays a role in assisting the high-temperature screw (12) to rotate.

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