Graphite layer processing equipment
By spraying graphite onto the substrate and using laser heating, the time-consuming and labor-consuming problem of graphite layer generation is solved, and the rapid molding of the graphite layer and the improvement of the strength and heat dissipation ability of the substrate are achieved.
Patent Information
- Application Number
- CN202421917514.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-08
- Publication Date
- 2025-06-27
- Estimated Expiration
- 2034-08-08
AI Technical Summary
In the prior art, the generation of graphite layers is time-consuming and labor-intensive, expensive, and lacks an efficient production method.
By spraying or sputtering graphite onto the substrate, a wet and soft graphite layer is formed, and the graphite layer is heated by laser means to bake the graphite layer to achieve rapid molding.
The rapid forming of the graphite layer is achieved, the structural strength and heat dissipation ability of the substrate are improved, and the production cost is reduced.
Smart Images
Figure CN223033132U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a graphite layer processing technology, in particular to a process and equipment for fabricating a graphite layer by laser means. Background Art
[0002] The conductivity of a graphite layer is hundreds of times higher than that of copper, and its strength is hundreds of times higher than that of steel. Graphite layers have become key materials in technical fields such as integrated circuits, transparent electrodes, vibration filtering, ultraviolet LEDs, gas sensing, supercapacitors, and biochips. However, the formation of graphite layers is quite time-consuming and laborious, with high costs. For example, the process of making a graphite layer like a thin film is even more difficult. In other words, there is currently no effective method for producing graphite layers.
[0003] Therefore, how to improve the production efficiency of graphite layers and expand their application fields through process improvement to overcome the above defects has become one of the important issues to be solved in this field. Summary of the Utility Model
[0004] The technical problem to be solved by the utility model is to provide a method for processing a graphite layer in view of the deficiencies of the prior art, which includes: spraying or sputtering graphite onto a substrate to form a wet and soft graphite layer. Heating the graphite layer by laser means and baking the graphite layer.
[0005] According to a feasible embodiment, the steps of heating the graphite layer by laser means successively include: heating the graphite layer in a line scanning manner of a laser spot. Heating the graphite layer in a surface scanning manner of a laser spot.
[0006] According to a feasible embodiment, the steps of heating the graphite layer by laser means successively include: heating the graphite layer in a surface scanning manner of a laser spot. Heating the graphite layer in a line scanning manner of a laser spot.
[0007] According to a feasible embodiment, the substrate includes a body and an adhesive layer. The adhesive layer has a first surface and a second surface opposite to the first surface. The first surface adheres to the body, and the graphite layer is located on the second surface of the adhesive layer.
[0008] According to a feasible embodiment, the material of the substrate includes at least one of diamond, silicon, silicon carbide, gallium arsenide, glass, and ceramic.
[0009] The utility model also provides a processing device for a graphite layer, which includes: a stage, a control device, a spraying device, and a laser device. The stage is used to carry the substrate. The spraying device stores a graphite coating agent. The spraying device is electrically connected to the control device and is used to spray the graphite coating agent onto the substrate to form a wet and soft graphite layer. The laser device includes a galvanometer module. The laser device is electrically connected to the control device and heats the graphite layer with a laser beam to bake the graphite layer.
[0010] According to a feasible implementation, after the laser device heats the graphite layer in the way of laser spot line scanning in sequence, it then heats the graphite layer in the way of laser spot surface scanning.
[0011] According to a feasible implementation, the laser device heats the graphite layer in the way of laser spot surface scanning in sequence, and then heats the graphite layer in the way of laser spot line scanning.
[0012] According to a feasible implementation, the wavelength of the laser beam is 800 - 1000 nm (nanometer); the pulse width is 0.1 - 100 ns (nanosecond); and the repetition frequency is 0.1 - 1000 KHz (kilohertz).
[0013] According to a feasible implementation, the processing equipment for the graphite layer further includes a chamber, a stage and a spraying device are located in the chamber. When the spraying device sprays the graphite coating agent on the substrate, the chamber is in a vacuum state.
[0014] One of the beneficial effects of the present utility model is that the method for processing the graphite layer provided by the present utility model can, through the technical solution of "heating the graphite layer by laser means and baking the graphite layer", enable the graphite layer to be quickly formed on the substrate. In some technical fields, the structural strength of the substrate is enhanced through the graphite layer, and the heat dissipation capacity of the substrate is enhanced through the graphite layer.
[0015] Furthermore, heating the graphite layer by laser means includes: laser spot line scanning and laser spot surface scanning. Through secondary heating scanning, in the first step, it preheats, and in the second step, it bakes the graphite layer. In this way, the graphite layer is heated more evenly and the forming effect is better.
[0016] According to some other embodiments, the graphite layer can be made into a graphite sticker and can be arbitrarily attached to the object that needs it.
[0017] One of the beneficial effects of the present utility model is that the processing equipment for the graphite layer provided by the present utility model heats the graphite coating through a laser device to make it dry and formed, enhances the structural strength of the substrate through the graphite layer, and enhances the heat dissipation capacity of the substrate through the graphite layer.
[0018] Furthermore, the processing equipment for the graphite layer further includes a chamber, a stage and a spraying device are located in the chamber. When the spraying device sprays the graphite coating agent on the substrate, the chamber is in a vacuum state. The vacuum state helps the graphite coating agent to be tightly combined with the substrate, and is more conducive to enhancing the overall strength of the substrate after the graphite layer is formed.
[0019] To further understand the features and technical content of the present utility model, please refer to the following detailed description and drawings of the present utility model. However, the provided drawings are only for reference and illustration, and are not used to limit the present utility model. Brief Description of the Drawings
[0020] Figure 1 It is a process schematic diagram of a method for processing a graphite layer according to an embodiment of the present invention.
[0021] Figure 2 It is a side view of a graphite layer and a substrate according to an embodiment of the present invention.
[0022] Figure 3 It is a schematic diagram of the architecture of a processing device for a graphite layer according to an embodiment of the present invention.
[0023] Figure 4 It is a schematic diagram of the architecture of a processing device for a graphite layer according to an embodiment of the present invention. Detailed Description of the Embodiments
[0024] The following are specific embodiments to illustrate the implementation manners of the present invention regarding the "method for processing a graphite layer and a processing device for a graphite layer". Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. Additionally, the drawings of the present invention are only simple schematic illustrations and are not drawn according to actual dimensions, hereby stating in advance. The following embodiments will further detail the related technical content of the present invention, but the disclosed content is not used to limit the protection scope of the present invention.
[0025] Please refer to Figure 1 , which is a process schematic diagram of a method for processing a graphite layer according to an embodiment of the present invention. The method 100 for processing a graphite layer includes: step S1 and step S2. Step S1: Spraying or sputtering graphite onto a substrate to form a wet and soft graphite layer. Step S2: Heating the graphite layer by laser means to bake the graphite layer. Through steps S1 and S2, the graphite layer can be rapidly formed, and the structural strength of the substrate can be enhanced. The material of the substrate is, for example, glass silicon, silicon carbide, gallium arsenide, or ceramic, or it can also be a combination of at least two of the foregoing materials. According to an embodiment, the substrate material is glass, and the graphite layer can strengthen the structure of the glass. For example, when the glass substrate is applied in the field of semiconductor manufacturing, the heat dissipation capacity of the glass substrate can also be enhanced.
[0026] According to some embodiments, the laser heating of the graphite layer sequentially includes the following steps: after heating the graphite layer by means of line scanning of the laser spot, then heating the graphite layer by means of area scanning of the laser spot. In this way, after two thermal scans, the first thermal scan is a preheating treatment, and the second thermal scan dries the graphite layer. Thus, the graphite layer is heated more evenly, the structure of the layer is uniform, and the surface is smoother. However, the present invention is not limited thereto. In some embodiments, the laser heating of the graphite layer includes the following steps: first heating the graphite layer by means of area scanning of the laser spot, and then heating the graphite layer by means of line scanning of the laser spot, depending on the user's needs. In some embodiments, the preheating treatment of the first thermal scan uses non-femtosecond laser and can be a block-by-block preheating treatment. The second thermal scan can also bake the graphite layer in a block-by-block manner. In other words, in some embodiments of the present invention, the purpose of baking the graphite layer can be achieved through one step, or the purpose of gradually baking the graphite layer can be achieved through more than two steps.
[0027] Please refer to Figure 2 , which is a side view of the graphite layer and the substrate according to an embodiment of the present invention. According to this embodiment, the substrate 1 includes a body 11 and an adhesive layer 12. The adhesive layer 12 has a first surface and a second surface opposite thereto. The first surface adheres to the body 11, and the graphite layer 2 is located on the second surface of the adhesive layer 12. The adhesive layer 12 is, for example, an adhesive layer, and the graphite layer 2 covers the adhesive layer. When the subsequent production of the graphite layer 2 is completed, the user can separate the adhesive layer from the body 11 (such as physical peeling or by heating means). Thus, the graphite layer 2 and the adhesive layer can be attached to the surface of the object to be attached like a sticker.
[0028] Please refer to Figure 3 , which is a schematic structural diagram of the processing equipment for the graphite layer according to an embodiment of the present invention. The processing equipment 3A for the graphite layer includes: a stage 31, a control device 32, a spraying device 33, and a laser device 34. The stage 31 is used to carry the substrate. The spraying device 33 stores a graphite coating agent. The spraying device 33 is electrically connected to the control device. The spraying device 33 is used to spray the graphite coating agent on the substrate to form a wet and soft graphite layer. The laser device 34 includes a galvanometer module 341. The laser device 34 is electrically connected to the control device 32. The laser device 34 heats the graphite layer with a laser beam to bake the graphite layer. In some embodiments, the graphite coating agent includes a glue material. Thus, the graphite coating is more easily attached to the substrate.
[0029] The control device is, for example, a computer mainframe. According to some embodiments, the stage is electrically connected to the control device. The stage, for example, has a lifting module or a moving module. Through signal transmission of the control device, the movement or lifting of the stage can be controlled. However, the present invention is not limited thereto. According to some embodiments, the stage is a fixed base.
[0030] According to some embodiments, after the laser device heats the graphite layer in the manner of laser spot line scanning in sequence, it then heats the graphite layer in the manner of laser spot area scanning. In this way, after two thermal scans, the first thermal scan is a preheating treatment, and the second thermal scan bakes the graphite layer. Thus, the graphite layer is heated more uniformly, the structure of the layer is uniform, and the surface is smoother. However, the present utility model is not limited thereto. In some embodiments, the laser device can also heat the graphite layer in the manner of laser spot area scanning in sequence, and then heat the graphite layer in the manner of laser spot line scanning, depending on the user's needs. In some embodiments, the preheating treatment of the first thermal scan uses non-femtosecond laser and can be a blocky preheating treatment. The second thermal scan can also bake the graphite layer in a blocky manner.
[0031] In some embodiments, the wavelength of the laser beam is 800 - 1000 nm (nanometer); the pulse width is 0.1 - 100 ns (nanosecond); and the repetition frequency is 0.1 - 1000 KHz (kilohertz).
[0032] Please refer to Figure 4 , which is a schematic diagram of the processing equipment structure of the graphite layer according to an embodiment of the present utility model. In this embodiment, the processing equipment 3B of the graphite layer further includes a chamber 35. The stage 31 and the spraying device 33 are located in the chamber 35. When the spraying device 33 sprays the graphite coating agent on the substrate, the chamber 35 is in a vacuum state. Thus, the graphite coating agent and the substrate have the ability to be tightly combined, which is more conducive to improving the overall strength of the substrate after the graphite layer is completed.
[0033] It should be particularly noted that according to some embodiments, the processing equipment of the graphite layer includes a robotic arm or a conveying device for moving the substrate (and the graphite layer) to facilitate the processing of the spraying device and the laser device. The present utility model has no limitation. According to other embodiments, both the spraying device and the laser device have moving modules. In this way, they can move above the substrate and process the substrate.
[0034] "Advantages of the embodiment"
[0035] One of the advantages of the present utility model is that the method for processing the graphite layer provided by the present utility model can enable the graphite layer to be quickly formed on the substrate through the technical solution of "heating the graphite layer by laser means and baking the graphite layer". In some technical fields, the structural strength of the substrate is improved through the graphite layer, and the heat dissipation capacity of the substrate is improved through the graphite layer.
[0036] Furthermore, heating the graphite layer by laser means includes: laser spot line scanning and laser spot area scanning. Through two heating scans, the first thermal scan is a preheating treatment, and the second thermal scan is baking the graphite layer. Thus, the graphite layer is heated more evenly and the forming effect is better.
[0037] According to some embodiments, the graphite layer can be made into a graphite sticker and can be arbitrarily attached to the object in need.
[0038] One of the beneficial effects of the present utility model is that the processing equipment for the graphite layer provided by the present utility model heats the graphite coating through a laser device to bake it dry and form, enhances the structural strength of the substrate through the graphite layer, and enhances the heat dissipation capacity of the substrate through the graphite layer.
[0039] Furthermore, the processing equipment for the graphite layer further includes a chamber, a stage and a spraying device are located in the chamber. When the spraying device sprays the graphite coating agent on the substrate, the chamber is in a vacuum state. The vacuum state helps the graphite coating agent to tightly bond with the substrate, and is more conducive to enhancing the overall strength of the substrate after the graphite layer is formed.
[0040] The content disclosed above is only the preferred feasible embodiment of the present utility model, and does not limit the protection scope of the claims of the present utility model. Therefore, all equivalent technical changes made by using the content of the specification and drawings of the present utility model are included in the protection scope of the claims of the present utility model.
Claims
1. A graphite layer processing equipment, characterized in that: The processing equipment of the graphite layer comprises: A carrier for carrying a substrate; a control device; a spraying device storing a graphite coating agent, the spraying device being electrically connected to the control device, and the spraying device being used to spray a graphite coating agent onto the substrate to form a soft graphite layer; and A laser device includes a galvanometer module. The laser device is electrically connected to the control device. The laser device heats the graphite layer with a laser beam to bake the graphite layer.
2. The graphite layer processing equipment according to claim 1, characterized in that: The laser device heats the graphite layer in sequence by a laser spot line scanning method, and then heats the graphite layer by a laser spot surface scanning method.
3. The graphite layer processing equipment according to claim 1, characterized in that: The laser device sequentially heats the graphite layer in a laser spot surface scanning manner, and then heats the graphite layer in a laser spot line scanning manner.
4. The graphite layer processing equipment according to claim 1, characterized in that: The wavelength of the laser beam is 800-1000 nm; the pulse width is 0.1-100 ns; and the repetition frequency is 0.1-1000 KHz.
5. The graphite layer processing equipment according to claim 1, characterized in that: The graphite layer processing equipment further comprises a chamber, wherein the carrier and the spraying device are located in the chamber, and when the spraying device sprays the graphite coating agent on the substrate, the chamber is in a vacuum state.