Full-automatic nitrogen curing oven drying oven of semiconductor processing equipment

Abstract

The utility model discloses a full-automatic nitrogen curing oven oven of semiconductor processing equipment, which belongs to the technical field of SiC and IGBT (insulated gate bipolar transistor) power semiconductor industrial modules and comprises an oven body, four groups of nitrogen heating furnaces and four groups of nitrogen cooling furnaces are respectively mounted in the oven body, the internal structures of the cooling furnaces and the heating furnaces are the same, and the heating furnaces are mounted at the front ends of the cooling furnaces. Each group of heating furnaces and cooling furnaces are respectively and automatically communicated through pneumatic doors of the butted parallel channels, pneumatic doors are arranged on the side walls of one sides of the cooling furnaces and the heating furnaces, an automatic feeding and discharging mechanism is arranged at a feeding and discharging port of the box body, and an automatic alignment conveying mechanism is arranged on the lifting mechanism. According to the utility model, the defects in the prior art are overcome, the heating furnace, the cooling furnace, the lifting mechanism, the conveying mechanism, the heating plate mechanism, the conveying plug-in and other structures are matched with one another to automatically feed, heat and cool products, and manual operation by multiple persons is not needed, so that the manual labor is reduced, the time is saved, and the production efficiency is improved. The working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the field of SiC power modules, and particularly to a fully automatic nitrogen non-oxidizing curing furnace oven for semiconductor manufacturing equipment. Background Art

[0002] A semiconductor is a substance with electrical conductivity between that of an insulator and a conductor. Its electrical conductivity is easily controlled and can be used as a component material for information processing. From the perspective of technological or economic development, semiconductors are very important. The core units of many electronic products, such as computers, mobile phones, and digital recorders, utilize the change in the electrical conductivity of semiconductors to process information. Common semiconductor materials include silicon, germanium, gallium arsenide, etc., and silicon is the most influential one in commercial applications among various semiconductor materials. During the preparation process of semiconductors, it is often necessary to process them through a fully automatic non-oxidizing oven.

[0003] Currently, the existing fully automatic non-oxidizing ovens require multiple people to perform the feeding, heating, and discharging steps. Thus, it increases the manual labor, takes a long time, reduces the work efficiency, and cannot meet the requirements of Industry 4.0. Summary of the Utility Model

[0004] Aiming at the deficiencies of the prior art, the utility model provides a fully automatic nitrogen curing furnace oven for semiconductor manufacturing equipment, which overcomes the deficiencies of the prior art.

[0005] To achieve the above object, the utility model provides the following technical solution: A fully automatic nitrogen curing furnace oven for semiconductor manufacturing equipment, including a box body. Four groups of heating furnaces and four groups of cooling furnaces are respectively installed inside the box body. The internal structures of the cooling furnaces and the heating furnaces are the same. The heating furnaces are installed at the front ends of the cooling furnaces, and the four groups of heating furnaces and the cooling furnaces are respectively connected and communicated through docking channels. Pneumatic doors are installed on the side walls of one side of the cooling furnaces and the heating furnaces. A lifting mechanism is installed on the box body, and a conveying mechanism is installed on the lifting mechanism and is arranged at the position corresponding to the pneumatic doors.

[0006] By adopting the above technical solution, during use, the products automatically flow onto the conveying mechanism, and the conveying mechanism is used to transport the products. Moreover, the pneumatic door is opened to enable the products to enter the heating furnace, and the plate heating component is automatically started. Then the heating furnace will automatically heat the products. When the products are heated and cured, the products are nitrogen-cooled by the conveying mechanism. After cooling, they are automatically transported out. Then, the conveying mechanism is programmed to move through the lifting mechanism, running precisely and automatically, and docking with any channel in the formula. When the conveying mechanism moves to the position of the cooling furnace, the pneumatic door on the cooling furnace is opened, and the products are transported into the cooling furnace by the conveying mechanism. After the cooling time arrives, the automatic door of the cooling furnace is opened to automatically discharge the products, and then the products are removed from the cooling furnace by the conveying mechanism. Through the above structure, the products can be automatically loaded, heated, and cooled without manual operation by multiple people. In this way, the labor force is reduced, time is saved, and work efficiency is improved.

[0007] As a preferred technical solution of the present utility model, nitrogen gas collecting boxes are installed in both the heating furnace and the cooling furnace. A heating plate mechanism is installed in the heating furnace, and the heating plate mechanism is located below the nitrogen gas collecting box to ensure that the processed products are in the middle. The products are precisely conveyed above the plate heater, and the plate heater rises to hold the products for curing. The curing is automatically timed. When the time is up, the plate heater pneumatically descends, and the products are automatically placed on the plug-in conveying chain and automatically flow into the nitrogen cooling furnace. Plug-in conveying chains are installed in both the heating furnace and the cooling furnace at positions below the nitrogen gas collecting box. Nitrogen gas inlet connectors are installed at the tops of both the heating furnace and the cooling furnace.

[0008] By adopting the above technical solution, nitrogen gas is discharged into the heating furnace and the cooling furnace through the nitrogen gas inlet connectors to cool the products. At the same time, the heating plate mechanism in the heating furnace can heat the products. Moreover, the products can be conveyed through the plug-in conveying chain, and the nitrogen gas collecting box can evenly protect the products with nitrogen gas from oxidation, thereby ensuring the excellent quality of the products.

[0009] As a preferred technical solution of the present utility model, adjusting handwheels for adjusting the width of the conveying plug-in line are installed on the side walls of one side of both the heating furnace and the cooling furnace.

[0010] By adopting the above technical solution, the width of the conveying plug-in line is adjusted through the adjusting handwheel or the servo motor to meet the requirements under different conditions.

[0011] As a preferred technical solution of the present utility model, viewing windows are installed on the side walls of one side of both the heating furnace and the cooling furnace.

[0012] By adopting the above technical solution, it is convenient to observe the interiors of the heating furnace and the cooling furnace.

[0013] As a preferred technical solution of the present utility model, a plurality of movable sealing plates are evenly and equidistantly installed on the side wall of the front surface of the box body, and a touch screen, a nitrogen flowmeter for the heating section, an operation panel, and a nitrogen flowmeter for the cooling section are respectively installed on the side wall of the front surface of the box body.

[0014] By adopting the above technical solution, the interior of the box body is controlled through the touch screen and the operation panel, and moreover, the nitrogen is monitored and anti-fooled through the nitrogen flowmeter for the heating section and the nitrogen flowmeter for the cooling section, and an automatic alarm is given in case of lack or shortage of gas, and a touch screen picture prompt and MES data management and control are provided.

[0015] As a preferred technical solution of the present utility model, a filter screen is installed on the side wall of the movable sealing plate.

[0016] By adopting the above technical solution, the dust from the outside is filtered.

[0017] As a preferred technical solution of the present utility model, gratings are installed on the symmetric side walls on both sides of the box body.

[0018] By adopting the above technical solution, it is used for information transmission.

[0019] As a preferred technical solution of the present utility model, a plurality of movable casters and support foot cups are evenly and equidistantly connected to the bottom end of the box body.

[0020] By adopting the above technical solution, it is convenient to support and move the box body.

[0021] Compared with the prior art, the beneficial effects of the present utility model are:

[0022] The utility model is provided with a box body, a heating furnace, a cooling furnace, a docking channel, a pneumatic door, a lifting mechanism, a conveying mechanism, a nitrogen gas collecting box, aluminum and copper heating plate mechanisms, a conveying plug-in, a nitrogen gas inlet joint, an adjusting handwheel, a viewing window and other structures. The product is transported by the conveying mechanism. Moreover, the pneumatic door is opened to enable the product to enter the heating furnace, and then the heating furnace is started. The heating furnace will heat and process the product. After the product is heated, it is transported out by the conveying mechanism. Then, the lifting mechanism is used to move the conveying mechanism upward. When the conveying mechanism moves to the position of the cooling furnace, the pneumatic door on the cooling furnace is opened, and the product is transported into the cooling furnace by the conveying mechanism. Then, the cooling furnace is opened to cool and process the product. After the product is processed, it is removed from the cooling furnace by the conveying mechanism. Through the above structures, the product can be automatically loaded, heated and cooled without manual operation by multiple people. In this way, the manual labor is reduced, the time is saved, and the work efficiency is improved. Moreover, it has multiple functions. The software realizes that one group of channels is directly connected, and the other channels can produce normally arbitrarily. The formula input is truly realized, and the fully unmanned production is achieved. When there is a malfunction or at the end of the material, the machine itself software program realizes automatic one-key material cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is a schematic diagram of the overall structure of the utility model;

[0024] Figure 2 is a schematic diagram of the internal structure of the box body in the utility model;

[0025] Figure 3 is a schematic diagram of the structure of the heating furnace in the utility model;

[0026] Figure 4 is a schematic diagram of the internal structure of the heating furnace in the utility model;

[0027] Figure 5 is a front view of the heating furnace in the utility model.

[0028] DESCRIPTION OF THE REFERENCE NUMERALS

[0029] 1. Box body; 2. Heating furnace; 3. Cooling furnace; 4. Docking channel; 5. Pneumatic door; 6. Lifting mechanism; 7. Conveying mechanism; 8. Nitrogen gas collecting box; 9. Heating plate mechanism; 10. Conveying plug-in; 11. Nitrogen gas inlet joint; 12. Adjusting handwheel; 13. Viewing window; 14. Movable sealing plate; 15. Touch screen; 16. Nitrogen gas flowmeter in the heating section; 17. Operating panel; 18. Nitrogen gas flowmeter in the cooling section; 19. Filter screen; 20. Grating; 21. Movable caster; 22. Support foot cup. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0030] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0031] Please refer to Figures 1-5 , a fully automatic nitrogen curing furnace oven for semiconductor manufacturing equipment, comprising a box body 1, in which four groups of heating furnaces 2 and cooling furnaces 3 are respectively installed. The internal structures of the cooling furnace 3 and the heating furnace 2 are the same. The heating furnace 2 is installed at the front end of the cooling furnace 3. The heating furnace 2 and the cooling furnace 3 are installed in a one-channel for each group, four groups for four channels, or single group, multiple groups, with any combination. And the four groups of heating furnaces 2 and cooling furnaces 3 are respectively connected through a docking channel 4. Pneumatic doors 5 are installed on the side walls of one side of the cooling furnace 3 and the heating furnace 2. A lifting mechanism 6 is installed on the box body 1. The lifting mechanism 6 is driven by a cylinder or a lead screw. A conveying mechanism 7 is installed on the lifting mechanism 6. The conveying mechanism 7 is specifically a chain drive, and the conveying mechanism 7 is arranged at the position corresponding to the pneumatic door 5. A fault lamp is installed in the box body 1. And when the fault lamp is on, automatic one-key material cleaning can be realized through the software program of the machine itself. During use, the product is placed on the conveying mechanism 7, and the product is transported through the conveying mechanism 7. And the pneumatic door 5 is opened to enable the product to enter the heating furnace 2. Then the heating furnace 2 is started, and the heating furnace 2 will heat and process the product. When the product is heated, the product is transported out through the conveying mechanism 7 again. Then the lifting mechanism 6 is used to move the conveying mechanism 7 upward. When the conveying mechanism 7 moves to the position of the cooling furnace 3, the pneumatic door 5 on the cooling furnace 3 is opened, and the product is transported into the cooling furnace 3 through the conveying mechanism 7. Then the cooling furnace 3 is opened to cool and process the product. When the product is processed, the product is removed from the cooling furnace 3 through the conveying mechanism 7. Through the above structure, the product can be automatically loaded, heated, and cooled without manual operation by multiple people. In this way, the labor force is reduced, time is saved, and work efficiency is improved.

[0032] In the technical solution of the present utility model, nitrogen gas collecting boxes 8 are installed in both the heating furnace 2 and the cooling furnace 3. A heating plate mechanism 9 is installed in the heating furnace 2, and the heating plate mechanism 9 is located below the nitrogen gas collecting box 8. Conveyor inserts 10 are installed in both the heating furnace 2 and the cooling furnace 3 at positions below the nitrogen gas collecting box 8. Nitrogen gas inlet connectors 11 are installed at the tops of the heating furnace 2 and the cooling furnace 3. Nitrogen gas is discharged into the heating furnace 2 and the cooling furnace 3 through the nitrogen gas inlet connectors 11 to cool the product. At the same time, the heating plate mechanism 9 in the heating furnace 2 can heat the product, and the product can be conveyed through the conveyor inserts 10. The nitrogen gas collecting box 8 can collect nitrogen gas.

[0033] In the technical solution of the present utility model, an adjusting handwheel 12 for adjusting the width of the line of the conveyor insert 10 is installed on the side wall of one side of the heating furnace 2 and the cooling furnace 3. The width of the line of the conveyor insert 10 is adjusted through the adjusting handwheel 12 to meet the requirements under different conditions.

[0034] In the technical solution of the present utility model, viewing windows 13 are installed on the side walls of one side of the heating furnace 2 and the cooling furnace 3, facilitating the observation of the interiors of the heating furnace 2 and the cooling furnace 3.

[0035] In the technical solution of the present utility model, a plurality of movable sealing plates 14 are evenly and equidistantly installed on the side wall of the front surface of the box body 1. A touch screen 15, a nitrogen gas flowmeter 16 for the heating section, an operation panel 17, and a nitrogen gas flowmeter 18 for the cooling section are respectively installed on the side wall of the front surface of the box body 1. The interior of the box body 1 is controlled through the touch screen 15 and the operation panel 17, and nitrogen gas is monitored through the nitrogen gas flowmeter 16 for the heating section and the nitrogen gas flowmeter 18 for the cooling section.

[0036] In the technical solution of the present utility model, a filter screen 19 is installed on the side wall of the movable sealing plate 14 to filter dust from the outside.

[0037] In the technical solution of the present utility model, gratings 20 are installed on the side walls of both sides of the box body 1 symmetrically for information transmission.

[0038] In the technical solution of the present utility model, a number of movable casters 21 and support foot cups 22 are evenly and equidistantly connected to the bottom end of the box body 1, facilitating the support and movement of the box body 1.

[0039] Working principle: When in use, place the product on the conveying mechanism 7, and use the conveying mechanism 7 to transport the product. Moreover, open the pneumatic door 5 to allow the product to enter the heating furnace 2. Then start the heating furnace 2, and the heating furnace 2 will heat and process the product. When the product is heated, transport the product out through the conveying mechanism 7, and then use the lifting mechanism 6 to move the conveying mechanism 7 upward. When the conveying mechanism 7 moves to the position of the cooling furnace 3, open the pneumatic door 5 on the cooling furnace 3, and then transport the product into the cooling furnace 3 through the conveying mechanism 7. Then open the cooling furnace 3 to cool and process the product. When the product is processed, remove the product from the cooling furnace 3 through the conveying mechanism 7.

[0040] Finally, it should be noted that in the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "vertical", "upper", "lower", "horizontal", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present invention.

[0041] In the description of the present invention, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0042] The above are only the preferred embodiments of the present invention and are not used to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A fully automatic nitrogen curing oven for semiconductor process equipment, comprising a box (1), characterized in that: Four groups of heating furnaces (2) and four groups of cooling furnaces (3) are respectively installed in the box body (1). The cooling furnace (3) has the same internal structure as the heating furnace (2). The heating furnace (2) is installed at the front end of the cooling furnace (3), and the two groups of heating furnaces (2) are connected to the cooling furnace (3) through docking channels (4). Pneumatic doors (5) are installed on the side walls of one side of the cooling furnace (3) and the heating furnace (2). A lifting mechanism (6) is installed on the box body (1), and a conveying mechanism (7) is installed on the lifting mechanism (6), and the conveying mechanism (7) is arranged at the corresponding position of the pneumatic door (5).

2. A fully automatic nitrogen curing oven for semiconductor process equipment according to claim 1, characterized in that: A nitrogen gas collecting box (8) is installed in both the heating furnace (2) and the cooling furnace (3); an automatic program-controlled heating plate mechanism (9) is installed in the heating furnace (2), and the heating plate mechanism (9) is located below the nitrogen gas collecting box (8); an automatic adjustable width mechanism is installed in both the heating furnace (2) and the cooling furnace (3) located below the nitrogen gas collecting box (8); and a nitrogen gas inlet joint (11) is installed at the top of each of the heating furnace (2) and the cooling furnace (3).

3. A fully automatic nitrogen curing oven for semiconductor process equipment according to claim 2, characterized in that: An adjusting hand wheel (12) for adjusting the line width of the conveying plug-in (10) is installed on the side wall of one side of the heating furnace (2) and the cooling furnace (3).

4. The fully automatic nitrogen curing oven for semiconductor process equipment according to claim 2, characterized in that: Visual windows (13) are installed on the side walls of the heating furnace (2) and the cooling furnace (3).

5. The fully automatic nitrogen curing oven for semiconductor process equipment according to claim 1, characterized in that: A plurality of pneumatic movable sealing plates (14) are evenly and equidistantly mounted on the side walls at the front of the box (1), and a touch screen (15), a heating section nitrogen flow meter (16), an operation panel (17) and a cooling section nitrogen flow meter (18) are respectively mounted on the side walls at the front of the box (1).

6. A fully automatic nitrogen curing oven for semiconductor process equipment according to claim 5, characterized in that: A filter screen (19) is installed on the side wall of the movable sealing plate (14).

7. The fully automatic nitrogen curing oven for semiconductor process equipment according to claim 5, characterized in that: Gratings (20) are installed on the symmetrical side walls of the box body (1).

8. The fully automatic nitrogen curing oven for semiconductor process equipment according to claim 7, characterized in that: The bottom end of the box body (1) is evenly and equidistantly connected with a plurality of movable casters (21) and supporting foot cups (22).

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