Rotary cathode unit for magnetron sputtering device

Abstract

The utility model relates to a rotary cathode unit for a magnetron sputtering device, which comprises a cylindrical target cylinder and a magnetic bar pipe mounted in the target cylinder, and a water inlet pipeline and a water outlet pipeline which are communicated with the magnetic bar pipe and connected with corresponding ends of the target cylinder are respectively assembled at two ends of the target cylinder; the water inlet pipeline is connected with a driving mechanism and can rotate under the driving of the driving mechanism; the water inlet pipeline is sleeved with a side plate connecting piece, an outer side plate connecting disc is arranged at the outer end of the side plate connecting piece, at least one circle of first pipeline sealing ring is arranged between the outer side plate connecting disc and the water inlet pipeline and on the water inlet pipeline in a sleeving mode, and at least one circle of side plate sealing ring is arranged on the side, facing the target cylinder, of the outer side plate connecting disc; a ball bearing is arranged at the end, close to the water outlet pipeline, of the target barrel and in the target barrel, one end of the water outlet pipeline is sleeved with the ball bearing in a sealed mode, at least one sealing ring is arranged at the end, away from the ball bearing, of the water outlet pipeline and on the water outlet pipeline, and a hollow cavity double-layer side plate assembling space is formed between the sealing ring and the ball bearing.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum magnetron sputtering devices, and particularly relates to a rotary cathode unit for a magnetron sputtering device. Background Art

[0002] The cathodes used in the magnetron sputtering coating process are classified into planar cathodes and rotary cathodes according to their structures. Among them, the rotary cathode has the advantages of high target material utilization rate and large loadable electric power, and is used more and more widely. The rotary cathode unit mainly includes a cylindrical target tube and a magnetic rod tube installed in the target tube. A cooling water channel for cooling water to pass through is installed in the magnetic rod tube. A driving mechanism for driving the target tube to rotate is installed at one end of the target tube. The cooling water enters from one end of the cooling water channel and flows out from the other end to realize the cooling of the magnetic rod tube. During installation, the inlet pipe and outlet pipe at the end of the target tube need to be hermetically connected to the side plate of the vacuum chamber, and between the target tube and the side plate of the vacuum chamber, to ensure that the rotary cathode unit is in a vacuum environment. After adopting the above installation structure, in order to ensure the sealing effect and the side plate of the vacuum chamber has a relatively high strength, the thickness of the side plate of the vacuum chamber used will be relatively thick, increasing the cost of the magnetron sputtering device, and the number of rotary sealing components used between each rotary cathode unit and the side plate of the vacuum chamber is also large, and the installation and disassembly are relatively complicated.

[0003] To solve the above problems, the applicant considered setting the side plate of the vacuum chamber to a double-layer structure (that is, the side plate of the vacuum chamber is composed of an inner side plate and an outer side plate connected to the inner side plate) to save costs and reduce the installation of rotary sealing components. After adopting the above structure, the existing installation structure of the rotary cathode unit is obviously not applicable to the double-layer side plate of the vacuum chamber. Based on this, the applicant considered setting a rotary cathode unit with good sealing effect and applicable to the double-layer side plate of the vacuum chamber. Summary of the Invention

[0004] Aiming at the above deficiencies of the prior art, the technical problem to be solved by the utility model is to provide a rotary cathode unit for a magnetron sputtering device, avoiding the problem that the existing rotary cathode unit cannot be adaptively installed on the double-layer structure side plate of the vacuum chamber.

[0005] To solve the above technical problems, the utility model adopts the following technical solutions:

[0006] A rotary cathode unit for a magnetron sputtering device, comprising a cylindrical target tube and a magnetic rod tube installed inside the target tube. At both ends of the target tube, a water inlet pipe and a water outlet pipe are respectively assembled, which are connected to the magnetic rod tube and are connected to the corresponding ends of the target tube; the water inlet pipe is connected to a driving mechanism and can rotate under the drive of the driving mechanism; a side plate connector is sleeved on the water inlet pipe, and an outer side plate connection disk is arranged at the outer end of the side plate connector. Between the outer side plate connection disk and the water inlet pipe, at least one circle of first pipeline sealing rings is sleeved on the water inlet pipe, and at least one circle of side plate sealing rings is arranged on the side of the outer side plate connection disk facing the target tube; at one end of the target tube close to the water outlet pipe, a ball bearing is arranged inside the target tube. One end of the water outlet pipe is hermetically sleeved inside the ball bearing, and at least one circle of sealing rings is arranged on the water outlet pipe at the end far from the ball bearing. A hollow chamber double-side plate assembly space is formed between the sealing rings and the ball bearing. In this way, after the side plate connector is arranged on the water inlet pipe, the outer side plate connection disk arranged on the side plate connector can be respectively connected to the corresponding outer side plates of the hollow chamber, realizing the connection and fixation between one end of the water inlet pipe of the cathode unit and the vacuum chamber, and there is no need for vacuum sealing between the water inlet pipe and the inner side plate of the hollow chamber. One end of the water outlet pipe is sleeved with the ball bearing inside the target tube, and sealing rings are arranged at the other end. Thus, when installing the water outlet pipe end, after cooperating with the sealing flange on the water outlet pipe, vacuum sealing is realized, and only the outside needs to be sealed during installation, and the installation is relatively simple. When the driving mechanism drives the water inlet pipe to rotate, the target tube connected thereto will be driven to rotate together. At the same time, after the cooling water enters through the water inlet pipe, it enters the magnetic rod tube and is finally discharged through the water outlet pipe to cool the target tube and the magnetic rod tube. When the target tube rotates, high-energy ions bombard the surface of the target tube. Ions or atoms on the surface of the target tube exchange energy with the incident high-energy ions and then splash out from the surface of the target material and deposit into a film on the substrate; the arranged water outlet pipe is rotationally connected with the ball bearing during the rotation of the target tube, so it will not rotate and only needs to be hermetically connected to the outer side plate of the hollow chamber on this side. After adopting the rotary cathode unit in this application, when the cathode unit is installed on the side plate of the vacuum chamber and needs to be replaced, after directly disconnecting the outer side plate connection disk from the outer side plate of the vacuum chamber, together with the driving mechanism, the water inlet pipe, the target tube and the water outlet pipe can be taken out together, and the disassembly is relatively convenient. At the same time, during disassembly, the water outlet pipe will be successively placed at the assembly holes of the outer side plate of the vacuum chamber and the inner side plate of the vacuum chamber on one side of the water outlet pipe, and the disassembly is more labor-saving.

[0007] Further, the water inlet pipeline includes a connecting sleeve, a middle connecting cylinder, and a water inlet pipe that are fixedly connected in sequence. One end of the connecting sleeve is sleeved inside the target cylinder, and the end face of the other end is closely attached to the end of the middle connecting cylinder and is connected by a fastener. The water inlet pipe is sleeved inside the middle connecting cylinder and is sealed with the middle connecting cylinder through at least one circle of second pipeline sealing rings. In this way, after the water inlet pipeline is set in multiple sections, it is convenient to save the manufacturing cost for pipes with steps in the middle. The way that the water inlet pipe is sleeved with the middle connecting cylinder and sealed with a sealing ring can effectively ensure the sealing effect of the cooling water and prevent the cooling water from overflowing.

[0008] Further, a third pipeline sealing ring is provided between the connecting sleeve and the target cylinder. There is a step on the middle of the connecting sleeve that is closely attached to the end face of the target cylinder. After the connecting sleeve is closely attached to the end of the target cylinder, multiple circular grooves are formed on the outer end face. The connecting sleeve and the target cylinder are locked and fixed through a first clamp whose inner side is matched with the circular groove. In this way, in addition to the socket connection between the water inlet pipeline and the target cylinder, they are also locked and fixed through the cooperation of the first clamp with the connection between the water inlet pipeline and the target cylinder. This double connection and fixing method can effectively ensure the sealing effect between the water inlet pipeline and the target cylinder.

[0009] Further, a distributor is also sleeved on the middle connecting cylinder. A connector that is hermetically connected to the outer side plate connection disk and has connecting wires at both ends is provided on the outer side plate connection disk. The connector is electrically connected to the wiring terminal on the outer circle of the distributor. A protective sleeve is sleeved outside the distributor. The distributor is composed of an inner distributor circle and an outer distributor circle. The inner distributor circle is sleeved and fixed with the middle connecting cylinder, and the outer distributor circle is in clearance fit with the inner distributor circle. In this way, the provided distributor can supply power to the target cylinder, and the connector provided on the outer side plate connection disk can supply external power to the distributor to power the distributor. In application, the inner distributor circle rotates synchronously with the target cylinder, the outer distributor circle remains fixed, the wire harness will not be wound, and a sealing structure is adopted to ensure the vacuum seal at the wiring part.

[0010] Further, the side plate connecting piece is sleeved on the water inlet pipe and is composed of an outer side plate connection disk and a distributor fixing piece that is detachably installed on the inner side surface of the outer side plate connection disk. The distributor fixing piece includes a pipe sleeve, and a distributor mounting disk and a fixing disk placed at both ends of the pipe sleeve. The fixing disk is closely attached to the inner side of the outer side plate connection disk and is connected and fixed through a fastener. Multiple arc-shaped plates are spaced on the outer circle of the distributor, and each arc-shaped plate encloses a clamping and fitting space for the distributor mounting disk. In this way, one end of the distributor fixing piece on the side plate connecting piece is fixed to the outer side plate connection disk, which provides sufficient support for it through the outer side plate connection disk, and the other end is connected to the distributor, so that the outer circle of the distributor will not generate relative movement when the inner circle rotates and remains in the current state.

[0011] Furthermore, an assembly tube is sleeved on one end of the target tube close to the water outlet pipe, and the ball bearing is sleeved in the assembly tube; a step is provided in the middle of the assembly tube, and the step surface is in close contact with the end of the target tube, and the assembly tube and the target tube are clamped and fixed by a second clamp. In this way, the assembly tube can be in close contact with the inner side of the vacuum inner plate on this side and protect the ball bearing, and the second clamp can fasten the assembly tube and the end of the target tube together.

[0012] Furthermore, the first clamp and the second clamp have the same structure, both consisting of two semicircular arc clamps, and after the two arc clamp ends are tightly attached, a circular sleeve space is formed in the middle; a threaded hole is provided at the two connecting ends of the two arc clamps, and the two arc clamp connecting ends are fastened and connected by a fastening bolt and the threaded hole. In this way, the structure of the first clamp and the second clamp is simple, and fastening is relatively convenient. Both are fastened together by fasteners, the inner side cooperates with the target tube and the corresponding assembly tube or connecting sleeve, and the outer side is fastened and fixed by fasteners. This double fixing method can effectively ensure the tightness of the connection between the two components.

[0013] Furthermore, the driving mechanism includes a driving motor, a driving gear, a driven gear and a transmission belt. The output shaft of the driving motor is spline-connected with the driving gear. The driven gear is sleeved on the water inlet pipe and fixedly connected to the water inlet pipe. The transmission belt is sleeved on the driving gear and the driven gear. In this way, the overall structure of the driving mechanism is simple, and power is transmitted through gears and belts. During operation, after the output shaft of the driving motor rotates, it drives the driving gear connected thereto to rotate, and then drives the driven gear to rotate through the belt. The driven gear is sleeved and fixed on the water inlet pipe, thereby achieving the purpose of driving the water inlet pipe to rotate.

[0014] Furthermore, a drive mechanism mounting bracket is fixedly installed on the outer side of the outer plate connection plate, and the drive mechanism mounting bracket includes two I-shaped plates installed on the outer plate connection plate at intervals and a support plate fixedly connected to the outer end of the I-shaped plate. The drive motor is fixedly installed on the outer side of the support plate, and the end of the water inlet pipe passes through the support plate and is sealed and connected to a water inlet joint. In this way, the drive mechanism mounting bracket can support the drive motor and provide sufficient space for the driving gear, the driven gear and the belt. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a structural schematic diagram of a rotary cathode unit for a magnetron sputtering device according to a specific embodiment;

[0016] Figure 2 for Figure 1 A magnified upward-looking structural diagram;

[0017] Figure 3 for Figure 2Schematic cross-sectional structure diagram of C-C;

[0018] Figure 4 is Figure 3 Schematic enlarged structure diagram of part A in

[0019] Among them, the driving mechanism 1, the driving motor 11, the driving gear 12, the driven gear 13, the transmission belt 14, the water inlet pipeline 2, the water inlet pipe 21, the middle connecting cylinder 22, the connecting sleeve 23, the side plate connecting member 3, the outer side plate connecting disc 31, the distributor fixing member 32, the distributor 4, the distributor outer ring 41, the distributor inner ring 42, the target cylinder 5, the first clamp 6, the ball bearing 7, the assembly cylinder 8, the second clamp 9. Specific implementation manners

[0020] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are some but not all of the embodiments of the present invention. Usually, the components of the embodiments of the present invention described and illustrated herein can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed present invention, but merely represents selected embodiments of the present invention. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the scope of protection of the present invention.

[0021] It should be noted that like reference numerals and letters denote like items in the following figures. Thus, once an item is defined in one figure, further definition and explanation thereof is not required in subsequent figures. In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the figures, or the orientation or positional relationship in which the inventive product is customarily placed during use. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation on the present invention. In addition, the terms "first", "second", "third", etc. are only used for distinguishing descriptions and should not be construed as indicating or implying relative importance. In addition, terms such as "horizontal" and "vertical" do not mean that the components are required to be absolutely horizontal or hanging vertically, but may be slightly inclined. For example, "horizontal" only means that its direction is more horizontal relative to "vertical", and does not mean that the structure must be completely horizontal, but may be slightly inclined. In the description of the present invention, it should also be noted that unless otherwise clearly specified and defined, the terms "arranged", "installed", "connected", and "coupled" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention may be understood according to specific circumstances.

[0022] See Figures 1-4As shown in the figure, the rotary cathode unit for a magnetron sputtering device provided in this embodiment includes a cylindrical target tube 5 and a magnetic rod tube material (not shown in the figure) installed inside the target tube 5. At both ends of the target tube 5, a water inlet pipe 2 and a water outlet pipe 10 that are connected to the magnetic rod tube material and are connected to the corresponding ends of the target tube 5 are respectively assembled; the water inlet pipe 2 is connected to a driving mechanism 1 (the water inlet pipe is a rotating core shaft, and the hollow part of the rotating core shaft forms a water inlet channel and is thus used as the water inlet pipe), and can rotate under the drive of the driving mechanism 1; a side plate connecting piece 3 is sleeved on the water inlet pipe 2. An outer side plate connecting disk 31 is provided at the outer end of the side plate connecting piece 3. At least one circle of first pipeline sealing rings is sleeved on the water inlet pipe 2 between the outer side plate connecting disk 31 and the water inlet pipe 2. At least one circle of side plate sealing rings is provided on the side of the outer side plate connecting disk 31 facing the target tube 5; at one end of the target tube 5 close to the water outlet pipe 10, a ball bearing 7 is provided inside the target tube 5. One end of the water outlet pipe 10 is hermetically sleeved inside the ball bearing 7 (when hermetically sleeved, it is hermetically connected through an assembly cylinder sleeved on the ball bearing and the water outlet pipe. Specifically, when hermetically connected, two sealing rings are provided at intervals at the end where the water outlet pipe and the target tube are sleeved. Through the sealing connection between the two sealing rings and the assembly cylinder, the sealing connection between the water outlet pipe and the ball bearing is realized, and it is avoided that cooling water flows out from the assembly gap between the ball bearing and the water outlet pipe). At least one circle of sealing rings is provided on the water outlet pipe 10 at the end away from the ball bearing 7. A hollow chamber double-side plate assembly space is formed between the sealing ring and the ball bearing 7. In this way, after the side plate connecting piece 3 is provided on the water inlet pipe 2, the outer side plate connecting disk 31 provided on the side plate connecting piece 3 can be respectively connected to the corresponding outer side plate of the hollow chamber, realizing the connection and fixation of one end of the water inlet pipe 2 of the cathode unit to the vacuum chamber, and there is no need for vacuum sealing between the water inlet pipe 2 and the inner side plate of the hollow chamber. One end of the water outlet pipe 10 is sleeved with the ball bearing 7 inside the target tube 5, and a sealing ring is provided at the other end. Thus, when installing the end of the water outlet pipe 10, after cooperating with the sealing flange on the water outlet pipe 10, vacuum sealing is realized, and only the outside needs to be sealed during installation, and the installation is relatively simple. When the driving mechanism 1 drives the water inlet pipe 2 to rotate, the target tube 5 connected thereto will be driven to rotate together. At the same time, after the cooling water enters through the water inlet pipe 2, it enters the magnetic rod tube material, and finally is discharged through the water outlet pipe 10 to cool the target tube 5 and the magnetic rod tube material. When the target tube 5 rotates, high-energy ions bombard the surface of the target tube 5. Ions or atoms on the surface of the target tube 5 exchange energy with the incident high-energy ions and then splash out from the surface of the target material and deposit into a film on the substrate; the provided water outlet pipe 10 is rotationally connected to the ball bearing 7 during the rotation of the target tube 5, so it will not rotate, and only needs to be hermetically connected to the outer side plate of the hollow chamber on this side.After adopting the rotary cathode unit in the present application, when the cathode unit is installed on the side plate of the vacuum chamber, when the cathode unit needs to be replaced, after directly disconnecting the outer plate connection disk 31 from the outer side plate of the vacuum chamber, together with the drive mechanism 1, the water inlet pipeline 2, the target cylinder 5 and the water outlet pipeline 10 can be taken out together, and the disassembly is relatively convenient.

[0023] After installation, the outer plate connection disk 31 is placed on the outer side of the outer side plate of the vacuum chamber and is fixedly connected to the outer side plate of the vacuum chamber through a plurality of fasteners. The other end of the side plate connecting member 3 is placed between the outer side plate and the inner side plate of the vacuum chamber, and a protective sleeve is sleeved on the inner side plate of the vacuum chamber.

[0024] Further, the water inlet pipeline 2 includes a connecting sleeve 23, a middle connecting cylinder 22 and a water inlet pipe 21 which are fixedly connected in sequence. One end of the connecting sleeve 23 is sleeved in the target cylinder 5, and the end face of the other end is closely attached to the end of the middle connecting cylinder 22 and is connected by fasteners. The water inlet pipe 21 is sleeved in the middle connecting cylinder 22 and is sealed with the middle connecting cylinder 22 through two circles of second pipeline sealing rings (not marked in the figure). In this way, after the water inlet pipeline 2 is arranged in multiple sections, for a pipe with a step in the middle, it is convenient to save the manufacturing cost. The way that the water inlet pipe 21 is sleeved with the middle connecting cylinder 22 and sealed with a sealing ring can effectively ensure the sealing effect of the cooling water and avoid the overflow of the cooling water.

[0025] Further, a third pipeline sealing ring is provided between the connecting sleeve 23 and the target cylinder 5. There is a step on the middle of the connecting sleeve 23 that is closely attached to the end face of the target cylinder 5, and after the connecting sleeve 23 and the end of the target cylinder 5 are closely attached, a multi-turn annular groove is formed on the outer end face; the connecting sleeve 23 and the target cylinder 5 are locked and fixed through a first clamp 6 whose inner side face cooperates with the annular groove. In this way, in addition to the socket connection between the water inlet pipeline 2 and the target cylinder 5, the first clamp 6 is also used to cooperate with the joint of the water inlet pipeline 2 and the target cylinder 5 and then locked and fixed. This double connection and fixing method can effectively ensure the sealing effect between the water inlet pipeline 2 and the target cylinder 5.

[0026] Further, a distributor 4 (the distributor 4 is an externally purchased part) is also sleeved on the middle connecting cylinder 22. A connector that is hermetically connected to the outer plate connection disk 31 and has connecting wires at both ends is provided on the outer plate connection disk 31, and the connector is electrically connected to the terminal on the outer ring 41 of the distributor; a protective sleeve is sleeved outside the distributor 4 (such as Figure 4As shown, the protective sleeve covers part of the water inlet pipe 2, the distributor 4 and the end of the target barrel 5. When installed, it is sleeved in the through hole of the inner plate of the vacuum chamber). The distributor 4 is composed of a distributor inner ring 42 and a distributor outer ring 41. The distributor inner ring 42 is sleeved and fixed with the middle connecting tube 22, and the distributor outer ring 41 is loosely fitted on the distributor inner ring 42. In this way, the distributor 4 can supply power to the target barrel 5, and the connector provided on the outer plate connecting disk 31 can provide external power to the distributor 4 to supply power to the distributor 4. In use, the distributor inner ring 42 rotates synchronously with the target barrel 5, and the distributor outer ring 41 remains fixed, the wiring harness will not be entangled, and a sealing structure is adopted to ensure the vacuum sealing at the wiring point.

[0027] Furthermore, the side panel connector 3 is sleeved on the water inlet pipe 21, and is composed of an outer panel connecting plate 31 and a distributor fixing part 32 detachably mounted on the inner side of the outer panel connecting plate 31. The distributor fixing part 32 includes a pipe sleeve and a distributor mounting plate and a fixing plate placed at both ends of the pipe sleeve. The fixing plate is tightly attached to the inner side of the outer panel connecting plate 31 and is connected and fixed by fasteners. A plurality of arc plates are arranged at intervals on the outer ring of the distributor 4, and each arc plate encloses and forms a clamping fit space for the distributor 4 mounting plate. In this way, one end of the distributor fixing part 32 on the side panel connector 3 is fixed to the outer panel connecting plate 31, and is provided with sufficient support by the outer panel connecting plate 31. The other end is connected to the distributor 4, so that the outer ring 41 of the distributor can maintain the current state without relative movement when the inner ring rotates.

[0028] Furthermore, an assembly tube 8 is sleeved on one end of the target tube 5 close to the water outlet pipe, and the ball bearing 7 is sleeved in the assembly tube 8; a step is provided in the middle of the assembly tube 8, and the step surface is in close contact with the end of the target tube 5, and the assembly tube 8 and the target tube 5 are clamped and fixed by a second clamp 9. In this way, the assembly tube 8 can be in close contact with the inner side of the vacuum inner plate on this side and protect the ball bearing 7, and the second clamp 9 can be provided to fasten the assembly tube 8 and the end of the target tube 5 together.

[0029] Furthermore, the first clamp 6 and the second clamp 9 have the same structure, both consisting of two semicircular arc clamps, and after the two arc clamp ends are tightly attached, a circular sleeve space is formed in the middle; a threaded hole is provided at the two connecting ends of the two arc clamps, and the two arc clamp connecting ends are fastened and connected by a fastening bolt and the threaded hole. In this way, the structure of the first clamp 6 and the second clamp 9 is simple, and fastening is relatively convenient. Both are fastened together by fasteners, the inner side is matched with the target tube 5 and the corresponding assembly tube 8 or the connecting sleeve 23, and the outer side is fastened and fixed by fasteners. This double fixing method can effectively ensure the tightness of the connection between the two components.

[0030] Furthermore, the driving mechanism 1 includes a driving motor 11, a driving gear 12, a driven gear 13 and a transmission belt 14. The output shaft of the driving motor 11 is splined to the driving gear 12. The driven gear 13 is sleeved on the water inlet pipe 21 and fixedly connected to the water inlet pipe 21. The transmission belt 14 is sleeved on the driving gear 12 and the driven gear 13. In this way, the overall structure of the driving mechanism 1 is simple, and the power is transmitted through gears and belts. During operation, after the output shaft of the driving motor 11 rotates, it drives the driving gear 12 connected thereto to rotate, and then drives the driven gear 13 to rotate through the belt. The driven gear 13 is sleeved and fixed on the water inlet pipe 21, so as to achieve the purpose of driving the water inlet pipe 21 to rotate.

[0031] Furthermore, a driving mechanism mounting bracket is fixedly installed on the outside of the outer plate connecting disc 31. The driving mechanism mounting bracket includes two I-shaped plates spacedly installed on the outer plate connecting disc 31 and a support plate fixedly connected to the outer ends of the I-shaped plates. The driving motor 11 is fixedly installed on the outside of the support plate. After the end of the water inlet pipe 21 penetrates through the support plate, it is hermetically connected to a water inlet joint. In this way, the provided driving mechanism mounting bracket can support the driving motor 11 and provide sufficient space for the driving gear 12, the driven gear 13 and the belt.

[0032] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and not to limit them. Although the present invention has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that the technical solutions of the present invention can be modified or equivalently replaced without departing from the spirit and scope of the technical solutions of the present invention, and they should all be covered within the scope of the claims of the present invention.

Claims

1. A rotary cathode unit for a magnetron sputtering device, comprising a cylindrical target barrel and a magnetic rod tube installed in the target barrel, wherein a water inlet pipe and a water outlet pipe connected to the magnetic rod tube and connected to the corresponding end of the target barrel are respectively installed at both ends of the target barrel; the water inlet pipe is connected to a driving mechanism and can rotate under the drive of the driving mechanism; the characteristics are: A side plate connector is sleeved on the water inlet pipeline, an outer plate connecting disk is provided at the outer end of the side plate connector, at least one circle of first pipeline sealing ring is sleeved on the water inlet pipeline between the outer plate connecting disk and the water inlet pipeline, and at least one circle of side plate sealing ring is provided on the side of the outer plate connecting disk facing the target barrel; a ball bearing is provided in the target barrel at one end of the target barrel close to the water outlet pipeline, one end of the water outlet pipeline is sealed and sleeved in the ball bearing, at least one circle of sealing ring is provided on the water outlet pipeline at one end of the water outlet pipeline away from the ball bearing, and a hollow chamber double-layer side plate assembly space is formed between the sealing ring and the ball bearing.

2. The rotatable cathode unit for a magnetron sputtering device according to claim 1, characterized in that: The water inlet pipeline includes a connecting sleeve, a middle connecting tube and a water inlet pipe which are fixedly connected in sequence. One end of the connecting sleeve is sleeved in the target tube, and the end face of the other end is tightly attached to the end of the middle connecting tube and connected by a fastener. The water inlet pipe is sleeved in the middle connecting tube and is sealed with the middle connecting tube by at least one circle of a second pipeline sealing ring.

3. The rotatable cathode unit for a magnetron sputtering device according to claim 2, characterized in that: A third pipeline sealing ring is provided between the connecting sleeve and the target barrel, and a step is provided in the middle of the connecting sleeve which is in close contact with the end face of the target barrel. After the connecting sleeve is in close contact with the end of the target barrel, a plurality of annular grooves are formed on the outer end face; the connecting sleeve and the target barrel are locked and fixed by a first clamp whose inner side surface cooperates with the annular groove.

4. The rotatable cathode unit for a magnetron sputtering device according to claim 2 or 3, characterized in that: A distributor is also sleeved on the middle connecting tube, and the distributor consists of a distributor inner ring and a distributor outer ring. A connector is provided on the outer plate connecting disk, which is sealed and connected to the distributor and has connecting wires at both ends. The connector is electrically connected to the wiring terminals on the outer ring of the distributor. A protective sleeve is provided on the outer sleeve of the distributor, and the inner ring of the distributor is sleeved and fixed to the middle connecting tube, and the outer ring of the distributor is loosely fitted on the inner ring of the distributor.

5. The rotatable cathode unit for a magnetron sputtering device according to claim 4, characterized in that: The side panel connecting piece is sleeved on the water inlet pipe, and is composed of an outer panel connecting plate and a distributor fixing piece detachably mounted on the inner side of the outer panel connecting plate. The distributor fixing piece includes a pipe sleeve and a distributor mounting plate and a fixing plate placed at both ends of the pipe sleeve. The fixing plate is tightly attached to the inner side of the outer panel connecting plate and is connected and fixed by fasteners. A plurality of arc plates are spaced apart on the outer ring of the distributor, and each arc plate encloses a distributor mounting plate clamping fitting space.

6. The rotatable cathode unit for a magnetron sputtering device according to claim 3, characterized in that: An assembly tube is sleeved on one end of the target tube close to the water outlet pipe, and the ball bearing is sleeved in the assembly tube; a step is provided in the middle of the assembly tube, and the step surface is tightly attached to the end of the target tube, and the assembly tube and the target tube are clamped and fixed by a second clamp.

7. The rotatable cathode unit for a magnetron sputtering device according to claim 6, characterized in that: The first clamp and the second clamp have the same structure, both consisting of two semicircular arc clamps. When the ends of the two arc clamps are tightly attached, a circular tightening space is formed in the middle; a threaded hole is provided at the two connecting ends of the two arc clamps, and the two arc clamp connecting ends are fastened and connected by a fastening bolt that cooperates with the threaded hole.

8. The rotatable cathode unit for a magnetron sputtering device according to claim 2, 5 or 7, characterized in that: The driving mechanism includes a driving motor, a driving gear, a driven gear and a transmission belt. The output shaft of the driving motor is spline-connected with the driving gear. The driven gear is sleeved on the water inlet pipe and fixedly connected to the water inlet pipe. The transmission belt is sleeved on the driving gear and the driven gear.

9. The rotatable cathode unit for a magnetron sputtering device according to claim 8, characterized in that: A drive mechanism mounting bracket is fixedly installed on the outer side of the outer plate connecting plate, and the drive mechanism mounting bracket includes two I-shaped plates installed at intervals on the outer plate connecting plate and a support plate fixedly connected to the outer end of the I-shaped plate. The drive motor is fixedly installed on the outer side of the support plate, and the end of the water inlet pipe passes through the support plate and is sealed and connected to a water inlet joint.

Images