Vacuum winding and coating equipment
By setting up a plug-in valve in the vacuum winding coating equipment to control the isolation between the coating chamber and the external environment, the problem of exposure of the coating chamber during substrate replacement is solved, and process stability and production efficiency are improved.
Patent Information
- Application Number
- CN202421782193.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-25
- Publication Date
- 2025-07-01
- Estimated Expiration
- 2034-07-25
AI Technical Summary
When the existing vacuum winding coating equipment replaces the substrate, the interior of the coating chamber is connected to the external atmospheric environment, resulting in the exposure of parts and substrates to the atmospheric environment, increasing process complexity and reducing production efficiency.
A vacuum winding coating equipment is designed, including an unwinding chamber, a coating chamber and a winding chamber. Both sides of the coating chamber are connected to adjacent chambers through plug-ins. The plug-ins control the closure and opening of the channels through the drive member to prevent the coating chamber from communicating with the external atmospheric environment, and to maintain a vacuum state when replacing the substrate.
The process stability of the vapor deposition substrate is ensured, pollution of coating indoor parts and substrates is avoided, production efficiency is improved, no need to re-vacuum, and production efficiency is improved.
Smart Images
Figure CN223047585U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of vacuum coating, in particular to a vacuum winding coating device. Background Art
[0002] In the existing vacuum winding coating equipment, it generally has a closed single-chamber structure. Before evaporation coating, the substrate needs to be pre-placed in the chamber, and then the chamber is evacuated to make the inside of the chamber in a vacuum state, and then the substrate is subjected to vacuum evaporation coating treatment.
[0003] However, after the evaporation coating is completed, the chamber needs to be opened to take out the substrate, resulting in the inside of the chamber communicating with the external atmospheric environment. The parts and the substrate inside the chamber are all exposed to the atmospheric environment. Therefore, the process complexity of the evaporation-coated substrate is increased, and the chamber needs to be evacuated again to carry out the next vacuum evaporation coating work, reducing the production efficiency. Summary of the Utility Model
[0004] In order to overcome the deficiencies of the prior art, the utility model provides a vacuum winding coating device, which can avoid the inside of the coating chamber communicating with the external atmospheric environment when replacing the substrate, and avoid the parts and the substrate inside the coating chamber being exposed to the atmospheric environment. Therefore, the process stability of the evaporation-coated substrate is ensured, and there is no need to evacuate the coating chamber again, improving the production efficiency.
[0005] The technical solution adopted by the utility model to solve its technical problems is as follows:
[0006] A vacuum winding coating device includes an unwinding chamber, a coating chamber and a winding chamber arranged in sequence. Both sides of the coating chamber are connected to the adjacent chambers through gate valves. The unwinding chamber is used for unwinding the substrate, the coating chamber is used for vacuum coating the substrate, the winding chamber is used for winding the coated substrate. The gate valve includes a valve body, a valve core and a first driving member. The valve core is movably arranged in the valve body. The valve body is provided with a channel for the substrate to pass through, and the channel communicates with the adjacent chamber. The first driving member is used to drive the valve core to close or open the channel.
[0007] As a further improvement of the above technical solution, sealing members are arranged on both sides of the valve body, and the sealing members are used to seal the gap between the valve body and the adjacent chamber.
[0008] As a further improvement of the above technical solution, the coating chamber includes a first chamber, an evaporation source disposed in the first chamber, and a plurality of guide rollers. The two sides of the first chamber are respectively provided with a first feed port and a first discharge port, both of which are communicated with the channel. The evaporation source is disposed in the middle of the first chamber, and the plurality of guide rollers are symmetrically arranged along the center of the evaporation source. The evaporation source is used for vapor-depositing the substrate entering the first chamber.
[0009] As a further improvement of the above technical solution, the first chamber is provided with two cooling rollers, and the two cooling rollers are symmetrically arranged along the center of the evaporation source respectively.
[0010] As a further improvement of the above technical solution, the first chamber is further provided with two tension rollers, and the two tension rollers are symmetrically arranged along the center of the evaporation source respectively. The tension rollers are located between the evaporation source and the cooling rollers.
[0011] As a further improvement of the above technical solution, the unwinding chamber includes a second chamber and an unwinding mechanism disposed in the second chamber. A second discharge port is provided on one side of the second chamber. The unwinding mechanism is used for unwinding the substrate coil.
[0012] As a further improvement of the above technical solution, the winding chamber includes a third chamber and a winding mechanism disposed in the third chamber. A second feed port is provided on one side of the third chamber. The winding mechanism is used for winding the coated substrate.
[0013] As a further improvement of the above technical solution, it further includes a plurality of vacuum transition chambers, and the plurality of vacuum transition chambers are located between the coating chamber and the unwinding chamber and between the coating chamber and the winding chamber.
[0014] As a further improvement of the above technical solution, the vacuum transition chamber includes a fourth chamber and two pressure components disposed in the fourth chamber. The two sides of the fourth chamber are respectively provided with a third feed port and a third discharge port. The two pressure components are respectively located on one side of the third feed port and the third discharge port. The pressure components are used for pressing the substrate passing through the third feed port and the third discharge port.
[0015] As a further improvement of the above technical solution, the pressure component includes two pressure rollers, and the two pressure rollers are arranged parallel to each other up and down. The substrate passes between the two pressure rollers, and the upper and lower sides of the substrate are respectively abutted against the roller surfaces of the two pressure rollers.
[0016] The beneficial effects of the present utility model are as follows: The present utility model provides a vacuum winding coating device. By providing an unwinding chamber, a coating chamber, and a winding chamber, both sides of the coating chamber are connected to adjacent chambers through gate valves. When it is necessary to replace the substrate, the gate valves on both sides of the coating chamber can seal the coating chamber. Thus, it can be avoided that the inside of the coating chamber communicates with the external atmospheric environment when replacing the substrate, and the parts and substrates inside the coating chamber are prevented from being exposed to the atmospheric environment. Therefore, the process stability of the vapor-deposited substrate is ensured, and it is not necessary to re-pump the coating chamber to vacuum, improving the production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] The present utility model will be further described below with reference to the drawings and embodiments.
[0018] Figure 1 is a schematic structural diagram provided by an embodiment of the present utility model;
[0019] Figure 2 is Figure 1 a cross-sectional view of
[0020] Figure 3 is Figure 1 a schematic structural diagram of the gate valve in
[0021] Figure 4 is a schematic structural diagram of another embodiment;
[0022] Figure 5 is Figure 4 a cross-sectional view of
[0023] Reference numerals: 1 - unwinding chamber, 11 - second chamber, 12 - unwinding mechanism, second chamber door 13, 111 - second discharge port;
[0024] 2 - coating chamber, 21 - first chamber, 22 - evaporation source, 23 - over-roller, 24 - cooling roller, 25 - tension roller, first chamber door 26, 211 - first feed port, 212 - first discharge port;
[0025] 3 - winding chamber, 31 - third chamber, 32 - winding mechanism, third chamber door 33, 311 - second feed port;
[0026] 4 - gate valve, 41 - valve body, 42 - valve core, 43 - first driving member, 44 - channel, 45 - seal;
[0027] 5 - vacuum transition chamber, 51 - fourth chamber, 52 - pressure feeding assembly, 511 - third feed port, 512 - third discharge port, 521 - pressure roller. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0028] The concept, specific structure and technical effects of the present utility model will be clearly and completely described below in conjunction with embodiments and the accompanying drawings to fully understand the purpose, features and effects of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all embodiments. Based on the embodiments of the present utility model, other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present utility model. In addition, all connection / linkage relationships involved in the patent do not simply refer to the direct connection of components, but refer to the formation of a more optimal connection structure by adding or reducing connection accessories according to specific implementation situations. The various technical features in the creation of the present utility model can be interactively combined without conflicting with each other.
[0029] Referring to Figures 1 to 3 , a vacuum winding coating device provided by an embodiment of the present utility model includes an unwinding chamber 1, a coating chamber 2 and a winding chamber 3 arranged in sequence. Both sides of the coating chamber 2 are connected to adjacent chambers through gate valves 4. The unwinding chamber 1 is used for unwinding the substrate, the coating chamber 2 is used for vacuum coating the substrate, and the winding chamber 3 is used for winding the coated substrate. The gate valve 4 includes a valve body 41, a valve core 42 and a first driving member 43. The valve core 42 is movably arranged in the valve body 41. The valve body 41 is provided with a passage 44 for the substrate to pass through, and the passage 44 is communicated with the adjacent chamber. The first driving member 43 is used to drive the valve core 42 to close or open the passage 44. It should be noted that the chamber can be any one of the unwinding chamber 1, the transition chamber 5, the coating chamber 2 and the winding chamber 3, and the corresponding chamber needs to be specifically selected according to the arrangement of the gate valve 4.
[0030] Specifically, the coating chamber 2 includes a first chamber 21, an evaporation source 22 and a plurality of guide rollers 23 arranged in the first chamber 21. A first chamber door 26 is arranged at the top of the first chamber 21. A first feed port 211 and a first discharge port 212 are respectively opened on both sides of the first chamber 21. The first feed port 211 and the first discharge port 212 are respectively communicated with two passages 44. The evaporation source 22 is arranged in the middle of the first chamber 21. The plurality of guide rollers 23 are symmetrically arranged along the center of the evaporation source 22. The evaporation source 22 is used for evaporating the substrate entering the first chamber 21, and the plurality of guide rollers 23 can support the substrate.
[0031] It should be noted that the evaporation method of the evaporation source 22 can be resistance heating evaporation, electron beam evaporation, or even high-frequency heating evaporation, laser heating evaporation and other methods. The evaporation method of the evaporation source 22 is not limited in this embodiment.
[0032] The unwinding chamber 1 includes a second chamber 11 and an unwinding mechanism 12 disposed within the second chamber 11. A second chamber door 13 is provided at the top of the second chamber 11, and a second discharge port 111 is provided on one side of the second chamber 11. The unwinding mechanism 12 is used for unwinding the base material coil.
[0033] The winding chamber 3 includes a third chamber 31 and a winding mechanism 32 disposed within the third chamber 31. A third chamber door 33 is provided at the top of the third chamber 31, and a second feed port 311 is provided on one side of the third chamber 31. The winding mechanism 32 is used for winding the coated base material.
[0034] More specifically, a gate valve 4 is provided between the unwinding chamber 1 and the coating chamber 2, and a gate valve 4 is provided between the winding chamber 3 and the coating chamber 2. The two ends of the passage 44 of one of the gate valves 4 are respectively communicated with the second discharge port 111 and the first feed port 211, and the two ends of the passage 44 of the other gate valve 4 are respectively communicated with the first discharge port 212 and the second feed port 311.
[0035] Before coating, the unwinding mechanism 12 in the unwinding chamber 1 unwinds the base material coil. The base material sequentially passes through the second discharge port 111, the passage 44 of one of the gate valves 4, the first feed port 211, the coating chamber 2, the first discharge port 212, the passage 44 of the other gate valve 4, and the second feed port 311, and finally enters the winding chamber 3 and is wound around the winding mechanism 32. Then, the inside of the coating chamber 2 is evacuated to make the inside of the coating chamber 2 in a vacuum state. Then, the evaporation source 22 in the coating chamber 2 evaporates and coats the base material. At the same time, the unwinding mechanism 12 unwinds the uncoated base material, and the winding mechanism 32 winds the coated base material.
[0036] After the coating is completed, the substrate needs to be replaced. The two gate valves 4 act simultaneously. The first driving member 43 drives the valve core 42 to close the passage 44, making the first chamber 21 in a closed independent space. Then, the second chamber door 13 and the third chamber door 33 are opened. At this time, the second chamber 11 and the third chamber 31 are communicated with the external atmospheric environment. Subsequently, both ends of the original substrate are cut off, and then the reel on the unwinding mechanism 12 and the coated substrate coil on the winding mechanism 32 are removed. Then, a new coil is placed on the unwinding mechanism 12, a new take-up reel is placed on the winding mechanism 32, the head of the new coil is joined to one end of the original substrate, and the new take-up reel is joined to the other end of the original substrate. Then, the second chamber door 13 and the third chamber door 33 are closed to isolate the second chamber 11 and the third chamber 31 from the external atmospheric environment. Finally, the two gate valves 4 act simultaneously, and the first driving member 43 drives the valve core 42 to open the passage 44. The evaporation source 22 in the first chamber 21 performs vacuum evaporation on the new substrate. By repeating the above actions, it is possible to prevent the inside of the coating chamber 2 from communicating with the external atmospheric environment when replacing the substrate, avoid the parts and the substrate in the coating chamber 2 from being exposed to the atmospheric environment, thereby ensuring the process stability of the vapor-deposited substrate, and moreover, there is no need to re-pump the coating chamber 2 to vacuum, improving the production efficiency.
[0037] Further, sealing members 45 are provided on both sides of the valve body 41. The sealing members 45 are used to seal the gap between the valve body 41 and the adjacent chamber, thereby improving the sealing performance of the coating chamber 2 and the stability during vacuum coating.
[0038] Further, two cooling rollers 24 are provided in the first chamber 21. The two cooling rollers 24 are symmetrically arranged along the center of the evaporation source 22 respectively, so that the substrate can be cooled before and after evaporation coating, thereby improving the heat resistance of the substrate, improving the surface quality of the substrate coating, improving the uniformity of the coating, and avoiding wrinkles on the substrate.
[0039] Further, two tension rollers 25 are also provided in the first chamber 21. The two tension rollers 25 are symmetrically arranged along the center of the evaporation source 22 respectively. The tension rollers 25 are located between the evaporation source 22 and the cooling rollers 24, and the two tension rollers 25 are installed above the evaporation source 22 and are used to control the tension fluctuation of the substrate, thereby further improving the stability of the substrate during evaporation coating.
[0040] Refer to Figure 4 and Figure 5 In another embodiment, in order to improve the stability of the coating process, several vacuum transition chambers 5 are further included. The several vacuum transition chambers 5 are located between the coating chamber 2 and the unwinding chamber 1 and between the coating chamber 2 and the winding chamber 3. The several vacuum transition chambers 5 can be evacuated step by step, so that the required vacuum degree for work can be achieved inside the coating chamber 2.
[0041] It should be noted that the number of vacuum transition chambers can be one or multiple, and can be adjusted according to specific process conditions.
[0042] Further, the vacuum transition chamber 5 includes a fourth chamber 51 and two pressure feeding components 52 disposed in the fourth chamber 51. A third feeding port 511 and a third discharging port 512 are respectively formed on two sides of the fourth chamber 51. The two pressure feeding components 52 are respectively located on one side of the third feeding port 511 and the third discharging port 512. The pressure feeding component 52 is used to press the substrate passing through the third feeding port 511 and the third discharging port 512. On the one hand, the substrate can pass through the third feeding port 511 and the third discharging port 512. On the other hand, it can also prevent the fourth chamber 51 from communicating with other cavities or the external atmospheric environment, and ensure the stability of the vacuum degree in the fourth chamber 51.
[0043] Furthermore, the pressure feeding component 52 includes two pressure rollers 521 which are arranged parallel to each other vertically. The substrate passes between the two pressure rollers 521, and the upper and lower sides of the substrate are respectively abutted against the roller surfaces of the two pressure rollers 521. When the substrate moves, the two pressure rollers 521 rotate simultaneously, so as to ensure that the substrate can move stably.
[0044] The above is a specific description of the preferred embodiment of the present invention, but the present invention is not limited to the described embodiment. Those skilled in the art can also make various equivalent deformations or substitutions without departing from the spirit of the present invention, and these equivalent deformations or substitutions are all included in the scope defined by the claims of this application.
Claims
1. A vacuum winding coating device, characterized in that: It includes an unwinding chamber, a coating chamber and a winding chamber which are arranged in sequence, both sides of the coating chamber are connected to adjacent chambers through a gate valve, the unwinding chamber is used for unwinding a substrate, the coating chamber is used for vacuum coating a substrate, and the winding chamber is used for winding up the coated substrate, the gate valve includes a valve body, a valve core and a first driving member, the valve core is movably arranged in the valve body, the valve body is provided with a channel for accommodating the passage of the substrate, the channel is communicated with the adjacent chamber, and the first driving member is used to drive the valve core to close or open the channel.
2. The vacuum winding coating equipment according to claim 1, characterized in that: Sealing members are arranged on both sides of the valve body, and the sealing members are used to seal the gap between the valve body and the adjacent chamber.
3. The vacuum winding coating equipment according to claim 1, characterized in that: The coating chamber includes a first chamber, an evaporation source arranged in the first chamber, and a plurality of rollers. A first feed port and a first discharge port are respectively opened on both sides of the first chamber. The first feed port and the first discharge port are respectively connected to the two channels. The evaporation source is arranged in the middle of the first chamber, and the plurality of rollers are symmetrically arranged along the center of the evaporation source. The evaporation source is used to perform vapor deposition on the substrate entering the first chamber.
4. The vacuum winding coating equipment according to claim 3, characterized in that: The first chamber is provided with two cooling rollers, and the two cooling rollers are symmetrically arranged along the center of the evaporation source.
5. The vacuum winding coating equipment according to claim 4, characterized in that: The first chamber is further provided with two tension rollers, which are symmetrically arranged along the center of the evaporation source, and are located between the evaporation source and the cooling roller.
6. The vacuum winding coating equipment according to claim 1, characterized in that: The unwinding chamber comprises a second chamber and an unwinding mechanism disposed in the second chamber. A second discharge port is disposed at one side of the second chamber. The unwinding mechanism is used to unwind the substrate roll.
7. The vacuum winding coating equipment according to claim 1, characterized in that: The winding chamber comprises a third chamber and a winding mechanism disposed in the third chamber. A second feed port is disposed on one side of the third chamber. The winding mechanism is used to wind up the substrate after coating.
8. The vacuum winding coating equipment according to claim 1, characterized in that: It also includes a plurality of vacuum transition chambers, which are located between the coating chamber and the unwinding chamber and between the coating chamber and the winding chamber.
9. The vacuum winding coating equipment according to claim 8, characterized in that: The vacuum transition chamber includes a fourth chamber and two pressing assemblies arranged in the fourth chamber, a third feed port and a third discharge port are respectively opened on both sides of the fourth chamber, the two pressing assemblies are respectively located on one side of the third feed port and the third discharge port, and the pressing assemblies are used to press the substrate passing through the third feed port and the third discharge port.
10. The vacuum winding coating equipment according to claim 9, characterized in that: The pressing assembly comprises two pressing rollers, which are arranged in parallel up and down. The substrate passes between the two pressing rollers, and the upper and lower sides of the substrate respectively abut against the roller surfaces of the two pressing rollers.