Gas flow optimizing device for diffusion furnace

Abstract

The utility model discloses a gas flow optimizing device for a diffusion furnace, which belongs to the technical field of diffusion furnaces and comprises a furnace body, a sealing door, a first connector and a second connector, the sealing door is mounted at a port of the furnace body, and the first connector and the second connector are communicated and connected with the furnace body. A connecting pipe connected with the first connector in a communicating mode is installed in an inner cavity of the furnace body, the end, away from the first connector, of the connecting pipe is of a closed structure, the inner cavity, close to the first connector, of the connecting pipe is fixedly connected with a retainer, and a shaft rod is rotationally connected between the retainer and the tail end of the connecting pipe; the paddle can be used for driving the shaft rod to be matched with the retainer to rotate, then the spiral blade is driven to rotate synchronously, process gas can be uniformly diffused to the inner side of the furnace body through the air holes while being conveyed to the tail end of the connecting pipe, so that the process gas is non-uniformly diffused in the furnace chamber, and the machining quality of workpieces is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion furnaces, and more specifically to a gas flow optimization device for a diffusion furnace. Background Art

[0002] Diffusion furnaces are mainly used for diffusion and oxidation processes in the manufacture of silicon wafer solar devices. The furnace body is the reaction chamber for the diffusion and oxidation processes, and the structural form of the diffusion furnace is very critical. The existing silicon wafer solar cell diffusion process uses a horizontal diffusion furnace. The diffusion furnace is equipped with a horizontal quartz boat to carry silicon wafers. During production, silicon wafers need to be manually inserted into the quartz boat slot. After the quartz boat is inserted with silicon wafers, it is placed on the cantilever slurry, and the automatic operation process can enter the quartz tube for the diffusion process. After the diffusion is completed, the cantilever paddle will withdraw and the furnace door will be closed. A chemical reaction will occur in the process furnace tube, and the main product is metaphosphoric acid. Metaphosphoric acid will flow out from the quartz furnace tube mouth and drip onto the iron plate at the furnace door, causing silicon wafer contamination. Since the process needs to be carried out in a high temperature environment, the existing furnace door temperature is high and the furnace door is easily damaged. It takes time to cool down when cleaning the waste liquid, otherwise it is easy to get burned, and the maintenance cycle is not easy to control. In addition, the furnace door has poor stability, which affects the production efficiency of silicon wafers.

[0003] The existing patented diffusion furnace, patent authorization number CN217651350U, includes a furnace body, a furnace tube arranged in the furnace body, a furnace door and a receiving tray. One end of the furnace tube has an opening, and the furnace door is used to close the opening. In order to avoid damage to the furnace tube when the furnace door closes the furnace tube, a gas delivery pipeline is also provided at the furnace door to buffer the pressure of the furnace door on the furnace tube. In order to facilitate the cleaning of metaphosphoric acid, a receiving tray is provided below the furnace tube opening along the gravity direction, and a cooling water pipeline is provided at the furnace door, which can facilitate the placement and removal of the receiving tray and protect the furnace door, thereby increasing the durability and production quality of the diffusion furnace.

[0004] However, one end of the furnace tube in patent authorization number CN217651350U has an opening to facilitate the placement or removal of the quartz boat. The other end of the furnace tube is provided with a first interface and a second interface. The first interface is used to connect with a sealed pipe to adjust the vacuum degree in the furnace tube. The vacuum degree can be adjusted by connecting the outlet of the sealed pipe to a vacuum pump (not shown in the figure, a conventional vacuum pump in the prior art). The second interface is equipped for the input and output of the process gas. Since the process gas is transported to the inner cavity of the furnace body through the second interface, it is not conducive to the diffusion of the process gas, resulting in uneven diffusion of the process gas in the furnace cavity, which in turn affects the processing of the workpiece. Therefore, we propose a diffusion furnace gas flow optimization device to solve the above-mentioned problems. Utility Model Content

[0005] 1. Technical problems to be solved

[0006] Aiming at the problems existing in the prior art, the purpose of the present utility model is to provide an optimized device for gas flow in a diffusion furnace, which can drive the shaft rod to rotate in cooperation with the cage by means of the paddle blades, and then drive the spiral blades to rotate synchronously. While transferring the process gas to the end of the connecting pipe, the process gas can be evenly diffused to the inner side of the furnace body through the air holes, so as to ensure that the process gas is not unevenly diffused in the furnace cavity and guarantee the processing quality of the workpiece.

[0007] 2. Technical solution

[0008] To solve the above problems, the present utility model adopts the following technical solutions.

[0009] An optimized device for gas flow in a diffusion furnace includes a furnace body, a sealing door installed at the port part of the furnace body, and a first interface and a second interface that are conductively connected to the furnace body. A connecting pipe that is conductively connected to the first interface is installed in the inner cavity of the furnace body, and the end of the connecting pipe far from the first interface is arranged in a closed structure;

[0010] A cage is fixedly connected to the inner cavity of the connecting pipe near the first interface. A shaft rod is rotatably connected between the cage and the end of the connecting pipe. One end of the shaft rod is provided with a guiding cone extending to the inner side of the first interface. One side of the guiding cone is provided with paddle blades fixedly connected to the side wall of the shaft rod. A spiral blade is installed at the part of the shaft rod located in the inner cavity of the connecting pipe;

[0011] Air holes are arranged in a circular array on the outer wall of the connecting pipe corresponding to the spiral blade.

[0012] Furthermore, one end of the connecting pipe near the first interface is fixedly connected with a mounting seat, and assembly holes are arranged on the surface of the mounting seat.

[0013] A sealing rubber ring that is closely attached to the inner cavity wall of the furnace body is inlaid on the surface of the mounting seat.

[0014] Furthermore, the part where the mounting seat is combined with the connecting pipe is fixedly connected with rib plates arranged in a right triangle structure, and a plurality of rib plates are arranged in the radial position of the connecting pipe.

[0015] Furthermore, specifically three paddle blades are provided, and the included angle between two adjacent paddle blades corresponding to the axis line of the shaft rod is 120°.

[0016] Furthermore, bearings are installed at the parts where the cage and the connecting pipe are combined with the shaft rod.

[0017] Furthermore, the outer diameter of the spiral blade is adapted to the inner diameter of the connecting pipe.

[0018] 3. Beneficial effects

[0019] Compared with the prior art, the advantages of the present utility model are as follows:

[0020] (1) In this solution, after the process gas is transported to the inner side of the connecting pipe at the first interface, under the disturbance of the air flow, the flow guiding cone disperses the flowing air flow to the paddle blades. Under the action of the paddle blades, the process gas is blown towards the inner side of the connecting pipe. At the same time, the paddle blades drive the shaft rod to rotate in cooperation with the cage, thereby driving the spiral blades to rotate synchronously. While transporting the process gas to the end of the connecting pipe, the process gas can be evenly diffused to the inner side of the furnace body through the air holes, preventing the uneven diffusion of the process gas in the furnace cavity and ensuring the processing quality of the workpiece.

[0021] (2) In this solution, when the connecting pipe is installed through the mounting seat, the gap between the mounting seat and the furnace body is filled with a sealing rubber ring, thereby avoiding leakage from the connecting part during the transportation of the process gas. Description of the Drawings

[0022] Figure 1 is a three-dimensional structural schematic diagram of the present utility model;

[0023] Figure 2 is a front view schematic diagram of the furnace body of the present utility model;

[0024] Figure 3 is a partial cross-sectional view along the A-A line of the furnace body of the present utility model;

[0025] Figure 4 is an enlarged schematic diagram of part A of the present utility model;

[0026] Figure 5 is a structural schematic diagram of the connecting pipe of the present utility model.

[0027] Explanation of the reference numerals in the drawings:

[0028] 1. Furnace body; 2. Sealing door; 3. First interface; 4. Second interface; 5. Connecting pipe; 6. Mounting seat; 7. Cage; 8. Shaft rod; 9. Flow guiding cone; 10. Paddle blade; 11. Spiral blade; 12. Air hole; 13. Rib plate; 14. Sealing rubber ring. Detailed Embodiment

[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model; obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0030] Embodiment:

[0031] Please refer to Figures 1-5 , a diffusion furnace gas flow optimization device, including a furnace body 1, a sealing door 2 installed at the port part of the furnace body 1, and a first interface 3 and a second interface 4 conductively connected to the furnace body 1. A connecting pipe 5 conductively connected to the first interface 3 is installed in the inner cavity of the furnace body 1, and the end of the connecting pipe 5 far from the first interface 3 is arranged in a closed structure;

[0032] A retaining frame 7 is fixedly connected to the inner cavity of the connecting pipe 5 close to the first interface 3. A shaft rod 8 is rotatably connected between the retaining frame 7 and the end of the connecting pipe 5. A flow guiding cone 9 extending to the inner side of the first interface 3 is installed at one end of the shaft rod 8. A paddle 10 fixedly connected to the side wall of the shaft rod 8 is arranged on one side of the flow guiding cone 9. A spiral blade 11 is installed at the part of the shaft rod 8 located in the inner cavity of the connecting pipe 5;

[0033] Air holes 12 are arranged in an annular array on the outer wall of the connecting pipe 5 corresponding to the spiral blade 11;

[0034] It should be noted that when the diffusion furnace gas flow optimization device is in use, after placing the material in the inner side of the furnace body 1 through a quartz boat, the sealing door 2 is closed. The second interface 4 is used to connect to a sealing pipeline to adjust the vacuum degree in the furnace tube 20, and the first interface 3 is for the input and output of process gas;

[0035] After the process gas is conveyed to the inner side of the connecting pipe 5 at the first interface 3, under the disturbance of the air flow, the flow guiding cone 9 disperses the flowing air flow to the paddle 10. Under the action of the paddle 10, the process gas is blown towards the inner side of the connecting pipe 5. At the same time, the paddle 10 drives the shaft rod 8 to rotate in cooperation with the retaining frame 7, and then drives the spiral blade 11 to rotate synchronously. While conveying the process gas to the end of the connecting pipe 5, the process gas can be evenly diffused to the inner side of the furnace body 1 through the air holes 12, so that the process gas is not evenly diffused in the furnace cavity, ensuring the processing quality of the workpiece.

[0036] As Figure 3 , Figure 5 shown, one end of the connecting pipe 5 close to the first interface 3 is fixedly connected with a mounting seat 6, and an assembly hole is arranged on the surface of the mounting seat 6. A sealing rubber ring 14 closely attached to the inner cavity wall of the furnace body 1 is inlaid on the surface of the mounting seat 6;

[0037] It should be noted that when installing the connecting pipe 5 through the mounting seat 6, the gap between the mounting seat 6 and the furnace body 1 is filled by the sealing rubber ring 14, so as to avoid leakage from the connecting part during the conveyance of the process gas.

[0038] As Figure 5 shown, the part where the mounting seat 6 is combined with the connecting pipe 5 is fixedly connected with a rib plate 13 arranged in a right triangle structure, and a plurality of rib plates 13 are arranged in the radial position of the connecting pipe 5;

[0039] It should be noted that by providing the rib plate 13, the strength, rigidity and torsional resistance of the connecting pipe 5 are enhanced, and the warping and deformation of the product caused by uneven stress due to the difference in wall thickness of the connecting pipe 5 can be overcome, so as to increase the strength of the joint surface with the mounting seat 6.

[0040] As Figure 3 , Figure 5 shown, there are specifically three paddle blades 10, and the angle between the axes of the corresponding shaft rods 8 between two adjacent paddle blades 10 is 120°. Bearings are installed at the parts where the cage 7 and the connecting pipe 5 are combined with the shaft rod 8;

[0041] It should be noted that the resistance of the shaft rod 8 during rotation is reduced, and the rotation accuracy of the shaft rod 8 is ensured.

[0042] As Figure 3 shown, the outer diameter of the spiral blade 11 is adapted to the inner diameter of the connecting pipe 5;

[0043] It should be noted that by the rotation of the spiral blade 11, the process gas can be evenly conveyed inside the connecting pipe 5.

[0044] During use: After placing the material in the inner side of the furnace body 1 through the quartz boat, the sealing door 2 is closed. The second interface 4 is used to connect with the sealing pipeline to adjust the vacuum degree in the furnace tube 20, and the first interface 3 is for the input and output of the process gas;

[0045] After the process gas is conveyed to the inner side of the connecting pipe 5 at the first interface 3, under the disturbance of the air flow, the flow guiding cone 9 disperses the flowing air flow to the paddle blade 10. Under the action of the paddle blade 10, the process gas is blown to the inner side of the connecting pipe 5. At the same time, the paddle blade 10 drives the shaft rod 8 to rotate in cooperation with the cage 7, and then drives the spiral blade 11 to rotate synchronously. While conveying the process gas to the end of the connecting pipe 5, the process gas can be evenly diffused to the inner side of the furnace body 1 through the air holes 12.

[0046] The above is only a preferred specific embodiment of the present invention; however, the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its improved concept, makes equivalent substitutions or changes, and should be covered by the protection scope of the present invention.

Claims

1. A gas flow optimization device for a diffusion furnace, comprising a furnace body (1), a sealing door (2) installed at a port of the furnace body (1), and a first interface (3) and a second interface (4) conductively connected to the furnace body (1), characterized in that: The inner cavity of the furnace body (1) is provided with a connecting pipe (5) which is in conductive connection with the first interface (3), and the end of the connecting pipe (5) which is away from the first interface (3) is arranged in a closed structure; The inner cavity of the connecting pipe (5) close to the first interface (3) is fixedly connected with a retaining frame (7); a shaft (8) is rotatably connected between the retaining frame (7) and the end of the connecting pipe (5); a guide cone (9) extending to the inner side of the first interface (3) is installed at one end of the shaft (8); a blade (10) fixedly connected to the side wall of the shaft (8) is arranged on one side of the guide cone (9); and a spiral blade (11) is installed at a portion of the shaft (8) located in the inner cavity of the connecting pipe (5); The connecting pipe (5) is provided with air holes (12) in a circular array at an outer wall portion corresponding to the spiral blade (11).

2. The gas flow optimization device for a diffusion furnace according to claim 1, characterized in that: One end of the connecting pipe (5) close to the first interface (3) is fixedly connected to a mounting seat (6), and a mounting hole is provided on the surface of the mounting seat (6).

3. The gas flow optimization device for a diffusion furnace according to claim 2, characterized in that: The surface of the mounting seat (6) is inlaid with a sealing rubber ring (14) which is tightly fitted with the inner cavity wall of the furnace body (1).

4. The gas flow optimization device for a diffusion furnace according to claim 3, characterized in that: A rib plate (13) arranged in a right-angled triangle structure is fixedly connected to the portion where the mounting seat (6) is combined with the connecting pipe (5), and a plurality of rib plates (13) are arranged at radial positions of the connecting pipe (5).

5. The gas flow optimization device for a diffusion furnace according to claim 1, characterized in that: Specifically, three blades (10) are provided, and the angle between two adjacent blades (10) corresponding to the axis center line of the shaft rod (8) is 120°.

6. The gas flow optimization device for a diffusion furnace according to claim 1, characterized in that: The positions where the retaining frame (7) and the connecting pipe (5) are combined with the shaft rod (8) are all equipped with bearings.

7. The gas flow optimization device for a diffusion furnace according to claim 1, characterized in that: The outer diameter of the spiral blade (11) is matched with the inner diameter of the connecting pipe (5).

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