Reaction sintering silicon carbide ceramic cantilever paddle

Abstract

The utility model discloses a reaction sintering silicon carbide ceramic cantilever paddle which comprises a fixed area, a transition area and a bearing area which are sequentially, integrally and fixedly connected, the fixing area is of a hollow square tubular structure, the transition area and the bearing area each comprise a bottom plate and side plates oppositely arranged on the two sides, the bottom plates and the side plates on the two sides define a groove-shaped structure, bearing shoulders protruding outwards are fixed to the tops of the side plates on the two sides respectively, the transition area comprises a transition connecting plate, and the transition connecting plate is obliquely arranged. One end of the transition connecting plate is fixedly connected with the top plate of the fixing area, the two sides of the transition connecting plate are fixedly connected with the two side plates respectively, the end, away from the fixing area, of the transition connecting plate is spaced from the bottom plate, and the end, connected with the fixing area, of the transition connecting plate is higher than the end, away from the fixing area, of the transition connecting plate. The reaction sintering silicon carbide ceramic cantilever paddle can effectively prevent silicon accumulation, avoid non-uniform wall thickness of the cantilever paddle and prevent the cantilever paddle from being broken.

Description

Technical Field

[0001] The utility model relates to the technical field of cantilever paddles, in particular to a reaction-sintered silicon carbide ceramic cantilever paddle for silicon wafer production in a photovoltaic semiconductor diffusion furnace. Background Technique

[0002] When thermally growing oxide on a silicon wafer using a diffusion furnace, the silicon wafer needs to be placed on a quartz boat or a silicon carbide ceramic boat, and the quartz boat or the silicon carbide ceramic boat is placed on a cantilever paddle. The cantilever paddle serves as a key loading component to move the quartz boat or the silicon carbide ceramic boat carrying the silicon wafer into and out of the diffusion furnace.

[0003] The Chinese utility model patent authorization announcement number CN 208846967U, application number 201821473024.9, discloses a reaction-sintered silicon carbide ceramic cantilever paddle with a reinforcing wall. Although the reaction-sintered silicon carbide ceramic cantilever paddle with a reinforcing wall has the characteristics of large load-bearing capacity, small deformation amount, good stability, and long service life. However, along the direction from the fixed area to the bearing area, the transition area gradually shrinks until the connection between the transition area and the bearing area shrinks and closes. Since one end of the transition area (the connection between the transition area and the bearing area) is in a closed state, therefore, silicon is extremely likely to accumulate in the transition area of the cantilever paddle after reaction sintering, and it is difficult to clean it out. In addition, due to the difference in material between the accumulated silicon and the cantilever paddle body, the cantilever paddle will break during use. In addition, the wall thickness of the transition area at the connection between the transition area and the bearing area is relatively thick, which is inconsistent with the wall thickness of other parts. During use, the uneven wall thickness results in poor thermal shock resistance and also causes the cantilever paddle to break. Summary of the Utility Model

[0004] The technical problem to be solved by the utility model is to provide a reaction-sintered silicon carbide ceramic cantilever paddle, which can prevent silicon accumulation, avoid uneven wall thickness of the cantilever paddle, and prevent the cantilever paddle from breaking.

[0005] The technical solution adopted by the utility model to solve its technical problems is:

[0006] A reaction-sintered silicon carbide ceramic cantilever paddle, comprising: a fixed area, a transition area, and a bearing area that are sequentially and integrally fixedly connected; characterized in that,

[0007] The fixed area is a hollow square tubular structure, the transition area and the bearing area both include a bottom plate and two side plates oppositely arranged on both sides, the bottom plate and the two side plates enclose a trough-shaped structure, and supporting shoulders protruding outward are respectively fixed at the tops of the two side plates.

[0008] The transition area includes a transition connecting plate which is inclined. One end of the transition connecting plate is fixedly connected to the top plate of the fixed area. The two side plates are respectively and fixedly connected to both sides of the transition connecting plate. There is a gap between one end of the transition connecting plate away from the fixed area and the bottom plate. The end of the transition connecting plate connected to the fixed area is higher than the end of the transition connecting plate away from the fixed area.

[0009] Preferably, let the included angle between the transition connecting plate and the bottom plate be α, and 3° ≤ α ≤ 20°.

[0010] Preferably, the fixed area includes a fixedly connected fixed area top plate, two fixed area side plates and a fixed area bottom plate.

[0011] The side plates include two transition area side plates and two bearing area side plates which are oppositely arranged.

[0012] The bottom plate includes a transition area bottom plate and a bearing area bottom plate. The two sides of the transition area bottom plate are respectively and fixedly connected to the transition area side plates. The two sides of the bearing area bottom plate are respectively and fixedly connected to the bearing area side plates.

[0013] The supporting shoulders include a transition area supporting shoulder fixedly connected to the top end of the transition area side plate and a bearing area supporting shoulder fixedly connected to the top end of the bearing area side plate.

[0014] The two ends of the transition area bottom plate are respectively and fixedly connected to the fixed area bottom plate and the bearing area bottom plate.

[0015] The two ends of the transition area side plate are respectively and fixedly connected to the fixed area side plate and the bearing area side plate.

[0016] One end of the transition area supporting shoulder close to the fixed area is fixedly connected to the fixed area top plate and the fixed area side plate. One end of the transition area supporting shoulder close to the bearing area is fixedly connected to the bearing area supporting shoulder.

[0017] Preferably, the end of the transition connecting plate away from the fixed area is set as a concave arc-shaped end face.

[0018] Preferably, the supporting shoulder in the bearing area has a supporting plane.

[0019] Preferably, the inner space of the trough-shaped structure in the bearing area forms an avoidance channel, and the cross-section of the avoidance channel is trapezoidal.

[0020] After adopting the above technical solution, the beneficial effects of the utility model are:

[0021] Due to the spacing between the end of the transition connecting plate away from the fixed area and the bottom plate in the reaction-sintered silicon carbide ceramic cantilever paddle of the present utility model, that is, the end of the transition area close to the bearing area is open. Even if there is silicon accumulation in the transition area of the cantilever paddle after reaction sintering, it is easy to clean it out, effectively preventing silicon accumulation in the reaction-sintered silicon carbide ceramic cantilever paddle, and thus avoiding the fracture of the cantilever paddle during use due to silicon accumulation.

[0022] Moreover, the wall thickness at the transition area provided in the present utility model is the same as that of other parts. Therefore, the reaction-sintered silicon carbide ceramic cantilever paddle of the present utility model has good thermal shock resistance, avoiding the fracture of the cantilever paddle during use due to uneven wall thickness and poor thermal shock resistance.

[0023] In summary, the reaction-sintered silicon carbide ceramic cantilever paddle of the present utility model can effectively prevent silicon accumulation, avoid uneven wall thickness of the cantilever paddle, and prevent the cantilever paddle from breaking. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 is a schematic structural diagram of the reaction-sintered silicon carbide ceramic cantilever paddle of the present utility model;

[0025] Figure 2 is Figure 1 the top view structural diagram of the reaction-sintered silicon carbide ceramic cantilever paddle in

[0026] Figure 3 is Figure 2 the sectional structural diagram of the reaction-sintered silicon carbide ceramic cantilever paddle in

[0027] Figure 4 is Figure 2 the sectional structural diagram of the reaction-sintered silicon carbide ceramic cantilever paddle in

[0028] Figure 5 is Figure 2 the sectional structural diagram of the reaction-sintered silicon carbide ceramic cantilever paddle in

[0029] Figure 6 is Figure 2 the sectional structural diagram of the reaction-sintered silicon carbide ceramic cantilever paddle in

[0030] Figure 7 is Figure 2 the sectional structural diagram of the reaction-sintered silicon carbide ceramic cantilever paddle in

[0031] Figure 8 is a reference diagram of the use state of the reaction-sintered silicon carbide ceramic cantilever paddle;

[0032] In the figure: 1. Reaction-sintered silicon carbide ceramic cantilever paddle; 11. Fixed area; 111. Fixed area top plate; 112. Fixed area side plate; 113. Fixed area bottom plate; 12. Transition area; 121. Transition area bottom plate; 122. Transition area side plate; 123. Transition area supporting shoulder; 13. Bearing area; 131. Bearing area bottom plate; 132. Bearing area side plate; 133. Bearing area supporting shoulder; 134. Oblique chamfer; 14. Transition connecting plate; 141. Concave arc end face; 3. Diffusion furnace; 4. Silicon wafer; 5. Silicon carbide ceramic boat; 51. Shoulder; 6. Avoidance channel. Detailed implementation manners

[0033] The following further elaborates on the detailed implementation manners of the present utility model in conjunction with the accompanying drawings.

[0034] As Figures 1 to 7 The reaction-sintered silicon carbide ceramic cantilever paddle 1 shown jointly includes: a fixed area 11, a transition area 12, and a bearing area 13 that are sequentially and integrally fixedly connected; the fixed area 11 is a hollow square tubular structure, and both the transition area 12 and the bearing area 13 include a bottom plate and side plates oppositely arranged on both sides. The bottom plate and the two side plates enclose a trough-shaped structure, and outwardly protruding supporting shoulders are respectively fixed at the tops of the two side plates.

[0035] The transition area 12 includes a transition connecting plate 14. The transition connecting plate 14 is inclined. One end of the transition connecting plate 14 is fixedly connected to the top plate of the fixed area 11. The two sides of the transition connecting plate 14 are respectively fixedly connected to the two side plates. There is a distance H between the end of the transition connecting plate 14 far from the fixed area 11 and the bottom plate. The end of the transition connecting plate 14 connected to the fixed area 11 is higher than the end of the transition connecting plate 14 far from the fixed area 11.

[0036] Since there is a distance H between the end of the transition connecting plate 14 far from the fixed area 11 and the bottom plate, the end of the transition area 12 close to the bearing area 13 is open. Even if there is accumulated silicon in the transition area 12 of the cantilever paddle after reaction sintering, it is easy to clean it out, preventing the accumulation of silicon on the reaction-sintered silicon carbide ceramic cantilever paddle 1, and thus avoiding the fracture of the cantilever paddle during use due to the accumulation of silicon.

[0037] Moreover, the wall thickness at the transition area 12 provided in the present utility model is the same as that of other parts. Therefore, the reaction-sintered silicon carbide ceramic cantilever paddle 1 of the present utility model has good thermal shock resistance, avoiding the fracture of the cantilever paddle during use due to uneven wall thickness and poor thermal shock resistance.

[0038] In some embodiments, such as Figure 3As shown, let the angle between the transition connecting plate 14 and the bottom plate be α, where 3° ≤ α ≤ 20°. If α is too large, the overall length of the transition area will be short, resulting in stress concentration at the joints between the transition area 12 and the fixed area 11 and the bearing area 13, and it is prone to fracture. If α is too small, the overall length of the transition area 12 will be too long. To ensure the number of products to be carried, the length of the bearing area 13 will inevitably be extended, leading to an overall lengthening of the reaction-sintered silicon carbide ceramic cantilever paddle. However, an overly long reaction-sintered silicon carbide ceramic cantilever paddle will cause the cantilever end to sag and be prone to bending deformation, resulting in fracture of the reaction-sintered silicon carbide ceramic cantilever paddle.

[0039] In some embodiments, as Figures 1 to 7 collectively shown, the fixed area 11 includes a fixed area top plate 111, two fixed area side plates 112, and a fixed area bottom plate 113 that are fixedly connected.

[0040] The side plates include two transition area side plates 122 and two bearing area side plates 132 that are oppositely arranged.

[0041] The bottom plate includes a transition area bottom plate 121 and a bearing area bottom plate 131. The two sides of the transition area bottom plate 121 are respectively fixedly connected to the transition area side plates 122, and the two sides of the bearing area bottom plate 131 are respectively fixedly connected to the bearing area side plates 132.

[0042] The supporting shoulders include a transition area supporting shoulder 123 fixedly connected to the top end of the transition area side plate 122 and a bearing area supporting shoulder 133 fixedly connected to the top end of the bearing area side plate 132.

[0043] The two ends of the transition area bottom plate 121 are respectively fixedly connected to the fixed area bottom plate 113 and the bearing area bottom plate 131.

[0044] The two ends of the transition area side plate 122 are respectively fixedly connected to the fixed area side plate 112 and the bearing area side plate 132.

[0045] One end of the transition area supporting shoulder 123 close to the fixed area 11 is fixedly connected to the fixed area top plate 111 and the fixed area side plate 112, and one end of the transition area supporting shoulder 123 close to the bearing area 13 is fixedly connected to the bearing area supporting shoulder 133.

[0046] In some embodiments, as Figure 1 shown, the end of the transition connecting plate 14 away from the fixed area 11 is set as a concave arc end face 141. This avoids stress concentration on the transition connecting plate 14 and extends the service life of the reaction-sintered silicon carbide ceramic cantilever paddle.

[0047] In some embodiments, as Figure 1 shown, the supporting shoulder of the bearing area 13 has a supporting plane for supporting the carrier of the product to be fired. The inner space of the trough-shaped structure at the bearing area 13 forms an avoidance channel 6, and the cross-section of the avoidance channel 6 is trapezoidal. AsFigure 8 As shown, the fixing area 11 is usually clamped by a clamping device (not shown in the figure). The carrying area 13 is used to place the silicon carbide ceramic boat 5. The clamping device clamps the fixing area 11 and pushes the reaction-sintered silicon carbide ceramic cantilever paddle 1, the silicon carbide ceramic boat 5 thereon, and multiple silicon wafers 4 on the silicon carbide ceramic boat 5 into the diffusion furnace 3. After the reaction is completed, the reaction-sintered silicon carbide ceramic cantilever paddle 1, the silicon carbide ceramic boat 5 thereon, and multiple silicon wafers 4 on the silicon carbide ceramic boat 5 are withdrawn together. Multiple silicon wafers 4 are sequentially placed along the length direction of the silicon carbide ceramic boat 5. The shoulder 51 of the silicon carbide ceramic boat 5 is placed on the supporting shoulder 133 of the carrying area of the cantilever paddle. A part of the lower end of the silicon wafer 4 extends out of the bottom of the silicon carbide ceramic boat 5. The supporting shoulder 133 of the carrying area has a supporting plane that contacts the lower surface of the shoulder 51 of the silicon carbide ceramic boat 5.

[0048] To prevent the part of the silicon wafer 4 extending out of the silicon carbide ceramic boat 5 from interfering with the carrying area 13, the inner space of the groove-shaped structure at the carrying area 13 forms an avoidance channel 6, and the cross-section of the avoidance channel 6 is trapezoidal.

[0049] In summary, the reaction-sintered silicon carbide ceramic cantilever paddle of the present utility model can effectively prevent silicon accumulation, avoid uneven wall thickness of the cantilever paddle, and prevent the cantilever paddle from breaking.

Claims

1. A reaction-sintered silicon carbide ceramic cantilever paddle, comprising: The fixing area, transition area and bearing area are sequentially and integrally fixedly connected; characterized in that, The fixing area is a hollow square structure, the transition area and the bearing area both include a bottom plate and two side plates arranged opposite to each other, the bottom plate and the side plates on both sides form a groove-shaped structure, and the tops of the side plates on both sides are respectively fixed with supporting shoulders protruding outwards. The transition zone includes a transition connecting plate, which is inclined, one end of the transition connecting plate is fixedly connected to the top plate of the fixed zone, both sides of the transition connecting plate are respectively fixedly connected to the side plates on both sides, there is a gap between the end of the transition connecting plate away from the fixed zone and the bottom plate, and the end of the transition connecting plate connected to the fixed zone is higher than the end of the transition connecting plate away from the fixed zone.

2. The reaction-sintered silicon carbide ceramic cantilever paddle according to claim 1, characterized in that: Assume that the included angle between the transition connecting plate and the bottom plate is α, 3°≤α≤20°.

3. The reaction-sintered silicon carbide ceramic cantilever paddle according to claim 1, characterized in that: The fixed area includes a fixed area top plate, two fixed area side plates and a fixed area bottom plate, which are fixedly connected. The side panels include two transition area side panels and two bearing area side panels that are arranged opposite to each other. The bottom plate includes a transition area bottom plate and a bearing area bottom plate, the two sides of the transition area bottom plate are respectively fixedly connected to the transition area side plates, and the two sides of the bearing area bottom plate are respectively fixedly connected to the bearing area side plates. The supporting shoulder comprises a transition area supporting shoulder fixedly connected to the top of the transition area side plate and a bearing area supporting shoulder fixedly connected to the top of the bearing area side plate. The two ends of the transition area bottom plate are respectively fixedly connected to the fixed area bottom plate and the bearing area bottom plate. The two ends of the transition area side plate are respectively fixedly connected to the fixed area side plate and the bearing area side plate. One end of the transition zone supporting shoulder close to the fixed zone is fixedly connected to the fixed zone top plate and the fixed zone side plate, and one end of the transition zone supporting shoulder close to the load-bearing zone is fixedly connected to the load-bearing zone supporting shoulder.

4. The reaction-sintered silicon carbide ceramic cantilever paddle according to claim 1, characterized in that: One end of the transition connecting plate away from the fixing area is configured as a concave arc-shaped end surface.

5. The reaction-sintered silicon carbide ceramic cantilever paddle according to claim 1, characterized in that: The bearing shoulder of the bearing area has a bearing plane.

6. The reaction-sintered silicon carbide ceramic cantilever paddle according to claim 2, characterized in that: The inner space of the groove-shaped structure at the bearing area forms an avoidance channel, and the cross section of the avoidance channel is trapezoidal.

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