Adjustable device and equipment for measuring resistivity

Abstract

The utility model relates to an adjustable device and equipment for measuring resistivity. The device comprises a conductivity detection piece, a mounting piece, an auxiliary flattening piece, a supporting piece and a limiting piece, one side of the conductivity detection piece is inserted into the mounting piece, and the mounting piece is rotationally arranged on the supporting piece in a sleeving manner so as to adjust the longitudinal displacement of the conductivity detection piece and is fixed through the limiting piece; wherein the number of the conductivity detection pieces is multiple, and before the resistivity is measured, the ends, deviating from the mounting piece, of the conductivity detection pieces are pressed on the same straight line through the auxiliary flattening piece; one conductivity detection piece corresponds to one mounting piece, and the plurality of mounting pieces are arranged on the rotating shaft of the supporting piece at intervals. The device has the beneficial effects that accurate positioning can be carried out while a plurality of conductivity detection pieces are installed, so that the operation of disassembling and assembling the conductivity detection pieces for multiple times when a sample is clamped is reduced to a certain extent; the sample can be repeatedly measured, and the occupied area of the device is small.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to an adjustable device and equipment for measuring resistivity. Background Art

[0002] At present, the layout of probes in the hot and cold stage products in the semiconductor industry is generally to arrange probes in four corners, or to arrange 4 independent probes side by side on the same side. This layout has the following shortcomings, as follows:

[0003] 1. This layout structure has limitations in the use of the in-line four-probe method, and the probes cannot be positioned relatively accurately;

[0004] 2. When clamping the sample, the probe needs to be operated multiple times;

[0005] 3. It is impossible to measure the repeatability of the sample. The clamping and positioning are different each time. The same sample cannot be measured repeatedly to confirm the repeatability.

[0006] 4. It occupies a large area. Utility Model Content

[0007] The utility model aims at the technical problems existing in the prior art and provides an adjustable device and equipment for measuring resistivity.

[0008] The technical solution of the utility model to solve the above technical problems is as follows:

[0009] The first aspect protects: an adjustable device for measuring resistivity, comprising a conductivity detection member, a mounting member, an auxiliary flattening member, a supporting member, and a limiting member;

[0010] One side of the conductivity detection member is inserted into the mounting member, and the mounting member is rotatably sleeved on the support member to adjust the displacement of the conductivity detection member in the longitudinal direction, and is fixed by the limiting member;

[0011] There are several conductivity detection members, and before measuring the resistivity, the end of the conductivity detection member facing away from the mounting member is pressed on the same straight line by the auxiliary flattening member; one conductivity detection member corresponds to one mounting member, and several mounting members are arranged at intervals on the rotating shaft of the support member.

[0012] As a further technical solution, it also includes an adjusting partition, which is arranged on the supporting member and buckled on the mounting member to adjust the distance between the plurality of conductivity detection members;

[0013] Wherein, a spacing hole on the adjusting partition is correspondingly provided with a mounting piece.

[0014] As a further technical solution, an insertion hole for inserting the conductivity detection element is formed in the mounting member along its length direction, and a rotation through hole is formed in the mounting member along its width direction and rotatably sleeved on the rotating shaft;

[0015] Wherein, the center line of the insertion hole coincides with the longitudinal center line of the mounting member, and the included angle between the center line of the rotation through hole and the longitudinal center line of the mounting member is greater than 90°.

[0016] As a further technical solution, a first screw hole is formed in the mounting member along its height direction, so that after the conductivity detection element is inserted into the mounting member, a screw is inserted into the first screw hole to lock and fix it;

[0017] Wherein, the first screw hole communicates with the insertion hole.

[0018] As a further technical solution, the limiting member includes a limiting plate, a telescopic elastic member, and a set screw. The limiting plate is arranged parallel and spaced below the mounting member, and one end of the limiting plate is fixed on the supporting member. The telescopic elastic member is sleeved outside the set screw, so that the locking end of the set screw passes through the lower part of the limiting plate and extends into the second screw hole of the mounting member to control the longitudinal displacement of the mounting member.

[0019] As a further technical solution, a strip-shaped groove is formed along the upper edge of the limiting plate for several set screws to pass through and connect with the mounting member;

[0020] Wherein, the opening direction of the strip-shaped groove is parallel to the space of the rotating shaft.

[0021] As a further technical solution, the supporting member further includes a bracket, a base, and a baffle. The bracket is locked to the upper end face of the base by screws. There are two baffles symmetrically arranged on both sides of the length direction of the bracket. The two baffles are connected by the rotating shaft and fixedly arranged parallel to it;

[0022] Wherein, the limiting plate is fixedly arranged between the bracket and the base.

[0023] As a further technical solution, the auxiliary flattening member includes a pressing part and strip-shaped parts on both sides of the pressing part. The strip-shaped parts are fixed to the supporting member on the side far away from the pressing part. A space for accommodating part of the mounting member and the conductivity detection element is formed among the strip-shaped parts, the pressing part, and the rotating shaft;

[0024] Wherein, an installation groove for placing the conductivity detection element is formed in the pressing part.

[0025] As a further technical solution, the installation groove on the pressing part is opened from top to bottom, and its longitudinal section is configured as an inverted 7 shape to adjust the displacement of the conductivity detection part in the longitudinal direction.

[0026] The second aspect of the protection: A device includes the adjustable device described in the first aspect.

[0027] The beneficial effects of the present utility model are:

[0028] 1. It can accurately position while installing several conductivity detection parts, reducing the operation of disassembling and assembling the conductivity detection parts multiple times when clamping samples to a certain extent; and it can perform repetitive measurements on samples, with a small occupied area of the device;

[0029] 2. The structural designs of the installation part and the adjusting partition can adjust the equal spacing between several conductivity detection parts and achieve quantitative spacing;

[0030] 3. The structural design of the limiting part ensures the close contact between each conductivity probe part and the sample. Description of the Drawings

[0031] Figure 1 It is a three-dimensional structural schematic diagram before measuring the resistivity of an adjustable device for measuring resistivity of the present utility model;

[0032] Figure 2 、 Figure 3 They are respectively three-dimensional schematic diagrams from different perspectives after removing some structures when measuring the resistivity of an adjustable device for measuring resistivity of the present utility model;

[0033] Figure 4 、 Figure 5 They are respectively the state diagrams of the installation part tilting up and pressing down when measuring the resistivity after removing the auxiliary flattening part of an adjustable device for measuring resistivity of the present utility model;

[0034] Figure 6 、 Figure 7 They are respectively the state diagrams of small spacing and large spacing between conductivity detection parts when measuring the resistivity after removing the auxiliary flattening part of an adjustable device for measuring resistivity of the present utility model;

[0035] Figure 8 、 Figure 9 They are respectively the structural schematic diagrams of the adjusting partition with large spacing and small spacing of the present utility model;

[0036] Figure 10 It is the top view structural schematic diagram of the auxiliary flattening part;

[0037] Figure 11 It is the top view structural schematic diagram of the installation part.

[0038] In the accompanying drawings, the list of components represented by each reference numeral is as follows:

[0039] Conductivity detection member 1;

[0040] Mounting member 2, insertion hole 21, rotary through hole 22, first screw hole 23, connecting portion 24, mounting portion 25, second screw hole 26;

[0041] Auxiliary flattening member 3, pressing portion 31, mounting groove 311, strip portion 32;

[0042] Support member 4, rotating shaft 41, bracket 42, base 43, baffle 44;

[0043] Limiting member 5, limiting plate 51, strip groove 511, telescopic elastic member 52, set screw 53;

[0044] Adjusting partition 6, spacing hole 61;

[0045] Screw 7. Detailed implementation manners

[0046] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present application.

[0047] In the description of the present application, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of the described features. In the description of the present application, the meaning of "a plurality" is two or more unless otherwise specifically defined.

[0048] In the description of the present application, the term "for example" is used to mean "serving as an example, illustration, or explanation". Any embodiment described as "for example" in the present application is not necessarily construed as being more preferred or having more advantages than other embodiments. In order for any person skilled in the art to implement and use the present invention, the following description is given. In the following description, details are set forth for purposes of explanation. It should be understood that those of ordinary skill in the art can recognize that the present invention can be implemented without using these specific details. In other instances, well-known structures and processes are not described in detail to avoid obscuring the description of the present invention with unnecessary details. Therefore, the present invention is not intended to be limited to the embodiments shown, but is to be accorded the widest scope consistent with the principles and features disclosed in the present application.

[0049] In order to perform repeatable measurements on the sample and realize accurate positioning of the probe, this embodiment provides an adjustable device for measuring resistivity, see Figures 1 - 3 , specifically including a conductivity detector 1, a mounting member 2, an auxiliary flattening member 3, a support member 4, and a limiting member 5; one side of the conductivity detector 1 is inserted into the mounting member 2, and the mounting member 2 is rotatably sleeved on the support member 4 to adjust the displacement of the conductivity detector 1 in the longitudinal direction, and is fixed by the limiting member 5; wherein, the conductivity detector 1 is provided with a plurality of probes, and before measuring the resistivity, the end thereof away from the mounting member 2 is pressed on the same straight line by the auxiliary flattening member 3, and the auxiliary flattening member 3 is removed when measuring the resistivity; one conductivity detector 1 corresponds to one mounting member 2, and a plurality of mounting members 2 are spaced apart on the rotating shaft 41 of the support member 4. In this embodiment, the conductivity detector 1 is preferably a probe, and during operation, the probe is pressed on the sample to perform electrical measurement, that is, before the electrical measurement, the auxiliary flattening member 3 is used to press a plurality of probes on the same straight line, and the auxiliary flattening member 3 is removed when the electrical measurement is performed, so that precise positioning is achieved and the probe does not need to be operated multiple times during the sample clamping process;

[0050] In the specific implementation process, see Figure 8 , Figure 9 In order to make the plurality of conductivity detectors 1 arranged at equal intervals and at equal intervals, the debugging device further comprises an adjusting partition 6, which is arranged on the supporting member 4 and buckled on the mounting member 2 to adjust the intervals between the plurality of conductivity detectors 1; wherein, one spacing hole 61 on the adjusting partition 6 corresponds to one mounting member 2. That is, the spacing holes 61 on different adjusting partitions 6 have different sizes. When it is necessary to adjust the intervals between the plurality of conductivity detectors 1, the adjusting partition 6 with suitable spacing holes 61 can be selected so that one spacing hole 61 is correspondingly snapped into one mounting member 2;

[0051] In the specific implementation process, see Figure 11 The mounting member 2 is provided with an insertion hole 21 opened along its length direction for inserting the conductivity detection member 1, and a rotation through hole 22 opened along its width direction and rotatably sleeved on the rotating shaft 41; wherein the center line of the insertion hole 21 coincides with the longitudinal center line of the mounting member 2, and the angle between the center line of the rotation through hole 22 and the longitudinal center line of the mounting member 2 is greater than 90°, so that the contact ends of the conductivity detection members 1 and the sample are gathered toward the middle to measure a sample with a smaller area;

[0052] More specifically, a first screw hole 23 is formed in the mounting member 2 along its height direction, so that after the conductivity detection member 1 is inserted into the mounting member 2, it is locked and fixed by inserting a screw 7 into the first screw hole 23; wherein, the first screw hole 23 communicates with the insertion hole 21;

[0053] Preferably, the mounting member 2 includes a connecting portion 24 and mounting portions 25 connected to both sides of the connecting portion 24. To facilitate adjusting the angle between the conductivity detection members 1, the mounting portions 25 are symmetrically connected to opposite side walls of the connecting portion 24, and the width of the mounting portion 25 is smaller than the width of the connecting portion 24, so that an angle α with a cross-sectional structure greater than 90° and less than 180° is formed between the connecting portion 24 and the mounting portion 25, that is, the connecting portion 24 is inclined, and the two connecting portions 24 are arranged on both sides of the connecting portion 24 with a common center line; further, the connecting portion 24 and the mounting portion 25 are both rectangular parallelepiped structures and share a common horizontal center; the insertion hole 21 and the first screw hole 23 are both formed in the mounting portion 25, and the rotation through hole 22 is formed in the connecting portion 24; in a specific implementation, the connecting portion 24 and the mounting portion 25 are integrally formed;

[0054] The connecting portion 24 is received in the spacer hole 61 and can move horizontally therein to adjust the distance between the conductivity detection members 1;

[0055] For the convenience of the test, for example, when installing four conductivity detection members 1, the two mounting members 2 located on the outermost side of the rotating shaft 41 are installed in opposite directions, while the adjacent inner conductivity detection members 1 are installed in the same direction. The specific number and installation direction of the installed conductivity detection members 1 are determined according to actual requirements.

[0056] In the specific implementation process, referring to Figure 1 、 Figures 3 - 5 ,the limiting member 5 includes a limiting plate 51, a telescopic elastic member 52, and a set screw 53. The limiting plate 51 is arranged in parallel and at intervals below the mounting member 2, and one end of it is fixed to the support member 4. The telescopic elastic member 52 is sleeved outside the set screw 53, so that the locking end of the set screw 53 passes through the lower part of the limiting plate 51 and extends into the second screw hole 26 of the mounting member 2 to control the longitudinal displacement of the mounting member 2.

[0057] In detail, the mounting portion 25 is provided with the first screw hole 23 and the second screw hole 26, and the first screw hole 23 and the second screw hole 26 are arranged in parallel and are communicated with the insertion hole 21; during use, the conductivity detector 1 is inserted into the mounting portion 25 on the side away from the stopper 5, at which time, the first screw hole 23 on this side allows the screw 7 to pass through to press the corresponding conductivity detector 1, and the second screw hole 26 can be used as a viewing window to observe the insertion depth of the conductivity detector 1, so that The second screw hole 26 is located on a side close to the connecting portion 24, while the first screw hole 23 is located on a side away from the connecting portion 24; at the same time, the first screw hole 23 on the mounting portion 25 on the side away from the conductivity detector 1 is used for locking and connecting the mounting member 2 with other equipment, such as connecting with a hot and cold table screw, while the second screw hole 26 is used for locking and connecting with the plug screw 53 to adjust the longitudinal displacement of the mounting member 2, that is, when the telescopic elastic member 52 sleeved on the plug screw 53 is in an extended state (see Figure 4 ), the mounting member 2 rotates around the rotating shaft 41, so that the mounting member 2 with the conductivity detection member 1 on one side thereof is tilted upward and the other side thereof is pressed downward; when the telescopic elastic member 52 sleeved on the plug screw 53 is in a compressed state (see Figure 5 ), the mounting member 2 rotates around the rotating shaft 41, so that one side of the mounting member 2 provided with the conductivity detection member 1 is pressed down and the other side is tilted upward, thereby realizing the longitudinal displacement of the conductivity detection member 1 to ensure that each of the conductivity detection members 1 is in precise contact with the sample.

[0058] For ease of operation, see Figure 10 The upper edge of the limit plate 51 is provided with a strip groove 511, for a plurality of the plug screws 53 to pass through side by side and connect with a plurality of the mounting members 2; wherein the strip groove 511 is opened in a direction parallel to the rotation shaft 41. That is, one plug screw 53 corresponds to one mounting member 2, and one mounting member 2 corresponds to one conductivity detector 1.

[0059] In the specific implementation process, see Figures 1 - 5, the support member 4 further includes a bracket 42, a base 43, and a baffle 44. The bracket 42 is screwed and locked to the upper end surface of the base 43. There are two baffles 44, which are symmetrically arranged on both sides of the length direction of the bracket 42. Two of the baffles 44 are connected by the rotating shaft 41 and fixedly arranged in parallel therewith. Among them, the limiting plate 51 is fixedly arranged between the bracket 42 and the base 43. Optionally, the base 43 is of a frame structure to reduce weight and floor area at the same time, and the bracket 42 is a horizontal plate structure arranged on the upper part of the base 43, so that the base 43, the limiting plate 51, and the bracket 42 are stacked in sequence from bottom to top and connected by screws. The baffle 44 is vertically arranged on the upper end surface of the bracket 42, and two of the baffles 44 are fixedly connected by the rotating shaft 41. Optionally, it is fixed by screws. That is, the rotating shaft 41 is arranged in parallel with a gap from the bracket 42, so that the mounting member 2 rotates around the rotating shaft 41 to control the longitudinal displacement of the conductivity detector 1 on the mounting member 2.

[0060] In the specific implementation process, referring to Figure 10 , the auxiliary flattening member 3 includes a pressing part 31 and strip-shaped parts 32 located on both sides of the pressing part 31. One side of the strip-shaped part 32 away from the pressing part 31 is fixed to the support member 4. A space for accommodating part of the mounting member 2 and the conductivity detector 1 is formed among the strip-shaped part 32, the pressing part 31, and the rotating shaft 41. Among them, an installation groove 311 for placing the conductivity detector 1 is formed on the pressing part 31. In order to facilitate pressing on the conductivity detector 1, the installation groove 311 on the pressing part 31 is opened from top to bottom, and its longitudinal section is configured as an inverted 7 shape to adjust the longitudinal displacement of the conductivity detector 1. It should be noted that the height of the installation groove 311 is less than the thickness of the pressing part 31.

[0061] Specifically, one end of the strip-shaped part 32 away from the pressing part 31 is fixed to the bracket 42, optionally connected by screws.

[0062] This embodiment is implemented as follows:

[0063] First, the probe is installed in the insertion hole 21 and locked and fixed by the screw 7. Then, the longitudinal displacement of the probe is adjusted by the dowel screw 53. During this process, the mounting member 2 rotates around the rotating shaft 41. After adjustment, it is locked and fixed. If the distance between the probes needs to be adjusted, an appropriate adjustment partition 6 can be selected and installed. The distance between the spacing holes 61 on the adjustment partition 6 is 2mm / 2.5mm / 3mm / 3.5mm, which is selected according to actual needs. The smaller the distance, the smaller the distance between the ends of the probes away from the mounting member 2.

[0064] Finally, the auxiliary flattening member 3 is arranged on the supporting member 4, and one probe corresponds to one mounting groove 311, so that the tips of several probes facing away from the rotating shaft 41 are in the same straight line, and then the auxiliary flattening member 3 is removed for subsequent resistivity detection.

[0065] In this embodiment, the rotating shaft 41 , the limiting plate 51 , and the adjusting partition 6 are all made of insulating materials to ensure that there is no electrical conduction between the probes; and the height of the base 43 can be selected according to the application scenario.

[0066] Example 2

[0067] A device is provided for protecting, which includes the adjustable device described in Example 1. To facilitate the installation and stability of the adjustable device, a mounting hole is provided at the lower part of the base 43, which can be connected to the device by screws.

[0068] It should be noted that in the above embodiments, the description of each embodiment has its own emphasis, and for parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0069] Although the preferred embodiments of the utility model have been described, those skilled in the art may make other changes and modifications to these embodiments once they have learned the basic creative concept. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments and all changes and modifications falling within the scope of the utility model.

[0070] Obviously, those skilled in the art can make various changes and modifications to the present invention without departing from the spirit and scope of the present invention. Thus, if these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.

Claims

1. An adjustable device for measuring resistivity, characterized in that: It comprises a conductivity detection component (1), a mounting component (2), an auxiliary flattening component (3), a supporting component (4), and a limiting component (5); The auxiliary flattening piece of the mounting piece (2) is inserted into one side of the conductivity detection piece (1); the mounting piece (2) is rotatably sleeved on the support piece (4) to adjust the longitudinal displacement of the conductivity detection piece (1) and is fixed by the limiting piece (5); The conductivity detection components (1) are provided with a plurality of them, and before measuring the resistivity, the ends thereof facing away from the mounting component (2) are pressed onto the same straight line by the auxiliary flattening component (3); one conductivity detection component (1) corresponds to one mounting component (2), and the plurality of mounting components (2) are arranged at intervals on the rotating shaft (41) of the support component (4).

2. The adjustable device according to claim 1, characterized in that: It also comprises an adjusting baffle (6), wherein the adjusting baffle (6) is arranged on the supporting member (4) and buckled on the mounting member (2) so as to adjust the spacing between the plurality of conductivity detection members (1); Wherein, a spacing hole (61) on the adjusting partition plate (6) is correspondingly mounted with a mounting member (2).

3. The adjustable device according to claim 1, characterized in that: The mounting member (2) is provided with an insertion hole (21) opened along its length direction for inserting the conductivity detection member (1), and a rotation through hole (22) opened along its width direction and rotatably sleeved on the rotation shaft (41); The center line of the insertion hole (21) coincides with the longitudinal center line of the mounting member (2), and the angle between the center line of the rotation through hole (22) and the longitudinal center line of the mounting member (2) is greater than 90°.

4. The adjustable device according to claim 3, characterized in that: The mounting member (2) is provided with a first screw hole (23) along its height direction, so that after the conductivity detection member (1) is inserted into the mounting member (2), the screw (7) is inserted into the first screw hole (23) to be locked and fixed; Wherein, the first screw hole (23) is communicated with the insertion hole (21).

5. The adjustable device according to claim 1, characterized in that: The limiting member (5) comprises a limiting plate (51), a telescopic elastic member (52), and a plug screw (53). The limiting plate (51) is arranged in parallel and spaced relationship below the mounting member (2), and one end of the limiting plate is fixed to the supporting member (4). The telescopic elastic member (52) is sleeved outside the plug screw (53), so that the locking end of the plug screw (53) passes through the lower part of the limiting plate (51) and then extends into the second screw hole (26) of the mounting member (2) to control the displacement of the mounting member (2) in the longitudinal direction.

6. The adjustable device according to claim 5, characterized in that A strip-shaped groove (511) is formed on the upper edge of the limit plate (51) for a plurality of the driving screws (53) to pass through and be connected to the mounting member (2); The strip-shaped groove (511) is opened in a direction parallel to the rotation axis (41).

7. The adjustable device according to claim 5, characterized in that: The support member (4) further comprises a bracket (42), a base (43), and a baffle (44); the bracket (42) is screwed to the upper end surface of the base (43); two baffles (44) are provided and symmetrically arranged on both sides of the bracket (42) in the length direction; the two baffles (44) are connected by the rotating shaft (41) and fixed parallel to the rotating shaft; Wherein, the limiting plate (51) is fixedly arranged between the bracket (42) and the base (43).

8. The adjustable device according to claim 1, characterized in that: The auxiliary flattening member (3) comprises a pressure portion (31) and strip portions (32) located on both sides of the pressure portion (31); a side of the strip portion (32) away from the pressure portion (31) is fixed to the support member (4); a space for accommodating part of the mounting member (2) and the conductivity detection member (1) is formed between the strip portion (32), the pressure portion (31) and the rotating shaft (41); Wherein, the pressure-applying portion (31) is provided with a mounting groove (311) for accommodating the conductivity detection element (1).

9. The adjustable device according to claim 8, characterized in that The mounting groove (311) on the pressure-applying portion (31) is opened from top to bottom, and its longitudinal cross-section is constructed in an inverted 7 shape, so as to adjust the longitudinal displacement of the conductivity detection element (1).

10. An adjustable device for measuring resistivity, characterized in that: Comprising an adjustable device as described in any one of claims 1-9.

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