Wafer state detection system of wafer box opener

Abstract

The utility model discloses a wafer state detection system of a wafer box opener, which comprises a first detection mechanism used for detecting the number of wafers in a wafer box, and the first detection mechanism is obliquely arranged at the front end and the rear end of the bottom of a lifting mechanism; the second detection mechanism is used for detecting whether the wafer in the wafer box is obliquely placed or not, and the second detection mechanism is arranged at the left end and the right end of the bottom of the lifting mechanism and located at the end close to the main body frame; and the third detection mechanism is used for detecting whether the wafer in the wafer box protrudes, and the third detection mechanism is arranged at the left end and the right end of the bottom of the lifting mechanism and located at the end away from the main body frame. The two groups of second detection mechanisms and the two groups of third detection mechanisms respectively correspond to the detection sizes of the 12-inch wafer box and the 8-inch wafer box, the first detection mechanism is obliquely arranged, the detection route of the first detection mechanism is not limited by the sizes of the wafer boxes, and the wafer state detection compatible with the 12-inch wafer box and the 8-inch wafer box at the same time is realized.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductors, and particularly relates to a wafer state detection system for a wafer cassette opener. Background Art

[0002] A wafer cassette is a container used to protect, transport, and store wafers in the semiconductor manufacturing process. Currently, 12-inch and 8-inch wafer cassettes are commonly used.

[0003] In the prior art, for example, Chinese invention patent application CN202310554515.5 discloses a pod wafer transfer and opening device and its wafer scanning operation method, which can detect the state of wafers in the wafer cassette, but cannot be compatible with both 12-inch and 8-inch wafer cassettes at the same time. For example, after detecting a 12-inch wafer cassette, the detection mechanism needs to be adjusted in position before detecting an 8-inch wafer cassette.

[0004] Therefore, a wafer state detection system for a wafer cassette opener is needed to simultaneously detect the wafer states of 12-inch and 8-inch wafer cassettes. Summary of the Utility Model

[0005] To achieve the above object, the utility model provides a wafer state detection system for a wafer cassette opener. The wafer cassette opener includes a main frame and an opening mechanism. The opening mechanism is arranged at the front end of the main frame, and the opening mechanism includes a lifting mechanism and a positioning platform.

[0006] The wafer state detection system includes:

[0007] A first detection mechanism for detecting the number of wafers in the wafer cassette. The first detection mechanism is inclined and arranged at the front and rear ends of the bottom of the lifting mechanism.

[0008] A second detection mechanism for detecting whether the wafers in the wafer cassette are placed crooked. The second detection mechanism is horizontally arranged at the left and right ends of the bottom of the lifting mechanism and is located at one end close to the main frame.

[0009] A third detection mechanism for detecting whether the wafers in the wafer cassette protrude. The third detection mechanism is horizontally arranged at the left and right ends of the bottom of the lifting mechanism and is located at one end far from the main frame.

[0010] Preferably, there is a set of the first detection mechanism.

[0011] Preferably, there are two sets of the second detection mechanism.

[0012] Preferably, the two sets of the second detection mechanism are arranged in parallel, and the distances between the two sets of the second detection mechanism and the main frame are different.

[0013] Preferably, the two detection units of the second detection mechanism are arranged at different heights.

[0014] Preferably, two sets of the third detection mechanism are provided.

[0015] Preferably, the two sets of the third detection mechanism are arranged in parallel, and the distances between the two sets of the third detection mechanism and the main body frame are different.

[0016] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0017] (1) The second detection mechanism and the third detection mechanism of the present utility model are both provided with two sets, and the distances from the main body frame are different. The two sets of the second detection mechanism and the two sets of the third detection mechanism respectively correspond to the detection sizes of 12-inch and 8-inch wafer cassettes, realizing the wafer state detection that is compatible with both 12-inch and 8-inch wafer cassettes at the same time.

[0018] (2) The first detection mechanism of the present utility model is arranged obliquely, ensuring that the detection route of the first detection mechanism can pass through the wafer cassette regardless of whether it is an 8-inch or 12-inch wafer cassette. Its detection route is not limited by the size of the wafer cassette, and it can also simultaneously detect the wafer state of both 12-inch and 8-inch wafer cassettes. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0020] Figure 1 Structural schematic diagram of a wafer cassette opener disclosed in an embodiment of the present utility model;

[0021] Figure 2 Structural schematic diagram of the opening mechanism of a wafer cassette opener disclosed in an embodiment of the present utility model;

[0022] Figure 3 Structural schematic diagram of the wafer state detection system of a wafer cassette opener disclosed in an embodiment of the present utility model.

[0023] In the figure: main body frame 100, opening mechanism 200, lifting mechanism 210, positioning platform 220, first detection mechanism 310, second detection mechanism 320, third detection mechanism 330, wafer cassette 400. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0025] Figure 1 The structural schematic diagram of the wafer cassette opener disclosed in the embodiment of the present utility model is shown. Figure 2 The structural schematic diagram of the opening mechanism of the wafer cassette opener disclosed in the embodiment of the present utility model is shown. The wafer cassette opener includes a main body frame 100 and an opening mechanism 200. The opening mechanism 200 is arranged at the front end of the main body frame 100. The opening mechanism 200 includes a lifting mechanism 210 and a positioning platform 220. During the process of opening the wafer cassette 400, the wafer cassette 400 is first positioned and fixed on the positioning platform 220, and then the lifting mechanism 210 rises and drives the outer cover of the wafer cassette 400 to be opened, realizing the opening of the wafer cassette 400.

[0026] During this process, it is necessary to detect the state of the wafers in the wafer cassette 400. Figure 3 The structural schematic diagram of the wafer state detection system of the wafer cassette opener disclosed in the embodiment of the present utility model is shown. The wafer state detection system is arranged at the bottom of the lifting mechanism 210 and rises together with the lifting mechanism 210 during the rising process of the lifting mechanism 210.

[0027] The wafer state detection system includes a first detection mechanism 310, a second detection mechanism 320, and a third detection mechanism 330.

[0028] The first detection mechanism 310 is used to detect the number of wafers in the wafer cassette 400. The first detection mechanism 310 is inclined and arranged at the front and rear ends of the bottom of the lifting mechanism 210. The inclined arrangement of the first detection mechanism 310 ensures that the detection route of the first detection mechanism 310 can pass through the wafer cassette regardless of whether it is an 8-inch or 12-inch wafer cassette, and its detection route is not limited by the size of the wafer cassette, and can simultaneously be compatible with the wafer state detection of 12-inch and 8-inch wafer cassettes. Preferably, a group of first detection mechanisms 310 are arranged to prevent interference with each other.

[0029] The second detection mechanism 320 is used to detect whether the wafers in the wafer cassette 400 are placed obliquely. The second detection mechanism 320 is arranged at the left and right ends of the bottom of the lifting mechanism 210 and is located at one end close to the main body frame 100. Preferably, two sets of the second detection mechanisms 320 are provided, and the two sets of the second detection mechanisms 320 are arranged in parallel. The distances between the two sets of the second detection mechanisms 320 and the main body frame 100 are different. The two sets of the second detection mechanisms respectively correspond to the detection sizes of 12-inch and 8-inch wafer cassettes, realizing the detection of the wafer states of both 12-inch and 8-inch wafer cassettes simultaneously.

[0030] In another embodiment, the two detection units of the second detection mechanism 320 are arranged at different heights to more accurately detect whether the wafers are placed obliquely.

[0031] The third detection mechanism 330 is used to detect whether the wafers in the wafer cassette 400 protrude from the placement positions. The third detection mechanism 330 is arranged at the left and right ends of the bottom of the lifting mechanism 210 and is located at one end far from the main body frame 100. Preferably, two sets of the third detection mechanisms 330 are provided, and the two sets of the third detection mechanisms 330 are arranged in parallel. The distances between the two sets of the third detection mechanisms 330 and the main body frame 100 are different. The two sets of the third detection mechanisms 330 respectively correspond to the detection sizes of 12-inch and 8-inch wafer cassettes, realizing the detection of the wafer states of both 12-inch and 8-inch wafer cassettes simultaneously.

[0032] It should be noted that how the first detection mechanism 310 detects the number of wafers in the wafer cassette 400, how the second detection mechanism 320 detects whether the wafers in the wafer cassette 400 are placed obliquely, and how the third detection mechanism 330 detects whether the wafers in the wafer cassette 400 protrude are all common technical means for those skilled in the art and will not be elaborated herein.

[0033] In this specification, the various embodiments are described in a progressive manner. Each embodiment focuses on the differences from other embodiments. The same or similar parts among the various embodiments can be referred to each other.

[0034] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be obvious to those skilled in the art. The general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A wafer status detection system for a wafer box opener, characterized in that: The wafer box opener comprises a main frame (100) and a box opening mechanism (200), wherein the box opening mechanism (200) is arranged at the front end of the main frame (100), and the box opening mechanism (200) comprises a lifting mechanism (210) and a positioning platform (220); The wafer status detection system comprises: A first detection mechanism (310), the first detection mechanism (310) being used to detect the number of wafers in the wafer box (400), the first detection mechanism (310) being obliquely arranged at the front and rear ends of the bottom of the lifting mechanism (210); a second detection mechanism (320), the second detection mechanism (320) being used to detect whether the wafers in the wafer box (400) are tilted, the second detection mechanism (320) being arranged at the left and right ends of the bottom of the lifting mechanism (210) and located at one end close to the main frame (100); A third detection mechanism (330), the third detection mechanism (330) is used to detect whether the wafer in the wafer box (400) is protruding, and the third detection mechanism (330) is arranged at the left and right ends of the bottom of the lifting mechanism (210) and is located at an end away from the main frame (100).

2. The wafer status detection system according to claim 1, characterized in that: The first detection mechanism (310) is provided in a group.

3. The wafer status detection system according to claim 1, characterized in that: The second detection mechanism (320) is provided in two groups.

4. The wafer status detection system according to claim 3, characterized in that: The two groups of the second detection mechanisms (320) are arranged in parallel, and the distances between the two groups of the second detection mechanisms (320) and the main frame (100) are different.

5. The wafer status detection system according to claim 1, characterized in that: The two detection units of the second detection mechanism (320) are arranged at different heights.

6. The wafer status detection system according to claim 1, characterized in that: The third detection mechanism (330) is provided in two groups.

7. The wafer status detection system according to claim 6, characterized in that: The two groups of the third detection mechanisms (330) are arranged in parallel, and the distances between the two groups of the third detection mechanisms (330) and the main frame (100) are different.

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