Hydraulic drive type displacement table

Abstract

The utility model discloses a hydraulic drive type displacement table which comprises a coarse adjustment screw rod, a fine adjustment screw rod, a fine adjustment plunger, a coarse adjustment plunger, a drive double cylinder, a hydraulic guide column, a sliding plate, a spring sleeve guide column, a titanium alloy compression spring and a fixing plate, the hydraulic guide column and the titanium alloy compression spring are arranged on the lower side of the sliding plate, and the fixing plate is arranged on the lower side of the sliding plate. The hydraulic guide column is connected with a driving double-cylinder through a cylindrical guide pipe, a coarse adjustment screw and a fine adjustment screw are arranged in the driving double-cylinder respectively, the coarse adjustment screw and the fine adjustment screw rotate to drive a coarse adjustment plunger and a fine adjustment plunger respectively, hydraulic oil is pushed to reach a hydraulic cylinder of a sliding plate, and the sliding plate is promoted to move rightwards; and the titanium alloy pressure spring and the atmospheric pressure always press the sliding plate leftwards so as to keep no reverse clearance during screw adjustment. According to the utility model, coarse and fine adjustment double-tube or multi-tube differential adjustment is adopted, pressure is applied in cooperation with a thread pair, nanoscale micro-resolution displacement adjustment can be realized, and rapid adjustment can be realized through coarse adjustment.

Description

Technical Field

[0001] The utility model relates to an optical displacement stage, in particular to a hydraulic-driven displacement stage. Background Art

[0002] The existing displacement stages are processed from 3-series (303) or 4-series (440C) stainless steel, with a high coefficient of thermal expansion and contraction. In an experimental environment with large temperature variations, the overall stability of the displacement stage changes significantly. Moreover, they have weak magnetism, are prone to adsorbing metal particles, affecting the experimental environment, and have a relatively large overall mass, requiring a higher load capacity for the test bench. Currently, it is difficult to process high-hardness brittle materials such as glass ceramics and ceramics. The existing displacement stages are difficult to achieve nano-level micro-resolution displacement adjustment and cannot achieve large-resolution rapid adjustment. Most existing displacement stages use metal screw pairs for driving, making it difficult to adjust small displacement amounts. Content of the Utility Model

[0003] Purpose of the Utility Model: The purpose of the utility model is to provide a hydraulic-driven displacement stage.

[0004] Technical Solution: The device of the utility model includes a coarse adjustment screw, a fine adjustment screw, a fine adjustment plunger, a coarse adjustment plunger, a sealing screw, a driving double cylinder, a valve cover, a cylindrical valve core, a hydraulic guide post, a sliding plate, a spring sleeve guide post, a titanium alloy compression spring, a screw, and a fixing plate. The lower side of the sliding plate is respectively provided with a hydraulic guide post and a titanium alloy compression spring. The lower side of the sliding plate is a fixing plate. The hydraulic guide post is connected to the driving double cylinder through a cylindrical conduit. The driving double cylinder is internally provided with a coarse adjustment screw and a fine adjustment screw. The rotation of the coarse adjustment screw and the fine adjustment screw respectively drives the coarse adjustment plunger and the fine adjustment plunger, pushing the hydraulic oil to the hydraulic cylinder of the sliding plate, causing the sliding plate to move to the right. The titanium alloy compression spring and the atmospheric pressure always press the sliding plate to the left to maintain no reverse clearance in the screw adjustment.

[0005] Further, a spring sleeve guide post is sleeved outside the titanium alloy compression spring, and the spring sleeve guide post is located between the sliding plate and the titanium alloy compression spring.

[0006] Further, the hydraulic guide post and the fixing plate are locked by screws after pre-tightening and gluing.

[0007] Further, the spring sleeve guide post and the fixing plate are locked by screws after pre-tightening and gluing.

[0008] Further, a cylindrical valve core is provided on the cylindrical conduit, and a valve cover is covered on the cylindrical valve core.

[0009] Further, the coarse adjustment plunger and the fine adjustment plunger are fixed by a sealing screw.

[0010] Further, a titanium alloy compression spring is fixed inside the spring sleeve guide post.

[0011] Beneficial effects: Compared with the prior art, the utility model has the following advantages: The special guiding transmission mechanism reduces the finish machining surface and assembly difficulty, makes full use of the advantages of stable size and good surface sealing performance of ceramics and glass-ceramics, and adopts a large number of hydraulic cylinders, pneumatic cylinders and guide post structures, reducing the cost; The coarse and fine adjustment double-tube or multi-tube differential adjustment is adopted, and pressure is applied through the thread pair, so that the nano-level micro-resolution displacement adjustment can be realized, and the rapid adjustment can also be realized by the coarse adjustment. Brief description of the drawings

[0012] Figure 1 It is a structural schematic diagram of the utility model;

[0013] Figure 2 It is a sectional view of the hydraulic differential regulator;

[0014] Figure 3 It is a sectional view of the displacement table. Specific implementation manners

[0015] The technical solution of the utility model will be further described below with reference to the drawings.

[0016] As Figure 1 shown, the device of the utility model includes a coarse adjustment screw 1, a fine adjustment screw 2, a fine adjustment plunger 3, a coarse adjustment plunger 4, a sealing screw 5, a driving double cylinder 6, a valve cover 7, a cylindrical valve core 8, a hydraulic guide post 9, a sliding plate 10, a spring sleeve guide post 11, a titanium alloy compression spring 12, a screw 13 and a fixing plate 14.

[0017] As Figure 3 shown, the lower side of the sliding plate 10 is respectively a hydraulic guide post 9 and a titanium alloy compression spring 12, the lower side of the sliding plate 10 is a fixing plate 14, and the hydraulic guide post 9 is connected to the driving double cylinder 6 through a cylindrical conduit. The outside of the titanium alloy compression spring 12 is sleeved with a spring sleeve guide post 11, and the spring sleeve guide post 11 is located between the sliding plate 10 and the titanium alloy compression spring 12. The hydraulic guide post 9 and the fixing plate 14 are locked by a screw 13 after pre-tightening and caulking. The spring sleeve guide post 11 and the fixing plate 14 are locked by a screw 13 after pre-tightening and caulking. A cylindrical valve core 8 is arranged on the cylindrical conduit, and a valve cover 7 is covered on the cylindrical valve core 8.

[0018] As Figure 2 shown, the inside of the driving double cylinder 6 is respectively provided with a coarse adjustment screw 1 and a fine adjustment screw 2. The rotation of the coarse adjustment screw 1 and the fine adjustment screw 2 respectively drives the coarse adjustment plunger 4 and the fine adjustment plunger 3, and pushes the hydraulic oil to the hydraulic cylinder of the sliding plate 10, so as to cause the sliding plate 10 to move to the right. The titanium alloy compression spring 12 and the atmospheric pressure always press the sliding plate 10 to the left to keep no reverse clearance in the screw adjustment. The coarse adjustment plunger 4 and the fine adjustment plunger 3 are fixed by a sealing screw 5. A titanium alloy compression spring 12 is fixed inside the spring sleeve guide post 11.

[0019] Most of the existing displacement stages adopt metal screw pairs for driving, making it difficult to adjust minute displacement. Our displacement stage adopts a double-tube (or multi-tube) differential adjustment for coarse and fine tuning. By applying pressure in combination with the screw pair, it can achieve nano-level minute resolution displacement adjustment, and can also achieve rapid adjustment with coarse tuning.

[0020] Currently, it is difficult to process high-hardness brittle materials such as glass-ceramics and ceramics. Our component structure is very suitable for the molding of glass or ceramic molds. The special guiding drive mechanism reduces the finish machining surface and assembly difficulty, makes full use of the advantages of ceramics and glass-ceramics with stable dimensions and good surface sealing performance, and largely adopts hydraulic cylinders, pneumatic cylinders, and guide post structures.

Claims

1. A hydraulic drive displacement stage, characterized in that: It includes a coarse adjustment screw rod (1), a fine adjustment screw rod (2), a fine adjustment plunger (3), a coarse adjustment plunger (4), a sealing screw (5), a driving double cylinder (6), a valve cover (7), a cylindrical valve core (8), a hydraulic guide post (9), a sliding plate (10), a spring sleeve guide post (11), a titanium alloy compression spring (12), a screw (13), and a fixing plate (14). The lower side of the sliding plate (10) is respectively the hydraulic guide post (9) and the titanium alloy compression spring (12), and the lower side of the sliding plate (10) is the fixing plate (14). The hydraulic guide post (9) is connected to the driving double cylinder (6) through a cylindrical conduit. The coarse adjustment screw rod (1) and the fine adjustment screw rod (2) are respectively arranged inside the driving double cylinder (6). The rotation of the coarse adjustment screw rod (1) and the fine adjustment screw rod (2) respectively drives the coarse adjustment plunger (4) and the fine adjustment plunger (3), pushing the hydraulic oil to the hydraulic cylinder of the sliding plate (10), causing the sliding plate (10) to move to the right. The titanium alloy compression spring (12) and the atmospheric pressure always press the sliding plate (10) to the left to keep the screw adjustment without reverse clearance.

2. The hydraulic drive type displacement stage according to claim 1, wherein: A spring sleeve guide post (11) is sleeved outside the titanium alloy compression spring (12), and the spring sleeve guide post (11) is located between the sliding plate (10) and the titanium alloy compression spring (12).

3. The hydraulic drive type displacement stage according to claim 1, characterized in that: The hydraulic guide post (9) and the fixing plate (14) are locked by a screw (13) with pre-tightening and then caulking.

4. The hydraulic drive type displacement stage according to claim 1, characterized in that: The spring sleeve guide post (11) and the fixing plate (14) are locked by a screw (13) with pre-tightening and then caulking.

5. The hydraulic drive type displacement stage according to claim 1, wherein: A cylindrical valve core (8) is arranged on the cylindrical conduit, and a valve cover (7) is covered on the cylindrical valve core (8).

6. The hydraulic drive type displacement stage according to claim 1, wherein: The coarse adjustment plunger (4) and the fine adjustment plunger (3) are fixed by a sealing screw (5).

7. The hydraulic drive type displacement stage according to claim 1, characterized in that: A titanium alloy compression spring (12) is fixed inside the spring sleeve guide post (11).

8. The hydraulic drive type displacement stage according to claim 1, wherein: The hydraulic guide post (9) is made of ceramic or glass material.

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