Vacuum evaporation equipment

Abstract

The utility model relates to the technical field of magnetron sputtering coating, in particular to vacuum evaporation equipment. The vacuum evaporation equipment comprises a feeding cavity, a vacuum transition cavity, a process cavity, a first vacuum pump set and a second vacuum pump set. Wherein the feeding cavity is selectively communicated with the atmospheric environment; the vacuum transition cavity is selectively communicated with the feeding cavity; the process cavity comprises a first evaporation transition cavity, an evaporation process cavity and a second evaporation transition cavity, one end of the evaporation process cavity communicates with the first evaporation transition cavity, the other end of the evaporation process cavity communicates with the second evaporation transition cavity, and the end, away from the evaporation process cavity, of the first evaporation transition cavity selectively communicates with the vacuum transition cavity; the first vacuum pump set is arranged on the first evaporation transition cavity and communicates with the first evaporation transition cavity, and the second vacuum pump set is arranged on the second evaporation transition cavity and communicates with the second evaporation transition cavity. The vacuum evaporation equipment can improve the production efficiency, prolong the service life of the first vacuum pump set and the second vacuum pump set and save the cost.

Description

Technical Field

[0001] The utility model relates to the technical field of magnetron sputtering coating, in particular to a vacuum evaporation coating device. Background Art

[0002] Vacuum evaporation is a production process for depositing metals on the surface of a thin film. Its main principle is as follows: the material to be evaporated is fed into an evaporation crucible, and the material to be evaporated is heated and evaporated in the evaporation crucible. The evaporated material deposits upward in the form of atoms or atomic clusters on the surface of a substrate passing above the evaporation crucible under vacuum conditions, thereby forming a metal coating on the surface of the substrate.

[0003] The vacuum evaporation process needs to be carried out in a vacuum environment. However, in the prior art, each time the substrate (coating sample) is taken and placed, the vacuum of the vacuum evaporation device needs to be broken, thereby reducing the production efficiency and affecting the production rhythm. In addition, during the coating process, some of the evaporated materials will enter and adhere to the vacuum pump group, affecting the performance of the vacuum pump group, shortening the service life, and increasing the cost.

[0004] Therefore, it is urgent to design a vacuum evaporation coating device to solve the above technical problems. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a vacuum evaporation coating device, which can improve the production efficiency, extend the service life of the first vacuum pump group and the second vacuum pump group, and save costs.

[0006] To achieve the above object, the utility model adopts the following technical solutions:

[0007] The utility model provides a vacuum evaporation coating device, comprising:

[0008] A feeding chamber, which is selectively communicated with the atmospheric environment;

[0009] A vacuum transition chamber, which is selectively communicated with the feeding chamber;

[0010] A process chamber, which includes a first evaporation transition chamber, an evaporation process chamber, and a second evaporation transition chamber. One end of the evaporation process chamber is communicated with the first evaporation transition chamber, and the other end is communicated with the second evaporation transition chamber. The end of the first evaporation transition chamber far from the evaporation process chamber is selectively communicated with the vacuum transition chamber;

[0011] A first vacuum pump group and a second vacuum pump group. The first vacuum pump group is arranged on the first evaporation transition chamber and communicated with the first evaporation transition chamber, and the second vacuum pump group is arranged on the second evaporation transition chamber and communicated with the second evaporation transition chamber.

[0012] As an alternative technical solution of a vacuum evaporation coating device, the first vacuum pump group is arranged on the top of the first evaporation coating transition chamber, and the first vacuum pump group is located on the side far from the process chamber; the second vacuum pump group is arranged on the top of the second evaporation coating transition chamber, and the second vacuum pump group is located on the side far from the process chamber.

[0013] As an alternative technical solution of a vacuum evaporation coating device, the first vacuum pump group and the second vacuum pump group are symmetrically arranged with respect to the evaporation coating process chamber.

[0014] As an alternative technical solution of a vacuum evaporation coating device, the size of the first evaporation coating transition chamber is equal to the size of the second evaporation coating transition chamber.

[0015] As an alternative technical solution of a vacuum evaporation coating device, the length of the first evaporation coating transition chamber is not less than the length of the substrate to be coated, and the length of the second evaporation coating transition chamber is not less than the length of the substrate to be coated.

[0016] As an alternative technical solution of a vacuum evaporation coating device, the process chamber further includes a first movable plate and a second movable plate. The first movable plate is located between the first evaporation coating transition chamber and the evaporation coating process chamber, and the second movable plate is located between the second evaporation coating transition chamber and the evaporation coating process chamber;

[0017] Both the first movable plate and the second movable plate have an open state and a closed state. When the evaporation coating process chamber is evacuated, both the first movable plate and the second movable plate are open; when the evaporation coating process chamber is performing evaporation coating, both the first movable plate and the second movable plate are closed, and there are gaps between both the first movable plate and the second movable plate and the bottom wall of the process chamber, and the gaps are used to transport the substrate to be coated.

[0018] As an alternative technical solution of a vacuum evaporation coating device, a first slide rail is arranged on the inner wall of the first evaporation coating transition chamber, a second slide rail is arranged on the inner wall of the second evaporation coating transition chamber, the first movable plate is slidably connected to the first slide rail, and the second movable plate is slidably connected to the second slide rail.

[0019] As an alternative technical solution of a vacuum evaporation coating device, the vacuum evaporation coating device includes a driving assembly, and the driving end of the driving assembly is drivingly connected to both the first movable plate and the second movable plate, so that both the first movable plate and the second movable plate are in the open state or both are in the closed state.

[0020] As an alternative technical solution of a vacuum evaporation coating device, the vacuum evaporation coating device further includes an evaporation source and a lifting assembly. The evaporation source is arranged on the lifting assembly, and the lifting assembly is located below the evaporation coating process chamber.

[0021] As an alternative technical solution of a vacuum evaporation coating device, the vacuum evaporation coating device further includes a first valve, a second valve, and a third valve;

[0022] The first valve is arranged on the feeding chamber, and the first valve is used to control the communication between the feeding chamber and the atmospheric environment so that the substrate to be coated enters the feeding chamber;

[0023] Both the second valve and the third valve are arranged on the vacuum transition chamber. The second valve is used to control the communication between the vacuum transition chamber and the feeding chamber, and the third valve is used to control the communication between the vacuum transition chamber and the first evaporation coating transition chamber.

[0024] The beneficial effects of the present utility model at least include:

[0025] The present utility model provides a vacuum evaporation coating device, which includes a feeding chamber, a vacuum transition chamber, a process chamber, a first vacuum pump group, and a second vacuum pump group. Among them, the feeding chamber is selectively communicated with the atmospheric environment. That is to say, when the substrate to be coated needs to enter the vacuum evaporation coating device, the feeding chamber is opened; when the substrate to be coated completely enters the feeding chamber, the feeding chamber is closed at this time and is isolated from the external atmospheric environment. The vacuum transition chamber is selectively communicated with the feeding chamber. That is to say, when it is necessary to transport the substrate to be coated to the vacuum transition chamber, the valve of the vacuum transition chamber is opened at this time, and when the transportation is completed, the valve of the vacuum transition chamber is closed. The process chamber includes a first evaporation coating transition chamber, an evaporation coating process chamber, and a second evaporation coating transition chamber. One end of the evaporation coating process chamber is communicated with the first evaporation coating transition chamber, and the other end is communicated with the second evaporation coating transition chamber. The end of the first evaporation coating transition chamber far away from the evaporation coating process chamber is selectively communicated with the vacuum transition chamber. That is to say, when it is necessary to transport the substrate to be coated to the process chamber, the valve of the first evaporation coating transition chamber is opened at this time, and when the transportation is completed, the valve of the first evaporation coating transition chamber is closed.

[0026] Above, when the vacuum evaporation coating device works normally, the vacuum degree of the feeding chamber, the vacuum degree of the vacuum transition chamber, and the vacuum degree of the process chamber gradually increase, thus forming a vacuum gradient. In other words, the requirement for the vacuum degree of the feeding chamber is the lowest, and the requirement for the vacuum degree in the process chamber is the highest. This ensures that the vacuum degree of the process chamber can always be maintained in a high vacuum state. Only the feeding chamber with a low requirement for the vacuum degree needs to interact with the atmospheric environment so that the substrate to be coated can be transported into the feeding chamber. And the time required for the air extraction and release step of breaking the vacuum of the feeding chamber is much less than the time required for breaking the vacuum of the process chamber. That is to say, the vacuum coating device in the present utility model does not require the air extraction and release step of continuously breaking the vacuum of the process chamber in the prior art, improves the production efficiency, and saves costs.

[0027] In addition, the first vacuum pump group in the present utility model is arranged on the first evaporation coating transition chamber and is communicated with the first evaporation coating transition chamber, and the second vacuum pump group is arranged on the second evaporation coating transition chamber and is communicated with the second evaporation coating transition chamber. This enables the first vacuum pump group and the second vacuum pump group to be far away from the evaporation coating process chamber, which is the area where a large amount of evaporation coating materials gather. Therefore, this design structure in the present utility model can make the interfaces of the first vacuum pump group and the second vacuum pump group as far away from the evaporation coating process chamber as possible, thereby reducing or avoiding the phenomenon of evaporation coating materials entering the first vacuum pump group and the second vacuum pump group, prolonging the service life and saving costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following will briefly introduce the drawings required for description in the embodiments of the present utility model. Obviously, the drawings described below are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained according to the content of the embodiments of the present utility model and these drawings.

[0029] Figure 1 is a schematic structural diagram of the vacuum evaporation coating device provided by the embodiment of the present utility model;

[0030] Figure 2 is a front view of the vacuum evaporation coating device provided by the embodiment of the present utility model.

[0031] REFERENCE NUMERALS

[0032] 100, feeding chamber;

[0033] 200, vacuum transition chamber;

[0034] 300, process chamber; 310, first evaporation coating transition chamber; 320, evaporation coating process chamber; 330, second evaporation coating transition chamber; 340, first vacuum pump group; 350, second vacuum pump group;

[0035] 400, evaporation source; 500, lifting assembly;

[0036] 600, first valve; 700, second valve; 800, third valve. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0037] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. Usually, the components of the embodiments of the present utility model described and illustrated in the drawings here can be arranged and designed in various different configurations.

[0038] Accordingly, the following detailed description of the embodiments of the present utility model provided in the accompanying drawings is not intended to limit the scope of the claimed present utility model, but merely represents selected embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present utility model without creative efforts shall fall within the scope of protection of the present utility model.

[0039] It should be noted that like reference numerals and letters denote like items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0040] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is customarily placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present utility model. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and should not be construed as indicating or implying relative importance. In the description of the present utility model, unless otherwise specified, the meaning of "a plurality" is two or more.

[0041] In the description of the present utility model, it should also be noted that unless otherwise clearly defined and limited, the terms "set" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0042] In the present utility model, unless otherwise clearly defined and limited, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact through additional features therebetween. Moreover, the first feature being "above", "over" and "on" the second feature includes the first feature being directly above and obliquely above the second feature, or merely indicating that the first feature has a higher horizontal height than the second feature. The first feature being "below", "under" and "beneath" the second feature includes the first feature being directly below and obliquely below the second feature, or merely indicating that the first feature has a lower horizontal height than the second feature.

[0043] Embodiments of the present utility model will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation to the present utility model.

[0044] This embodiment provides a vacuum evaporation device, which improves production efficiency, extends the service life of the first vacuum pump group and the second vacuum pump group, and saves costs.

[0045] As Figure 1 - Figure 2 shown, the vacuum evaporation device mainly includes a feeding chamber 100, a vacuum transition chamber 200, a process chamber 300, a first vacuum pump group 340, and a second vacuum pump group 350. Among them, the feeding chamber 100 is selectively communicated with the atmospheric environment. That is, when a substrate to be coated needs to enter the vacuum evaporation device, the feeding chamber 100 is opened; when the substrate to be coated completely enters the feeding chamber 100, the feeding chamber 100 is closed at this time and isolated from the external atmospheric environment. The vacuum transition chamber 200 is selectively communicated with the feeding chamber 100. That is, when it is necessary to transport the substrate to be coated to the vacuum transition chamber 200, the valve of the vacuum transition chamber 200 is opened at this time, and when the transportation is completed, the valve of the vacuum transition chamber 200 is closed. The process chamber 300 includes a first evaporation transition chamber 310, an evaporation process chamber 320, and a second evaporation transition chamber 330. One end of the evaporation process chamber 320 is communicated with the first evaporation transition chamber 310, and the other end is communicated with the second evaporation transition chamber 330. The end of the first evaporation transition chamber 310 far from the evaporation process chamber 320 is selectively communicated with the vacuum transition chamber 200. That is, when it is necessary to transport the substrate to be coated to the process chamber 300, the valve of the first evaporation transition chamber 310 is opened at this time, and when the transportation is completed, the valve of the first evaporation transition chamber 310 is closed.

[0046] Above, when the vacuum evaporation device is working normally, the vacuum degree of the feeding chamber 100, the vacuum degree of the vacuum transition chamber 200, and the vacuum degree of the process chamber 300 gradually increase, thereby forming a vacuum gradient. In other words, the vacuum degree requirement of the feeding chamber 100 is the lowest, and the vacuum degree requirement in the process chamber 300 is the highest. This ensures that the vacuum degree of the process chamber 300 can always be maintained in a high vacuum state. Only the feeding chamber 100 with a low requirement for vacuum degree needs to interact with the atmospheric environment so that the substrate to be coated can be transported into the feeding chamber 100. And the time required for the evacuation and gas release step of breaking the vacuum of the feeding chamber 100 is much less than the time required for breaking the vacuum of the process chamber 300. That is to say, the vacuum coating device in this embodiment does not require the evacuation and gas release step of continuously breaking the vacuum of the process chamber 300 in the prior art, improves production efficiency, and saves costs.

[0047] In addition, the first vacuum pump group 340 in this embodiment is arranged on the first evaporation transition chamber 310 and communicates with the first evaporation transition chamber 310, and the second vacuum pump group 350 is arranged on the second evaporation transition chamber 330 and communicates with the second evaporation transition chamber 330. This enables the first vacuum pump group 340 and the second vacuum pump group 350 to be far away from the evaporation process chamber 320, and the evaporation process chamber 320 is exactly the area where a large amount of evaporation materials gather. Therefore, this design structure in this embodiment can make the interfaces of the first vacuum pump group 340 and the second vacuum pump group 350 as far away from the evaporation process chamber 320 as possible, thereby reducing or avoiding the phenomenon of evaporation materials entering the first vacuum pump group 340 and the second vacuum pump group 350, prolonging the service life and saving costs.

[0048] Meanwhile, through the settings of the first evaporation transition chamber 310 and the second evaporation transition chamber 330, when the evaporation rate in the evaporation process chamber 320 is unstable, at this time, the substrate to be coated can be cached in the first evaporation transition chamber 310 or the second evaporation transition chamber 330 for a period of time, and then the substrate to be coated is made to enter the evaporation process chamber 320 after the evaporation rate in the evaporation process chamber 320 is stable, improving the coating quality and enhancing the product yield.

[0049] It should be noted that Figure 2 the dashed boxes in represent the actual positions of the feeding chamber 100, the vacuum transition chamber 200 and the process chamber 300, as well as the actual positions of the first evaporation transition chamber 310, the evaporation process chamber 320 and the second evaporation transition chamber 330 in the process chamber 300.

[0050] As Figure 1 - Figure 2 shown, the first vacuum pump group 340 in this embodiment is arranged on the top of the first evaporation transition chamber 310, and the first vacuum pump group 340 is located on the side far away from the process chamber 300; the second vacuum pump group 350 is arranged on the top of the second evaporation transition chamber 330, and the second vacuum pump group 350 is located on the side far away from the process chamber 300. This can make the first vacuum pump group 340 and the second vacuum pump group 350 as far away from the evaporation process chamber 320 as possible, further reducing the risk of evaporation materials entering the first vacuum pump group 340 and the second vacuum pump group 350 and prolonging the service life.

[0051] Furthermore, the first vacuum pump group 340 and the second vacuum pump group 350 in this embodiment are symmetrically arranged with respect to the evaporation process chamber 320. On the one hand, this can improve the stability and efficiency of evacuating the process chamber 300 by the first vacuum pump group 340 and the second vacuum pump group 350. On the other hand, it can improve the gravity center stability of the process chamber 300, facilitate installation and reduce the risk of shaking or even tipping over.

[0052] In this embodiment, the sizes of the first evaporation transition cavity 310 and the second evaporation transition cavity 330 are equal, which can improve the processing efficiency of the front-end process cavity 300 and reduce the manufacturing cost of the process cavity 300.

[0053] Furthermore, in this embodiment, the length of the first evaporation transition cavity 310 is not less than the length of the substrate to be coated, and the length of the second evaporation transition cavity 330 is not less than the length of the substrate to be coated. This can ensure that the substrate to be coated can be accommodated in the first evaporation transition cavity 310 and the second evaporation transition cavity 330.

[0054] Meanwhile, the settings of the first evaporation transition cavity 310 and the second evaporation transition cavity 330 are beneficial to temperature control of substrates that are not suitable for high temperatures. Specifically, a substrate that is not suitable for high temperatures is placed on the substrate to be coated and reciprocates between the first evaporation transition cavity 310 and the second evaporation transition cavity 330 along with the substrate to be coated. That is, the substrate can stay and cool down in the first evaporation transition cavity 310 and the second evaporation transition cavity 330, so that the temperature rise of the substrate on the substrate to be coated when passing through the evaporation process cavity 320 can be effectively controlled, avoiding the high-temperature problem caused by single-layer film formation.

[0055] The process cavity 300 in this embodiment further includes a first movable plate and a second movable plate (the first movable plate and the second movable plate are not shown in the figure). The first movable plate is located between the first evaporation transition cavity 310 and the evaporation process cavity 320, and the second movable plate is located between the second evaporation transition cavity 330 and the evaporation process cavity 320.

[0056] Both the first movable plate and the second movable plate have an open state and a closed state. When the evaporation process cavity 320 is evacuated, both the first movable plate and the second movable plate are opened, which can improve the working efficiency of evacuation and save time. When the evaporation process cavity 320 is performing evaporation, both the first movable plate and the second movable plate are closed, and there are gaps between both the first movable plate and the second movable plate and the bottom wall of the process cavity 300. These gaps are used to transfer the substrate to be coated, which can minimize the damage to the first vacuum pump group 340 and the second vacuum pump group 350 by the evaporation material as much as possible on the premise of ensuring the normal transportation of the substrate to be coated, extend the service life, and save costs.

[0057] Further, a first slide rail (not shown in the figure) is provided on the inner wall of the first evaporation transition cavity 310 in this embodiment, and a second slide rail (not shown in the figure) is provided on the inner wall of the second evaporation transition cavity 330. The first movable plate is slidably connected to the first slide rail, and the second movable plate is slidably connected to the second slide rail, and both the first slide rail and the second slide rail are vertically arranged. When both the first movable plate and the second movable plate are in the open state, at this time, the first movable plate slides to the top of the first slide rail, and the second movable plate slides to the top of the second slide rail. When both the first movable plate and the second movable plate are in the closed state, at this time, the first movable plate slides to the bottom of the first slide rail, and the second movable plate slides to the bottom of the second slide rail. At this time, only a gap for conveying the substrate to be coated is reserved between the first movable plate and the second movable plate and the bottom wall of the process cavity 300.

[0058] Furthermore, the vacuum evaporation device in this embodiment includes a driving assembly (not shown in the figure). The driving end of the driving assembly is drivingly connected to both the first movable plate and the second movable plate, so that both the first movable plate and the second movable plate are in the open state or both are in the closed state. Optionally, the driving assembly can be set as common components such as cylinders and electric cylinders on the market, which will not be elaborated here.

[0059] As Figure 1 - Figure 2 shown, in this embodiment, the vacuum evaporation device further includes an evaporation source 400 and a lifting assembly 500. The evaporation source 400 is arranged on the lifting assembly 500, and the lifting assembly 500 is located below the evaporation process cavity 320. The evaporation source 400 has a target inside, and the lifting assembly 500 can flexibly adjust the positions of the evaporation source 400 and the substrate on the substrate to be coated according to actual needs, thereby improving the coating quality and the flexible applicability.

[0060] Optionally, the lifting assembly 500 can be set as a lifting platform controlled by a motor.

[0061] As Figure 1 - Figure 2 shown, in this embodiment, the vacuum evaporation device further includes a first valve 600, a second valve 700, and a third valve 800. The first valve 600 is arranged on the feeding cavity 100, and the first valve 600 is used to control the communication between the feeding cavity 100 and the atmospheric environment so that the substrate to be coated enters the feeding cavity 100. The second valve 700 and the third valve 800 are both arranged on the vacuum transition cavity 200. The second valve 700 is used to control the communication between the vacuum transition cavity 200 and the feeding cavity 100, and the third valve 800 is used to control the communication between the vacuum transition cavity 200 and the first evaporation transition cavity 310.

[0062] The selective connection among the atmospheric environment, the feeding chamber 100, the vacuum transition chamber 200 and the process chamber 300 can be realized by setting the first valve 600, the second valve 700 and the third valve 800. Specifically, when it is necessary to connect the atmospheric environment and the feeding chamber 100 to transfer the substrate to be coated, the first valve 600 is opened; after the substrate to be coated passes through, the first valve 600 is closed to isolate the air pressures on both sides. When it is necessary to connect the feeding chamber 100 and the vacuum transition chamber 200, the second valve 700 is opened; after the substrate to be coated passes through, the second valve 700 is closed to isolate the air pressures on both sides. When it is necessary to connect the vacuum transition chamber 200 and the process chamber 300, the third valve 800 is opened; after the substrate to be coated passes through, the third valve 800 is closed to isolate the air pressures on both sides.

[0063] In this embodiment, the first valve 600, the second valve 700 and the third valve 800 can all adopt the flip-type structure or the sliding-type structure, and the controller for controlling the actions of the first valve 600, the second valve 700 and the third valve 800 can be selected from the common controllers on the market, which will not be elaborated here.

[0064] Obviously, the above is only the preferred embodiment of the present invention and the applied technical principle. Those skilled in the art will understand that the present invention is not limited to the specific embodiments here, and various obvious changes, re-adjustments and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Without departing from the concept of the present invention, more other equivalent embodiments can be included, and the scope of the present invention is determined by the scope of the appended claims.

[0065] Note that in the description of this specification, the descriptions referring to the terms "some embodiments", "other embodiments", etc. mean that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

Claims

1. A vacuum evaporation apparatus, characterized in that, Comprising: A feed chamber (100), which is selectively communicated with the atmospheric environment; A vacuum transition chamber (200), which is selectively communicated with the feed chamber (100); A process chamber (300), which includes a first evaporation transition chamber (310), an evaporation process chamber (320), and a second evaporation transition chamber (330). One end of the evaporation process chamber (320) is communicated with the first evaporation transition chamber (310), and the other end is communicated with the second evaporation transition chamber (330). One end of the first evaporation transition chamber (310) far from the evaporation process chamber (320) is selectively communicated with the vacuum transition chamber (200); A first vacuum pump group (340) and a second vacuum pump group (350), the first vacuum pump group (340) is arranged on the first evaporation transition chamber (310) and communicated with the first evaporation transition chamber (310), and the second vacuum pump group (350) is arranged on the second evaporation transition chamber (330) and communicated with the second evaporation transition chamber (330).

2. The vacuum evaporation apparatus according to claim 1, wherein The first vacuum pump group (340) is arranged on the top of the first evaporation transition chamber (310), and the first vacuum pump group (340) is located on the side far from the process chamber (300); the second vacuum pump group (350) is arranged on the top of the second evaporation transition chamber (330), and the second vacuum pump group (350) is located on the side far from the process chamber (300).

3. The vacuum evaporation apparatus according to claim 2, wherein The first vacuum pump group (340) and the second vacuum pump group (350) are symmetrically arranged with respect to the evaporation process chamber (320).

4. The vacuum evaporation apparatus according to claim 1, characterized in that, The size of the first evaporation transition chamber (310) is equal to the size of the second evaporation transition chamber (330).

5. The vacuum evaporation apparatus according to claim 4, characterized in that, The length of the first evaporation transition chamber (310) is not less than the length of the substrate to be coated, and the length of the second evaporation transition chamber (330) is not less than the length of the substrate to be coated.

6. The vacuum evaporation apparatus according to claim 1, wherein The process chamber (300) further includes a first movable plate and a second movable plate. The first movable plate is located between the first evaporation transition chamber (310) and the evaporation process chamber (320), and the second movable plate is located between the second evaporation transition chamber (330) and the evaporation process chamber (320); Both the first movable plate and the second movable plate have an open state and a closed state. When the evaporation process chamber (320) is evacuated, both the first movable plate and the second movable plate are open; when the evaporation process chamber (320) is evaporating, both the first movable plate and the second movable plate are closed, and both the first movable plate and the second movable plate have a gap with the bottom wall of the process chamber (300), and the gap is used to transport the substrate to be coated.

7. The vacuum evaporation apparatus according to claim 6, wherein, The inner wall of the first evaporation transition chamber (310) is provided with a first slide rail, the inner wall of the second evaporation transition chamber (330) is provided with a second slide rail, the first movable plate is slidably connected with the first slide rail, and the second movable plate is slidably connected with the second slide rail.

8. The vacuum evaporation apparatus according to claim 7, wherein The vacuum evaporation equipment includes a driving assembly, and the driving end of the driving assembly is drivingly connected to both the first movable plate and the second movable plate, so that both the first movable plate and the second movable plate are in an open state or both are in a closed state.

9. The vacuum evaporation apparatus according to any one of claims 1-8, characterized in that, The vacuum evaporation equipment further includes an evaporation source (400) and a lifting assembly (500), the evaporation source (400) is arranged on the lifting assembly (500), and the lifting assembly (500) is located below the evaporation process chamber (320).

10. The vacuum evaporation apparatus according to any one of claims 1-8, characterized in that, The vacuum evaporation equipment further includes a first valve (600), a second valve (700) and a third valve (800); The first valve (600) is arranged on the feeding chamber (100), and the first valve (600) is used to control the communication between the feeding chamber (100) and the atmospheric environment, so that the substrate to be coated enters the feeding chamber (100). Both the second valve (700) and the third valve (800) are arranged on the vacuum transition chamber (200), the second valve (700) is used to control the communication between the vacuum transition chamber (200) and the feeding chamber (100), and the third valve (800) is used to control the communication between the vacuum transition chamber (200) and the first evaporation transition chamber (310).

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