Double-swing-rod air floatation vibration isolation platform supporting leg

Abstract

The utility model discloses a double-swing-rod air floatation vibration isolation platform supporting leg, and belongs to the technical field of vibration isolators. Comprising a supporting leg shell and a gas adjusting valve, a pressing plate is arranged at the top end of the supporting leg shell, an adjusting screw is arranged in the supporting leg shell, and the side, located at the outer end of the supporting leg shell, of the adjusting screw is connected with a supporting disc; a partition plate is arranged in the supporting leg shell and divides the interior of the supporting leg shell into an inner cavity and an outer cavity, a fixing block is arranged above the partition plate, a plurality of steel wire ropes are evenly distributed between the fixing block and the pressing plate, and an air inlet hole for conveying air into the outer cavity is formed in the side wall of the supporting leg shell. The partition plate is provided with an ultra-small hole laminar flow damper for conveying gas into the inner cavity. According to the double-swing-rod air floating vibration isolation platform, the flexible double-cavity and ultra-small hole laminar flow damping design is adopted in the double-swing-rod air floating vibration isolation platform, the double-swing-rod structural design of the internal center adjusting screw rod and the steel wire rope is combined, when vibration occurs outside, the internal screw rod moves, external vibration can be effectively eliminated, and the stability of supporting legs of the air floating platform is enhanced.

Description

Technical Field

[0001] The utility model relates to the technical field of vibration isolators, and in particular to a leg of a double pendulum rod air-floating vibration isolation platform. Background Technique

[0002] In recent years, with the continuous progress of precision machining technology, especially in the fields of semiconductor nanofabrication process, microelectromechanical systems, nanocomposites, ultra-precision machining, etc., there is an urgent need for relevant technologies and measuring instruments for surface microtopography measurement. During the process of measuring the surface microtopography, it must be carried out on a measuring workbench with good vibration isolation performance, otherwise any tiny vibration will have a great impact on its measurement results. Therefore, there is an urgent need for a workbench with excellent vibration isolation performance and capable of effectively absorbing vibration energy.

[0003] In the prior art, generally, an air-floating vibration isolation platform is used for support, and by using gas (usually air) as an isolation medium to reduce or absorb external disturbances. The air-floating vibration damping leg on the air-floating vibration isolation platform is an important vibration damping component. In the case of complex and changeable or frequent vibration interference, the legs of some air-floating platforms may have a decrease in stability, affecting the measurement accuracy of precision equipment on the platform.

[0004] In view of the above problems, the utility model proposes a leg of a double pendulum rod air-floating vibration isolation platform. Content of the Utility Model

[0005] The purpose of the utility model is to provide a leg of a double pendulum rod air-floating vibration isolation platform, which has good stability and can be applied to high-precision instrument measurement.

[0006] To achieve the above purpose, the utility model provides a leg of a double pendulum rod air-floating vibration isolation platform, which includes a leg housing and a gas regulating valve. A pressing plate is arranged at the top end of the leg housing, an adjusting screw is arranged inside the leg housing, and a support disc is connected to one side of the outer end of the adjusting screw outside the leg housing; a partition is arranged inside the leg housing, and the partition divides the inside of the leg housing into an inner cavity and an outer cavity. A fixing block is arranged above the partition, and a plurality of steel wires are evenly distributed between the fixing block and the pressing plate. An air inlet hole for delivering gas into the outer cavity is opened on the side wall of the leg housing, and a super-small hole laminar flow damper for delivering gas into the inner cavity is opened on the partition.

[0007] Preferably, a limiting tray is sleeved on the outer periphery of one side of the outer end of the adjusting screw outside the leg housing.

[0008] Preferably, an airbag protection cover is arranged at the top end of the leg housing.

[0009] Preferably, a number of limiting columns are evenly distributed above the pressing plate.

[0010] Preferably, three steel wire ropes are provided, and four limiting columns are provided.

[0011] Preferably, the adjustment range of the adjustment screw is ±15 mm.

[0012] Preferably, a base is provided below the outer shell of the support leg.

[0013] Preferably, casters are provided at the bottom end of the base.

[0014] Therefore, compared with the prior art, the support leg of the double swing rod air-floating vibration isolation platform of the present utility model has the following specific beneficial effects:

[0015] (1) The present utility model uses the double swing rod structure designed by the adjustment screw and the steel wire rope. When external vibration occurs, the internal screw moves to effectively cancel the external vibration. Combined with the hybrid double cavity structure, the stability of the support leg can be improved;

[0016] (2) The present utility model uses ultra-small hole laminar flow damping, which can ensure the smoothness of the air flow, the uniformity of air intake and exhaust, and make the floating state of the platform better;

[0017] (3) The present utility model is provided with an airbag protection cover to protect key components from the external environment.

[0018] The technical solution of the present utility model will be further described in detail below with reference to the drawings and embodiments. Description of the Drawings

[0019] Figure 1 It is a three-dimensional structural schematic diagram of a support leg of a double swing rod air-floating vibration isolation platform of the present utility model;

[0020] Figure 2 It is a sectional structural schematic diagram of a support leg of a double swing rod air-floating vibration isolation platform of the present utility model;

[0021] Reference Signs

[0022] 1. Outer shell of the support leg; 2. Adjustment screw; 3. Support disc; 4. Partition; 5. Inner cavity body; 6. Outer cavity body; 7. Air inlet hole; 8. Ultra-small hole laminar flow damping; 9. Limiting tray; 10. Airbag protection cover; 11. Base; 12. Gas regulating valve; 13. Caster; 14. Steel wire rope; 15. Limiting column. Detailed Embodiments

[0023] The technical solution of the present utility model will be further described below with reference to the drawings and embodiments.

[0024] Unless otherwise defined, the technical terms or scientific terms used in this utility model shall have the ordinary meanings understood by those with ordinary skills in the field to which this utility model belongs. The "first", "second" and similar terms used in this utility model do not denote any order, quantity or importance, but are only used to distinguish different components. Words such as "including" or "comprising" mean that the elements or objects appearing before this word cover the elements or objects listed after this word and their equivalents, without excluding other elements or objects. Words such as "connected" or "coupled" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Upper", "lower", "left", "right", etc. are only used to represent relative position relationships. When the absolute position of the object being described changes, the relative position relationship may also change accordingly.

[0025] The specific connection methods of each part all adopt conventional means such as bolts, rivets, welding, etc. that are mature in the prior art. The machinery, parts and equipment all adopt conventional models in the prior art, and the circuit connection adopts the conventional connection method in the prior art, which will not be elaborated here.

[0026] Embodiment

[0027] As Figure 1-2 As shown, this utility model discloses a leg of a double pendulum rod air-floating vibration isolation platform, which includes a leg housing 1 and a gas regulating valve 12 for adjusting the pressure inside the leg housing 1; a pressing plate is arranged at the top of the leg housing 1, and four limiting columns 15 are evenly distributed above the pressing plate for protecting the gas regulating valve 12; an adjusting screw rod 2 is arranged inside the leg housing 1, and one end of the adjusting screw rod 2 passes through and is connected to a support plate 3 in the leg housing 1 for placing a measurement workbench. Among them, the adjustment range of the adjusting screw rod 2 is ±15 mm.

[0028] A limiting tray 9 is sleeved on the outer periphery of one side of the adjusting screw rod 2 located outside the leg housing 1 for limiting the support plate 3 to prevent the support plate 3 from falling significantly. An airbag protection cover 10 is arranged at the top of the leg housing 1 for protecting key components from the influence of the external environment.

[0029] A partition plate 4 is arranged inside the leg housing 1, and the partition plate 4 divides the inside of the leg housing 1 into an inner cavity 5 and an outer cavity 6. A fixing block is arranged above the partition plate 4, and three steel wire ropes 14 are evenly distributed between the fixing block and the pressing plate. An air inlet hole 7 for delivering gas into the outer cavity 6 is opened on the side wall of the leg housing 1, and a super-small hole laminar flow damper 8 for delivering gas into the inner cavity 5 is opened on the partition plate 4.

[0030] A base 11 is arranged below the leg housing 1 to improve stability, and casters 13 are arranged at the bottom end of the base 11 for convenient position movement.

[0031] Therefore, the present utility model adopts a double pendulum rod air-floating vibration isolation platform leg with the above structure. The inside of the double pendulum rod air-floating vibration isolation platform adopts a flexible double cavity and ultra-small hole laminar flow damping design, combined with the double pendulum rod structure design formed by the internal adjusting screw rod and the steel wire rope. When external vibration occurs, the movement of the internal screw rod can effectively eliminate the external vibration. The double pendulum rod structure is a further upgrade based on the ordinary air-floating, enhancing the stability of the air-floating platform leg, making the natural frequency in the horizontal direction lower, and the whole more stable. It can be applied to instrument equipment with very high vibration requirements, such as microscopes, medical biology, optical path testing, optical measurement, spectral use, precision detection, etc.

[0032] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present utility model and are not intended to limit them. Although the present utility model has been described in detail with reference to the preferred embodiments, those of ordinary skill in the art should understand that they can still modify or equivalently replace the technical solutions of the present utility model, and these modifications or equivalent replacements cannot make the modified technical solutions deviate from the spirit and scope of the technical solutions of the present utility model.

Claims

1. A leg of a double pendulum air-floating vibration isolation platform, characterized in that: It includes a leg housing and a gas regulating valve. A pressing plate is provided at the top of the leg housing. An adjusting screw is arranged inside the leg housing. A support disc is connected to one side of the outer end of the adjusting screw located outside the leg housing. A partition is arranged inside the leg housing, which divides the interior of the leg housing into an inner cavity and an outer cavity. A fixing block is provided above the partition. A number of steel wires are evenly distributed between the fixing block and the pressing plate. An air inlet hole for delivering gas into the outer cavity is opened on the side wall of the leg housing, and a super-small hole laminar flow damper for delivering gas into the inner cavity is opened on the partition.

2. The leg of a double pendulum rod air-floating vibration isolation platform according to claim 1, characterized in that: A limiting tray is sleeved on the outer periphery of one side of the adjusting screw located outside the leg housing.

3. The leg of a double pendulum rod air-floating vibration isolation platform according to claim 2, characterized in that: An airbag protection cover is provided at the top of the leg housing.

4. The leg of a double pendulum air-floating vibration isolation platform according to claim 3, characterized in that: A number of limiting posts are evenly distributed above the pressing plate.

5. The leg of a double pendulum rod air-floating vibration isolation platform according to claim 4, characterized in that: There are three steel wires and four limiting posts.

6. The leg of a double pendulum rod air-floating vibration isolation platform according to claim 5, characterized in that: The adjusting range of the adjusting screw is ±15 mm.

7. The leg of a double pendulum rod air-floating vibration isolation platform according to claim 6, characterized in that: A base is provided below the leg housing.

8. The leg of a double pendulum rod air-floating vibration isolation platform according to claim 7, characterized in that: Foot wheels are provided at the bottom end of the base.

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