Conveying device and silicon wafer production equipment

Abstract

The utility model provides a conveying device and silicon wafer production equipment, and the conveying device comprises a pedestal; the first conveying mechanism is arranged on the base, the first conveying mechanism comprises a plurality of first conveying wheels and a first conveying belt wound on the first conveying wheels, and the top layer of the first conveying belt is used for conveying materials in the first direction; the second conveying mechanism is arranged on the base, the second conveying mechanism and the first conveying mechanism are arranged in the first direction, the second conveying mechanism comprises a plurality of second conveying wheels and a second conveying belt wound around the second conveying wheels, and the top layer of the second conveying belt is used for conveying materials in the first direction; the position changing mechanism is arranged on the base, the at least one first conveying wheel and the at least one second conveying wheel are arranged on the position changing mechanism, the position changing mechanism can move in the first direction to adjust the length of the top layer of the first conveying belt and the length of the top layer of the second conveying belt, and the position changing and speed changing functions in a compact space are achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer production equipment, and more specifically, to a conveying device and a silicon wafer production equipment. Background Art

[0002] In the related art, in order to meet the stable transmission of materials, a speed change device is required to make the materials match the speed difference between the front and rear sections of the conveying speed. The speed change device of the prior art usually adopts the method of gradually increasing the speed of multi-section conveyor belts to eliminate the speed difference. The speed change device is mainly composed of three or more sections of fixed-length conveyor belts. By controlling the small speed difference between each section of the belt by a motor, the conveying with different speed differences before and after is realized. There are disadvantages such as large space occupation, high material consumption, and high cost. Summary of the Utility Model

[0003] The utility model provides a new technical solution for a conveying device, which can at least solve the problems of the speed change device in the prior art.

[0004] The utility model also provides a silicon wafer production equipment, including the above-mentioned conveying device.

[0005] According to the first aspect of the utility model, a conveying device is provided, including: a base; a first conveying mechanism, the first conveying mechanism is arranged on the base, the first conveying mechanism includes a plurality of first conveying wheels and a first conveyor belt wound around the plurality of first conveying wheels, and the top layer of the first conveyor belt is used for conveying materials along a first direction; a second conveying mechanism, the second conveying mechanism is arranged on the base, the second conveying mechanism and the first conveying mechanism are arranged along the first direction, the second conveying mechanism includes a plurality of second conveying wheels and a second conveyor belt wound around the plurality of second conveying wheels, and the top layer of the second conveyor belt is used for conveying materials along the first direction; a displacement mechanism, the displacement mechanism is arranged on the base, at least one of the first conveying wheels and at least one of the second conveying wheels are arranged on the displacement mechanism, and the displacement mechanism is movable along the first direction to adjust the lengths of the top layers of the first conveyor belt and the second conveyor belt.

[0006] Optionally, the length of the top layer of the first conveyor belt is L1, the length of the top layer of the second conveyor belt is L2, and L1 + L2 = C, where C is a constant.

[0007] Optionally, the first conveyor belt is annular, the plurality of first conveying wheels include a first wheel and a second wheel connected to the displacement mechanism, the first wheel and the second wheel are respectively spaced apart in the first direction and the second direction, the second direction is perpendicular to the first direction, the first wheel is arranged inside the first conveyor belt, and the second wheel is arranged outside the first conveyor belt.

[0008] Optionally, the second conveyor belt is annular, and the plurality of second conveyor wheels include a third wheel and a fourth wheel connected to the displacement mechanism. The third wheel and the fourth wheel are respectively spaced apart in the first direction and the second direction. The third wheel is disposed inside the second conveyor belt, and the fourth wheel is disposed outside the second conveyor belt.

[0009] Optionally, the first wheel is connected to the top layer of the first conveyor belt, and the third wheel is connected to the top layer of the second conveyor belt. In the first direction, the first wheel and the third wheel are located between the second wheel and the fourth wheel. In the second direction, the first wheel and the third wheel are at the same height, and the second wheel and the fourth wheel are at the same height.

[0010] Optionally, the plurality of first conveyor wheels further include: a fifth wheel disposed on the base and at the same height as the first wheel in the second direction. The fifth wheel is connected to the top layer of the first conveyor belt and is located inside the first conveyor belt; a sixth wheel disposed on the base. In the second direction, the sixth wheel is located on the side of the second wheel away from the first wheel, and the sixth wheel is disposed inside the first conveyor belt; the plurality of second conveyor wheels further include: a seventh wheel disposed on the base and at the same height as the third wheel in the second direction. The seventh wheel is connected to the top layer of the second conveyor belt and is located inside the second conveyor belt; an eighth wheel disposed on the base. In the second direction, the eighth wheel is located on the side of the fourth wheel away from the third wheel, and the eighth wheel is disposed inside the second conveyor belt.

[0011] Optionally, the conveying device is at least switchable between a first state, a second state, and a third state. When the conveying device is in the first state, the first conveyor belt conveys the material, and the length of the top layer of the first conveyor belt is less than the length of the top layer of the second conveyor belt; when the conveying device is in the second state, the first conveyor belt transfers the material to the second conveyor belt, the length of the top layer of the first conveyor belt is equal to the length of the top layer of the second conveyor belt, and the speeds of the first conveyor belt and the second conveyor belt are equal; when the conveying device is in the third state, the second conveyor belt conveys the material, and the length of the top layer of the first conveyor belt is greater than the length of the top layer of the second conveyor belt.

[0012] Optionally, the conveying device further includes: a first driving mechanism connected to the first conveying mechanism to drive the first conveying mechanism to convey the material; a second driving mechanism connected to the second conveying mechanism to drive the second conveying mechanism to convey the material; and a third driving mechanism connected to the displacement mechanism to drive the displacement mechanism to move along the first direction.

[0013] Optionally, the conveying device further includes: a detection mechanism disposed on the upper side of the base for detecting the position of the material conveyed by the first conveying mechanism and the second conveying mechanism; and a controller electrically connected to the detection mechanism, the first driving mechanism, the second driving mechanism, and the third driving mechanism respectively, for controlling the first driving mechanism, the second driving mechanism, and the third driving mechanism according to the detection result of the detection mechanism.

[0014] Optionally, the number of the first conveying mechanisms and the second conveying mechanisms is multiple respectively. The multiple first conveying mechanisms are arranged along the width direction of the first conveyor belt, and the multiple second conveying mechanisms are arranged along the width direction of the second conveyor belt.

[0015] According to a second aspect of the present invention, there is provided a silicon wafer production device including the conveying device in any one of the above embodiments.

[0016] According to the conveying device of the present invention, at least one first conveying wheel in the first conveying mechanism and at least one second conveying wheel in the second conveying mechanism are arranged on the displacement mechanism. The position of the first conveying wheel and the second conveying wheel thereon is changed by the movement of the displacement mechanism along the first direction, so as to change the lengths of the top layers of the first conveyor belt and the second conveyor belt, realizing the function of displacement and speed change in a compact space, solving the problem that it is difficult to set multiple-end belts for step-by-step speed increase in a compact space, and having the advantages of simple structure and space saving.

[0017] Other features and advantages of the present invention will become clear through the following detailed description of the exemplary embodiments of the present invention with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings incorporated in the specification and constituting a part of the specification illustrate embodiments of the present invention and, together with the description, are used to explain the principles of the present invention.

[0019] Figure 1 is a perspective view of a conveying device from one perspective according to an embodiment provided by the present invention;

[0020] Figure 2is a perspective view of another angle of the conveying device according to an embodiment provided by the present utility model;

[0021] Figure 3 is a top view of the conveying device according to an embodiment provided by the present utility model;

[0022] Figure 4 is a front view of the conveying device in the first state according to an embodiment provided by the present utility model;

[0023] Figure 5 is a schematic diagram of the first conveying mechanism, the second conveying mechanism and the displacement mechanism of the conveying device in the first state according to an embodiment provided by the present utility model;

[0024] Figure 6 is a front view of the conveying device in the second state according to an embodiment provided by the present utility model;

[0025] Figure 7 is a schematic diagram of the first conveying mechanism, the second conveying mechanism and the displacement mechanism of the conveying device in the second state according to an embodiment provided by the present utility model;

[0026] Figure 8 is a front view of the conveying device in the third state according to an embodiment provided by the present utility model;

[0027] Figure 9 is a schematic diagram of the first conveying mechanism, the second conveying mechanism and the displacement mechanism of the conveying device in the third state according to an embodiment provided by the present utility model.

[0028] Reference numerals

[0029] 100, conveying device;

[0030] 10, machine base;

[0031] 20, first conveying mechanism; 211, first wheel; 212, second wheel; 213, fifth wheel; 214, sixth wheel; 215, first driving wheel; 216, first tensioning wheel; 22, first conveyor belt; 23, top layer of the first conveyor belt;

[0032] 30, second conveying mechanism; 311, third wheel; 312, fourth wheel; 313, seventh wheel; 314, eighth wheel; 315, second driving wheel; 316, second tensioning wheel; 32, second conveyor belt; 33, top layer of the second conveyor belt;

[0033] 40, displacement mechanism;

[0034] 50, first driving mechanism;

[0035] 60. A second driving mechanism;

[0036] 70. A third driving mechanism;

[0037] 80. Testing agency. DETAILED DESCRIPTION

[0038] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present invention.

[0039] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses.

[0040] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered as part of the specification.

[0041] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0042] It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0043] The following first describes in detail the conveying device 100 according to an embodiment of the present utility model in conjunction with the drawings.

[0044] like Figures 1 to 9 As shown, the conveying device 100 according to the embodiment of the utility model includes: a base, a first conveying mechanism 20 , a second conveying mechanism 30 and a displacement mechanism 40 .

[0045] Specifically, the first conveying mechanism 20 is arranged on the base, and the first conveying mechanism 20 includes a plurality of first conveying wheels and a first conveying belt 22 wound on the plurality of first conveying wheels, and the top layer 23 of the first conveying belt is used to convey materials along the first direction. The second conveying mechanism 30 is arranged on the base, and the second conveying mechanism 30 and the first conveying mechanism 20 are arranged along the first direction. The second conveying mechanism 30 includes a plurality of second conveying wheels and a second conveying belt 32 wound on the plurality of second conveying wheels, and the top layer 33 of the second conveying belt is used to convey materials along the first direction. The shifting mechanism 40 is movably arranged on the base along the first direction, and at least one first conveying wheel and at least one second conveying wheel are arranged on the shifting mechanism 40 to adjust the length of the top layer 23 of the first conveying belt and the top layer 33 of the second conveying belt.

[0046] In other words, the conveying device 100 according to the embodiment of the present utility model mainly consists of a base, a first conveying mechanism 20, a second conveying mechanism 30 and a displacement mechanism 40. The base can serve as a carrier for carrying and installing the first conveying mechanism 20, the second conveying mechanism 30 and the displacement mechanism 40.

[0047] The first conveying mechanism 20 and the second conveying mechanism 30 can be arranged along a first direction and convey materials along the first direction respectively. The materials can include but are not limited to silicon wafers. The first conveying mechanism 20 can be arranged upstream of the second conveying mechanism 30.

[0048] The first conveying mechanism 20 mainly consists of a plurality of first conveying wheels and a first conveyor belt 22. The first conveyor belt 22 can be wound around the first conveying wheels. The second conveying mechanism 30 mainly consists of a plurality of second conveying wheels and a second conveyor belt 32. The second conveyor belt 32 can be wound around the second conveying wheels.

[0049] The first conveyor belt 22 and the second conveyor belt 32 are respectively annular. The top layer 23 of the first conveyor belt and the top layer 33 of the second conveyor belt can extend linearly along the first direction respectively. The downstream of the top layer 23 of the first conveyor belt can be oppositely arranged with the upstream of the top layer 33 of the second conveyor belt. The top layer 23 of the first conveyor belt and the top layer 33 of the second conveyor belt can support and convey the materials. The first conveyor belt 22 can transfer the materials to the second conveyor belt 32.

[0050] The displacement mechanism 40 can be located between the first conveying mechanism 20 and the second conveying mechanism 30. At least one first conveying wheel and at least one second conveying wheel can be provided on the displacement mechanism 40. In addition, the displacement mechanism 40 can move relative to the base along the first direction, so that the first conveying wheel and the second conveying wheel connected to the displacement mechanism 40 move along the first direction, thereby causing the shapes of the first conveyor belt 22 wound around the first conveying wheel and the second conveyor belt 32 wound around the second conveying wheel to change simultaneously, so as to change the length of the top layer 23 of the first conveyor belt and the length of the top layer 33 of the second conveyor belt.

[0051] It should be noted that the length of the top layer 23 of the first conveyor belt refers to the distance between the two farthest points of the top layer 23 of the first conveyor belt in the first direction, and the length of the top layer 33 of the second conveyor belt refers to the distance between the two farthest points of the top layer 33 of the second conveyor belt in the first direction.

[0052] The conveying device 100 can be arranged between the incoming material conveyor belt and the outgoing material conveyor belt, and the speed of the incoming material conveyor belt is less than that of the outgoing material conveyor belt. The downstream end of the incoming material conveyor belt can be opposite to the upstream end of the first conveyor belt 22, the downstream end of the first conveyor belt 22 can be opposite to the upstream end of the second conveyor belt 32, and the downstream end of the second conveyor belt 32 can be opposite to the upstream end of the outgoing material conveyor belt, so that the material passes through the incoming material conveyor belt, the first conveyor belt 22, the second conveyor belt 32 and the outgoing material conveyor belt in sequence.

[0053] The process of variable position and variable speed conveying of the conveying device 100 in this embodiment will be described in detail below. For the convenience of description, it can be defined that the direction in which the incoming material conveyor belt faces the outgoing material conveyor belt is the positive direction of the first direction, and the direction in which the outgoing material conveyor belt faces the incoming material conveyor belt is the reverse direction of the first direction.

[0054] The incoming material conveyor belt conveys silicon wafers at a constant speed v1, and the outgoing material conveyor belt conveys silicon wafers at a constant speed v2, where v1 < v2. Initially, the length of the top layer 23 of the first conveyor belt is shorter, the length of the top layer 33 of the second conveyor belt is longer, the speed of the first conveyor belt 22 is equal to that of the incoming material conveyor belt, and the speed of the second conveyor belt 32 is equal to that of the outgoing material conveyor belt.

[0055] The silicon wafers are fed into the top layer 23 of the first conveyor belt from the upstream of the first conveyor belt 22, and during the transfer of the silicon wafers, the speed of the first conveyor belt 22 remains equal to that of the incoming material conveyor belt until the silicon wafers are separated from the incoming material conveyor belt, so as to avoid slippage of the silicon wafers during the transfer process. At the same time, starting from the feeding of the silicon wafers, the displacement mechanism 40 moves in the positive direction of the first direction, so that the length of the top layer 23 of the first conveyor belt increases and the length of the top layer 33 of the second conveyor belt decreases, preparing for the speed increase of the first conveyor belt 22.

[0056] When the silicon wafers are completely separated from the incoming material conveyor belt, that is, when the silicon wafers are only conveyed on the first conveyor belt 22, the speed of the first conveyor belt 22 is gradually increased until the speed of the first conveyor belt 22 is equal to that of the second conveyor belt 32. During this process, the displacement mechanism 40 continues to move in the positive direction of the first direction. At this time, the silicon wafers are transferred from the first conveyor belt 22 to the second conveyor belt 32. Since the speed of the first conveyor belt 22 is equal to that of the second conveyor belt 32, there will be no relative speed difference between the silicon wafers and the second conveyor belt 32, and surface defects such as scratches caused by silicon wafer slippage can be avoided.

[0057] Then the displacement mechanism 40 moves in the reverse direction of the first direction, that is, the displacement mechanism 40 folds back towards the direction close to the incoming material conveyor belt, and the silicon wafers are completely separated from the first conveyor belt 22. Before the silicon wafers are completely separated from the first conveyor belt 22, the speed of the first conveyor belt 22 remains the same as that of the second conveyor belt 32.

[0058] After the silicon wafer is completely separated from the first conveyor belt 22, the first conveyor belt 22 gradually decelerates to v1 to make preparations for the docking of the next silicon wafer in advance. The second conveyor belt 32 transfers the silicon wafer to the discharging conveyor belt. Since the speed of the second conveyor belt 32 is equal to the speed of the discharging conveyor belt, there will be no relative speed difference between the silicon wafer and the discharging conveyor belt, thus avoiding the silicon wafer from slipping.

[0059] After the silicon wafer is completely separated from the second conveyor belt 32, the second conveyor belt 32 runs with a clear space for the next variable-speed docking preparation.

[0060] Thus, in the conveying device 100 according to the embodiment of the present invention, at least one first conveying wheel in the first conveying mechanism 20 and at least one second conveying wheel in the second conveying mechanism 30 are arranged on the displacement mechanism 40. By using the movement of the displacement mechanism 40 in the first direction to change the positions of the first conveying wheel and the second conveying wheel thereon, the lengths of the top layer 23 of the first conveyor belt and the top layer 33 of the second conveyor belt are changed, realizing the displacement and variable-speed functions in a compact space, solving the problem that it is difficult to set up multi-stage belt for step-by-step speed increase in a compact space, and having the advantages of simple structure and space saving.

[0061] According to an embodiment of the present invention, the length of the top layer 23 of the first conveyor belt is L1, the length of the top layer 33 of the second conveyor belt is L2, and L1 + L2 = C, where C is a constant.

[0062] Specifically, since the first conveying wheel and the second conveying wheel on the displacement mechanism 40 move synchronously along the first direction with the displacement mechanism 40, during the movement of the displacement mechanism 40, the sum of the length of the top layer 23 of the first conveyor belt and the length of the top layer 33 of the second conveyor belt can be a constant C to keep the overall length of the conveying device 100 in the first direction constant.

[0063] In addition, the size of C can be designed according to the actual distance between the incoming material conveyor belt and the material conveyor belt in the production equipment.

[0064] According to some other embodiments of the present invention, the first conveyor belt 22 is annular, and a plurality of first conveying wheels include a first wheel 211 and a second wheel 212 connected to the displacement mechanism 40. The first wheel 211 and the second wheel 212 are respectively spaced apart in the first direction and the second direction, and the second direction is perpendicular to the first direction. The first wheel 211 is arranged inside the first conveyor belt 22, and the second wheel 212 is arranged outside the first conveyor belt 22.

[0065] According to some other embodiments of the present utility model, the second conveyor belt 32 is annular, and the plurality of second conveyor wheels include a third wheel 311 and a fourth wheel 312 connected to the displacement mechanism 40. The third wheel 311 and the fourth wheel 312 are respectively spaced apart in the first direction and the second direction. The third wheel 311 is disposed inside the second conveyor belt 32, and the fourth wheel 312 is disposed outside the second conveyor belt 32.

[0066] Specifically, a first wheel 211, a second wheel 212, a third wheel 311, and a fourth wheel 312 are provided on the displacement mechanism 40. Among them, the first wheel 211 and the second wheel 212 belong to the first conveyor wheels, and the third wheel 311 and the fourth wheel 312 belong to the second conveyor wheels.

[0067] In the first direction, the first wheel 211 and the second wheel 212 can be spaced apart, and the third wheel 311 and the fourth wheel 312 can be spaced apart. In the second direction, the first wheel 211 and the second wheel 212 can be spaced apart, and the third wheel 311 and the fourth wheel 312 can be spaced apart.

[0068] The first wheel 211 is disposed inside the first conveyor belt 22, and the second wheel 212 is disposed outside the first conveyor belt 22, which can make the first conveyor belt 22 wind around between the first wheel 211 and the second wheel 212 in an S shape. Optionally, the radian of the first conveyor belt 22 in contact with the first wheel 211 can be ≥180°, and the radian of the first conveyor belt 22 in contact with the second wheel 212 can be ≥180°.

[0069] The third wheel 311 is disposed inside the second conveyor belt 32, and the fourth wheel 312 is disposed outside the second conveyor belt 32, which can make the second conveyor belt 32 wind around between the third wheel 311 and the fourth wheel 312 in an S shape. Optionally, the radian of the second conveyor belt 32 in contact with the third wheel 311 can be ≥180°, and the radian of the second conveyor belt 32 in contact with the fourth wheel 312 can be ≥180°.

[0070] Optionally, the first direction can be the horizontal direction, and the second direction can be the vertical direction. As Figures 4 to 9 shown, the first wheel 211 can be disposed in the upper right of the second wheel 212, and the third wheel 311 can be disposed in the upper left of the fourth wheel 312.

[0071] In addition, since the first round 211, the second round 212, the third round 311, and the fourth round 312 are all arranged on the displacement mechanism 40, the distance between the first round 211 and the third round 311 remains constant, and the distance between the second round 212 and the fourth round 312 remains constant. As the displacement mechanism 40 moves forward in the first direction, the length of the top layer 23 of the first conveyor belt can be lengthened while the length of the top layer 33 of the second conveyor belt is shortened. Or as the displacement mechanism 40 moves backward in the first direction, the length of the top layer 23 of the first conveyor belt can be shortened while the length of the top layer 33 of the second conveyor belt is stretched.

[0072] In some specific embodiments, the displacement mechanism 40 may include upper and lower connecting plates. The first round 211 and the third round 311 are connected to the top connecting plate, and the second round 212 and the fourth round 312 are connected to the lower connecting plate.

[0073] In some specific embodiments of the present utility model, the first round 211 is connected to the top layer 23 of the first conveyor belt, and the third round 311 is connected to the top layer 33 of the second conveyor belt. In the first direction, the first round 211 and the third round 311 are located between the second round 212 and the fourth round 312. In the second direction, the first round 211 and the third round 311 are at the same height, and the second round 212 and the fourth round 312 are at the same height.

[0074] Specifically, by setting the top layer 23 of the first conveyor belt to be connected to the first round 211 and the top layer 33 of the second conveyor belt to be connected to the third round 311, the lengths of the first conveyor belt 22 and the second conveyor belt 32 can be directly adjusted by the movement of the first round 211 and the second round 212.

[0075] By arranging the first round 211 and the third round 311 between the second round 212 and the fourth round 312, the distance between the first round 211 and the second round 212 can be shortened, thereby shortening the distance between the first conveyor belt 22 and the second conveyor belt 32, which is beneficial to the stable and reliable transfer of the silicon wafers between the first conveyor belt 22 and the second conveyor belt 32.

[0076] In addition, by setting the first round 211 and the third round 311 at the same height, the ends of the first conveyor belt 22 and the second conveyor belt 32 where the silicon wafers are transferred can be at the same height, avoiding the silicon wafers from colliding and falling due to the height difference between the two.

[0077] According to some alternative embodiments of the present utility model, the plurality of first conveyor wheels further include a fifth wheel 213 and a sixth wheel 214. The fifth wheel 213 is disposed on the base and is at the same height as the first wheel 211 in the second direction. The fifth wheel 213 is connected to the top layer 23 of the first conveyor belt and is located inside the first conveyor belt 22. The sixth wheel 214 is disposed on the base. In the second direction, the sixth wheel 214 is located on the side of the second wheel 212 away from the first wheel 211, and the sixth wheel 214 is disposed inside the first conveyor belt 22. The plurality of second conveyor wheels further include a seventh wheel 313 and an eighth wheel 314. The seventh wheel 313 is disposed on the base and is at the same height as the third wheel 311 in the second direction. The seventh wheel 313 is connected to the top layer 33 of the second conveyor belt and is located inside the second conveyor belt 32. The eighth wheel 314 is disposed on the base. In the second direction, the eighth wheel 314 is located on the side of the fourth wheel 312 away from the third wheel 311, and the eighth wheel 314 is disposed inside the second conveyor belt 32.

[0078] Specifically, as Figures 4 to 9 shown, both the fifth wheel 213 and the sixth wheel 214 belong to the first conveyor wheels, and the fifth wheel 213 and the sixth wheel 214 are respectively rotatably connected to the base. The seventh wheel 313 and the eighth wheel 314 belong to the first conveyor wheels, the fifth wheel 213 and the sixth wheel 214 both belong to the second conveyor wheels, and the fifth wheel 213 and the sixth wheel 214 are respectively rotatably connected to the base.

[0079] The fifth wheel 213 can be disposed at one end of the first wheel 211 away from the second conveying mechanism 30, and the fifth wheel 213 can be at the same height as the first wheel 211. The fifth wheel 213 is disposed inside the first conveyor belt 22, which can enable the top layer 23 of the first conveyor belt to be mounted between the first wheel 211 and the fifth wheel 213.

[0080] The sixth wheel 214 can be disposed below the second wheel 212, and the sixth wheel 214 is disposed inside the first conveyor belt 22. Therefore, in the direction from top to bottom, the first conveyor belt 22 can sequentially bypass the first wheel 211, the second wheel 212, and the sixth wheel 214 in an S shape. Optionally, the arc of the first conveyor belt 22 in contact with the sixth wheel 214 can be ≥180°.

[0081] The seventh wheel 313 can be disposed at one end of the third wheel 311 away from the first conveying mechanism 20, and the seventh wheel 313 can be at the same height as the third wheel 311. The seventh wheel 313 is disposed inside the second conveyor belt 32, which can enable the top layer 33 of the second conveyor belt to be mounted between the third wheel 311 and the seventh wheel 313.

[0082] The eighth wheel 314 can be arranged below the fourth wheel 312, and the eighth wheel 314 is arranged inside the second conveyor belt 32. In the direction from top to bottom, the second conveyor belt 32 can sequentially bypass the third wheel 311, the fourth wheel 312, and the eighth wheel 314 in an S shape. Optionally, the arc formed by the second conveyor belt 32 in contact with the eighth wheel 314 can be ≥180°.

[0083] The sixth wheel 214 and the eighth wheel 314 can be arranged close to each other, and the distance between the sixth wheel 214 and the eighth wheel 314 can be less than the distance between the first wheel 211 and the third wheel 311.

[0084] In some specific embodiments, the plurality of first conveyor wheels further include a first driving wheel 215 and a first tensioning wheel 216. The first driving wheel 215 can be located at the bottommost of the plurality of first conveyor wheels. The first driving wheel 215 can be arranged inside the first conveyor belt 22 to drive the first conveyor belt 22 to move. The first tensioning wheel 216 can be arranged between the first driving wheel 215 and the fifth wheel 213. The first tensioning wheel 216 can be arranged outside the first conveyor belt 22, and the first tensioning wheel 216 can move in the thickness direction of the first conveyor belt 22 to adjust the tension of the first conveyor belt 22.

[0085] The plurality of second conveyor wheels further include a second driving wheel 315 and a second tensioning wheel 316. The second driving wheel 315 can be located at the bottommost of the plurality of second conveyor wheels. The second driving wheel 315 can be arranged inside the second conveyor belt 32 to drive the second conveyor belt 32 to move. The second tensioning wheel 316 can be arranged between the second driving wheel 315 and the seventh wheel 313. The second tensioning wheel 316 can be arranged outside the second conveyor belt 32, and the second tensioning wheel 316 can move in the thickness direction of the second conveyor belt 32 to adjust the tension of the second conveyor belt 32.

[0086] According to some other embodiments of the present utility model, the conveying device 100 is at least switchable between a first state, a second state, and a third state.

[0087] As Figure 4 and Figure 5 shown, when the conveying device 100 is in the first state, the first conveyor belt 22 conveys materials, and the length of the top layer 23 of the first conveyor belt is less than the length of the top layer 33 of the second conveyor belt.

[0088] As Figure 6 and Figure 7 shown, when the conveying device 100 is in the second state, the first conveyor belt 22 transfers materials to the second conveyor belt 32. The length of the top layer 23 of the first conveyor belt is equal to the length of the top layer 33 of the second conveyor belt, and the speeds of the first conveyor belt 22 and the second conveyor belt 32 are equal.

[0089] AsFigure 8 and Figure 9 As shown in Figure 9 , when the conveying device 100 is in the third state, the second conveyor belt 32 conveys materials, and the length of the top layer 23 of the first conveyor belt is greater than the length of the top layer 33 of the second conveyor belt.

[0090] During the process of the conveying device 100 switching from the first state to the third state, the displacement mechanism 40 moves in the positive direction of the first direction. During the process of the conveying device 100 switching from the third state to the first state, the displacement mechanism 40 moves in the reverse direction of the first direction.

[0091] In some specific embodiments of the present invention, the conveying device 100 further includes a first driving mechanism 50, a second driving mechanism 60, and a third driving mechanism 70. The first driving mechanism 50 is connected to the first conveying mechanism 20 to drive the first conveying mechanism 20 to convey materials. The second driving mechanism 60 is connected to the second conveying mechanism 30 to drive the second conveying mechanism 30 to convey materials. The third driving mechanism 70 is connected to the displacement mechanism 40 to drive the displacement mechanism 40 to move in the first direction.

[0092] Specifically, the first driving mechanism 50 and the second driving mechanism 60 may respectively include a driving motor and a driving belt for driving the first driving wheel 215 or the second driving wheel 315 to rotate, and then driving the first conveyor belt 22 and the second conveyor belt 32 to move.

[0093] The third driving mechanism 70 may be connected to the displacement mechanism 40 for driving the displacement mechanism 40 to perform a reciprocating motion in the first direction.

[0094] According to some alternative embodiments of the present invention, the conveying device 100 further includes a detection mechanism 80 and a controller (not shown in the figure). The detection mechanism 80 is disposed on the upper side of the base for detecting the positions of the materials conveyed by the first conveying mechanism 20 and the second conveying mechanism 30. The controller is electrically connected to the detection mechanism 80, the first driving mechanism 50, the second driving mechanism 60, and the third driving mechanism 70 respectively for controlling the first driving mechanism 50, the second driving mechanism 60, and the third driving mechanism 70 according to the detection results of the detection mechanism 80.

[0095] Specifically, a detection mechanism 80 may be disposed above the first conveying mechanism 20 and the second conveying mechanism 30. The detection mechanism 80 can detect the position of the silicon wafer and send the detection result to the controller. The controller can control and adjust the speed of the first conveyor belt 22, the speed of the second conveyor belt 32, and the movement of the displacement mechanism 40 according to the position of the silicon wafer.

[0096] Optionally, the detection mechanism 80 may include three detectors, which may be sequentially arranged at intervals along the first direction, where two detectors are respectively arranged at both ends of the conveying device 100, and the other detector is arranged in the middle of the conveying device 100.

[0097] According to some other embodiments of the present invention, the number of the first conveying mechanisms 20 and the second conveying mechanisms 30 is respectively multiple. The multiple first conveying mechanisms 20 are arranged along the width direction of the first conveyor belt 22, and the multiple second conveying mechanisms 30 are arranged along the width direction of the second conveyor belt 32.

[0098] It may be defined that the width direction of the first conveyor belt 22 is the third direction, and the third direction is perpendicular to the first direction and the second direction respectively. As Figure 1 and Figure 2 shown, two first conveying mechanisms 20 may be arranged at intervals along the third direction, and two second conveying mechanisms 30 may also be arranged at intervals along the third direction.

[0099] The first wheels 211 and the second wheels 212 on the two first conveying mechanisms 20 and the third wheels 311 and the fourth wheels 312 on the two second conveying mechanisms 30 are all arranged on the displacement mechanism 40. Therefore, the movement of the displacement mechanism 40 can simultaneously drive the paired first wheels 211, second wheels 212, third wheels 311 and fourth wheels 312 to move synchronously.

[0100] The displacement and speed-changing conveying process of the conveying device 100 provided by the present invention will be described in detail below.

[0101] Initially, the conveying device 100 is in the first state. The incoming material conveyor belt conveys the silicon wafers at a constant speed v1, and the outgoing material conveyor belt conveys the silicon wafers at a constant speed v2, where v1 < v2. The length of the top layer 23 of the first conveyor belt is the shortest, and the length of the top layer 33 of the second conveyor belt is the longest. The speed of the first conveyor belt 22 is equal to the speed of the incoming material conveyor belt, and the speed of the second conveyor belt 32 is equal to the speed of the outgoing material conveyor belt.

[0102] When the leftmost detector detects that the silicon wafer enters the first conveyor belt 22 from the left, the controller controls the displacement mechanism 40 to move forward along the first direction, so that the conveying device 100 switches from the first state to the second state, and the silicon wafer is continuously conveyed on the first conveyor belt 22, so that the silicon wafer is completely separated from the incoming material conveyor belt.

[0103] When the conveying device 100 switches to the second state, the middle detector is triggered by detecting the silicon wafer,

[0104] The controller controls the first conveyor belt 22 to increase its speed and quickly reach the same speed as the second conveyor belt 32. At this time, the length of the top layer 23 of the first conveyor belt is approximately equal to the length of the top layer 33 of the second conveyor belt. The silicon wafer enters the second conveyor belt 32 at a high speed. Since the speeds of the first conveyor belt 22 and the second conveyor belt 32 are equal, there is no relative speed difference between the silicon wafer and the second conveyor belt 32, and surface defects such as scratches caused by the slippage of the silicon wafer can be avoided.

[0105] Then the position-changing mechanism 40 continues to move forward in the first direction, causing the conveying device 100 to switch from the second state to the third state. During this process, the silicon wafer gradually detaches from the first conveyor belt 22 and enters the second conveyor belt 32.

[0106] When the conveying device 100 switches to the third state, the rightmost detector detects the silicon wafer and is triggered. The controller controls the position-changing mechanism 40 to fold back in the reverse direction of the first direction, and causes the silicon wafer to completely detach from the first conveyor belt 22.

[0107] During the process of the position-changing mechanism 40 folding back, the speed of the first conveyor belt 22 gradually decreases until it is equal to the speed of the incoming material conveyor belt, so as to make preparations in advance for the arrival of the next silicon wafer. The silicon wafer on the second conveyor belt 32 continues to be conveyed to the outgoing material conveyor belt until the second conveyor belt 32 runs empty after the silicon wafer completely detaches from it, making preparations for the next position-changing docking.

[0108] The embodiment of the present invention also provides a silicon wafer production device, which includes the conveying device 100 according to any one of the above embodiments. Since the conveying device 100 according to the embodiment of the present invention has the above technical effects, therefore, the silicon wafer production device according to the embodiment of the present invention also has corresponding technical effects, that is, by moving the position-changing mechanism 40 in the first direction, the positions of the first conveying wheel and the second conveying wheel thereon are changed, thereby changing the lengths of the top layer 23 of the first conveyor belt and the top layer 33 of the second conveyor belt, realizing the position-changing and speed-changing function in a compact space, solving the problem that it is difficult to set up multi-stage belts for step-by-step speed increase in a compact space, and having the advantages of simple structure and space saving.

[0109] In the actual application process, the above-mentioned controller is not limited to a certain brand and model. The present invention does not need to make an explanation for this. It should be noted that the computer program loaded by the above-mentioned controller is not within the protection scope of the present invention. The present invention does not protect computer programs. When using the present invention, all computer programs need to be additionally loaded by those skilled in the art. According to the present invention, certain steps can be carried out sequentially or simultaneously.

[0110] Although some specific embodiments of the present utility model have been described in detail by way of examples, those skilled in the art should understand that the above examples are only for illustration and not for limiting the scope of the present utility model. Those skilled in the art should understand that the above embodiments can be modified without departing from the scope and spirit of the present utility model. The scope of the present utility model is defined by the appended claims.

Claims

1. A conveying device, characterized in that, Comprising: Base; The first conveying mechanism is arranged on the base. The first conveying mechanism includes a plurality of first conveying wheels and a first conveyor belt wound around the plurality of first conveying wheels. The top layer of the first conveyor belt is used for conveying materials in the first direction; The second conveying mechanism is arranged on the base. The second conveying mechanism and the first conveying mechanism are arranged in the first direction. The second conveying mechanism includes a plurality of second conveying wheels and a second conveyor belt wound around the plurality of second conveying wheels. The top layer of the second conveyor belt is used for conveying materials in the first direction; The displacement mechanism is arranged on the base. At least one of the first conveying wheels and at least one of the second conveying wheels are arranged on the displacement mechanism. The displacement mechanism is movable in the first direction to adjust the lengths of the top layers of the first conveyor belt and the second conveyor belt.

2. The conveying device according to claim 1, wherein The length of the top layer of the first conveyor belt is L1, the length of the top layer of the second conveyor belt is L2, and L1 + L2 = C, where C is a constant.

3. The conveying device according to claim 1, characterized in that, The first conveyor belt is annular. The plurality of first conveying wheels include a first wheel and a second wheel connected to the displacement mechanism. The first wheel and the second wheel are spaced apart in the first direction and the second direction respectively. The second direction is perpendicular to the first direction. The first wheel is arranged inside the first conveyor belt, and the second wheel is arranged outside the first conveyor belt.

4. The conveying device according to claim 3, characterized in that, The second conveyor belt is annular. The plurality of second conveying wheels include a third wheel and a fourth wheel connected to the displacement mechanism. The third wheel and the fourth wheel are spaced apart in the first direction and the second direction respectively. The third wheel is arranged inside the second conveyor belt, and the fourth wheel is arranged outside the second conveyor belt.

5. The conveying device according to claim 4, characterized in that The first wheel is connected to the top layer of the first conveyor belt, and the third wheel is connected to the top layer of the second conveyor belt. In the first direction, the first wheel and the third wheel are located between the second wheel and the fourth wheel. In the second direction, the first wheel and the third wheel are at the same height, and the second wheel and the fourth wheel are at the same height.

6. The conveying device according to claim 5, characterized in that The plurality of first conveying wheels further include: A fifth wheel arranged on the base and at the same height as the first wheel in the second direction. The fifth wheel is connected to the top layer of the first conveyor belt and is located inside the first conveyor belt; A sixth wheel arranged on the base. In the second direction, the sixth wheel is located on the side of the second wheel away from the first wheel. The sixth wheel is arranged inside the first conveyor belt; The plurality of second conveying wheels further include: A seventh wheel arranged on the base and at the same height as the third wheel in the second direction. The seventh wheel is connected to the top layer of the second conveyor belt and is located inside the second conveyor belt; An eighth wheel arranged on the base. In the second direction, the eighth wheel is located on the side of the fourth wheel away from the third wheel. The eighth wheel is arranged inside the second conveyor belt.

7. The conveying device according to claim 1, characterized in that The conveying device is switchable at least between a first state, a second state, and a third state. When the conveying device is in the first state, the first conveyor belt conveys the material, and the length of the top layer of the first conveyor belt is less than the length of the top layer of the second conveyor belt; When the conveying device is in the second state, the first conveyor belt transfers the material to the second conveyor belt, the length of the top layer of the first conveyor belt is equal to the length of the top layer of the second conveyor belt, and the speeds of the first conveyor belt and the second conveyor belt are equal; When the conveying device is in the third state, the second conveyor belt conveys the material, and the length of the top layer of the first conveyor belt is greater than the length of the top layer of the second conveyor belt.

8. The conveying device according to claim 1, characterized in that It further includes: A first driving mechanism, which is connected to the first conveying mechanism to drive the first conveying mechanism to convey the material; A second driving mechanism, which is connected to the second conveying mechanism to drive the second conveying mechanism to convey the material; A third driving mechanism, which is connected to the displacement mechanism to drive the displacement mechanism to move along the first direction.

9. The conveying device according to claim 8, characterized in that, It further includes: A detection mechanism, which is arranged on the upper side of the base and is used to detect the position of the material conveyed by the first conveying mechanism and the second conveying mechanism; A controller, which is electrically connected to the detection mechanism, the first driving mechanism, the second driving mechanism and the third driving mechanism respectively, and is used to control the first driving mechanism, the second driving mechanism and the third driving mechanism according to the detection result of the detection mechanism.

10. The conveying device according to any one of claims 1-9, characterized in that, The numbers of the first conveying mechanism and the second conveying mechanism are respectively multiple, and the multiple first conveying mechanisms are arranged along the width direction of the first conveyor belt, and the multiple second conveying mechanisms are arranged along the width direction of the second conveyor belt.

11. A silicon wafer production device, characterized in that, It includes: The conveying device according to any one of claims 1-10.

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