Vacuum coating clamp

Abstract

The utility model discloses a vacuum coating clamp which comprises a pipe body, the peripheral surface of the pipe body is used for fixing a plurality of circles of substrates which are distributed along the axis of the pipe body, the pipe body comprises a central pipe part and two first gradually-widened pipe parts which are positioned at the two ends of the central pipe part and have gradually-increased diameters, and the small-diameter ends of the first gradually-widened pipe parts are connected with the end part of the central pipe part; the large-diameter end of the first gradually-widened pipe part extends in the direction away from the center pipe part, and the center cross section of the center pipe part is aligned with the point evaporation source. According to the vacuum coating clamp disclosed by the utility model, the coating thickness of a substrate at each point position on the clamp along the axial direction of the clamp is more uniform.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating tools, and particularly relates to a vacuum coating fixture. Background Art

[0002] Vacuum coating mainly refers to a type of coating that needs to be carried out under a relatively high vacuum degree, including many specific types, such as vacuum resistance heating evaporation, electron beam heating evaporation, magnetron sputtering, PLD laser sputtering deposition, ion beam sputtering, etc. The main idea is divided into two types: evaporation and sputtering.

[0003] Among them, the product to be coated is called a substrate, and the coating material is called a film material. The substrate and the film material are both in the vacuum chamber.

[0004] In optical devices, an electron beam heating evaporation system is generally used. For the electron beam heating evaporation system, its evaporation source is a point evaporation source.

[0005] In the related art, when the electron beam heating evaporation system is in use, the substrate needs to be fixed on a straight tubular fixture, and the film material evaporates and deposits from the point evaporation source in a fan shape from point to surface onto the substrate on the straight tubular fixture.

[0006] As Figure 1 shown, the film material evaporates and deposits from the point evaporation source onto the substrate on the straight tubular fixture. The coating thickness at each point along the axial direction of the straight tubular fixture is inversely proportional to the square of the distance L between the point evaporation source and the substrate, and is proportional to the cosine function of the angle θ between L and the perpendicular distance from the point evaporation source to the straight tubular fixture. That is to say, on the straight tubular fixture, the larger the angle θ, the smaller it is, the larger L is, and the thinner the coating thickness of the substrate at the position of this point on the straight tubular fixture is.

[0007] However, the differences in L at each point along the axial direction of the straight tubular fixture are large, resulting in large differences in the coating thickness of the substrates at each point position on the straight tubular fixture, and the coating thickness is uneven. Summary of the Utility Model

[0008] The utility model aims to solve at least one of the technical problems existing in the prior art. For this purpose, the utility model provides a vacuum coating fixture, which can make the coating thickness of the substrates at each point position along the axial direction of the fixture more uniform.

[0009] A vacuum coating fixture according to an embodiment of the first aspect of the present invention includes a tube body. The outer peripheral surface of the tube body is used to fix a plurality of circles of substrates distributed along the axis of the tube body. The tube body includes a central tube portion and two first gradually widening tube portions located at both ends of the central tube portion and having gradually increasing diameters. The small-diameter end of the first gradually widening tube portion is connected to the end of the central tube portion, and the large-diameter end of the first gradually widening tube portion extends away from the central tube portion. The central cross-section of the central tube portion is aligned with the point evaporation source.

[0010] A vacuum coating fixture according to an embodiment of the present invention has at least the following beneficial effects:

[0011] 1. By providing the tube body in the present invention, the outer peripheral surface of the tube body is used to fix a plurality of circles of substrates distributed along the axis of the tube body. Thus, the substrates can be fixed on the outer peripheral surface of the tube body, and multiple circles of substrates can be distributed along the axial direction of the outer peripheral surface of the tube body. Furthermore, the number of substrates fixed on the tube body is increased.

[0012] 2. By making the tube body include a central tube portion and two first gradually widening tube portions located at both ends of the central tube portion and having gradually increasing diameters, the small-diameter end of the first gradually widening tube portion is connected to the end of the central tube portion, the large-diameter end of the first gradually widening tube portion extends away from the central tube portion, and the central cross-section of the central tube portion is aligned with the point evaporation source. It can be understood that the central tube portion and the first gradually widening tube portion can surround the emission source approximately annularly, so that the distance difference between the point evaporation source and the substrates on the outer surface of the central tube and the distance difference between the point evaporation source and the substrates on the outer surface of the first gradually widening tube portion are small. Thus, compared with a conventional straight tube-shaped fixture, the vacuum coating fixture of the present invention can reduce the distance difference between the point evaporation source and the substrates at different positions along the axis of the fixture, making the coating thickness of the film material on the substrates at different positions along the axis of the fixture more uniform.

[0013] According to some embodiments of the present invention, the central tube portion and the first gradually widening tube portion are fixedly welded.

[0014] According to some embodiments of the present invention, the central tube portion is provided as a straight tube shape.

[0015] According to some embodiments of the present invention, at least two circles of hanging holes are provided on the outer peripheral surface of the central tube portion. The at least two circles of hanging holes are arranged along the axis of the central tube portion and are centrally symmetric along the center of the central tube portion. The hanging holes are used to fix the substrates.

[0016] According to some embodiments of the present invention, the first gradually widening tube portion is in a trumpet shape.

[0017] According to some embodiments of the present utility model, at least two circles of hanging holes are provided on the outer circumferential surface of the first gradually widening pipe portion, and the at least two circles of hanging holes are arranged along the axis of the first gradually widening pipe portion. The hanging holes are used for fixing the substrate.

[0018] According to some embodiments of the present utility model, the pipe body further includes a second gradually widening pipe portion. The second gradually widening pipe portion is provided at one end of the first gradually widening pipe portion away from the central pipe portion. The small-diameter end of the second gradually widening pipe portion is connected to the large-diameter end of the first gradually widening pipe portion. The large-diameter end of the second gradually widening pipe portion extends in a direction away from the first gradually widening pipe portion. The inclination angle of the outer circumferential surface of the second gradually widening pipe portion is greater than the inclination angle of the outer circumferential surface of the first gradually widening pipe portion.

[0019] According to some embodiments of the present utility model, the first gradually widening pipe portion and the second gradually widening pipe portion are fixed by welding.

[0020] According to some embodiments of the present utility model, the second gradually widening pipe portion is in a trumpet shape.

[0021] According to some embodiments of the present utility model, an installation pipe is provided at the axis of the pipe body, and support pieces are provided between the installation pipe and the inner wall of the pipe body.

[0022] The additional aspects and advantages of the present utility model will be partly given in the following description, partly will become obvious from the following description, or will be understood through the practice of the present utility model. Description of the Drawings

[0023] The above and / or additional aspects and advantages of the present utility model will become obvious and easy to understand from the description of the embodiments in conjunction with the following drawings, in which:

[0024] Figure 1 is a schematic diagram of the film coating principle of the point evaporation source in the prior art to each point of the fixture;

[0025] Figure 2 is a schematic structural diagram of a vacuum coating fixture according to an embodiment of the present utility model;

[0026] Figure 3 is Figure 2 a front view shown;

[0027] Figure 4 is Figure 3 a sectional view taken along line A-A shown;

[0028] Figure 5 is a schematic diagram of the film coating principle of the point evaporation source in the embodiment of the present utility model to each point of the fixture.

[0029] Reference numerals: 100 - tube body, 110 - central tube portion, 120 - first tapered tube portion, 130 - hanging hole, 140 - second tapered tube portion, 150 - mounting tube, 160 - support piece. Detailed implementation manners

[0030] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the drawings, wherein the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation to the present utility model.

[0031] In the description of the present utility model, it should be understood that with regard to the orientation description, such as the upper, lower, front, rear, left, right, etc., the indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0032] In the description of the present utility model, the meaning of "a number of" is one or more, the meaning of "a plurality of" is two or more, "greater than", "less than", "exceeding", etc. are understood not to include the present number, and "above", "below", "within", etc. are understood to include the present number. If the first and the second are described only for the purpose of distinguishing technical features, they should not be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0033] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0034] A vacuum coating fixture according to an embodiment of the present utility model will be described below with reference to the drawings.

[0035] Referring to Figure 2 , Figure 3 and Figure 4 , a vacuum coating fixture according to an embodiment of the present utility model includes a tube body 100, and the outer peripheral surface of the tube body 100 is used to fix a plurality of circles of substrates distributed along the axis of the tube body 100.

[0036] In this embodiment, by providing a tube body 100, the outer peripheral surface of the tube body 100 is used to fix a plurality of circles of substrates distributed along the axis of the tube body 100. Thus, the substrates can be fixed on the outer peripheral surface of the tube body 100, and multiple circles of substrates can be distributed along the axial direction of the outer peripheral surface of the tube body 100. Furthermore, the number of substrates fixed on the tube body 100 is increased.

[0037] Referring to Figure 5 , specifically, the tube body 100 includes a central tube portion 110 and two first tapered tube portions 120 located at both ends of the central tube portion 110 with gradually increasing diameters. The small-diameter end of the first tapered tube portion 120 is connected to the end of the central tube portion 110, and the large-diameter end of the first tapered tube portion 120 extends away from the central tube portion 110. The central cross-section of the central tube portion 110 is aligned with the point evaporation source.

[0038] It can be understood that the central tube portion 110 and the first tapered tube portion 120 can approximately surround the point evaporation source in a ring shape, so that the distance difference between the point evaporation source and the substrates on the outer surface of the central tube and the distance difference between the point evaporation source and the substrates on the outer surface of the first tapered tube portion 120 are small. Thus, compared with a conventional straight tubular fixture, the vacuum coating fixture of this embodiment can reduce the distance difference between the point evaporation source and the substrates at different positions along the axis of the fixture, making the coating thickness of the film material on the substrates at different positions along the axis of the fixture more uniform.

[0039] In some specific embodiments, the central tube portion 110 and the first tapered tube portion 120 are fixed by welding, so that the connection between the central tube portion 110 and the first tapered tube portion 120 is more firm.

[0040] In some specific embodiments, the central tube portion 110 is provided as a straight tube, so that the production of the straight central tube portion 110 is simpler, and further, the production difficulty of the central tube portion 110 is reduced.

[0041] In some specific embodiments, at least two circles of hanging holes 130 are provided on the outer peripheral surface of the central tube portion 110. The at least two circles of hanging holes 130 are arranged along the axis of the central tube portion 110 and are centrosymmetric about the center of the central tube portion 110. The hanging holes 130 are used to fix the substrates. Thus, the distance difference between the two circles of hanging holes 130 on the outer peripheral surface of the central tube portion 110 and the point evaporation source is small, and further, the coating thickness of the film material on the substrates of the central tube portion 110 is more uniform.

[0042] In some specific embodiments, the first tapered tube portion 120 is in a trumpet shape, so that the outer circular surface of the first tapered tube portion 120 is an inclined surface. It can be understood that the first tapered tube portion 120 with an outer circular surface being an inclined surface is simpler to manufacture than the first tapered tube portion 120 with an outer circular surface being an arc surface, and further, the production difficulty of the first tapered tube portion 120 is reduced.

[0043] In some specific embodiments, at least two circles of hanging holes 130 are provided on the outer circumferential surface of the first gradually widening tube portion 120. The at least two circles of hanging holes 130 are arranged along the axis of the first gradually widening tube portion 120. The hanging holes 130 are used to fix the substrates, thereby increasing the number of substrates fixed on the first gradually widening tube portion 120, and further improving the coating efficiency.

[0044] In some specific embodiments, the tube body 100 further includes a second gradually widening tube portion 140. The second gradually widening tube portion 140 is provided at one end of the first gradually widening tube portion 120 away from the central tube portion 110. The small-diameter end of the second gradually widening tube portion 140 is connected to the large-diameter end of the first gradually widening tube portion 120. The large-diameter end of the second gradually widening tube portion 140 extends in a direction away from the first gradually widening tube portion 120. The inclination angle of the outer circumferential surface of the second gradually widening tube portion 140 is greater than the inclination angle of the outer circumferential surface of the first gradually widening tube portion 120.

[0045] It can be understood that by providing the second gradually widening tube portion 140 at the large-diameter end of the first gradually widening tube portion 120, the length of the tube body 100 is longer, and the tube body 100 can fix more substrates, thereby improving the coating efficiency. At the same time, the inclination angle of the outer circumferential surface of the second gradually widening tube portion 140 is greater than the inclination angle of the outer circumferential surface of the first gradually widening tube portion 120, so that the inclination angle of the second gradually widening tube portion 140 towards the point evaporation source is larger. Furthermore, the difference between the distance from the outer surface of the first gradually widening tube portion 120 to the point evaporation source and the distance from the second gradually widening tube portion 140 to the point evaporation source is reduced, making the coating thickness of the film material on the substrates of the first gradually widening tube portion 120 and the second gradually widening tube portion 140 more uniform.

[0046] Specifically, the inclination angle between the outer circumferential surface of the first gradually widening tube portion 120 and the axis of the tube body 100 is set to 7±1°.

[0047] Furthermore, the inclination angle between the outer circumferential surface of the second gradually widening tube portion 140 and the axis of the tube body 100 is set to 16±1°.

[0048] In some specific embodiments, two second gradually widening tube portions 140 are provided, and the two second gradually widening tube portions 140 are respectively connected to the two first gradually widening tube portions 120.

[0049] Furthermore, the first gradually widening tube portion 120 and the second gradually widening tube portion 140 are fixed by welding, so that the connection between the first gradually widening tube portion 120 and the second gradually widening tube portion 140 is more firm.

[0050] In some specific embodiments, the second gradually widening tube portion 140 is in a horn shape. Thus, the outer circumferential surface of the second gradually widening tube portion 140 is an inclined surface. It can be understood that the second gradually widening tube portion 140 with an inclined outer circumferential surface is simpler to manufacture than the second gradually widening tube portion 140 with an arc-shaped outer circumferential surface. Furthermore, the manufacturing difficulty of the second gradually widening tube portion 140 is reduced.

[0051] In some specific embodiments, at least two circles of hanging holes 130 are provided on the outer circumferential surface of the second gradually widening tube portion 140. The at least two circles of hanging holes 130 are arranged along the axis of the second gradually widening tube portion 140. The hanging holes 130 are used to fix the substrate. Thus, the number of substrates fixed on the second gradually widening tube portion 140 is increased. Furthermore, the coating efficiency is improved.

[0052] In some specific embodiments, an installation tube 150 is provided at the axis center of the tube body 100. A support piece 160 is provided between the installation tube 150 and the inner wall of the tube body 100. Thus, it is convenient to install the tube body 100 on a vacuum coating machine.

[0053] Furthermore, a plurality of support pieces 160 are provided. The plurality of support pieces 160 are arranged along the axial direction of the tube body 100. Thus, the tube body 100 is made more stable.

[0054] In some specific embodiments, a plurality of through holes are provided on the support piece 160. The through holes can ventilate. Thus, the gas flow inside the tube body 100 is made smoother.

[0055] In some specific embodiments, the installation tube 150 is provided as a square tube.

[0056] In some specific embodiments, both ends of the installation tube 150 extend outside the tube body 100. Thus, it is convenient to install and fix the installation tube 150.

[0057] In the description of this specification, the description with reference to terms such as "one embodiment", "some embodiments", "schematic embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.

[0058] The above has described the embodiments of the present invention in detail with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those of ordinary skill in the art in the said technical field, various changes can be made without departing from the gist of the present invention.

Claims

1. A vacuum coating fixture, comprising a tube body (100), wherein the outer peripheral surface of the tube body (100) is used for fixing a plurality of circles of substrates distributed along the axis of the tube body (100), and is characterized in that: The tube body (100) includes a central tube portion (110), and two first tapered tube portions (120) located at both ends of the central tube portion (110) with gradually increasing diameters. The small-diameter end of the first tapered tube portion (120) is connected to the end of the central tube portion (110), and the large-diameter end of the first tapered tube portion (120) extends away from the central tube portion (110). The central cross-section of the central tube portion (110) is aligned with the point evaporation source.

2. The vacuum coating fixture according to claim 1, wherein, The central tube portion (110) and the first tapered tube portion (120) are fixed by welding.

3. A vacuum coating fixture according to claim 1, characterized in that, The central tube portion (110) is arranged in a straight tube shape.

4. The vacuum coating fixture according to claim 3, wherein, At least two circles of hanging holes (130) are provided on the outer peripheral surface of the central tube portion (110). At least two circles of the hanging holes (130) are arranged along the axis of the central tube portion (110) and are centrosymmetric about the center of the central tube portion (110). The hanging holes (130) are used to fix the substrate.

5. A vacuum coating fixture according to claim 1, characterized in that, The first tapered tube portion (120) is in a horn shape.

6. The vacuum coating fixture according to claim 5, characterized in that, At least two circles of hanging holes (130) are provided on the outer peripheral surface of the first tapered tube portion (120). At least two circles of the hanging holes (130) are arranged along the axis of the first tapered tube portion (120). The hanging holes (130) are used to fix the substrate.

7. The vacuum coating fixture according to claim 1, characterized in that, The tube body (100) further includes a second tapered tube portion (140). The second tapered tube portion (140) is arranged at the end of the first tapered tube portion (120) away from the central tube portion (110). The small-diameter end of the second tapered tube portion (140) is connected to the large-diameter end of the first tapered tube portion (120). The large-diameter end of the second tapered tube portion (140) extends away from the first tapered tube portion (120). The inclination angle of the outer peripheral surface of the second tapered tube portion (140) is greater than the inclination angle of the outer peripheral surface of the first tapered tube portion (120).

8. A vacuum coating fixture according to claim 7, characterized in that, The first tapered tube portion (120) and the second tapered tube portion (140) are fixed by welding.

9. A vacuum coating fixture according to claim 7, wherein, The second tapered tube portion (140) is in a horn shape.

10. A vacuum coating fixture according to claim 1, characterized in that, An installation tube (150) is arranged at the axis center of the tube body (100), and a support piece (160) is arranged between the installation tube (150) and the inner wall of the tube body (100).

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