Quartz furnace tube suitable for silicon carbide boat support

Abstract

The utility model discloses a quartz furnace tube suitable for a silicon carbide boat support, and relates to the technical field of diffusion equipment in the photovoltaic industry. The quartz furnace tube suitable for the silicon carbide boat support comprises a quartz furnace tube body, the silicon carbide boat support is arranged in an inner cavity of the quartz furnace tube body, supporting mechanisms are arranged on the two sides of the bottom of the silicon carbide boat support, the side walls of the two supporting mechanisms are connected with the inner wall of the quartz furnace tube body, and each supporting mechanism comprises a supporting strip. The silicon carbide boat support is arranged on the inner wall of the quartz furnace tube, the supporting strip is arranged on one side of the bottom of the silicon carbide boat support, the bottom end of the supporting strip is connected with the inner wall of the quartz furnace tube, and a guide strip is arranged on the surface of the top of the supporting strip. The quartz furnace tube cannot be cracked by the expansion of the silicon carbide boat support, so that the quality accident can be effectively avoided, and the maximization of the production efficiency under the high-temperature working condition is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion equipment in the photovoltaic industry, and particularly relates to a quartz furnace tube suitable for use with a silicon carbide boat support. Background Technique

[0002] The boat support is a load-bearing component of the diffusion equipment in the photovoltaic industry. In the Topcon process of the photovoltaic industry, the boron diffusion process is adopted, and the temperature is 1050°C. The commonly used boat support material is quartz. The quartz boat support can be used for a long time below 1000°C. When the temperature is higher than 1000°C, the quartz boat support is prone to deformation (the service life is about 2 months). The silicon carbide boat support can be used for a long time below 1300°C. The silicon carbide boat support can replace the quartz boat support at high temperatures. Using the silicon carbide boat support can reduce the line stop time caused by maintenance and repair, and reduce the production capacity loss. The thermal expansion coefficient of the silicon carbide material is 4.8E-6, and the thermal expansion coefficient of the quartz material is 5.5E-7.

[0003] In the diffusion equipment, the material of the furnace tube is generally quartz. The silicon carbide boat support is directly placed on the inner wall of the quartz furnace tube. However, the silicon carbide material has a larger thermal expansion coefficient than quartz. During the heating process, the expansion of the silicon carbide boat support will cause the quartz furnace tube to be squeezed and cracked, resulting in quality accidents, and restricting the reasonable use of the silicon carbide boat support. Therefore, we propose a quartz furnace tube suitable for use with a silicon carbide boat support to solve the above problems. Content of the Utility Model

[0004] Aiming at the deficiencies of the prior art, the utility model provides a quartz furnace tube suitable for use with a silicon carbide boat support, which solves the problem that the quartz furnace tube will be squeezed and cracked during the heating process due to the expansion of the silicon carbide boat support, resulting in quality accidents.

[0005] To achieve the above object, the utility model is realized through the following technical solutions: A quartz furnace tube suitable for use with a silicon carbide boat support, including a quartz furnace tube, a silicon carbide boat support is arranged in the inner cavity of the quartz furnace tube, and lifting mechanisms are arranged on both sides of the bottom of the silicon carbide boat support, and the side walls of the two lifting mechanisms are connected to the inner wall of the quartz furnace tube.

[0006] Preferably, the lifting mechanism includes a support bar, the support bar is arranged on one side of the bottom of the silicon carbide boat support, and the bottom end of the support bar is connected to the inner wall of the quartz furnace tube. Guide bars are arranged on the top surface of the support bar, and the guide bars are respectively connected to both sides of the silicon carbide boat support;

[0007] A receiving groove is formed in the middle of the top surface of the support bar, and a transfer assembly is inserted into the inner cavity of the receiving groove. A jacking hole is formed at the bottom of one end of the support bar, and the top end of the jacking hole is communicated with the receiving groove;

[0008] At the other end of each support bar, a blocking component is provided, and the blocking component is used to limit the silicon carbide boat support placed on the support bar.

[0009] Preferably, the transfer component includes a hollow frame, the hollow frame is arranged in the inner cavity of the receiving groove, and a plurality of shaft holes are formed in both side walls of the hollow frame;

[0010] A shaft rod is inserted into the inner cavity of each shaft hole, and a roller is arranged on each shaft rod and located in the inner cavity of the hollow frame.

[0011] Preferably, a plurality of the rollers are distributed in a linear array, and the top end of the roller is higher than the top surface of the support bar.

[0012] Preferably, the top view shape of the hollow frame is the same as the top view shape of the inner cavity of the receiving groove, and the two are inserted and connected.

[0013] Preferably, the blocking component includes a positioning plate, the positioning plate is arranged at one end of the support bar, a blocking piece is arranged on the outer wall surface of the positioning plate, and a resisting block is arranged on one side wall of the blocking piece and on the fitting surface with the silicon carbide boat support;

[0014] A through hole is formed on one side of the surface of the blocking piece, and a positioning screw is inserted into the inner cavity of the through hole. An internal and external thread groove for rotatably installing one end of the positioning screw is formed on one side of the surface of the positioning plate.

[0015] Preferably, the blocking component further includes a dial rod, the dial rod is arranged on one side of the surface of the blocking piece, and the dial rod is located at a position far from the through hole.

[0016] Preferably, the dial rod is made of ceramic material.

[0017] Preferably, the lifting mechanism includes a rib, the rib is arranged on one side of the bottom of the silicon carbide boat support, and the bottom end of the rib is connected to the inner wall of the quartz furnace tube.

[0018] Beneficial effects

[0019] The utility model provides a quartz furnace tube suitable for use with a silicon carbide boat support. Compared with the prior art, the following beneficial effects are achieved:

[0020] The quartz furnace tube applicable to the use of silicon carbide boat supports can not only install and fix two support bars through the quartz furnace tube, but also provide a storage space for the silicon carbide boat supports. Since guiding bars are provided on the top surfaces of both support bars, and the two guiding bars are respectively on both sides of the silicon carbide boat support, and the distance between the two guiding bars is greater than the width of the silicon carbide boat support, through the two support bars, the silicon carbide boat support can be stably lifted and smoothly transferred into the quartz furnace tube under the guidance of the two guiding bars. Moreover, for the quartz furnace tube designed with such a structure, the thermal expansion of the silicon carbide boat support during use will not have any impact on the quartz furnace tube, and the quartz furnace tube will not be cracked by the expansion of the silicon carbide boat support, effectively avoiding quality accidents and ensuring the maximization of production efficiency under high-temperature working conditions;

[0021] Through the accommodation grooves on the support bars, the transfer assembly can be installed and fixed, so that the transfer assembly can slide and transfer the silicon carbide boat support, facilitating the staff to introduce the silicon carbide boat support into the quartz furnace tube. Through the ejection holes, it is convenient for the staff to jack up the transfer assembly from the bottom, and then the transfer assembly can be replaced and maintained. Since blocking components are provided at the other ends of the two support bars, the blocking components can be used to limit the silicon carbide boat support placed on the support bars, preventing the silicon carbide boat support from sliding outwards on the support bars and improving the safety of the support bars in lifting the silicon carbide boat support;

[0022] This solution can also install only two convex bars in the quartz furnace tube to support the silicon carbide boat support, so that the thermal expansion of the silicon carbide boat support during use will not have any impact on the quartz furnace tube, and the quartz furnace tube will not be cracked by the expansion of the silicon carbide boat support, effectively avoiding quality accidents and ensuring the maximization of production efficiency under high-temperature working conditions. Description of the Drawings

[0023] Figure 1 Schematic diagram of the overall structure of the first embodiment of the present invention;

[0024] Figure 2 Schematic diagram of the internal structure of the quartz furnace tube of the first embodiment of the present invention;

[0025] Figure 3 Schematic diagram of the structure of the transfer assembly of the first embodiment of the present invention;

[0026] Figure 4 Schematic diagram of the structure of the blocking component of the first embodiment of the present invention;

[0027] Figure 5 Exploded view of the structure of the blocking component of the first embodiment of the present invention;

[0028] Figure 6 Exploded view of the bottom of the support bar of the first embodiment of the present invention;

[0029] Figure 7 This is a schematic structural diagram of the second embodiment of the present utility model;

[0030] Figure 8 This is a schematic diagram of the internal structure of the quartz furnace tube in the second embodiment of the present utility model.

[0031] In the figure: 1. Quartz furnace tube; 2. Silicon carbide boat support; 3. Support bar; 4. Guide bar; 5. Ejection hole; 6. Accommodation groove; 7. Transfer assembly; 71. Hollow frame; 72. Shaft hole; 73. Shaft rod; 74. Roller; 8. Blocking assembly; 81. Positioning plate; 82. Blocking piece; 83. Blocking block; 84. Through hole; 85. Positioning screw; 86. Internal and external thread groove; 87. Pushing rod; 9. Ridge. Detailed implementation manners

[0032] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0033] Embodiment 1

[0034] Please refer to Figure 1-2 and Figure 6 , the present utility model provides a technical solution: A quartz furnace tube suitable for use with a silicon carbide boat support includes a quartz furnace tube 1. A silicon carbide boat support 2 is provided in the inner cavity of the quartz furnace tube 1. Lifting mechanisms are provided on both sides of the bottom of the silicon carbide boat support 2, and the side walls of the two lifting mechanisms are connected to the inner wall of the quartz furnace tube 1. The lifting mechanism includes a support bar 3. The support bar 3 is provided on one side of the bottom of the silicon carbide boat support 2, and the bottom end of the support bar 3 is connected to the inner wall of the quartz furnace tube 1. Guide bars 4 are provided on the top surfaces of the support bar 3, and the guide bars 4 are respectively connected to both sides of the silicon carbide boat support 2; Accommodation grooves 6 are respectively opened in the middle of the top surfaces of the support bar 3, and transfer assemblies 7 are inserted into the inner cavities of the accommodation grooves 6. Ejection holes 5 are respectively opened at the bottom of one end of the support bar 3, and the top ends of the ejection holes 5 are communicated with the accommodation grooves 6; A blocking assembly 8 is provided at the other end of the support bar 3, and the blocking assembly 8 is used to limit the silicon carbide boat support 2 placed on the support bar 3;

[0035] Through the quartz furnace tube 1, it can not only install and fix the two support bars 3, but also provide a storage space for the silicon carbide boat support 2. Since guiding bars 4 are provided on the top surfaces of both support bars 3, and the two guiding bars 4 are respectively on both sides of the silicon carbide boat support 2, and the distance between the two guiding bars 4 is greater than the width of the silicon carbide boat support 2. Through the two support bars 3, the silicon carbide boat support 2 can be stably lifted, and can be smoothly transferred into the quartz furnace tube 1 under the guidance of the two guiding bars 4. Moreover, for the quartz furnace tube 1 designed with such a structure, the thermal expansion of the silicon carbide boat support 2 during use will not bring any impact to the quartz furnace tube 1, and the quartz furnace tube 1 will not be cracked by the expansion of the silicon carbide boat support 2, which can effectively avoid quality accidents and ensure the maximization of production efficiency under high-temperature working conditions. Through the receiving groove 6 on the support bar 3, the transfer assembly 7 can be installed and fixed, so that the transfer assembly 7 can slide and transfer the silicon carbide boat support 2, facilitating the staff to introduce the silicon carbide boat support 2 into the quartz furnace tube 1. Through the ejection hole 5, the staff can conveniently lift the transfer assembly 7 from the bottom upwards, and then can replace and maintain the transfer assembly 7. Since blocking assemblies 8 are provided at the other ends of the two support bars 3, the blocking assemblies 8 can be used to limit the silicon carbide boat support 2 placed on the support bar 3, thereby preventing the silicon carbide boat support 2 from sliding outwards on the support bar 3, so as to improve the safety of the support bar 3 in lifting the silicon carbide boat support 2.

[0036] Refer to Figure 2 、 Figure 3 The transfer assembly 7 includes a hollow frame 71. The hollow frame 71 is arranged in the inner cavity of the receiving groove 6. A plurality of shaft holes 72 are opened on both side walls of the hollow frame 71; a shaft rod 73 is inserted into the inner cavity of each shaft hole 72, and a roller 74 is arranged on each shaft rod 73 and in the inner cavity of the hollow frame 71. The plurality of rollers 74 are distributed in a linear array. The top of the roller 74 is higher than the top surface of the support bar 3. The top view shape of the hollow frame 71 is the same as the top view shape of the inner cavity of the receiving groove 6, and the two are inserted and connected.

[0037] Through the hollow frame 71 in the transfer assembly 7, it can not only be installed in the inner cavity of the receiving groove 6, but also provide a space for opening the plurality of shaft holes 72. Then, through the shaft holes 72, the rollers 74 can be installed via the shaft rods 73, so that the rollers 74 can rotate flexibly, and then the rotating rollers 74 can roll and transfer the silicon carbide boat support 2.

[0038] Refer to Figure 2 、 Figure 4 and Figure 5, the blocking component 8 includes a positioning plate 81. The positioning plate 81 is arranged at one end of the supporting bar 3. A blocking piece 82 is arranged on the outer wall surface of the positioning plate 81. An abutting block 83 is arranged on one side wall of the blocking piece 82 and on the joint surface with the silicon carbide boat support 2. A through hole 84 is formed on one side of the surface of the blocking piece 82, and a positioning screw 85 is inserted into the inner cavity of the through hole 84. An internal and external thread groove 86 for rotatably installing one end of the positioning screw 85 is formed on one side of the surface of the positioning plate 81. The blocking component 8 further includes a lever 87. The lever 87 is arranged on one side of the surface of the blocking piece 82, and the lever 87 is located at a position far from the through hole 84. The lever 87 is made of ceramic material;

[0039] Through the positioning plate 81 in the blocking component 8, it can be fixed at one end of the supporting bar 3 and also provide a space for opening the internal and external thread groove 86. Then, through the internal and external thread groove 86 and the positioning screw 85, it can penetrate the through hole 84 on the blocking piece 82, so that the blocking piece 82 can rotate around the positioning screw 85 as the axis, and then the position of the blocking piece 82 can be adjusted. When the blocking piece 82 rotates to the horizontal state, at this time, the abutting block 83 on the blocking piece 82 can not only be clamped on the positioning plate 81 but also abut against one end of the silicon carbide boat support 2, thus achieving the purpose of blocking the silicon carbide boat support 2 and preventing the silicon carbide boat support 2 from sliding outwards. When it is necessary to remove the silicon carbide boat support 2, at this time, through the lever 87 made of ceramic material, the blocking piece 82 can be rotated, and then the blocking of the silicon carbide boat support 2 can be released, facilitating the staff to take out the silicon carbide boat support 2.

[0040] Embodiment 2

[0041] Please refer to Figure 7 and Figure 8 , the present utility model provides a technical solution: a quartz furnace tube suitable for use with a silicon carbide boat support, including a quartz furnace tube 1. A silicon carbide boat support 2 is arranged in the inner cavity of the quartz furnace tube 1. Lifting mechanisms are arranged on both sides of the bottom of the silicon carbide boat support 2, and the side walls of the two lifting mechanisms are connected to the inner wall of the quartz furnace tube 1; the lifting mechanism includes a protruding strip 9. The protruding strip 9 is arranged on one side of the bottom of the silicon carbide boat support 2, and the bottom end of the protruding strip 9 is connected to the inner wall of the quartz furnace tube 1;

[0042] By only installing two protruding strips 9 in the quartz furnace tube 1, the silicon carbide boat support 2 can be lifted and supported, so that the thermal expansion of the silicon carbide boat support 2 during use will not have any impact on the quartz furnace tube 1, and the quartz furnace tube 1 will not be cracked by the expansion of the silicon carbide boat support 2, effectively avoiding quality accidents and ensuring the maximization of production efficiency under high-temperature working conditions.

[0043] During operation, through the quartz furnace tube 1, the two support bars 3 can be installed and fixed, and a storage space can be provided for the silicon carbide boat support 2. Since guiding bars 4 are provided on the top surfaces of the two support bars 3, and the two guiding bars 4 are respectively on both sides of the silicon carbide boat support 2, and the distance between the two guiding bars 4 is greater than the width of the silicon carbide boat support 2, through the two support bars 3, the silicon carbide boat support 2 can be stably lifted, and can be smoothly transferred into the quartz furnace tube 1 under the guidance of the two guiding bars 4. Moreover, for the quartz furnace tube 1 designed with such a structure, the thermal expansion of the silicon carbide boat support 2 during use will not have any impact on the quartz furnace tube 1, and the quartz furnace tube 1 will not be cracked by the expansion of the silicon carbide boat support 2, effectively avoiding quality accidents and ensuring the maximization of production efficiency under high-temperature conditions. Through the receiving groove 6 on the support bar 3, the transfer assembly 7 can be installed and fixed, so that the transfer assembly 7 can slide and transfer the silicon carbide boat support 2, facilitating the staff to introduce the silicon carbide boat support 2 into the quartz furnace tube 1. Through the ejection hole 5, it is convenient for the staff to jack up the transfer assembly 7 from the bottom, and then the transfer assembly 7 can be replaced and maintained. Since blocking components 8 are provided at the other ends of the two support bars 3, the blocking components 8 can be used to limit the silicon carbide boat support 2 placed on the support bar 3, preventing the silicon carbide boat support 2 from sliding outwards on the support bar 3, so as to improve the safety of the support bar 3 in lifting the silicon carbide boat support 2.

[0044] Through the hollow frame 71 in the transfer assembly 7, it can be installed in the inner cavity of the receiving groove 6 and provide a space for opening a plurality of shaft holes 72. Then, through the shaft holes 72, the roller 74 can be installed via the shaft rod 73, enabling the roller 74 to rotate flexibly, and further enabling the rolling roller 74 to roll and transfer the silicon carbide boat support 2.

[0045] Through the positioning plate 81 in the blocking component 8, it can be fixed at one end of the support bar 3 and provide a space for opening the internal and external thread grooves 86. Then, through the internal and external thread grooves 86 and the positioning screw 85, the through hole 84 on the blocking piece 82 can be penetrated, enabling the blocking piece 82 to rotate around the positioning screw 85, and further enabling the position of the blocking piece 82 to be adjusted. When the blocking piece 82 rotates to the horizontal state, the abutting block 83 on the blocking piece 82 can both be engaged with the positioning plate 81 and abut against one end of the silicon carbide boat support 2, thus achieving the purpose of blocking the silicon carbide boat support 2 and preventing it from sliding outwards. When it is necessary to remove the silicon carbide boat support 2, at this time, the lever 87 made of ceramic material can be used to rotate the blocking piece 82, thereby releasing the block on the silicon carbide boat support 2 and facilitating the staff to take out the silicon carbide boat support 2.

[0046] By installing only two ridges 9 inside the quartz furnace tube 1, the silicon carbide boat support 2 can be lifted and supported, so that the thermal expansion of the silicon carbide boat support 2 during use will not have any impact on the quartz furnace tube 1, and the quartz furnace tube 1 will not be cracked by the expansion of the silicon carbide boat support 2, effectively avoiding quality accidents and ensuring the maximization of production efficiency under high-temperature conditions.

[0047] In summary, by designing the quartz furnace tube 1 with such a structure, the thermal expansion of the silicon carbide boat support 2 during use will not have any impact on the quartz furnace tube 1, and the quartz furnace tube 1 will not be cracked by the expansion of the silicon carbide boat support 2, effectively avoiding quality accidents and ensuring the maximization of production efficiency under high-temperature conditions.

[0048] Meanwhile, the content not described in detail in this specification belongs to the prior art well-known to those skilled in the art.

Claims

1. A quartz furnace tube applicable to the use of a silicon carbide boat support, comprising a quartz furnace tube (1), wherein a silicon carbide boat support (2) is arranged in the inner cavity of the quartz furnace tube (1), and is characterized in that: Both sides of the bottom of the silicon carbide boat support (2) are provided with lifting mechanisms, and the side walls of the two lifting mechanisms are connected to the inner wall of the quartz furnace tube (1).

2. The quartz furnace tube applicable to the use of a silicon carbide boat support according to claim 1, wherein: The lifting mechanism includes a support bar (3), the support bar (3) is arranged on one side of the bottom of the silicon carbide boat support (2), and the bottom end of the support bar (3) is connected to the inner wall of the quartz furnace tube (1). Guide bars (4) are arranged on the top surfaces of the support bars (3), and the guide bars (4) are respectively connected to both sides of the silicon carbide boat support (2); Receiving grooves (6) are formed in the middle of the top surfaces of the support bars (3), and transfer components (7) are inserted into the inner cavities of the receiving grooves (6). Ejecting holes (5) are formed in the bottom of one end of each support bar (3), and the top ends of the ejecting holes (5) are communicated with the receiving grooves (6); Blocking components (8) are arranged at the other ends of the support bars (3), and the blocking components (8) are used to limit the silicon carbide boat support (2) placed on the support bars (3).

3. The quartz furnace tube applicable to the use of a silicon carbide boat support according to claim 2, characterized in that: The transfer component (7) includes a hollow frame (71), the hollow frame (71) is arranged in the inner cavity of the receiving groove (6), and a plurality of shaft holes (72) are formed in both side walls of the hollow frame (71); Shaft rods (73) are inserted into the inner cavities of each shaft hole (72), and rollers (74) are arranged on each shaft rod (73) and located in the inner cavity of the hollow frame (71).

4. A quartz furnace tube applicable to the use of a silicon carbide boat support according to claim 3, characterized in that: The plurality of rollers (74) are distributed in a linear array, and the tops of the rollers (74) are higher than the top surfaces of the support bars (3).

5. A quartz furnace tube applicable to the use of a silicon carbide boat support according to claim 3, characterized in that: The top view shape of the hollow frame (71) is the same as the top view shape of the inner cavity of the receiving groove (6), and the two are inserted and connected.

6. A quartz furnace tube suitable for use with a silicon carbide boat support according to claim 2, characterized in that: The blocking component (8) includes a positioning plate (81), the positioning plate (81) is arranged at one end of the support bar (3), a blocking piece (82) is arranged on the outer wall surface of the positioning plate (81), and a resisting block (83) is arranged on one side wall of the blocking piece (82) and attached to the silicon carbide boat support (2); A through hole (84) is formed in one side of the surface of the blocking piece (82), and a positioning screw (85) is inserted into the inner cavity of the through hole (84). An internal and external thread groove (86) for rotatably installing one end of the positioning screw (85) is formed in one side of the surface of the positioning plate (81).

7. A quartz furnace tube applicable to the use of a silicon carbide boat support according to claim 6, characterized in that: The blocking component (8) further includes a lever (87), the lever (87) is arranged on one side of the surface of the blocking piece (82), and the lever (87) is located at a position far from the through hole (84).

8. A quartz furnace tube suitable for use with a silicon carbide boat support according to claim 7, characterized in that: The lever (87) is made of ceramic material.

9. A quartz furnace tube applicable to the use of a silicon carbide boat support according to claim 1, characterized in that: The lifting mechanism includes a convex strip (9), the convex strip (9) is arranged on one side of the bottom of the silicon carbide boat support (2), and the bottom end of the convex strip (9) is connected to the inner wall of the quartz furnace tube (1).

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