Wear-resistant and oxidation-resistant silicon carbide graphite carrier plate

Abstract

The utility model discloses a wear-resistant and antioxidative silicon carbide graphite carrier disc, which relates to the technical field of graphite carrier discs and comprises a carrier disc body, a carrier disc opening is arranged on the carrier disc body, a fixing frame is arranged inside the carrier disc opening, a carrier disc is connected inside the fixing frame, a carrier disc groove is arranged inside the carrier disc, and the carrier disc groove is connected with the carrier disc. The outer surfaces of the carrying disc body, the fixing frame and the carrying disc are each provided with a wear-resisting and oxidation-resisting coating. According to the utility model, the carrying disc opening is formed in the carrying disc body and used for mounting the fixing frame and the carrying disc, and the carrying disc opening is larger than the carrying disc during use, so that the carrying disc body can be communicated up and down, heat can be conveniently circulated from the carrying disc opening when a plurality of carrying disc bodies are stacked, and the device can be stacked to form a multi-layer structure; and the fixing frame and the carrying discs are detachable, and different numbers of carrying discs can be selected according to actual conditions, so that the use flexibility of the device can be improved, and the application range of the device is widened.

Description

Technical Field

[0001] The utility model relates to the technical field of graphite carrier plates, in particular to a silicon carbide graphite carrier plate with wear resistance and oxidation resistance. Background Art

[0002] As a new product with great influence in the optoelectronic industry, light-emitting diodes have the characteristics of small volume, long service life, rich and colorful colors, low energy consumption, etc., and are widely used in display devices.

[0003] The growth of epitaxial wafers is an important step in the production of light-emitting diodes. The growth of epitaxial wafers is usually carried out in a MOCVD (Metal-organic Chemical Vapor Deposition) reaction chamber. A graphite carrier plate is arranged in the reaction chamber, and a plurality of circular grooves are arranged on the surface of the graphite carrier plate, and a planetary disk is arranged in the grooves for placing substrates. However, the existing silicon carbide graphite carrier plates are mostly of an integral disc structure, and the disc structure is single and the use is single. Therefore, the utility model hereby provides a silicon carbide graphite carrier plate with wear resistance and oxidation resistance. Summary of the Utility Model

[0004] Technical Problem to be Solved

[0005] The purpose of the utility model is to make up for the deficiencies of the existing technology and provide a silicon carbide graphite carrier plate with wear resistance and oxidation resistance.

[0006] Technical Solution

[0007] To achieve the above purpose, the utility model provides the following technical solution: A silicon carbide graphite carrier plate with wear resistance and oxidation resistance, including a carrier plate body, a carrier plate opening is arranged on the carrier plate body, a fixing frame is arranged inside the carrier plate opening, a carrier plate is connected inside the fixing frame, and a carrier plate groove is opened inside the carrier plate. By arranging a carrier plate opening on the carrier plate body for installing the fixing frame and the carrier plate, when in use, the carrier plate opening is larger than the carrier plate, so that the carrier plate body can communicate up and down. Furthermore, when multiple carrier plate bodies are stacked and placed, heat can conveniently flow through the carrier plate opening, and thus the device can be stacked with multiple layers of structures to improve the processing efficiency. Wear-resistant and oxidation-resistant coatings are arranged on the outer surfaces of the carrier plate body, the fixing frame and the carrier plate. Wear-resistant and oxidation-resistant coatings are arranged on the carrier plate body, the fixing frame and the carrier plate respectively to improve the service life of the device.

[0008] Preferably, a carrier plate limiting groove is opened inside the carrier plate opening, and one end of the fixing frame is clamped inside the carrier plate limiting groove. The fixing frame and the carrier plate are detachable, and different numbers of carrier plates can be selected according to actual situations, so as to improve the flexibility of use of the device and the applicable range of the device.

[0009] Preferably, the fixing bracket includes a fixing rod and a fixing ring, and the fixing rod and the fixing ring are integrally formed structures.

[0010] Preferably, there are multiple fixing rods in each fixing bracket, and the multiple fixing rods are fixedly installed at the edge of the fixing ring.

[0011] Preferably, there are multiple loading ports on the loading tray body, and correspondingly, there are also multiple loading trays.

[0012] Preferably, the fixing ring is fixedly connected to the loading tray.

[0013] Beneficial effects:

[0014] Compared with the prior art, the silicon carbide graphite loading tray with wear resistance and oxidation resistance has the following beneficial effects:

[0015] First, the present utility model is provided with loading ports on the loading tray body for installing the fixing bracket and the loading tray. When in use, the loading port is larger than the loading tray, so that the loading tray body can be communicated up and down. Furthermore, when multiple loading tray bodies are stacked, heat can conveniently flow through the loading ports, and thus the device can be stacked in multiple layers to improve the processing efficiency.

[0016] Second, the fixing bracket and the loading tray of the present utility model are detachable, and different numbers of loading trays can be selected according to actual situations, thereby improving the flexibility of the device and expanding the applicable range of the device. Description of the drawings

[0017] Figure 1 is a schematic structural diagram of the present utility model;

[0018] Figure 2 is a schematic structural diagram of the fixing bracket of the present utility model;

[0019] Figure 3 is a schematic structural diagram of the loading tray of the present utility model;

[0020] Figure 4 is a schematic structural diagram of the wear-resistant and oxidation-resistant coating of the present utility model.

[0021] In the figure:

[0022] 1. Loading tray body; 2. Loading port; 3. Fixing bracket; 4. Loading tray; 5. Loading tray groove; 6. Wear-resistant and oxidation-resistant coating; 201. Loading tray limit groove; 301. Fixing rod; 302. Fixing ring. Detailed implementation manners

[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0024] Please refer to Figures 1 to 4 As shown, the present utility model provides a technical solution: a silicon carbide graphite carrier plate with wear resistance and oxidation resistance, including a carrier plate body 1. A carrier plate opening 2 is provided on the carrier plate body 1. A fixing frame 3 is arranged inside the carrier plate opening 2. A carrier plate 4 is connected inside the fixing frame 3. By providing the carrier plate opening 2 on the carrier plate body 1 for installing the fixing frame 3 and the carrier plate 4, the carrier plate opening 2 is larger than the carrier plate 4 during use, so that the carrier plate body 1 can be connected up and down. Furthermore, when multiple carrier plate bodies 1 are stacked, heat can conveniently flow through the carrier plate opening 2, and then the device can be stacked in multiple layers to improve the processing efficiency. A carrier plate groove 5 is opened inside the carrier plate 4. Wear-resistant and oxidation-resistant coatings 6 are provided on the outer surfaces of the carrier plate body 1, the fixing frame 3, and the carrier plate 4. Wear-resistant and oxidation-resistant coatings 6 are provided on each of the carrier plate body 1, the fixing frame 3, and the carrier plate 4.

[0025] Please refer specifically to Figure 1 、 Figure 2 and Figure 3 A carrier plate limit groove 201 is opened inside the carrier plate opening 2. One end of the fixing frame 3 is clamped inside the carrier plate limit groove 201. The fixing frame 3 and the carrier plate 4 are detachable, and different numbers of carrier plates 4 can be selected according to actual situations, thereby improving the flexibility of the device and the applicable range of the device.

[0026] Please refer specifically to Figure 2 , the fixing frame 3 includes a fixing rod 301 and a fixing ring 302. The fixing rod 301 and the fixing ring 302 are of an integrally formed structure. There are multiple fixing rods 301 in each fixing frame 3. The multiple fixing rods 301 are fixedly installed at the edge of the fixing ring 302. There are multiple carrier plate openings 2 on the carrier plate body 1, and correspondingly, there are also multiple carrier plates 4. The fixing ring 302 is fixedly connected to the carrier plate 4.

[0027] Working principle: A carrier plate port 2 is provided on the carrier plate body 1 for installing the fixing frame 3 and the carrier plate 4. When in use, the carrier plate port 2 is larger than the carrier plate 4, enabling the carrier plate body 1 to be connected up and down. Thus, when multiple carrier plate bodies 1 are stacked, heat can conveniently flow through the carrier plate port 2, allowing the device to be stacked in multiple layers to improve processing efficiency. Wear-resistant and antioxidant coatings 6 are provided on the carrier plate body 1, the fixing frame 3, and the carrier plate 4 respectively to extend the service life of the device. Moreover, the fixing frame 3 and the carrier plate 4 are detachable, and different numbers of carrier plates 4 can be selected according to actual situations, thereby improving the flexibility of the device and its applicable range.

[0028] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A silicon carbide graphite carrier plate with wear resistance and oxidation resistance, comprising a carrier plate body (1), characterized in that: A carrier plate body (1) is provided with a carrier plate opening (2). A fixing frame (3) is arranged inside the carrier plate opening (2). A carrier plate (4) is connected inside the fixing frame (3). A carrier plate groove (5) is formed inside the carrier plate (4). Wear-resistant and antioxidant coatings (6) are provided on the outer surfaces of the carrier plate body (1), the fixing frame (3) and the carrier plate (4).

2. A silicon carbide graphite carrier plate with wear resistance and oxidation resistance according to claim 1, characterized in that: A carrier plate limiting groove (201) is formed inside the carrier plate opening (2). One end of the fixing frame (3) is clamped inside the carrier plate limiting groove (201).

3. The silicon carbide graphite carrier plate with wear resistance and oxidation resistance according to claim 1, characterized in that: The fixing frame (3) includes a fixing rod (301) and a fixing ring (302). The fixing rod (301) and the fixing ring (302) are of an integrally formed structure.

4. A silicon carbide graphite carrier plate with wear resistance and oxidation resistance according to claim 1, characterized in that: There are multiple fixing rods (301) in each fixing frame (3). The multiple fixing rods (301) are fixedly installed at the edge of the fixing ring (302).

5. The silicon carbide graphite carrier plate with wear resistance and oxidation resistance according to claim 1, characterized in that: There are multiple carrier plate openings (2) on the carrier plate body (1). Correspondingly, there are also multiple carrier plates (4).

6. The silicon carbide graphite carrier plate with wear resistance and oxidation resistance according to claim 3, characterized in that: The fixing ring (302) is fixedly connected to the carrier plate (4).

Images