Tweezers for clamping wafer
By designing the connection structure of the replaceable clamping chip and wafer clamping part, the problem of improper clamping of traditional tweezers is solved, and a more stable wafer clamping and chip damage is achieved.
Patent Information
- Application Number
- CN202421909558.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-07
- Publication Date
- 2025-07-11
- Estimated Expiration
- 2034-08-07
AI Technical Summary
When traditional tweezers clamp wafers of different sizes, they are not firm enough to easily damage the chip.
A body including herringbone tweezers is designed, using a replaceable clamping sheet and wafer clamping section, connected by threaded holes and through holes, and the clamping sheet has deformation capability, increasing clamping area and reducing pressure.
A more stable clamping is achieved, reducing damage to the chip, and improving the firmness and protection effect of clamping is achieved.
Smart Images
Figure CN223084539U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of semiconductors, and particularly relates to a pair of tweezers for holding wafers. Background Art
[0002] In recent years, with the rapid development of technology, electronic products have become an indispensable part of people's lives. Electronic products serve various fields of people's clothing, food, housing, and transportation, and chips are important carriers for realizing the main functions of electronic products. Electronic products mainly include semiconductor integrated circuits and various optoelectronic device structure chips. The main material of semiconductors is silicon, and there are also various chips based on different materials such as InP, GaN, and GaAs as substrates.
[0003] At present, during the chip manufacturing process, tweezers are required for the transfer of wafers at each step. Traditional tweezers have an integrally formed structure. Since wafers come in different sizes, different tweezers need to be manufactured for each type of wafer. If the same pair of tweezers is used, the firmness of clamping is often not high during the clamping process, and even the chips may be damaged. Summary of the Utility Model
[0004] The utility model provides a pair of tweezers for holding wafers to solve the technical problems existing in the known technology, ensuring more stable and reliable clamping during the chip clamping process and causing less damage to the chips.
[0005] The purpose of the utility model is to provide a pair of tweezers for holding wafers, which includes a pair of tweezers body in a V shape. The tweezers body includes a connecting rod and two clamping pieces; the lower end of the connecting rod is fixedly connected to the upper ends of the two clamping pieces; each clamping piece includes an integrally formed upper straight segment and a lower straight segment, and the included angle between the upper straight segment and the lower straight segment ranges from 100 degrees to 170 degrees; a wafer clamping part is provided at the lower end of each clamping piece. The wafer clamping part includes an upper clamping segment located on the extension line below the lower straight segment, and a convex part is provided at the lower end of the opposite surfaces of the two upper clamping segments; the lower end of the lower straight segment is connected to the upper end of the upper clamping segment through a disassembling member.
[0006] Preferably, a counterbore is provided on the upper end surface of the upper clamping segment, a threaded hole communicating with the counterbore is provided on the side wall of the upper clamping segment, and a through hole is provided on the side wall of the lower straight segment; the lower end of the lower straight segment is inserted into the counterbore, and the disassembling member is a bolt that mates with the threaded hole.
[0007] Preferably, both the threaded hole and the through hole are two.
[0008] Preferably, both the upper straight segment and the lower straight segment are in a cuboid structure.
[0009] Preferably, the connecting rod and the two clamping pieces are in an integrally formed structure.
[0010] Preferably, the length of the upper clamping section is 35 mm, and the depth of the counterbore is 15 mm.
[0011] The advantages and positive effects of the present utility model are as follows:
[0012] By adopting the above technical solution, the present application can realize the replaceability of the wafer clamping part, thereby ensuring more stable and reliable clamping during chip clamping and causing less damage to the chip.
[0013] The tweezers in the present application include a pair of plate-shaped clamping pieces and a replaceable structure. The pair of clamping pieces are bent at the bending part and extend in the length direction and face each other. Clamping surfaces are respectively formed facing each other at the end edges on the side of the clamping pieces facing the bending part. In this tweezers, during use, the end edges on the side where the clamping surfaces are formed are displaced in the up-down direction intersecting with the above length direction, and it is impossible to clamp a target chip well and may cause damage to the sample. Thus, tweezers with good usability can be provided.
[0014] In the present application, a pair of clamping pieces and the replaceable area are deformed during clamping, increasing the contact area between the clamping part and the chip sample and reducing the pressure on the contact surface, eliminating the situation of sample falling off and damage caused by insufficient contact area when clamping the chip sample. Description of the Drawings
[0015] Figure 1 is the front view of the preferred embodiment of the present utility model;
[0016] Figure 2 is the right view of the preferred embodiment of the present utility model. Detailed Description of the Embodiment
[0017] In order to make the above objects, the designed control system and advantages of the present utility model more clear and understandable, the following further details the present utility model in conjunction with embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.
[0018] The technical solution of the present utility model is as follows:
[0019] A pair of tweezers for wafer clamping, including a herringbone-shaped tweezer body. The tweezer body includes a connecting rod 1 and two clamping pieces 2. The clamping pieces 2 are made of a material with a certain deformation ability; the lower end of the connecting rod 1 and the upper ends of the two clamping pieces 2 are fixedly connected; in order to achieve the tightness of the connection, the connecting rod and the two clamping pieces are of an integrally formed structure; for the convenience of clamping, the clamping pieces 2 in the present application adopt a non-linear structure, such as Figure 1As shown: The clamping piece 2 includes an integrally formed upper straight segment and a lower straight segment, and the included angle between the upper straight segment and the lower straight segment ranges from 100 degrees to 170 degrees; at the lower end of each clamping piece 2, a wafer clamping portion 3 is provided, and the wafer clamping portion 3 includes an upper clamping segment located on the extension line below the lower straight segment, and a convex portion is provided at the lower end of the opposite surfaces of the two upper clamping segments; the lower end of the lower straight segment is connected to the upper end of the upper clamping segment through a disassembling member 4. In this application, the clamping piece 2 and the wafer clamping portion 3 adopt a split connection structure, and there are many such implementation methods. For the sake of illustration, the following specific technical solutions are adopted in this application:
[0020] As Figure 2 shown: A counterbore is provided on the upper end surface of the upper clamping segment, a threaded hole communicating with the counterbore is provided on the side wall of the upper clamping segment, and a through hole is provided on the side wall of the lower straight segment; the lower end of the lower straight segment is inserted into the counterbore, and the disassembling member 4 is a bolt or screw that cooperates with the threaded hole.
[0021] For stable connection, both the threaded hole and the through hole are two or three.
[0022] Both the upper straight segment and the lower straight segment are rectangular parallelepiped structures.
[0023] The length of the upper clamping segment is 35 mm, and the depth of the counterbore is 15 mm.
[0024] The above technical solutions mainly include: a combination rod 1, two clamping pieces 2, two wafer clamping portions 3, and several disassembling members 4; among them:
[0025] The wafer clamping portion 3 is a replaceable structure and directly contacts the chip sample.
[0026] The total length of the tweezers is about 105 mm;
[0027] The width of the lower end of the wafer clamping portion 3 is 3 mm, and the length of the wafer clamping portion 3 is 10 mm.
[0028] When using the tweezers, pinch the two clamping pieces with fingers to make the two wafer clamping portions 3 approach, and clamp the wafer or chip sample to be picked up between the opposite clamping surfaces (convex portions). And, after transferring the wafer or chip sample, if the force applied to the two clamping pieces 2 is released, under the action of the elastic restoring force, the two wafer clamping portions 3 will move in opposite directions respectively and return to Figure 1 the initial state shown.
[0029] When in use, as described above, pinch the clamping piece with fingers to make the wafer clamping portions 3 approach each other, and clamp the wafer or chip sample to be picked up between them. When performing such an action, the convex portion will not displace with the combination rod as a fulcrum.
[0030] During use, the edge of the side where the clamping surface is formed does not shift in the vertical direction that intersects the length direction in which the clamping piece extends. Therefore, a situation where the target chip sample or the like cannot be well clamped due to this shift is avoided.
[0031] During use, the force applied to the clamping piece causes the wafer clamping portion 3 to deform, resulting in an increase in the contact area of the convex portion, thereby achieving the purpose of increasing the firmness when clamping the sample and protecting the sample.
[0032] The above-mentioned tweezer body is generally made of metal; the disassembling member 4 is cast from Teflon (polytetrafluoroethylene), which has resistance to strong acids and alkalis, anti-aging property, oil and water repellency, and is easy to clean and not easily contaminated by dirt. However, if it is a component that can exert the above-mentioned elastic force and the functions required for the operation of the tweezers, it can be made of various materials other than metal.
[0033] The above description is only of the preferred embodiments of the present invention, and does not impose any form of limitation on the present invention. Any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention are all within the scope of the technical solution of the present invention.
Claims
1. A pair of tweezers for holding a wafer, comprising a herringbone tweezers body, the tweezers body including a connecting rod (1) and two clamping pieces (2); the lower end of the connecting rod (1) and the upper ends of the two clamping pieces (2) are fixedly connected; characterized in that: The clamping piece (2) includes an integrally formed upper straight segment and a lower straight segment, and the included angle between the upper straight segment and the lower straight segment ranges from 100 degrees to 170 degrees; a wafer clamping portion (3) is provided at the lower end of each clamping piece (2), and the wafer clamping portion (3) includes an upper clamping segment located on the extension line below the lower straight segment, and a convex portion is provided at the lower end of the opposite surfaces of the two upper clamping segments; the lower end of the lower straight segment is connected to the upper end of the upper clamping segment through a disassembling member (4).
2. The tweezers for wafer clamping according to claim 1, characterized in that, A counterbore is provided on the upper end surface of the upper clamping segment, a threaded hole communicating with the counterbore is provided on the side wall of the upper clamping segment, and a through hole is provided on the side wall of the lower straight segment; the lower end of the lower straight segment is inserted into the counterbore, and the disassembling member (4) is a bolt matched with the threaded hole.
3. The tweezers for wafer clamping according to claim 2, characterized in that Both the threaded hole and the through hole are two.
4. The tweezers for wafer clamping according to claim 1, characterized in that, Both the upper straight segment and the lower straight segment are cuboid structures.
5. The tweezers for wafer clamping according to claim 1, characterized in that, The connecting rod and the two clamping pieces are of an integrally formed structure.
6. The tweezers for wafer gripping according to claim 2, characterized in that, The length of the upper clamping segment is 35 mm, and the depth of the counterbore is 15 mm.