Chemical source conveying pipeline structure and PEALD equipment

Abstract

The utility model discloses a chemical source delivery pipeline structure and PEALD equipment, the chemical source delivery pipeline structure comprises a carrier gas delivery pipeline, a carrier gas inlet pipeline and a reaction source output pipeline, the carrier gas delivery pipeline is connected with a reaction cavity in an on-off manner, and the carrier gas inlet pipeline is connected with the carrier gas delivery pipeline and a reaction source inlet in an on-off manner; the reaction source output pipeline is connected with the reaction source outlet and the reaction cavity in an on-off manner; wherein the carrier gas conveying pipeline, the carrier gas inlet pipeline and the reaction source output pipeline are all provided with ALD valves, at least one of the carrier gas inlet pipeline and the reaction source output pipeline is provided with a pneumatic valve, the pneumatic valve is arranged at the upstream position of the ALD valve, and the pneumatic valve has an interlocking function. According to the pneumatic valve, the ALD valve is released and is not influenced by the relay, the quick response of the ALD valve is realized, and meanwhile, the interlocking function is set on the pneumatic valve, so that the safety requirement is met.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a chemical source delivery pipeline structure and a PEALD device. Background Art

[0002] In the prior art, in semiconductor process equipment such as a PEALD device (plasma enhanced atomic layer deposition device), a carrier gas enters a liquid source cylinder, carries a reaction source into a reaction chamber, and the gas mixed with a reaction gas is sprayed onto the surface of a wafer through a shower plate to achieve a film forming process. The carrier gas enters and exits the liquid source bottle through the quick response switching control of an ALD valve, and the ALD valve is arranged at the inlet and outlet of the liquid source bottle. In terms of safety, there must be an interlock function limit switch condition.

[0003] Regarding the above problems of the ALD valve, the technical drawback is that the normal response time of the ALD valve is 14 - 16 ms, and after the ALD valve is associated with the interlock, its response time fluctuates between 24 - 28 ms. The reason is that the ALD valve has an interlock function, and it is necessary to judge whether the valve opening condition is met through a relay in the valve opening instruction. Therefore, the valve opening signal will be delayed by 6 - 8 ms after passing through a relay. Also, because the alarm value of the response time of the ALD valve of the PEALD device for production requirements is 25 ms, the response speed of 24 - 28 ms will frequently trigger an alarm, resulting in the process recipe being unable to proceed smoothly. Summary of the Utility Model

[0004] The purpose of the utility model is to overcome the deficiencies of the prior art and provide a chemical source delivery pipeline structure and a PEALD device, aiming to achieve both a fast response time of the ALD valve and an interlock function in terms of safety.

[0005] To achieve the above purpose, the utility model adopts the following technical solutions:

[0006] On the one hand, the utility model provides a chemical source delivery pipeline structure, including:

[0007] A carrier gas delivery pipeline, which is connectable to and disconnectable from the reaction chamber;

[0008] A carrier gas inlet pipeline, which is connectable to and disconnectable from the carrier gas delivery pipeline and the reaction source inlet;

[0009] A reaction source output pipeline, which is connectable to and disconnectable from the reaction source outlet and the reaction chamber;

[0010] Among them, ALD valves are provided in the carrier gas delivery pipeline, the carrier gas inlet pipeline, and the reaction source output pipeline. A pneumatic valve is provided in at least one of the carrier gas inlet pipeline and the reaction source output pipeline. The pneumatic valve is arranged at the upstream position of the ALD valve, and the pneumatic valve is provided with an interlock function.

[0011] Furthermore, manual valves are provided in both the carrier gas inlet pipeline and the reaction source output pipeline.

[0012] Furthermore, when only the carrier gas inlet pipeline is provided with the pneumatic valve, the manual valve of the carrier gas inlet pipeline is arranged at the downstream position of the ALD valve of the carrier gas inlet pipeline, and the manual valve of the reaction source output pipeline is arranged at the upstream position of the ALD valve of the reaction source output pipeline.

[0013] Furthermore, when only the reaction source output pipeline is provided with the pneumatic valve, the manual valve of the carrier gas inlet pipeline is arranged at the downstream position of the ALD valve of the carrier gas inlet pipeline, and the manual valve of the reaction source output pipeline is arranged at the upstream position of the pneumatic valve of the reaction source output pipeline.

[0014] Furthermore, the manual valve of the carrier gas inlet pipeline is arranged at the downstream position of the ALD valve of the carrier gas inlet pipeline, and the manual valve of the reaction source output pipeline is arranged at the upstream position of the pneumatic valve of the reaction source output pipeline.

[0015] Furthermore, the pneumatic valve and the ALD valve are designed independently and separately or integrally.

[0016] Furthermore, the carrier gas delivery pipeline and the reaction source output pipeline are provided with a shared ALD valve.

[0017] Furthermore, the shared ALD valve provided in the carrier gas delivery pipeline and the reaction source output pipeline is a three-way valve.

[0018] On the other hand, the present utility model also provides a PEALD device, including a reaction source container, a reaction chamber, and the above chemical source delivery pipeline structure. The reaction source container is provided with a reaction source inlet and a reaction source outlet, and the reaction chamber is provided with a reaction cavity.

[0019] The beneficial effects of the present utility model compared with the prior art are as follows: By providing a pneumatic valve in at least one of the carrier gas inlet pipeline and the reaction source output pipeline, arranging the pneumatic valve at the upstream position of the ALD valve, and setting the interlock function on the pneumatic valve, the ALD valve is released and is not affected by the relay, realizing the fast response of the ALD valve. At the same time, setting the interlock function on the pneumatic valve meets the safety requirements.

[0020] The above description is only an overview of the technical solution of the present utility model. In order to understand the technical means of the present utility model more clearly, it can be implemented according to the content of the specification. And in order to make the above and other purposes, features and advantages of the present utility model more obvious and understandable, the following preferred embodiments are specifically exemplified and described in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0022] Figure 1 It is a schematic diagram of the principle of the PEALD device provided in the first embodiment of the present utility model;

[0023] Figure 2 It is a schematic diagram of the integration scheme of the PEALD device provided in the first embodiment of the present utility model;

[0024] Figure 3 It is a schematic diagram of the principle of the PEALD device provided in the second embodiment of the present utility model;

[0025] Figure 4 It is a schematic diagram of the integration scheme of the PEALD device provided in the second embodiment of the present utility model;

[0026] Figure 5 It is a schematic diagram of the principle of the PEALD device provided in the third embodiment of the present utility model;

[0027] Figure 6 It is a schematic diagram of the integration scheme of the PEALD device provided in the third embodiment of the present utility model.

[0028] REFERENCE NUMERALS

[0029] 1. Carrier gas delivery pipeline; 2. Carrier gas inlet pipeline; 3. Reaction source output pipeline; 4. ALD valve; 5. Pneumatic valve; 6. Manual valve; 7. Reaction source container; 71. Reaction source inlet; 72. Reaction source outlet. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0030] The following will clearly and completely describe the technical solutions of the present utility model in conjunction with the specific embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection of the present utility model.

[0031] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.

[0032] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In the description of the present utility model, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0033] In the present utility model, unless otherwise clearly specified and defined, terms such as "mounted", "connected", "connected to", "fixed" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a mechanical connection or an electrical connection; it may be directly connected or indirectly connected through an intermediate medium, and it may be the communication inside two elements or the interaction relationship between two elements, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0034] In the present utility model, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "over" and "on top of" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath" and "underneath" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0035] It should be noted that when an element is referred to as "fixed to" or "disposed on" another element, it can be directly on the other element or there may be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are only for illustrative purposes and do not represent the only implementation.

[0036] Embodiment 1

[0037] As Figures 1 to 2 shown, an embodiment of the present invention provides a PEALD device. The PEALD device includes a reaction source container 7, a reaction chamber and a chemical source delivery pipeline structure. The reaction source container 7 can be a bottle-shaped structure, and the reaction source contained in the reaction source container 7 is a liquid reaction source. The reaction source container 7 is provided with a reaction source inlet 71 and a reaction source outlet 72, and the reaction chamber is provided with a reaction cavity; the chemical source delivery pipeline structure includes a carrier gas delivery pipeline 1, a carrier gas inlet pipeline 2 and a reaction source output pipeline 3. The carrier gas delivery pipeline 1 is connected to the reaction cavity in a switchable manner, the carrier gas inlet pipeline 2 is connected to the carrier gas delivery pipeline 1 and the reaction source inlet 71 in a switchable manner, and the reaction source output pipeline 3 is connected to the reaction source outlet 72 and the reaction cavity in a switchable manner. The carrier gas delivery pipeline 1, the carrier gas inlet pipeline 2 and the reaction source output pipeline 3 are all provided with ALD valves 4. The carrier gas inlet pipeline 2 is provided with a pneumatic valve 5. The pneumatic valve 5 is arranged at an upstream position (the upstream position refers to the upstream relative position in the carrier gas flow direction), and the pneumatic valve 5 is provided with an interlock function.

[0038] Specifically, the carrier gas delivery pipeline 1 is used to transport the carrier gas. On the one hand, the carrier gas is directly sent to the reaction cavity by the carrier gas delivery pipeline 1. On the other hand, it enters the reaction source container 7 through the carrier gas inlet pipeline 2 and carries the reaction source into the reaction cavity from the reaction source output pipeline 3.

[0039] The pneumatic valve 5 can be a pneumatic ball valve, a pneumatic butterfly valve, a pneumatic diaphragm valve or a pneumatic needle valve, etc.

[0040] By setting the pneumatic valve 5 in the carrier gas inlet pipeline 2, arranging the pneumatic valve 5 at an upstream position of the ALD valve 4, and setting the interlock function on the pneumatic valve 5, the ALD valve 4 is released, making it unaffected by the relay, achieving a rapid response of the ALD valve 4. At the same time, setting the interlock function on the pneumatic valve 5 meets the safety requirements.

[0041] The pneumatic valve 5 and the ALD valve 4 can be designed separately or integrally. As Figure 2 shown, Figure 2It is an integrated design solution. The carrier gas delivery pipeline 1 and the reaction source output pipeline 3 are provided with a common ALD valve 4 for both of them, and the common ALD valve 4 for both of them is a three-way valve.

[0042] After the carrier gas enters from position A, on the one hand, the carrier gas first passes through the pneumatic valve 5 on the carrier gas inlet pipeline 2, then passes through the ALD valve 4 on the carrier gas inlet pipeline 2, and then enters the reaction source container 7 from position B. The carrier gas coming out of the reaction source container 7 enters the reaction source output pipeline 3 from position C, and after passing through the ALD valve 4 common to the reaction source output pipeline 3 and the carrier gas delivery pipeline 1, it enters the reaction chamber from position D; on the other hand, the carrier gas first passes through the ALD valve 4 on the carrier gas delivery pipeline 1, and then enters the reaction chamber after passing through the ALD valve 4 common to the reaction source output pipeline 3 and the carrier gas delivery pipeline 1.

[0043] This design method saves physical space, reduces multiple pipeline segments and leakage points, and reduces the probability of particle deposition. Overall, it realizes the fast response of the ALD valve while ensuring the interlock function in a narrow and limited space.

[0044] Specifically, as Figures 1 to 2 shown, both the carrier gas inlet pipeline 2 and the reaction source output pipeline 3 are provided with manual valves 6. The manual valve 6 can be a manual ball valve, a manual butterfly valve or a manual gate valve, etc.

[0045] In this embodiment, the manual valve 6 of the carrier gas inlet pipeline 2 is arranged at the downstream position of the ALD valve 4 of the carrier gas inlet pipeline 2, and the manual valve 6 of the reaction source output pipeline 3 is arranged at the upstream position of the ALD valve 4 of the reaction source output pipeline 3.

[0046] The carrier gas entering the carrier gas inlet pipeline 2 passes through the pneumatic valve 5, the ALD valve 4 and the manual valve 6 in sequence, and then enters the reaction source container 7 from the reaction source inlet 71. The carrier gas carrying the reaction source comes out from the reaction source outlet 72 and enters the reaction source output pipeline 3, and passes through the manual valve 6 and the ALD valve 4 of the reaction source output pipeline 3 in sequence, and finally leads to the reaction chamber.

[0047] Embodiment 2

[0048] The difference between this embodiment and Embodiment 1 is the different setting positions of the pneumatic valve 5. In Embodiment 1, the pneumatic valve 5 is set on the carrier gas inlet pipeline 2, and in this embodiment, the pneumatic valve 5 is set on the reaction source output pipeline 3.

[0049] As Figures 3 to 4As shown in the figure, a PEALD device includes a reaction source container 7, a reaction chamber, and a chemical source delivery pipeline structure. The reaction source container 7 can be a bottle-shaped structure, and the reaction source contained in the reaction source container 7 is a liquid reaction source. The reaction source container 7 is provided with a reaction source inlet 71 and a reaction source outlet 72, and the reaction chamber is provided with a reaction cavity; the chemical source delivery pipeline structure includes a carrier gas delivery pipeline 1, a carrier gas inlet pipeline 2, and a reaction source output pipeline 3. The carrier gas delivery pipeline 1 is connected to the reaction cavity in a switchable manner. The carrier gas inlet pipeline 2 is connected to the carrier gas delivery pipeline 1 and the reaction source inlet 71 in a switchable manner. The reaction source output pipeline 3 is connected to the reaction source outlet 72 and the reaction cavity in a switchable manner. The carrier gas delivery pipeline 1, the carrier gas inlet pipeline 2, and the reaction source output pipeline 3 are all provided with ALD valves 4. The reaction source output pipeline 3 is provided with a pneumatic valve 5. The pneumatic valve 5 is arranged at the upstream position (the upstream position refers to the upstream relative position in the carrier gas flow direction), and the pneumatic valve 5 is provided with an interlock function.

[0050] Specifically, the carrier gas delivery pipeline 1 is used to transport the carrier gas. On the one hand, the carrier gas is directly sent from the carrier gas delivery pipeline 1 to the reaction cavity. On the other hand, the carrier gas enters the reaction source container 7 through the carrier gas inlet pipeline 2 and carries the reaction source into the reaction cavity from the reaction source output pipeline 3.

[0051] The pneumatic valve 5 can be a pneumatic ball valve, a pneumatic butterfly valve, a pneumatic diaphragm valve, or a pneumatic needle valve, etc.

[0052] By setting the pneumatic valve 5 in the reaction source output pipeline 3, and arranging the pneumatic valve 5 at the upstream position of the ALD valve 4, and setting the interlock function on the pneumatic valve 5, the ALD valve 4 is released, making it not affected by the relay, realizing the rapid response of the ALD valve 4. At the same time, setting the interlock function on the pneumatic valve 5 meets the safety requirements.

[0053] The pneumatic valve 5 and the ALD valve 4 can be designed separately or integrally. As Figure 4 shown, Figure 4 For the integrated design scheme, the carrier gas delivery pipeline 1 and the reaction source output pipeline 3 are provided with a common ALD valve 4 for both of them, and the common ALD valve 4 for both of them is a three-way valve.

[0054] After the carrier gas enters from position A, on the one hand, the carrier gas passes through the ALD valve 4 on the carrier gas inlet pipeline 2, then enters the reaction source container 7 from position B, and the carrier gas coming out of the reaction source container 7 enters the reaction source output pipeline 3 from position C, first passes through the pneumatic valve 5 of the reaction source output pipeline 3, and then passes through the common ALD valve 4 of the reaction source output pipeline 3 and the carrier gas delivery pipeline 1, and enters the reaction chamber from position D; on the other hand, the carrier gas first passes through the ALD valve 4 on the carrier gas delivery pipeline 1, and then enters the reaction chamber after passing through the common ALD valve 4 of the reaction source output pipeline 3 and the carrier gas delivery pipeline 1.

[0055] This design method saves physical space, reduces multiple sections of pipelines and leakage points, and decreases the probability of particle deposition. Overall, it realizes the fast response of the ALD valve in a narrow and limited space while achieving the interlock function.

[0056] Specifically, as Figures 3 to 4 shown, manual valves 6 are provided in both the carrier gas inlet pipeline 2 and the reaction source output pipeline 3. The manual valve 6 can be a manual ball valve, a manual butterfly valve, a manual gate valve, etc.

[0057] In this embodiment, the manual valve 6 of the carrier gas inlet pipeline 2 is arranged at the downstream position of the ALD valve 4 of the carrier gas inlet pipeline 2, and the manual valve 6 of the reaction source output pipeline 3 is arranged at the upstream position of the pneumatic valve 5 of the reaction source output pipeline 3.

[0058] The carrier gas entering the carrier gas inlet pipeline 2 passes through the ALD and the manual valve 6 in sequence, then enters the reaction source container 7 from the reaction source inlet 71. The carrier gas carrying the reaction source comes out from the reaction source outlet 72 and enters the reaction source output pipeline 3, and then passes through the manual valve 6, the pneumatic valve 5 and the ALD valve 4 of the reaction source output pipeline 3 in sequence, and finally leads to the reaction chamber.

[0059] Embodiment Three

[0060] The difference between this embodiment and Embodiment One lies in the different positions and quantities of the pneumatic valves 5. In Embodiment One, the pneumatic valve 5 is arranged on the carrier gas inlet pipeline 2, while in this embodiment, pneumatic valves 5 are arranged on both the reaction source output pipeline 3 and the carrier gas inlet pipeline 2.

[0061] As Figures 5 - 6 shown, a PEALD device includes a reaction source container 7, a reaction chamber and a chemical source delivery pipeline structure. The reaction source container 7 can be a bottle-shaped structure, and the reaction source contained in the reaction source container 7 is a liquid reaction source. The reaction source container 7 is provided with a reaction source inlet 71 and a reaction source outlet 72, and the reaction chamber is provided with a reaction cavity; the chemical source delivery pipeline structure includes a carrier gas delivery pipeline 1, a carrier gas inlet pipeline 2 and a reaction source output pipeline 3. The carrier gas delivery pipeline 1 is connected to the reaction cavity in a switchable manner. The carrier gas inlet pipeline 2 is connected to the carrier gas delivery pipeline 1 and the reaction source inlet 71 in a switchable manner. The reaction source output pipeline 3 is connected to the reaction source outlet 72 and the reaction cavity in a switchable manner. ALD valves 4 are provided in all of the carrier gas delivery pipeline 1, the carrier gas inlet pipeline 2 and the reaction source output pipeline 3. Pneumatic valves 5 are provided in both the carrier gas inlet pipeline 2 and the reaction source output pipeline 3. The pneumatic valve 5 is arranged at the upstream position (the upstream position refers to the upstream relative position in the carrier gas flow direction), and the pneumatic valve 5 is provided with an interlock function.

[0062] Specifically, the carrier gas delivery pipeline 1 is used to transport the carrier gas. On the one hand, the carrier gas is directly sent to the reaction chamber through the carrier gas delivery pipeline 1. On the other hand, the carrier gas enters the reaction source container 7 through the carrier gas inlet pipeline 2, and carries the reaction source into the reaction chamber from the reaction source outlet pipeline 3.

[0063] The pneumatic valve 5 can be a pneumatic ball valve, a pneumatic butterfly valve, a pneumatic diaphragm valve, a pneumatic needle valve, etc.

[0064] By setting the pneumatic valve 5 in the carrier gas inlet pipeline 2 and the reaction source outlet pipeline 3, and arranging the pneumatic valve 5 upstream of the ALD valve 4, and setting the interlock function on the pneumatic valve 5, the ALD valve 4 is released, making it unaffected by the relay, realizing the rapid response of the ALD valve 4. At the same time, setting the interlock function on the pneumatic valve 5 meets the safety requirements.

[0065] The pneumatic valve 5 and the ALD valve 4 can be designed independently or integrally. For example Figure 6 as shown Figure 6 In the integrated design scheme, the carrier gas delivery pipeline 1 and the reaction source outlet pipeline 3 are provided with a shared ALD valve 4, and the shared ALD valve 4 is a three-way valve.

[0066] After the carrier gas enters from position A, on the one hand, the carrier gas first passes through the pneumatic valve 5 on the carrier gas inlet pipeline 2, then passes through the ALD valve 4 on the carrier gas inlet pipeline 2, and then enters the reaction source container 7 from position B. The carrier gas coming out of the reaction source container 7 enters the reaction source outlet pipeline 3 from position C, first passes through the pneumatic valve 5 of the reaction source outlet pipeline 3, and then passes through the shared ALD valve 4 of the reaction source outlet pipeline 3 and the carrier gas delivery pipeline 1, and then enters the reaction chamber from position D. On the other hand, the carrier gas first passes through the ALD valve 4 on the carrier gas delivery pipeline 1, and then enters the reaction chamber after passing through the shared ALD valve 4 of the reaction source outlet pipeline 3 and the carrier gas delivery pipeline 1.

[0067] This design method saves physical space, reduces multiple pipelines and leakage points, and reduces the probability of particle deposition. Generally speaking, it realizes the rapid response of the ALD valve 4 in a narrow and limited space while realizing the interlock function.

[0068] Specifically, as Figures 5 to 6 shown, the carrier gas inlet pipeline 2 and the reaction source outlet pipeline 3 are both provided with manual valves 6. The manual valve 6 can be a manual ball valve, a manual butterfly valve or a manual gate valve, etc.

[0069] In this embodiment, the manual valve 6 of the carrier gas inlet pipeline 2 is arranged downstream of the ALD valve 4 of the carrier gas inlet pipeline 2, and the manual valve 6 of the reaction source outlet pipeline 3 is arranged upstream of the pneumatic valve 5 of the reaction source outlet pipeline 3.

[0070] The carrier gas entering the pipeline 2 of the carrier gas passes through the pneumatic valve 5, the ALD valve 4, and the manual valve 6 in sequence, and then enters the reaction source container 7 from the reaction source inlet 71. The carrier gas carrying the reaction source exits from the reaction source outlet 72 and enters the reaction source output pipeline 3, and then passes through the manual valve 6, the pneumatic valve 5, and the ALD valve 4 of the reaction source output pipeline 3 in sequence, and finally leads to the reaction chamber.

[0071] To illustrate the technical advantages of this application compared with the prior art, the following specific explanations are made:

[0072] In the process of implementing this application, does times and does purge times are stable in each cycle, solving the unstable factors brought by the hardware and meeting the safety requirements of the machine.

[0073] In the prior art, does times is 250 ms, with a delay of 14 ms, does purge time is 300 ms, and each cycle requires T1 = 564 ms. And for each pair of wafer thin film depositions, 400 cycles are required, that is, T = 225600 ms;

[0074] The production capacity of the prior art is 22 pairs of wafers per hour. In 24 hours, that is RUN 528 pairs of wafers. After this application solves the delay problem, 2983.2 s will be saved in 24 hours, about 50 min.

[0075] Calculated by the following formula, the solution of this application will save time R = 5% compared with the prior art.

[0076]

[0077] T=(T1 + Td)*C.

[0078] In the above formula, C represents the number of cycles, T1 represents the time consumed for a single cycle in the prior art (ms), Tn represents the time consumed for a single cycle in this application (ms), T represents the time consumed for depositing each pair of wafers (ms), Td represents the delay time of the ALD valve (ms), and R represents the time saving ratio of this application.

[0079] The above are only the specific implementation manners of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art in the technical field disclosed by the present utility model can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should be covered within the protection scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.

Claims

1. A chemical source delivery pipeline structure, characterized in that, Comprising: A carrier gas delivery pipeline, which is connected to the reaction chamber in a switchable manner; A carrier gas inlet pipeline, which is connected to the carrier gas delivery pipeline and the reaction source inlet in a switchable manner; A reaction source output pipeline, which is connected to the reaction source outlet and the reaction chamber in a switchable manner; Wherein, ALD valves are provided on the carrier gas delivery pipeline, the carrier gas inlet pipeline, and the reaction source output pipeline, and pneumatic valves are provided on at least one of the carrier gas inlet pipeline and the reaction source output pipeline. The pneumatic valve is arranged at the upstream position of the ALD valve, and the pneumatic valve is provided with an interlock function.

2. The chemical source delivery pipeline structure according to claim 1, characterized in that, Manual valves are provided on both the carrier gas inlet pipeline and the reaction source output pipeline.

3. The chemical source delivery pipeline structure according to claim 2, characterized in that, When only the carrier gas inlet pipeline is provided with the pneumatic valve, the manual valve of the carrier gas inlet pipeline is arranged at the downstream position of the ALD valve of the carrier gas inlet pipeline, and the manual valve of the reaction source output pipeline is arranged at the upstream position of the ALD valve of the reaction source output pipeline.

4. A chemical source delivery pipeline structure according to claim 2, characterized in that, When only the reaction source output pipeline is provided with the pneumatic valve, the manual valve of the carrier gas inlet pipeline is arranged at the downstream position of the ALD valve of the carrier gas inlet pipeline, and the manual valve of the reaction source output pipeline is arranged at the upstream position of the pneumatic valve of the reaction source output pipeline.

5. The chemical source delivery pipeline structure according to claim 2, characterized in that, The manual valve of the carrier gas inlet pipeline is arranged at the downstream position of the ALD valve of the carrier gas inlet pipeline, and the manual valve of the reaction source output pipeline is arranged at the upstream position of the pneumatic valve of the reaction source output pipeline.

6. A chemical source delivery pipeline structure according to any one of claims 2-5, characterized in that, The pneumatic valve and the ALD valve are designed independently or integrally.

7. A chemical source delivery pipeline structure according to any one of claims 2-5, characterized in that, The carrier gas delivery pipeline and the reaction source output pipeline are provided with a shared ALD valve.

8. A chemical source delivery pipeline structure according to claim 7, characterized in that, The shared ALD valve provided on the carrier gas delivery pipeline and the reaction source output pipeline is a three-way valve.

9. A PEALD device, characterized in that, Comprising a reaction source container, a reaction chamber, and the chemical source delivery pipeline structure according to any one of claims 1-8. The reaction source container is provided with a reaction source inlet and a reaction source outlet, and the reaction chamber is provided with a reaction chamber.

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