Temperature detection mechanism of spraying disc and thin film deposition equipment thereof
By using the automatic tensioning mechanism of elastic components on the temperature sensor signal line, the problem of the spray disk temperature sensor signal line being burned during the opening of the cavity is solved, and the safety of the equipment and maintenance cost are reduced.
Patent Information
- Application Number
- CN202422353339.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-25
- Publication Date
- 2025-07-11
- Estimated Expiration
- 2034-09-25
AI Technical Summary
The signal line of the existing spray disk temperature sensor is easily burned when in contact with the heated spray disk during the opening maintenance process, resulting in economic losses and increased maintenance costs.
The elastic component is used to hang the signal line of the temperature sensor to its mobile end, and the elastic component is used to automatically tension when the upper cover of the cavity is opened or closed, avoiding the signal line from contacting the heating spray disk. The design includes elastic members and connecting blocks, and the orientation guide is realized through guide grooves and guide holes.
Effectively avoid contact between the signal line and the heating spray disk, reducing maintenance costs and risk of equipment damage, and the structure is simple and easy to maintain.
Smart Images
Figure CN223091411U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of temperature detection devices, in particular to a temperature detection mechanism for a shower tray and a thin film deposition device thereof. Background Art
[0002] In semiconductor devices, due to the requirements of different types of processes, the process gas for the reaction needs to be heated before reaching the chamber. An intuitive and effective method is to heat the reaction gas passing through it by heating the shower tray, but the temperature of the shower tray needs to be maintained within a set range. Currently, the temperature measurement method of the shower tray is by directly contacting the temperature sensor with the shower tray. A temperature sensor is a common device that can sense temperature changes and convert them into electrical signals for output. The elastic deformation amount of the electrical connection wire (signal wire) of the currently commonly used temperature sensor is very small, and due to the need for cavity maintenance, the length of the electrical connection wire cannot be accurately determined. When the temperature sensor is not installed at the accurate position, it often contacts the heated shower tray, resulting in burnout, causing economic losses and increasing the maintenance cost. Summary of the Utility Model
[0003] The purpose of the utility model is to overcome the deficiencies of the prior art and provide a temperature detection mechanism for a shower tray and a thin film deposition device thereof, so as to solve the technical problem that the signal wire of the existing temperature detection sensor of the shower tray is easily burned due to contact with the shower tray.
[0004] To achieve the above purpose, the utility model adopts the following technical solutions:
[0005] An embodiment of the utility model provides a temperature detection mechanism for a shower tray, which includes:
[0006] An elastic component, one end of the elastic component is fixedly connected to the upper cover of the cavity;
[0007] A temperature sensor and a signal wire connected to the temperature sensor, the middle part of the signal wire is hung on the moving end of the elastic component, and the temperature sensor is connected to the shower tray.
[0008] Wherein, the elastic component includes: an elastic member and a connecting block, the connecting block is provided with a front hook and a rear hook, one end of the elastic member is fixedly connected to the upper cover, and the other end is hung on the front hook, and the signal wire is hung on the rear hook.
[0009] Wherein, the elastic member is a spring.
[0010] Wherein, the temperature detection mechanism for the shower tray further includes a fixed sheet metal part, and a guiding groove is provided on the fixed sheet metal part, and the connecting block is slidably assembled in the guiding groove.
[0011] Wherein, a guiding portion is further provided at the bottom of the connecting block, a guiding hole is further provided at the bottom of the guiding groove, and the guiding portion is inserted into the guiding hole.
[0012] Wherein, the guiding portion is a guiding post protruding from the bottom of the connecting block, and the guiding hole is a strip-shaped hole extending along the elastic telescopic direction of the elastic member.
[0013] Wherein, the fixed sheet metal part includes: a guiding groove portion and connecting portions bent out from both sides in the length direction of the guiding groove portion, and the guiding groove is recessed in the guiding groove portion.
[0014] Wherein, the temperature detection mechanism of the spray disc further includes an external sheet metal part, the fixed sheet metal part is connected to the external sheet metal part, and one end of the elastic member is fixedly connected to the external sheet metal part.
[0015] Wherein, a plurality of connection holes are provided in alignment on the fixed sheet metal part and the external sheet metal part, and screws are inserted into the connection holes.
[0016] An embodiment of the present invention further provides a thin film deposition device, and the thin film deposition device includes the temperature detection mechanism of the spray disc as described above.
[0017] For the temperature detection mechanism of the spray disc of the present invention and its thin film deposition device, by hanging the middle part of the signal wire of the temperature sensor on an elastic component, in the state of opening or closing the upper cover of the cavity and during the process, the signal wire is always automatically tensioned by the elastic component, so as to avoid the signal wire contacting the heated spray disc and being burned out. Its structure is simple and the maintenance cost is reduced.
[0018] The above description is only an overview of the technical solution of the present invention. In order to be able to understand the technical means of the present invention more clearly, it can be implemented according to the content of the specification. And in order to make the above and other purposes, features and advantages of the present invention more obvious and understandable, the following preferred embodiments are specifically described in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 and Figure 2 are schematic diagrams of the overall structure of the temperature detection mechanism of the spray disc of the embodiment of the present invention from different angles.
[0020] Figure 3 is a schematic diagram of the partial structure of the temperature detection mechanism of the spray disc of the embodiment of the present invention after removing the external sheet metal part.
[0021] Figure 4 is a schematic diagram of the partial assembly structure of the elastic component and the temperature sensor of the temperature detection mechanism of the spray disc of the embodiment of the present invention.
[0022] Figure 5Explosion diagram of the temperature detection mechanism of the spray tray according to an embodiment of the present utility model.
[0023] Figure 6 Schematic structural diagram of the fixed sheet metal part of the temperature detection mechanism of the spray tray according to an embodiment of the present utility model.
[0024] Figure 7 Schematic structural diagram of the connecting block part of the temperature detection mechanism of the spray tray according to an embodiment of the present utility model.
[0025] Explanation of reference numerals:
[0026] Temperature detection mechanism 100 of the spray tray, external sheet metal part 1, fixed sheet metal part 2, elastic part 3, connecting block 4, temperature sensor 5, signal wire 6, guide groove part 21, connecting part 22(23), connecting hole 221, guide groove 24, front hook 42, rear hook 41, guiding part 43, guiding hole 241. Detailed implementation manners
[0027] In order to make the objectives, technical solutions and advantages of the present utility model clearer and more understandable, the present utility model will be further described in detail below with reference to the accompanying drawings and specific implementation manners.
[0028] The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without making creative efforts shall fall within the protection scope of the present utility model.
[0029] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "resin", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.
[0030] In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, "a plurality" means two or more, unless otherwise specifically defined.
[0031] In the present utility model, unless otherwise clearly defined and limited, terms such as "installed", "connected", "joined", "fixed", etc. shall be understood in a broad sense. For example, it can be a connection, a detachable connection, or an integral body; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal communication between two components or the interaction relationship between two components. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0032] In the present utility model, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features therebetween. Moreover, the first feature being "above", "over" and "on top of" the second feature includes that the first feature is directly above and obliquely above the second feature, or merely means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "beneath" and "underneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or merely means that the horizontal height of the first feature is lower than that of the second feature.
[0033] In the description of this specification, the descriptions referring to terms such as "one embodiment", "some embodiments", "examples", "specific examples", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present utility model. In this specification, the schematic expressions of the above terms should not be understood as necessarily referring to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.
[0034] In semiconductor equipment, due to the requirements of different types of processes, the reaction gas needs to be heated before reaching the chamber. The existing intuitive and effective method is to heat the reaction gas passing through it by heating the showerhead plate. The temperature of the showerhead plate has a great influence on the temperature of the gas passing through it. At present, the temperature of the showerhead plate is measured by directly contacting the temperature sensor with the showerhead plate. A temperature sensor is a commonly used device that can sense temperature changes and convert them into electrical signals for output. Currently, the elastic deformation of the electrical connection line (signal line) of the commonly used temperature sensor is very small. However, due to the need for opening the chamber for maintenance in semiconductor equipment, the length of the electrical connection line (signal line) cannot be accurately determined. During the process of opening the chamber, the electrical connection line (signal line) will contact the heated showerhead plate, resulting in burnout, causing economic losses and increasing maintenance costs. Therefore, based on the above requirements, this embodiment provides a temperature detection mechanism 200 for the showerhead plate, a temperature detection mechanism 100 for the showerhead plate, and a thin film deposition device. Among them, the showerhead plate is assembled in a sealed chamber and is used to heat the process gas passing through it to a set temperature. After the sealed chamber is used for a certain period of time, it is necessary to open the upper cover of the chamber to maintain the interior.
[0035] Please refer to Figures 1 to 7 , this embodiment discloses a temperature detection mechanism 100 for a showerhead plate, which is used to solve the problem that the signal line of the temperature sensor may be burned out due to contact with the heated showerhead plate during the process of opening and maintaining the chamber. The temperature detection mechanism 100 for the showerhead plate includes:
[0036] An elastic component, one end of the elastic component is fixedly connected to the upper cover of the chamber;
[0037] A temperature sensor 5 and a signal line 6 connected to the temperature sensor 5. The middle part of the signal line 6 is hung on the moving end of the elastic component, and the temperature sensor 5 is connected to the showerhead plate.
[0038] In the temperature detection mechanism 100 for the showerhead plate of this embodiment, through the action of the elastic component on the signal line 6 of the temperature sensor 5, when the sealed chamber is opened or closed, the upper cover drives the elastic component, and the elastic component generates an appropriate elastic tension force on the signal line 6, so that the signal line 6 is always in a tension state, thereby avoiding being burned out due to the relaxation of the signal line and contacting the heated showerhead plate.
[0039] Specifically, the elastic component includes: an elastic member 3 and a connection block 4. The connection block 4 is provided with a front hook 42 and a rear hook 41. One end of the elastic member 3 is fixedly connected to the upper cover, and the other end is hung on the front hook 42, and the signal line 6 is hung on the rear hook 41.
[0040] In this embodiment, the elastic member 3 is a spring, and the spring is less affected by temperature in the cavity. In other embodiments, the elastic member 3 can also be replaced by other high-temperature-resistant elastic units or components. In order to facilitate the replacement of the elastic member 3 and the connecting block 4, and at the same time facilitate the hanging connection of the connecting block 4 and the signal line 6, this embodiment designs the elastic assembly with a split structure of the elastic member 3 and the connecting block 4. If the elastic member 3 or the signal line 6 needs to be replaced due to aging or other damages in the future, the disassembly and assembly are more rapid and convenient.
[0041] Please refer to again Figure 3 and Figure 6 , the temperature detection mechanism 100 of the spray disc further includes a fixed sheet metal part 2. A guiding groove 24 is provided on the fixed sheet metal part 2, and the connecting block 4 is slidably assembled in the guiding groove 24. Restricting the connecting block 4 to reciprocate in a fixed direction within the guiding groove 24 can avoid other damages or interferences caused by the elastic force of the elastic assembly in any uncertain direction, resulting in the uncertain movement of the signal line 6 in the cavity.
[0042] Please refer to again Figure 7 , a guiding part 43 is further provided at the bottom of the connecting block 4, and a guiding hole 241 is provided at the bottom of the guiding groove 24. The guiding part 43 is inserted into the guiding hole 241, and the directional guiding is realized through the cooperation of the guiding hole 241 and the guiding part 43.
[0043] In this embodiment, the guiding groove 24 is a rectangular groove with a constant width. This design is to facilitate the assembly of the connecting block 4 into the guiding groove 24 of the fixed sheet metal part 2. Further, a guiding hole 241 is opened at the bottom of the guiding groove 24, so that the guiding part 43 at the bottom of the connecting block 4 is inserted and matched with the guiding hole 241, making the guiding movement of the two more smooth and stable.
[0044] In this embodiment, the guiding part 43 is a guiding column protruding from the bottom of the connecting block, and the guiding hole 241 is a strip-shaped hole extending along the elastic telescopic direction of the elastic member 3.
[0045] As Figure 6 shown, the fixed sheet metal part 2 includes a guiding groove part 21 and connecting parts 22(23) bent out from both sides in the length direction of the guiding groove part 21. The guiding groove 24 is recessed in the guiding groove part 21. The cross-section of the fixed sheet metal part 2 is generally in the shape of a "several", and the connecting parts 22(23) are used for fixed connection with other components.
[0046] Among them, the temperature detection mechanism 100 of the spray tray further includes an external sheet metal part 1. The fixed sheet metal part 2 is connected to the external sheet metal part 1. One end of the elastic part 3 is fixedly connected to the external sheet metal part 1, and the external sheet metal part 1 is fixedly connected to the outside of the sealed cavity. The external sheet metal part 1 partially covers one side of the opening of the guiding groove 24, so that the connecting block 4 is limited in the guiding groove 24 and can only reciprocate along the length direction of the guiding groove 24.
[0047] Specifically, a number of connection holes 221 are provided in alignment on the fixed sheet metal part 2 and the external sheet metal part 1, and screws are inserted into the connection holes 221. That is, the fixed sheet metal part 2 and the external sheet metal part 1 are fixedly connected by screws.
[0048] As Figure 7 shown, the rear hook 41 of the connecting block 4 is hooked to the middle of the signal line 6. After the signal line 6 is hooked to the connecting block 4, it is roughly folded in half in the middle. At this time, the signal line 6 remains movably connected to the rear hook 41.
[0049] This embodiment also provides a thin film deposition device, which includes the temperature detection mechanism 100 of the spray tray as described above.
[0050] For the temperature detection mechanism of the spray tray and its thin film deposition device in this embodiment, by hooking the middle of the signal line of the temperature sensor to an elastic component, the signal line is always automatically tensioned by the elastic component in the state of opening or closing the upper cover of the cavity and during the process, so as to avoid the signal line contacting the heated spray tray and being burned out. Its structure is simple and the maintenance cost is reduced.
[0051] The above only uses the embodiment to further illustrate the technical content of the present invention, so that it is easier for readers to understand, but it does not mean that the implementation mode of the present invention is limited to this. Any technical extension or re-creation made according to the present invention is protected by the present invention. The protection scope of the present invention is subject to the claims.
Claims
1. A temperature detection mechanism for a spray tray, characterized in that, Including: An elastic component, one end of the elastic component is fixedly connected to the upper cover of the cavity; A temperature sensor and a signal line connected to the temperature sensor, the middle part of the signal line is hung on the mobile end of the elastic component, and the temperature sensor is connected to the spray disc.
2. The temperature detection mechanism of the spray tray according to claim 1, characterized in that, The elastic component includes: an elastic member and a connecting block, the connecting block is provided with a front hook and a rear hook, one end of the elastic member is fixedly connected to the upper cover, and the other end is hung on the front hook, and the signal line is hung on the rear hook.
3. The temperature detection mechanism of the spray tray according to claim 2, characterized in that, The elastic member is a spring.
4. The temperature detection mechanism of the spray tray according to claim 2 or 3, characterized in that The temperature detection mechanism of the spray disc further includes a fixed sheet metal part, and a guiding groove is provided on the fixed sheet metal part, and the connecting block is slidably assembled in the guiding groove.
5. The temperature detection mechanism of the spray tray according to claim 4, characterized in that, A guiding part is further provided at the bottom of the connecting block, and a guiding hole is further provided at the bottom of the guiding groove, and the guiding part is inserted into the guiding hole.
6. The temperature detection mechanism of the spray tray according to claim 5, characterized in that, The guiding part is a guiding column protruding from the bottom of the connecting block, and the guiding hole is a strip-shaped hole extending along the elastic expansion and contraction direction of the elastic member.
7. The temperature detection mechanism of the spray tray according to claim 6, characterized in that, The fixed sheet metal part includes: a guiding groove part and connecting parts bent out from both sides in the length direction of the guiding groove part, and the guiding groove is recessed in the guiding groove part.
8. The temperature detection mechanism of the spray tray according to claim 4, characterized in that, The temperature detection mechanism of the spray disc further includes an external sheet metal part, the fixed sheet metal part is connected to the external sheet metal part, and one end of the elastic member is fixedly connected to the external sheet metal part.
9. The temperature detection mechanism of the spray tray according to claim 8, characterized in that, A plurality of connecting holes are provided in alignment on the fixed sheet metal part and the external sheet metal part, and screws are inserted into the connecting holes.
10. A thin film deposition device, characterized in that, The thin film deposition equipment includes the temperature detection mechanism of the spray disc according to any one of claims 1 to 9.