Substrate cleaning flower basket
By changing the contact angle between the substrate and the cleaning basket and adopting a trapezoidal slot design, the problem of poor cleaning effect of the traditional cleaning basket is solved, and compatibility and cost reduction of multi-special substrates are achieved.
Patent Information
- Application Number
- CN202421896331.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-07
- Publication Date
- 2025-07-11
- Estimated Expiration
- 2034-08-07
AI Technical Summary
In the prior art, traditional substrate cleaning baskets have shortcomings in cleaning effects, and multiple specifications are required to be made to accommodate substrates of different sizes, resulting in increased production costs.
A substrate cleaning flower basket is designed, and by changing the contact angle between the substrate and the cleaning flower basket, using trapezoidal slot holes and multiple placement slots, it is suitable for substrates of various sizes, combined with polytetrafluoroethylene material to improve cleaning effect and reduce production costs.
It achieves better cleaning effect, reduces production costs, and has a simple and reasonable structure, which is suitable for substrates of various sizes.
Smart Images
Figure CN223092829U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of semiconductor chip manufacturing, and particularly relates to a substrate cleaning basket. Background Art
[0002] As is well known, during the processing of a substrate, the substrate usually needs to be cleaned multiple times. The general method for substrate cleaning is as follows: First, place the substrate in a cleaning basket, and then put the cleaning basket with the substrate into a cleaning tank. The cleaning tank is filled with a cleaning agent and is equipped with an ultrasonic generating device. Currently, most traditional cleaning baskets place the substrate vertically. The utility model designs a substrate cleaning basket that changes the contact angle between the substrate and the cleaning basket and has a good cleaning effect. Summary of the Utility Model
[0003] Aiming at the problems existing in the prior art, the utility model provides a substrate cleaning basket that changes the contact angle between the substrate and the cleaning basket and has a good cleaning effect.
[0004] The utility model is realized as follows. A substrate cleaning basket includes a basket body, on the upper surface of which a trapezoidal slot is opened; the upper opening width of the trapezoidal slot is greater than the lower opening width; M placing slots are opened on the side wall of the trapezoidal slot; the angle between the placing slot and the upper base is not equal to 90 degrees; N placing slot through-holes are opened at the bottom of the placing slot; where: both M and N are natural numbers greater than 0.
[0005] Preferably, the trapezoidal slot is an isosceles trapezoid.
[0006] Preferably, the angle range between the placing slot and the upper base is 10° - 80°.
[0007] Preferably, two placing slot through-holes are provided at the bottom of each placing slot.
[0008] Preferably, a connection hole for connecting a lifting member is opened on the basket body, and a connection thread is provided in the connection hole.
[0009] Preferably, the lifting member is a lifting rod or a lifting ring, and a threaded section for cooperating with a threaded hole is provided at the lower end of the lifting rod or the lifting ring.
[0010] The advantages and technical effects of the utility model are as follows:
[0011] Since the utility model adopts the above technical solution, the placement angle of the substrate is changed; multiple placing slots are adopted, which can be applicable to square and circular substrates of various sizes, avoiding the production of multiple specifications of cleaning baskets, reducing the production cost, and having a simple and reasonable structure. Brief Description of the Drawings
[0012] Figure 1It is the front view of the preferred embodiment of the present utility model;
[0013] Figure 2 It is the left view of the preferred embodiment of the present utility model;
[0014] Figure 3 It is the top view of the preferred embodiment of the present utility model;
[0015] In the figure, 1 is the flower basket body; 2 is the placement table; 3 is the placement groove; 4 is the through hole of the placement table; 5 is the through hole of the placement groove; 6 is the connecting thread; 7 is the lifting member. Detailed implementation manners
[0016] In order to make the objectives, technical solutions and advantages of the present utility model clearer and more understandable, the present utility model will be further described in detail below in conjunction with embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.
[0017] Please refer to Figures 1 to 3 , a wafer cleaning flower basket, comprising a flower basket body 1, the flower basket body 1 is a rectangular structure as a whole, and a trapezoidal slot is opened on the upper surface of the flower basket body 1; the planes where the two waists of the trapezoidal slot are located are the placement table 2; the bottom opening of the trapezoidal slot is the through hole 4 of the placement table; the width of the upper end opening of the trapezoidal slot is greater than the width of the lower end opening; M placement grooves 3 are opened on the side wall of the trapezoidal slot; the included angle between the placement groove 3 and the upper base is not equal to 90 degrees; N through holes 5 of the placement groove are opened at the bottom of the placement groove 3; where: both M and N are natural numbers greater than 0.
[0018] In this preferred embodiment:
[0019] The trapezoidal slot is an isosceles trapezoid.
[0020] The included angle range between the placement groove 3 and the upper base is 10° to 80°.
[0021] Two through holes 5 of the placement groove are provided at the bottom of each placement groove.
[0022] A connection hole for connecting the lifting member 7 is opened on the flower basket body 1, and a connection thread 6 is provided in the connection hole.
[0023] The lifting member 7 is a lifting rod or a lifting ring, and a threaded section for cooperating with the threaded hole is provided at the lower end of the lifting rod or the lifting ring.
[0024] In the technical solution of the present application: a placement table 2 is provided on the flower basket body. The placement table 2 is used to place wafers or substrates. The placement table includes a plurality of placement grooves 3 with a V-shaped structure; the bottom side of the placement table is a square placement table through hole 4, and two circular through holes 5 are provided at the bottom of each placement groove 3 to facilitate the flow of the solution; an attachment hole is provided at the edge of the flower basket body, and an attachment threaded hole 6 is provided in the attachment hole, and a lifting member 7 is screwed in the attachment threaded hole. By adopting the above technical solution, the traditional vertical placement angle of the wafer is changed, and the processing surface faces downward to reduce the risk of dirt attachment of the solution; in addition, the placement groove can be compatible with multiple types and sizes, avoiding the production of multiple specifications of cleaning baskets, reducing the production cost, and the structure is relatively simple.
[0025] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention, the material of the wafer cleaning flower basket is made of polytetrafluoroethylene material with chemical stability, corrosion resistance, electrical insulation, and good anti-aging endurance, shall be included in the protection scope of the present invention.
Claims
1. A substrate cleaning basket, comprising a basket body (1), characterized in that: A trapezoidal slot hole is formed on the upper surface of the flower basket body (1); the opening width of the upper end of the trapezoidal slot hole is greater than that of the lower end; M placing grooves (3) are formed on the side wall of the trapezoidal slot hole; the included angle between the placing groove (3) and the upper base is not equal to 90 degrees; N placing groove through holes (5) are formed at the bottom of the placing groove (3); wherein: both M and N are natural numbers greater than 0.
2. The substrate cleaning basket according to claim 1, wherein: The trapezoidal slot hole is an isosceles trapezoid.
3. The substrate cleaning basket according to claim 1, characterized in that: The included angle range between the placing groove (3) and the upper base is 10° to 80°.
4. The substrate cleaning basket according to claim 1, wherein: Two placing groove through holes (5) are provided at the bottom of each placing groove.
5. The substrate cleaning basket according to claim 1, wherein: A connecting hole for connecting a lifting member (7) is formed on the flower basket body (1), and a connecting thread (6) is provided in the connecting hole.
6. The substrate cleaning basket according to claim 5, wherein: The lifting member (7) is a lifting rod or a lifting ring, and a thread section matching with a threaded hole is provided at the lower end of the lifting rod or the lifting ring.