Recovery device for tail gas of vapor deposition furnace
The gas phase deposition furnace tail gas recovery system addresses environmental and safety concerns by purifying and recovering valuable gases using a multi-stage purification process, ensuring compliance with regulations and resource efficiency.
Patent Information
- Application Number
- CN202421806373.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-07-27
- Publication Date
- 2025-07-15
- Estimated Expiration
- 2034-07-27
AI Technical Summary
The direct emission of exhaust gas generated by the vapor deposition furnace during operation will pollute the environment and contain harmful substances and valuable resources that have not been effectively recycled, which poses safety hazards.
A gas-phase deposition furnace exhaust gas recovery device is designed, including a pretreatment unit, a main treatment component and a storage component. The preliminary treatment, deep purification and safe storage of exhaust gas are achieved using components such as buffer tanks, condensers, gas-liquid separators, adsorption tanks, catalytic converters and membrane separation plates.
It effectively removes liquid impurities and harmful substances in the exhaust gas, realizes resource utilization of exhaust gas, reduces environmental pollution, improves resource utilization, and ensures safety.
Smart Images
Figure CN223096543U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of tail gas recovery, in particular to a recovery device for the tail gas of a chemical vapor deposition furnace. Background Art
[0002] During the operation of a chemical vapor deposition furnace, various tail gases will be generated, which may contain harmful substances such as hydrogen selenide. If these tail gases are directly discharged into the environment, they will pollute the atmosphere, water source and soil, affecting the ecological balance and human health. Therefore, from an environmental protection perspective, it is necessary to install a tail gas recovery device to reduce pollutant emissions; the tail gas of a chemical vapor deposition furnace often contains valuable substances such as argon. It is necessary to effectively separate and recycle these substances to improve resource utilization rate and reduce production costs. The chemical vapor deposition furnace technology is a technology that forms solid deposits on the gas phase or gas-solid interface by means of chemical reactions in a reactor. The tail gas may contain flammable, explosive or toxic gases. If not properly treated, safety accidents may occur. Rare gases such as argon are precious resources, and direct discharge is also a waste of resources. Therefore, recycling these tail gases not only meets the environmental protection requirements but also reflects the concept of resource conservation; with the increasingly strict environmental protection regulations and the global emphasis on environmental protection, enterprises and institutions need to take more effective measures to reduce pollutant emissions. In summary, in order to protect the environment, conserve resources, improve resource utilization rate and meet regulatory policies, a recovery device for the tail gas of a chemical vapor deposition furnace is proposed to solve the above problems. Content of the Utility Model
[0003] The utility model aims to solve at least to some extent the technical problems of the recovery of the tail gas of a chemical vapor deposition furnace. For this purpose, the utility model proposes a recovery device for the tail gas of a chemical vapor deposition furnace.
[0004] The technical solution adopted by the utility model to solve its technical problems is: a recovery device for the tail gas of a chemical vapor deposition furnace, which specifically includes a pretreatment unit, a main treatment component and a storage component. The pretreatment unit includes a buffer tank body, a condenser, a first connecting pipe and a gas-liquid separator. The buffer tank body is communicated with the outlet of the tail gas of the chemical vapor deposition furnace. The gas-liquid separator is arranged in the buffer tank body. The condenser is arranged above the buffer tank body and is connected to the buffer tank body through a pipeline. The first connecting pipe is arranged at the end of the buffer tank body. The main treatment component includes an adsorption tank body, a catalytic converter and a membrane separation plate. The first connecting pipe is connected to the adsorption tank body. The catalytic converter is arranged in the adsorption tank body. The membrane separation plate is arranged on the bottom surface of the catalytic converter. The storage component includes a gas storage tank, a gas transmission pipeline and a detachable connecting frame. The gas storage tank is communicated with the adsorption tank body through the gas transmission pipeline. The detachable connecting frame is arranged on the back of the gas storage tank.
[0005] In a preferred embodiment of the present utility model, the catalytic converter includes connecting support rods, catalyst carrier plates, and heat-insulating sealing gaskets. Multiple layers of the catalyst carrier plates are arranged in the adsorption tank body. The connecting support rods connect multiple layers of the catalyst carrier plates in series in the adsorption tank body, and the heat-insulating sealing gaskets are arranged between the catalyst carrier plates and the inner wall of the adsorption tank body.
[0006] In a preferred embodiment of the present utility model, a layered cavity is arranged at the bottom inside the adsorption tank body, a compression pump is arranged below the adsorption tank body, the compression pump is connected to the layered cavity, and the compression pump is connected to the top of the adsorption tank body through a pipeline.
[0007] In a preferred embodiment of the present utility model, a safety valve and an emergency shutdown controller are arranged on the adsorption tank body.
[0008] In a preferred embodiment of the present utility model, the buffer tank body and the condenser are arranged on the support frame.
[0009] The beneficial effects of the present utility model are as follows: After adopting the above structure, through the buffer tank body, condenser, and gas-liquid separator in the pretreatment unit, the tail gas of the chemical vapor deposition furnace can be preliminarily treated, effectively removing the liquid impurities and particulate matters therein, and providing a clean gas flow for subsequent treatment; the adsorption tank body, catalytic converter, and membrane separation plate in the main treatment component are combined for use to achieve deep purification of the tail gas. The catalytic converter uses a specific catalyst to efficiently convert the harmful substances in the tail gas, and the membrane separation plate further separates the remaining harmful gases to ensure the quality of the finally discharged or reused gas; the gas storage tank in the storage component is connected to the adsorption tank body through a gas transmission pipeline to achieve safe storage of the purified gas; in summary, the tail gas recovery device of the chemical vapor deposition furnace of the present utility model has the advantages of high efficiency, safety, easy maintenance, etc., can effectively solve the problem of tail gas treatment of the chemical vapor deposition furnace, and achieve the dual goals of resource utilization of the tail gas and environmental protection. Description of the Drawings
[0010] Figure 1 is a three-dimensional schematic diagram of the main structure of the present utility model;
[0011] Figure 2 is a schematic diagram of the structure of the main treatment component and the storage component of the present utility model;
[0012] In the figure: 1 - buffer tank body, 2 - condenser, 3 - first connecting pipe, 4 - gas-liquid separator, 5 - adsorption tank body, 6 - catalytic converter, 7 - membrane separation plate, 8 - gas storage tank, 9 - gas transmission pipeline, 10 - detachable connecting frame, 11 - connecting support rod, 12 - catalyst carrier plate, 13 - heat-insulating sealing gasket, 14 - layered cavity, 15 - compression pump, 16 - safety valve, 17 - emergency shutdown controller, 18 - support frame. Detailed Embodiments
[0013] The embodiments of the present utility model will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present utility model and should not be construed as limiting the present utility model.
[0014] As Figure 1 and Figure 2As shown, the recovery device for the tail gas of the vapor deposition furnace specifically includes a pretreatment unit, a main treatment component, and a storage component. The pretreatment unit includes a buffer tank body 1, a condenser 2, a first connecting pipe 3, and a gas-liquid separator 4. The buffer tank body 1 is connected to the outlet of the tail gas of the vapor deposition furnace. The gas-liquid separator 4 is arranged inside the buffer tank body 1. The condenser 2 is arranged above the buffer tank body 1 and is connected to the buffer tank body 1 through a pipeline. The first connecting pipe 3 is arranged at the end of the buffer tank body 1. In implementation, the buffer tank body 1 serves as the first barrier for the tail gas to enter the system. The buffer tank body can temporarily store the tail gas discharged from the vapor deposition furnace, reduce the instability of the tail gas flow, protect the subsequent equipment from direct impact, regulate the tail gas flow rate, and enable the system to operate stably. At the same time, it provides sufficient space and time for subsequent condensation and gas-liquid separation. The condenser 2 cools the tail gas to condense some of the gaseous pollutants into a liquid state, facilitating subsequent treatment, reducing the tail gas temperature, promoting the condensation of easily condensable components in the tail gas, and reducing the difficulty of subsequent treatment. The first connecting pipe 3 connects the buffer tank body 1 and the adsorption tank body 5 to ensure that the tail gas can smoothly enter the main treatment unit and serves as the channel for the tail gas flow, ensuring the continuity and tightness of the system. The gas-liquid separator 4 effectively separates the gas and liquid in the tail gas, improving the efficiency and quality of subsequent treatment. It separates the liquid component and the gas component in the condensed tail gas to prevent the liquid from entering the adsorption tank body and damaging the catalyst. The main treatment component includes an adsorption tank body 5, a catalytic converter 6, and a membrane separation plate 7. The first connecting pipe 3 is connected to the adsorption tank 5. The catalytic converter 6 is arranged inside the adsorption tank body 5. The membrane separation plate 7 is arranged at the bottom surface of the catalytic converter 6. The storage component includes a gas storage tank 8, a gas transmission pipeline 9, and a detachable connecting frame 10. The gas storage tank 8 is connected to the adsorption tank body 5 through the gas transmission pipeline 9. The detachable connecting frame 10 is arranged on the back of the gas storage tank 8. In specific implementation, the adsorption tank body 5 on the main treatment component provides an installation space for the catalyst and the membrane separation plate 7 and is the core equipment for tail gas purification. Through the internal catalyst and membrane separation plate 7, it deeply purifies the tail gas and removes harmful substances. The catalytic converter 6 efficiently converts the harmful substances in the tail gas into harmless or low-toxic substances, using the catalyst to accelerate the chemical reaction rate and improve the tail gas purification efficiency. The membrane separation plate 7 efficiently separates different components in the tail gas, further improving the tail gas purification effect, and realizing the precise separation of the tail gas components according to the physical or chemical property differences between the components. The gas storage tank 8 on the storage component safely stores the purified tail gas for subsequent utilization or discharge. The gas transmission pipeline 9 connects the gas storage tank 5 and the adsorption tank body 8 to ensure that the purified tail gas can smoothly enter the gas storage tank. The detachable connecting frame 10 facilitates the installation, disassembly, and maintenance of the gas storage tank 8, provides a stable support structure, and at the same time facilitates the replacement or repair of the gas storage tank 8 according to needs.
[0015] As Figure 2As shown, on the basis of the above method, further, the catalytic converter 6 includes a connecting rod 11, a catalyst carrier plate 12, and a heat-insulating sealing gasket 13. Multiple layers of catalyst carrier plates 12 are arranged in the adsorption tank 5. The connecting rod 11 connects multiple layers of catalyst carrier plates 12 in series in the adsorption tank 5. The heat-insulating sealing gasket 13 is arranged between the catalyst carrier plate 12 and the inner wall of the adsorption tank 5. In a specific implementation, the catalyst in the catalytic converter 6 can accelerate the chemical reaction rate of harmful substances in the tail gas and convert them into harmless or low-toxic substances, thereby achieving the purpose of purifying the tail gas. The setting of multiple layers of catalyst carrier plates 12 increases the contact area between the tail gas and the catalyst, making the reaction more complete and improving the efficiency of tail gas purification; the connecting rod 11 connects multiple layers of catalyst carrier plates 12 in series to ensure their stable installation in the adsorption tank 5, preventing movement or deformation during operation and ensuring the structural integrity and stability of the catalytic converter. The heat-insulating sealing gasket 13 plays a dual role of heat insulation and sealing, reducing heat loss and improving the working temperature stability of the catalyst; the heat-insulating sealing gasket 13 also plays a role in protecting the catalyst. Since the catalytic converter generates high temperature during operation, the heat-insulating gasket can effectively reduce the heat transfer to the outside of the adsorption tank, reducing the impact of the external environment on the catalyst, and thus extending the service life of the catalyst.
[0016] As Figure 2 shown, on the basis of the above method, further, a layered chamber 14 is provided at the bottom inside the adsorption tank 5, and a compression pump 15 is provided below the adsorption tank 5. The compression pump 15 is connected to the layered chamber 14, and the compression pump 15 is connected to the adsorption tank 5 through a pipeline. In a specific implementation, during the tail gas treatment process, some particulate matter or reaction products may deposit in the adsorption tank. The layered chamber 14 is located at the bottom of the adsorption tank and can effectively collect these sediments. The layered chamber 15 can be conveniently discharged or recycled. The compression pump 15 promotes the flow and distribution of the tail gas in the adsorption tank 5 by increasing the tail gas pressure, making the contact between the tail gas and components such as the catalyst or the membrane separation plate 7 more sufficient and uniform; the residence time of the tail gas in the adsorption tank 5 can be effectively controlled, thereby improving the efficiency and effect of tail gas treatment. The compression pump 15 can also adjust parameters such as the tail gas flow rate and pressure according to actual needs to meet different treatment requirements.
[0017] As Figure 1As shown, further on the basis of the above method, a safety valve 16 and an emergency shutdown controller 17 are provided on the adsorption tank body. In specific implementation, when the internal pressure of the adsorption tank body exceeds the specified value, the safety valve 16 automatically opens to release the excess pressure, thereby protecting the safety of the tank body and pipelines. This helps prevent explosion or leakage accidents caused by excessive pressure. When abnormal conditions occur inside the adsorption tank body, such as a sharp increase in pressure, abnormal temperature, etc., the emergency shutdown controller 17 can quickly cut off the fluid or gas supply connected to the tank body to prevent the situation from deteriorating further.
[0018] As Figure 1 As shown, further on the basis of the above method, the buffer tank body 1 and the condenser 2 are arranged on the support frame 18. In specific implementation, the support frame 18 provides a stable support platform for the buffer tank body 1 and the condenser 2, ensuring that they remain stable during operation. This helps prevent damage or leakage accidents caused by equipment shaking or tilting. Fixed in a certain position, it is convenient for installation, commissioning and maintenance work.
[0019] In the specific working process of the novel recovery device for the tail gas of a vapor deposition furnace, the tail gas generated by the vapor deposition furnace first enters the buffer tank body 1 of the pretreatment unit. As the first barrier, the buffer tank body can temporarily store the tail gas, reduce the instability of the tail gas flow, protect the subsequent equipment from direct impact, and adjust the tail gas flow rate to ensure the stable operation of the system. After preliminary stabilization in the buffer tank body 1, the tail gas enters the condenser 2 through a pipeline. The condenser cools the tail gas to condense some of the gaseous pollutants into a liquid state, facilitating subsequent treatment. At the same time, it reduces the temperature of the tail gas, promotes the condensation of easily condensable components in the tail gas, and reduces the difficulty of subsequent treatment. The condensed tail gas enters the gas-liquid separator 4 to effectively separate the gas and liquid in the tail gas and prevent the liquid from entering the subsequent treatment equipment and damaging catalysts, etc. The separated gas tail gas enters the adsorption tank body 5 of the main treatment component through the first connecting pipe 3. In the adsorption tank body, the tail gas first passes through the catalytic converter 6. The multi-layer catalyst carrier plates 12 in the catalytic converter 6 are coated with a catalyst containing platinum metal, palladium metal, and rare earth lanthanum, which can efficiently convert harmful substances in the tail gas into harmless or low-toxic substances. The membrane separation plate 7 arranged below the catalytic converter 6 further separates different components in the tail gas to improve the tail gas purification effect. The purified tail gas enters the gas storage tank 8 of the storage component through the gas transmission pipeline 9 for safe storage, facilitating subsequent utilization or emission. A detachable connecting frame 10 is provided on the back of the gas storage tank, facilitating installation, disassembly, and maintenance. The layered cavity 14 arranged at the bottom inside the adsorption tank body 5 and the connected compression pump 15 are used to handle the particulate matter or reaction products that may deposit in the tank body and keep the tank body clean. The safety valve 16 and the emergency shutdown controller 17 arranged on the adsorption tank body ensure that the tail gas flow can be quickly cut off in case of an emergency to ensure the safety of the system. In summary, through steps such as pretreatment, deep purification, and safe storage, the novel recovery device for the tail gas of a vapor deposition furnace realizes the effective recovery and treatment of the tail gas of the vapor deposition furnace, reduces environmental pollution, and improves resource utilization rate.
[0020] In the description of this specification, the description with reference to terms such as "one embodiment", "certain embodiments", "schematic embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples.
[0021] In summary, although the present utility model has been disclosed above in preferred embodiments, the above preferred embodiments are not intended to limit the present utility model. Those of ordinary skill in the art can make various changes and modifications without departing from the spirit and scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the scope defined by the claims.
Claims
1. Recovery device for tail gas of vapor deposition furnace, the recovery device for tail gas of vapor deposition furnace specifically includes a pretreatment unit, a main treatment component and a storage component, and is characterized in that: The pretreatment unit includes a buffer tank body (1), a condenser (2), a first connecting pipe (3), and a gas-liquid separator (4). The buffer tank body (1) is communicated with the outlet of the tail gas of the chemical vapor deposition furnace. The gas-liquid separator (4) is arranged in the buffer tank body (1). The condenser (2) is arranged above the buffer tank body (1) and is connected to the buffer tank body (1) through a pipeline. The first connecting pipe (3) is arranged at the end of the buffer tank body (1). The main treatment component includes an adsorption tank body (5), a catalytic converter (6), and a membrane separation plate (7). The first connecting pipe (3) is connected to the adsorption tank body (5). The catalytic converter (6) is arranged in the adsorption tank body (5). The membrane separation plate (7) is arranged on the bottom surface of the catalytic converter (6). The storage component includes a gas storage tank (8), a gas transmission pipeline (9), and a detachable connecting frame (10). The gas storage tank (8) is communicated with the adsorption tank body (5) through the gas transmission pipeline (9). The detachable connecting frame (10) is arranged on the back of the gas storage tank (8).
2. The recovery device for the off-gas of the chemical vapor deposition furnace according to claim 1, characterized in that: The catalytic converter (6) includes a connecting support rod (11), a catalyst carrier plate (12), and a heat insulation sealing gasket (13). Multiple layers of the catalyst carrier plates (12) are arranged in the adsorption tank body (5). The connecting support rod (11) connects multiple layers of the catalyst carrier plates (12) in series in the adsorption tank body (5). The heat insulation sealing gasket (13) is arranged between the catalyst carrier plate (12) and the inner wall of the adsorption tank body (5).
3. The recovery device for the tail gas of the vapor deposition furnace according to claim 1, wherein: A layered cavity (14) is arranged at the inner bottom of the adsorption tank body (5). A compression pump (15) is arranged below the adsorption tank body (5). The compression pump (15) is connected to the layered cavity (14). The compression pump (15) is connected to the top of the adsorption tank body (5) through a pipeline.
4. The recovery device for the tail gas of the chemical vapor deposition furnace according to claim 1, wherein: A safety valve (16) and an emergency shutdown controller (17) are arranged on the adsorption tank body (5).
5. The recovery device for the tail gas of the chemical vapor deposition furnace according to claim 1, wherein: The buffer tank body (1) and the condenser (2) are arranged on a support frame (18).